JP2010537199A - 実際の欠陥が潜在的にシステム的な欠陥であるか、または潜在的にランダムな欠陥であるかを判断する、コンピューターに実装された方法 - Google Patents
実際の欠陥が潜在的にシステム的な欠陥であるか、または潜在的にランダムな欠陥であるかを判断する、コンピューターに実装された方法 Download PDFInfo
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Abstract
【選択図】図5
Description
具体的には、図4に示すように、実際の欠陥に対して作成されたパレート図は、x軸に沿ったGDSパターングループIDと、y軸に沿った欠陥カウント数とを示す。このように、パレート図は、各々がGDSパターンの異なる部分に対応する、各々の異なるグループにグループ分けされた実際の欠陥の数をグラフに図示する。したがって、パレート図は、ウエハー上で検出された実際の欠陥に対して実行された設計ごとのグループ分けの結果を図示する。
一般的に「コンピューターシステム」という用語は、メモリー媒体からの命令を実行する、1つ以上のプロセッサーを有するあらゆるデバイスを包含するように広範に定義されてもよい。
Claims (22)
- 実際の欠陥が潜在的にシステム的な欠陥であるか、または潜在的にランダムな欠陥であるかを判断する、コンピューターに実装された方法であって、
グループ内の実際の欠陥の数を、グループ内のランダムに発生した欠陥の数と比較するステップであって、前記実際の欠陥がウエハー上で検出され、かつ前記グループ内の前記各実際の欠陥と、前記グループ内の前記各ランダムに発生した欠陥との位置近傍のウエハー上の設計の部分が、実質的に同じである比較するステップと、
前記比較するステップの結果に基づいて、前記グループ内の前記実際の欠陥は潜在的にシステム的な欠陥であるか、または潜在的にランダムな欠陥であるかを判断するステップと
を含む方法。 - 前記比較するステップは、前記実際の欠陥に対して作成されたパレート図を、前記ランダムに発生した欠陥に対して作成されたパレート図と比較するステップを含む請求項1に記載の方法。
- 前記比較するステップは、前記グループ内の前記実際の欠陥の前記数に対する前記グループ内の前記ランダムに発生した欠陥の前記数の比を判断するステップを含む請求項1に記載の方法。
- 前記設計の前記部分は設計クリップに対応する請求項1に記載の方法。
- 前記方法は、前記ウエハー上で検出された実際の欠陥の異なるグループに対して別個に実行され、かつ前記各異なるグループ内の前記各実際の欠陥の位置近傍の前記ウエハー上の前記設計の部分は、実質的に同じである請求項1に記載の方法。
- 前記方法は、前記ウエハー上で検出された実際の欠陥のすべてのグループに対して別個に実行され、かつ前記すべての各グループ内の前記各実際の欠陥の位置近傍の前記ウエハー上の前記設計の部分は、実質的に同じである請求項1に記載の方法。
- 前記方法は、ユーザーの介入無しに実行される請求項1に記載の方法。
- 前記実際の欠陥は前記ウエハー上の層の検査により検出され、前記ランダムに発生した欠陥は前記ウエハー上の前記層に対する検査レシピに対して一旦発生し、かつ複数ウエハーの前記層上で検出される欠陥に対して前記検査レシピを使用して前記方法を実行するために使用される請求項1に記載の方法。
- 請求項1に記載の方法であって、
前記判断するステップは、
前記グループ内の前記実際の欠陥の前記数が前記グループ内の前記ランダムに発生した欠陥の前記数よりも多い場合、前記グループ内の前記実際の欠陥は潜在的にシステム的な欠陥であると判断するステップと、
前記グループ内の前記実際の欠陥の前記数が前記グループ内の前記ランダムに発生した欠陥の前記数よりも多くない場合、前記グループ内の前記実際の欠陥は潜在的にランダムな欠陥であると判断するステップと
を含む方法。 - 請求項1に記載の方法であって、
前記判断するステップは、
前記グループ内の前記実際の欠陥の前記数が前記グループ内の前記ランダムに発生した欠陥の前記数よりも統計的に多い場合、前記グループ内の前記実際の欠陥は潜在的にシステム的な欠陥であると判断するステップと、
前記グループ内の前記実際の欠陥の前記数が前記グループ内の前記ランダムに発生した欠陥の前記数よりも統計的に多くない場合、前記グループ内の前記実際の欠陥は潜在的にランダムな欠陥であると判断するステップと
を含む方法。 - 請求項1に記載の方法であって、更に、
前記比較するステップの前に、前記ウエハー上で検出された前記実際の欠陥の総数および前記ランダムに発生した欠陥の総数に基づいて、前記グループ内の前記ランダムに発生した欠陥の前記数を、前記グループ内の前記実際の欠陥の前記数に対して正規化するステップを含む方法。 - 請求項1に記載の方法であって、更に、
前記グループ内の前記実際の欠陥の前記数を異なるグループ内で異なるランダムに発生した数と比較するステップであって、前記グループ内の各前記実際の欠陥と前記異なるグループ内の各前記異なるランダムに発生した欠陥との前記位置近傍のウエハー上の前記設計の部分が実質的に同じであり、前記ランダムに発生した欠陥と前記異なるランダムに発生した欠陥とは別個に発生する比較するステップを含み、
前記判断するステップは、前記グループ内の前記実際の欠陥の前記数を前記グループ内の前記ランダムに発生した欠陥の前記数および前記グループ内の前記異なるランダムに発生した欠陥の前記数と比較するステップに基づいて、前記グループ内の前記実際の欠陥は潜在的にシステム的な欠陥であるか、または潜在的にランダムな欠陥であるかを判断するステップを含む
方法。 - 実際の欠陥のグループが潜在的にシステム的な欠陥であるか、または潜在的にランダムな欠陥であるかを判断するために使用するための、ランダムに発生した欠陥の一組のグループを生成するためのコンピューターに実装された方法であって、
少なくともウエハーの部分である検査された領域に対応する領域にわたる異なる位置で一組の欠陥をランダムに発生するステップと、
前記一組のランダムに発生した欠陥を、各前記グループ内の前記ランダムに発生した欠陥の位置近傍の前記ウエハー上の設計の部分が実質的に同じとなるようにグループ分けするステップと、
各前記グループ内の前記ランダムに発生した欠陥の数を判断するステップと
を含み、対応するグループの実際の欠陥が潜在的にシステム的な欠陥であるか、またはランダムな欠陥であるかを判断するために、前記グループ内の前記ランダムに発生した欠陥の前記数を前記対応するグループ内の前記実際の欠陥の数と比較することができる方法。 - 前記方法は、異なる組のランダムに発生した欠陥に対する追加的な数を判断するために2回以上実行され、前記対応するグループ内の前記実際の欠陥が潜在的にシステム的な欠陥であるかまたは潜在的にランダムな欠陥であるかを判断するために、前記数および前記追加的な数を前記対応するグループ内の前記実際の欠陥の前記数と比較することができる請求項13に記載の方法。
- 前記方法は、異なる一組のランダムに発生した欠陥に対する追加的な数を判断するために2回以上実行され、かつ前記方法は、前記ランダムに発生するステップを認証するために前記追加的な数を使用するステップをさらに含む請求項13に記載の方法。
- 前記一組の欠陥をランダムに発生するステップは、確率的シミュレーションを使用して前記一組の欠陥をランダムに発生するステップを含む請求項13に記載の方法。
- 前記一組の欠陥をランダムに発生するステップは、前記領域にわたるグリッド内に配設した位置に前記欠陥をランダムに発生するステップを含む請求項13に記載の方法。
- 前記一組の欠陥をランダムに発生するステップは、前記領域にわたる実質的に均一な分布を有する位置に前記欠陥をランダムに発生するステップを含む請求項13に記載の方法。
- 前記一組の欠陥をランダムに発生するステップは、各前記グループ内の前記ランダムに発生する欠陥の頻度が、前記領域にわたり各前記グループ内で前記ランダムに発生した欠陥の前記位置近傍の前記設計の前記部分の頻度にほぼ等しいように実行される請求項13に記載の方法。
- 少なくとも前記ウエハーの前記一部の前記検査された領域は、前記ウエハー上のダイの検査された領域とほぼ等しい請求項13に記載の方法。
- 前記一組のランダムに発生した欠陥に対するパレート図を作成するステップをさらに含み、前記一組の前記ランダムに発生した欠陥に対する前記パレート図を前記実際の欠陥に対するパレート図に対して比較することにより、前記ランダムに発生した欠陥の前記数を前記対応するグループ内の前記実際の欠陥の前記数と比較することができる請求項13に記載の方法。
- 実際の欠陥に対応するグループが潜在的にシステム的な欠陥であるか、または潜在的にランダムな欠陥であるかを判断するために使用するための、ランダムに発生した欠陥の正規化された一組のグループを生成するためのコンピューターに実装された方法であって、
ウエハーの層上で検出されたすべての実際の欠陥の総数を判断するステップと、
前記ウエハー上で検出されたすべての前記実際の欠陥の前記総数に基づき、グループ内のランダムに発生した欠陥の数を対応するグループ内の前記実際の欠陥の数に対して正規化するステップと
を含み、各前記グループ内の前記ランダムに発生した欠陥の位置近傍の前記ウエハー上の設計の部分が実質的に同じであり、前記実際の欠陥の前記対応するグループは潜在的にシステム的な欠陥であるかまたは潜在的にランダムな欠陥であるかを判断するために、前記グループ内の前記ランダムに発生した欠陥の前記正規化された数は前記対応するグループ内の前記実際の欠陥の数と比較できる方法。
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US7975245B2 (en) | 2011-07-05 |
WO2009026358A1 (en) | 2009-02-26 |
KR20100044902A (ko) | 2010-04-30 |
TW200915461A (en) | 2009-04-01 |
JP5425779B2 (ja) | 2014-02-26 |
US20090055783A1 (en) | 2009-02-26 |
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TWI469235B (zh) | 2015-01-11 |
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