JP2010503232A - 水に可溶性酸化剤を使用する炭化ケイ素の研磨方法 - Google Patents
水に可溶性酸化剤を使用する炭化ケイ素の研磨方法 Download PDFInfo
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- JP2010503232A JP2010503232A JP2009527375A JP2009527375A JP2010503232A JP 2010503232 A JP2010503232 A JP 2010503232A JP 2009527375 A JP2009527375 A JP 2009527375A JP 2009527375 A JP2009527375 A JP 2009527375A JP 2010503232 A JP2010503232 A JP 2010503232A
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- Prior art keywords
- liquid carrier
- substrate
- silicon carbide
- suspended
- polishing composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 175
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 91
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title claims abstract description 54
- 239000007800 oxidant agent Substances 0.000 title claims abstract description 42
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims description 13
- 239000000203 mixture Substances 0.000 claims abstract description 127
- 239000007788 liquid Substances 0.000 claims abstract description 73
- 239000000758 substrate Substances 0.000 claims abstract description 69
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 37
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 25
- 239000002245 particle Substances 0.000 claims description 25
- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 claims description 17
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 16
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 claims description 16
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 14
- -1 oxone Chemical compound 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 11
- 239000000377 silicon dioxide Substances 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 11
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 claims description 10
- ICIWUVCWSCSTAQ-UHFFFAOYSA-M iodate Chemical compound [O-]I(=O)=O ICIWUVCWSCSTAQ-UHFFFAOYSA-M 0.000 claims description 9
- KHIWWQKSHDUIBK-UHFFFAOYSA-N periodic acid Chemical compound OI(=O)(=O)=O KHIWWQKSHDUIBK-UHFFFAOYSA-N 0.000 claims description 9
- 229910001870 ammonium persulfate Inorganic materials 0.000 claims description 8
- HKVFISRIUUGTIB-UHFFFAOYSA-O azanium;cerium;nitrate Chemical compound [NH4+].[Ce].[O-][N+]([O-])=O HKVFISRIUUGTIB-UHFFFAOYSA-O 0.000 claims description 5
- JLKDVMWYMMLWTI-UHFFFAOYSA-M potassium iodate Chemical compound [K+].[O-]I(=O)=O JLKDVMWYMMLWTI-UHFFFAOYSA-M 0.000 claims description 4
- 239000001230 potassium iodate Substances 0.000 claims description 4
- 229940093930 potassium iodate Drugs 0.000 claims description 4
- 235000006666 potassium iodate Nutrition 0.000 claims description 4
- MLIWQXBKMZNZNF-KUHOPJCQSA-N (2e)-2,6-bis[(4-azidophenyl)methylidene]-4-methylcyclohexan-1-one Chemical group O=C1\C(=C\C=2C=CC(=CC=2)N=[N+]=[N-])CC(C)CC1=CC1=CC=C(N=[N+]=[N-])C=C1 MLIWQXBKMZNZNF-KUHOPJCQSA-N 0.000 claims description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
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- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 4
- 239000002738 chelating agent Substances 0.000 description 4
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- 150000007942 carboxylates Chemical class 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
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- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
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- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 238000000518 rheometry Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- NJVOHKFLBKQLIZ-UHFFFAOYSA-N (2-ethenylphenyl) prop-2-enoate Chemical compound C=CC(=O)OC1=CC=CC=C1C=C NJVOHKFLBKQLIZ-UHFFFAOYSA-N 0.000 description 1
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
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- TUSDEZXZIZRFGC-UHFFFAOYSA-N 1-O-galloyl-3,6-(R)-HHDP-beta-D-glucose Natural products OC1C(O2)COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC1C(O)C2OC(=O)C1=CC(O)=C(O)C(O)=C1 TUSDEZXZIZRFGC-UHFFFAOYSA-N 0.000 description 1
- LCPVQAHEFVXVKT-UHFFFAOYSA-N 2-(2,4-difluorophenoxy)pyridin-3-amine Chemical compound NC1=CC=CN=C1OC1=CC=C(F)C=C1F LCPVQAHEFVXVKT-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- RGHNJXZEOKUKBD-SQOUGZDYSA-M D-gluconate Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O RGHNJXZEOKUKBD-SQOUGZDYSA-M 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
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- 239000001263 FEMA 3042 Substances 0.000 description 1
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- 229910019142 PO4 Inorganic materials 0.000 description 1
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- 239000004793 Polystyrene Substances 0.000 description 1
- YDONNITUKPKTIG-UHFFFAOYSA-N [Nitrilotris(methylene)]trisphosphonic acid Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CP(O)(O)=O YDONNITUKPKTIG-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
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- 150000002009 diols Chemical class 0.000 description 1
- QLBHNVFOQLIYTH-UHFFFAOYSA-L dipotassium;2-[2-[bis(carboxymethyl)amino]ethyl-(carboxylatomethyl)amino]acetate Chemical compound [K+].[K+].OC(=O)CN(CC([O-])=O)CCN(CC(O)=O)CC([O-])=O QLBHNVFOQLIYTH-UHFFFAOYSA-L 0.000 description 1
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- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 1
- MGIYRDNGCNKGJU-UHFFFAOYSA-N isothiazolinone Chemical compound O=C1C=CSN1 MGIYRDNGCNKGJU-UHFFFAOYSA-N 0.000 description 1
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- 235000006408 oxalic acid Nutrition 0.000 description 1
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- VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Inorganic materials [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
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- IWZKICVEHNUQTL-UHFFFAOYSA-M potassium hydrogen phthalate Chemical compound [K+].OC(=O)C1=CC=CC=C1C([O-])=O IWZKICVEHNUQTL-UHFFFAOYSA-M 0.000 description 1
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- LRBQNJMCXXYXIU-NRMVVENXSA-N tannic acid Chemical compound OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-NRMVVENXSA-N 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
Abstract
Description
そうしたポリタイプは、立方晶(例えば、3C炭化ケイ素)または非立方晶(例えば、4H炭化ケイ素、6H炭化ケイ素)のいずれかであることができる。これらのポリタイプの物性は、周知技術である。
この例は、研磨組成物中での異なる酸化剤の存在による炭化ケイ素の除去速度への効果を示す。
この例は、研磨組成物内での酸化剤に存在による炭化ケイ素の除去速度への効果を示す。
この例は、研磨組成物内での酸化剤および研削剤の存在による炭化ケイ素の除去速度への効果を示す。
この例は、研磨組成物中での異なるタイプのアルミナ研削剤の存在による炭化ケイ素の除去速度への効果を示す。
この例は、研磨組成物中での過硫酸カリウムの濃度による炭化ケイ素の除去速度への効果を示す。
この例は、研磨組成物中での種結晶を用いたゲル法のαアルミナの濃度による炭化ケイ素の除去速度への効果を示す。
この例は、研磨組成物による幾つかの異なるタイプの炭化ケイ素ウェハーの除去速度への効果を示す。
この例は、異なる研磨工具パラメーターを使用して、研磨組成物で炭化ケイ素基材を研磨することによる、炭化ケイ素の除去速度への効果を示す。
Claims (26)
- 基材を化学的機械的に研磨する方法、該方法は、
(i)少なくとも1層の単結晶炭化ケイ素を含む基材と、
(a)液体キャリアー、
(b)該液体キャリアー中に懸濁された研削剤、
該研削剤は、40nm〜130nmの平均粒径を有する実質的に球状のシリカ粒子で
ある、および
(c)過酸化水素、オキソン、硝酸アンモニウムセリウム、過ヨウ素酸塩、ヨウ素酸塩、過硫酸塩、およびそれらの混合物からなる群から選択された酸化剤、
を含む化学的機械的研磨組成物と、
を接触させること、そして、
(ii)該基材に対して、該研磨組成物を動かすこと、そして、
(iii)該基材の該炭化ケイ素の少なくとも一部分を摩耗させて、該基材を磨くこと、
を含んで成る。 - 該研削剤が、該液体キャリアーおよび該液体キャリアーに溶解されまたは懸濁された全ての成分の重量に基づいて、5wt%〜40wt%の量で存在する、請求項1の方法。
- 該液体キャリアーが、水を含む、請求項1の方法。
- 該実質的に球状のシリカが、縮重合されたシリカである、請求項1の方法。
- 該酸化剤が、該液体キャリアーおよび該液体キャリアーに溶解されまたは懸濁された全ての成分の重量に基づいて、0.001wt%〜2wt%の量で存在する、請求項1の方法。
- 該液体キャリアーに溶解されまたは懸濁された全ての成分を有する、該液体キャリアーが、9以上のpHを有する、請求項1の方法。
- 該液体キャリアーに溶解されまたは懸濁された全ての成分を有する、該液体キャリアーが、3以下のpHを有する、請求項1の方法。
- 該炭化ケイ素が、20nm/時間〜180nm/時間の速度で、該基材から除去される、請求項1の方法。
- 該酸化剤が、過ヨウ素酸カリウム、ヨウ素酸カリウム、過硫酸アンモニウム、または過硫酸カリウムである、請求項1の方法。
- 化学的機械的に基材を研磨する方法、該方法は、
(i)少なくとも1層の単結晶炭化ケイ素を含む基材と、
(a)液体キャリアー、
(b)該液体キャリアー中に懸濁された研削剤、
該研削剤は、アルミナであり、そして該液体キャリアーおよび該液体キャリアーに溶
解されまたは懸濁された全ての成分の重量に基づいて、3wt%以下の量で存在する、および、
(c)酸化剤、
該酸化剤は、該液体キャリアーおよび該液体キャリアーに溶解されまたは懸濁された
全ての成分の重量に基づいて、0.001wt%〜0.5wt%の量で存在し、そして
、過酸化水素、オキソン、硝酸アンモニウムセリウム、過ヨウ素酸塩、ヨウ素酸塩、
過硫酸塩、およびそれらの混合物からなる群から選択される、
を含む化学的機械的研磨組成物と、
を接触させること、そして、
(ii)該基材に対して、該研磨組成物を動かすこと、そして、
(iii)該基材の該炭化ケイ素の少なくとも一部分を摩耗させて、該基材を研磨すること、
を含んで成る。 - 該研削剤が、該液体キャリアーおよび該液体キャリアーに溶解されまたは懸濁された全ての成分の重量に基づいて、1wt%以下の量で存在する、請求項10の方法。
- 該研削剤が、130nm以下の平均粒径を有する粒子を含む、請求項10の方法。
- 該液体キャリアーが、水を含む、請求項10の方法。
- 該酸化剤が、該液体キャリアーおよび該液体キャリアーに溶解されまたは懸濁された全ての成分の重量に基づいて、0.001wt%〜0.1wt%の量で存在する、請求項10の方法。
- 該液体キャリアーに溶解されまたは懸濁された全ての成分を有する、該液体キャリアーが、5以下のpHを有する、請求項10の方法。
- 該酸化剤が、過ヨウ素酸カリウム、ヨウ素酸カリウム、過硫酸アンモニウム、または過硫酸カリウムである、請求項10の方法。
- 該アルミナが、種結晶を用いたゲル法のαアルミナである、請求項10の方法。
- 該炭化ケイ素が、30nm/時間〜1000nm/時間の速度で、該基材から除去される、請求項10の方法。
- 基材を化学的機械的に研磨する方法、該方法は、
(i)少なくとも1層の炭化ケイ素を含む基材と、
(a)液体キャリアー、
(b)該液体キャリアー中に懸濁された研削剤、および、
(c)酸化剤
該酸化剤は、該液体キャリアーおよび該液体キャリアーに溶解されまたは懸濁された
全ての成分の重量に基づいて、0.001wt%〜0.5wt%の量で存在し、そして
オキソン、過硫酸カリウム、およびそれらの混合物からなる群から選択される、
を含む化学的機械的研磨組成物と、
を接触させること、そして、
(ii)該基材に対して、該研磨組成物を動かすこと、そして、
(iii)該基材の該炭化ケイ素の少なくとも一部分を摩耗させて、該基材を研磨すること、
を含んで成る。 - 該研削剤が、40nm〜130nmの平均粒径を有するアルミナまたは実質的に球状のシリカである、請求項19の方法。
- 該炭化ケイ素が、単結晶炭化ケイ素である、請求項19の方法。
- 該液体キャリアーが、水を含む、請求項19の方法。
- 該酸化剤が、該液体キャリアーおよび該液体キャリアーに溶解されまたは懸濁された全ての成分の重量に基づいて、0.001wt%〜0.1wt%の量で存在する、請求項19の方法。
- 該液体キャリアーに溶解されまたは懸濁された全ての成分を有する、該液体キャリアーが、5以下のpHを有する、請求項19の方法。
- 該酸化剤が、過硫酸カリウムである、請求項19の方法。
- 該炭化ケイ素が、30nm/時間〜1000nm/時間の速度で、該基材から除去される、請求項19の方法。
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JP2011513991A (ja) * | 2008-03-05 | 2011-04-28 | キャボット マイクロエレクトロニクス コーポレイション | 水溶性酸化剤を用いた炭化ケイ素の研磨方法 |
WO2011162265A1 (ja) | 2010-06-23 | 2011-12-29 | 日産化学工業株式会社 | 炭化珪素基板研磨用組成物及び炭化珪素基板の研磨方法 |
JPWO2011162265A1 (ja) * | 2010-06-23 | 2013-08-22 | 日産化学工業株式会社 | 炭化珪素基板研磨用組成物及び炭化珪素基板の研磨方法 |
JP5773170B2 (ja) * | 2010-06-23 | 2015-09-02 | 日産化学工業株式会社 | 炭化珪素基板研磨用組成物及び炭化珪素基板の研磨方法 |
Also Published As
Publication number | Publication date |
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KR20090051263A (ko) | 2009-05-21 |
CN101512732A (zh) | 2009-08-19 |
US20080057713A1 (en) | 2008-03-06 |
US20080153293A1 (en) | 2008-06-26 |
WO2008030420A1 (en) | 2008-03-13 |
SG174764A1 (en) | 2011-10-28 |
KR101371870B1 (ko) | 2014-03-07 |
JP5385141B2 (ja) | 2014-01-08 |
CN101512732B (zh) | 2011-05-18 |
MY145601A (en) | 2012-03-15 |
TW200821375A (en) | 2008-05-16 |
TWI378142B (en) | 2012-12-01 |
US7678700B2 (en) | 2010-03-16 |
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