JP2010507098A5 - - Google Patents

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Publication number
JP2010507098A5
JP2010507098A5 JP2009533469A JP2009533469A JP2010507098A5 JP 2010507098 A5 JP2010507098 A5 JP 2010507098A5 JP 2009533469 A JP2009533469 A JP 2009533469A JP 2009533469 A JP2009533469 A JP 2009533469A JP 2010507098 A5 JP2010507098 A5 JP 2010507098A5
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JP
Japan
Prior art keywords
probe
column
spring
card assembly
contact structure
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JP2009533469A
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Japanese (ja)
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JP5466007B2 (ja
JP2010507098A (ja
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Priority claimed from US11/872,008 external-priority patent/US8130007B2/en
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Publication of JP5466007B2 publication Critical patent/JP5466007B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009533469A 2006-10-16 2007-10-15 プローブカードアセンブリ Expired - Fee Related JP5466007B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US82967406P 2006-10-16 2006-10-16
US60/829,674 2006-10-16
US93867307P 2007-05-17 2007-05-17
US60/938,673 2007-05-17
US11/872,008 2007-10-13
US11/872,008 US8130007B2 (en) 2006-10-16 2007-10-13 Probe card assembly with carbon nanotube probes having a spring mechanism therein
PCT/US2007/081423 WO2008048938A2 (en) 2006-10-16 2007-10-15 Making and using carbon nanotube probes

Publications (3)

Publication Number Publication Date
JP2010507098A JP2010507098A (ja) 2010-03-04
JP2010507098A5 true JP2010507098A5 (enExample) 2010-12-16
JP5466007B2 JP5466007B2 (ja) 2014-04-09

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JP2009533469A Expired - Fee Related JP5466007B2 (ja) 2006-10-16 2007-10-15 プローブカードアセンブリ

Country Status (6)

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US (1) US8130007B2 (enExample)
EP (1) EP2084424A2 (enExample)
JP (1) JP5466007B2 (enExample)
KR (1) KR101406270B1 (enExample)
TW (1) TWI433200B (enExample)
WO (1) WO2008048938A2 (enExample)

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