JP4806762B2 - Spmカンチレバー - Google Patents
Spmカンチレバー Download PDFInfo
- Publication number
- JP4806762B2 JP4806762B2 JP2006057371A JP2006057371A JP4806762B2 JP 4806762 B2 JP4806762 B2 JP 4806762B2 JP 2006057371 A JP2006057371 A JP 2006057371A JP 2006057371 A JP2006057371 A JP 2006057371A JP 4806762 B2 JP4806762 B2 JP 4806762B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- probe
- carbon
- tip
- cantilever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
- G01Q70/12—Nanotube tips
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
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- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12N—MICROORGANISMS OR ENZYMES; COMPOSITIONS THEREOF; PROPAGATING, PRESERVING, OR MAINTAINING MICROORGANISMS; MUTATION OR GENETIC ENGINEERING; CULTURE MEDIA
- C12N15/00—Mutation or genetic engineering; DNA or RNA concerning genetic engineering, vectors, e.g. plasmids, or their isolation, preparation or purification; Use of hosts therefor
- C12N15/09—Recombinant DNA-technology
- C12N15/87—Introduction of foreign genetic material using processes not otherwise provided for, e.g. co-transformation
- C12N15/89—Introduction of foreign genetic material using processes not otherwise provided for, e.g. co-transformation using microinjection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
- G01Q60/54—Probes, their manufacture, or their related instrumentation, e.g. holders
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/863—Atomic force probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/875—Scanning probe structure with tip detail
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/875—Scanning probe structure with tip detail
- Y10S977/876—Nanotube tip
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/875—Scanning probe structure with tip detail
- Y10S977/879—Material
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- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Genetics & Genomics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Radiology & Medical Imaging (AREA)
- Wood Science & Technology (AREA)
- Zoology (AREA)
- Biotechnology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Biomedical Technology (AREA)
- Organic Chemistry (AREA)
- Molecular Biology (AREA)
- Biophysics (AREA)
- Biochemistry (AREA)
- Microbiology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Plant Pathology (AREA)
- Analytical Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Description
2 レバー部
3 探針
3a 探針先端部
4 レバー部自由端
5 グラファイト膜
6a 内包金属
7 CNT細線
7a CNF細線
11 超高真空装置
12 ステージ駆動部
13 真空排気口
14 イオンガン
15 ヒーター加熱部
16 SPMカンチレバー
17 金属導入口
18 試料ステージ
21 CNT細線
22 Ni金属(先端部内包金属)
23 Co金属(根元部内包金属)
24 均一内包金属
25,26 多層構造内包金属
27 点在内包金属
Claims (6)
- 支持部と、該支持部から延びるレバー部と、該レバー部の自由端側に形成される突起状探針とからなり、少なくとも突起状探針先端部表面に形成されたカーボン膜あるいはカーボン化合物膜を有し、高エネルギービームの照射により前記探針の先端部に該探針先端部から一体的に形成された一本のカーボン細線を備えたSPMカンチレバーにおいて、前記カーボン細線は金属を内包していることを特徴とするSPMカンチレバー。
- 前記内包金属は、前記カーボン細線の全体に亘って形成されていることを特徴とする請求項1に係るSPMカンチレバー。
- 前記内包金属は、前記カーボン細線の先端部あるいは根元部に形成されていることを特徴とする請求項1に係るSPMカンチレバー。
- 前記内包金属は、前記カーボン細線内に均一に充填されて一体的に形成されていることを特徴とする請求項2又は3に係るSPMカンチレバー。
- 前記内包金属は、前記カーボン細線内に点在して形成されていることを特徴とする請求項2又は3に係るSPMカンチレバー。
- 前記内包金属は、磁性特性を有する金属あるいはその合金であることを特徴とする請求項1〜5のいずれか1項に係るSPMカンチレバー。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006057371A JP4806762B2 (ja) | 2006-03-03 | 2006-03-03 | Spmカンチレバー |
US11/710,974 US7543482B2 (en) | 2006-03-03 | 2007-02-27 | Carbon thin line probe |
EP07103380A EP1830367A3 (en) | 2006-03-03 | 2007-03-02 | Carbon nanotube probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006057371A JP4806762B2 (ja) | 2006-03-03 | 2006-03-03 | Spmカンチレバー |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007232668A JP2007232668A (ja) | 2007-09-13 |
JP4806762B2 true JP4806762B2 (ja) | 2011-11-02 |
Family
ID=38255456
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006057371A Active JP4806762B2 (ja) | 2006-03-03 | 2006-03-03 | Spmカンチレバー |
Country Status (3)
Country | Link |
---|---|
US (1) | US7543482B2 (ja) |
EP (1) | EP1830367A3 (ja) |
JP (1) | JP4806762B2 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7439731B2 (en) | 2005-06-24 | 2008-10-21 | Crafts Douglas E | Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures |
US8130007B2 (en) | 2006-10-16 | 2012-03-06 | Formfactor, Inc. | Probe card assembly with carbon nanotube probes having a spring mechanism therein |
US8354855B2 (en) | 2006-10-16 | 2013-01-15 | Formfactor, Inc. | Carbon nanotube columns and methods of making and using carbon nanotube columns as probes |
JP5033609B2 (ja) * | 2007-03-12 | 2012-09-26 | 株式会社日立製作所 | 走査プローブ顕微鏡およびこれを用いた試料の観察方法 |
US8149007B2 (en) | 2007-10-13 | 2012-04-03 | Formfactor, Inc. | Carbon nanotube spring contact structures with mechanical and electrical components |
JP2009109411A (ja) * | 2007-10-31 | 2009-05-21 | Hitachi Kenki Fine Tech Co Ltd | プローブとその製造方法および走査型プローブ顕微鏡 |
KR20100098451A (ko) * | 2008-02-27 | 2010-09-06 | 도꾸리쯔교세이호징 가가꾸 기쥬쯔 신꼬 기꼬 | 카본나노튜브 지지체 및 그 제조방법 |
JP5216509B2 (ja) | 2008-03-05 | 2013-06-19 | 株式会社日立製作所 | 走査プローブ顕微鏡およびこれを用いた試料の観察方法 |
US8272124B2 (en) | 2009-04-03 | 2012-09-25 | Formfactor, Inc. | Anchoring carbon nanotube columns |
JP2012047539A (ja) * | 2010-08-25 | 2012-03-08 | Hitachi High-Technologies Corp | Spmプローブおよび発光部検査装置 |
US8872176B2 (en) | 2010-10-06 | 2014-10-28 | Formfactor, Inc. | Elastic encapsulated carbon nanotube based electrical contacts |
CN108931667A (zh) * | 2017-05-24 | 2018-12-04 | 中国科学院宁波材料技术与工程研究所 | 兼具电学和磁学信号获取功能的扫描显微镜探针及其制备方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0492369A (ja) * | 1990-08-06 | 1992-03-25 | Mitsui Eng & Shipbuild Co Ltd | 低温作動固体電解質型燃料電池 |
JPH081382B2 (ja) | 1990-10-31 | 1996-01-10 | インターナショナル・ビジネス・マシーンズ・コーポレイション | ナノメートル・スケールのプローブ及びその製造方法 |
JP3544267B2 (ja) * | 1996-05-22 | 2004-07-21 | 独立行政法人 科学技術振興機構 | 巨大フラーレンの製造方法 |
JP2000516708A (ja) * | 1996-08-08 | 2000-12-12 | ウィリアム・マーシュ・ライス・ユニバーシティ | ナノチューブ組立体から作製された巨視的操作可能なナノ規模の装置 |
US7112315B2 (en) * | 1999-04-14 | 2006-09-26 | The Regents Of The University Of California | Molecular nanowires from single walled carbon nanotubes |
JP3766682B2 (ja) | 1999-05-16 | 2006-04-12 | 喜萬 中山 | ナノチューブプローブ |
US7032437B2 (en) | 2000-09-08 | 2006-04-25 | Fei Company | Directed growth of nanotubes on a catalyst |
JP2002162337A (ja) | 2000-11-26 | 2002-06-07 | Yoshikazu Nakayama | 集束イオンビーム加工による走査型顕微鏡用プローブ |
JP2003090788A (ja) | 2001-09-19 | 2003-03-28 | Olympus Optical Co Ltd | Spmカンチレバー及びその製造方法 |
US6735046B2 (en) | 2001-11-21 | 2004-05-11 | Yoshikazu Nakayama | Nano-magnetic head and nano-magnetic head device using the same |
AU2003299538B2 (en) | 2002-09-20 | 2008-05-15 | The Trustees Of Boston College | Nanotube cantilever probes for nanoscale magnetic microscopy |
US20070087436A1 (en) | 2003-04-11 | 2007-04-19 | Atsushi Miyawaki | Microinjection method and device |
JP2005239481A (ja) * | 2004-02-26 | 2005-09-08 | Nagoya Institute Of Technology | 金属内包カーボンナノチューブ凝集体、その製造方法、金属内包カーボンナノチューブ、金属ナノワイヤおよびその製造方法 |
JP4539817B2 (ja) * | 2004-02-26 | 2010-09-08 | 国立大学法人 名古屋工業大学 | 炭素ナノ構造体の製造方法 |
JP4521482B2 (ja) * | 2004-04-26 | 2010-08-11 | オリンパス株式会社 | Spmカンチレバー及びその製造方法 |
-
2006
- 2006-03-03 JP JP2006057371A patent/JP4806762B2/ja active Active
-
2007
- 2007-02-27 US US11/710,974 patent/US7543482B2/en active Active
- 2007-03-02 EP EP07103380A patent/EP1830367A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2007232668A (ja) | 2007-09-13 |
US7543482B2 (en) | 2009-06-09 |
EP1830367A3 (en) | 2008-02-13 |
US20070204681A1 (en) | 2007-09-06 |
EP1830367A2 (en) | 2007-09-05 |
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