JP2010278139A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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Abstract
【解決手段】 半導体素子(3)は電極パッド(1)と電極パッド(1)上に設けられたバンプ(2)とを備え、半導体キャリア基板(4)は基板電極(9)を備え、バンプ(2)は空間部(S)が設けられ、バンプ(2)は半田(6)によって基板電極(9)に物理的かつ電気的に接続されると共に接続に供せられない半田(6)は空間部(S)に受容される。
【選択図】図1
Description
前記半導体素子は、
電極パッドと、
電極パッド上に設けられたバンプとを備え、
前記半導体キャリア基板は、
基板電極を備え、
前記バンプは空間部が設けられ、バンプは前記半田によって基板電極に物理的かつ電気的に接続されると共に、接続に供せられない半田は前記空間部に受容されている。
先ず、図1、図2、および図3を参照して、本発明の第1の実施の形態に係る半導体装置SCAについて説明する。なお、以降の説明において、同一構成要素には同じ符合を付して詳細な説明を省く。図1は半導体装置SCAの断面を示し、図2は図1におけるA部を拡大して示す。図1および図2に示すように、半導体装置SCA1は、半導体素子3および半導体キャリア基板4が互いに接合されて構成されている。半導体素子3の主面上には複数の電極パッド1が形成され、電極パッド1上にはバンプ2aが形成されている。
ンプ2aが表示されている。バンプ2aの外形は、基本的に上述のバンプ2と類似している。バンプ2aの表面ないし内部には空間部Sa(作図上の都合により図示せず)が設けられているポーラス(多孔体)構造を有する。この空間部Saは、バンプ2aと基板電極9との接合に必要とされる以上の余分な半田6を受容して、隣接する電極(電極パッド1や基板電極9)等に不用意に接続させないように、設けられているものである。
4との間に形成された空隙に封止樹脂7が供給される。封止樹脂7は、半導体素子3を保護するための封止機能を有するものが選ばれる。すなわち、耐湿性、耐マイグレーション性、外力に対する十分な強度、および電気絶縁性等の封止材として満足できる性能を有するものでなければならない。このような樹脂としては、代表的なものにエポキシ系の樹脂やポリイミド系の樹脂やシリコーン系の樹脂などが挙げられる。
以下に、図4を参照して、本発明の第2の実施の形態に係る半導体装置について説明する。本実施の形態にかかる半導体装置SCA2は、バンプ2aがバンプ2bに交換されている点を除いて、上述の半導体装置SCA1と同様に構成されている。よって、以降バンプ2bについて重点的に説明する。
および現像の処理により所望の形状のマスキング処理を行ったウェハに電解めっきにて形成される。なお、所望の形状のマスクを用いた印刷や光造形によりバンプ2bを形成しても構わない。
図5を参照して、本発明の第3の実施の形態に係る半導体装置について説明する。本実施の形態にかかる半導体装置SCA3は、バンプ2bがバンプ2cに交換されている点を除いて、上述の半導体装置SCA2と同様に構成されている。よって、以降バンプ2cについて重点的に説明する。
rは、エア抜きの機能を満たすのであれば、溝状の切れ目ではなく、バンプ2cの付け根部分に設けられた穴状のパスであっても構わない。また、半径方向溝部Crの数および位置も、任意に定めることができる。
1 電極パッド
2、2a、2b、2b1、2b2、2b3,2c、2c1、2c2 バンプ
3 半導体素子
4 半導体キャリア基板
5 伝導性微細粒子
6 半田
7 封止樹脂
8 外部端子
9 基板電極
Sa、Sb1、Sb2、Sb3、Sc、Sc1、Sc2 空間部
Cc 筒状空洞部
Cr 半径方向溝部
Claims (9)
- 半導体素子が半田により、半導体キャリア基板にフリップチップ実装されて成る半導体装置であって、
前記半導体素子は、
電極パッドと、
前記電極パッド上に設けられたバンプとを備え、
前記半導体キャリア基板は、
基板電極を備え、
前記バンプは空間部が設けられ、当該バンプは前記半田によって前記基板電極に物理的かつ電気的に接続されると共に、当該接続に供せられない半田は前記空間部に受容されていることを特徴とする半導体装置。 - 前記バンプは伝導性微細粒子の集合体により構成されていることを特徴とする請求項1に記載の半導体装置。
- 前記空間部はポーラス構造であることを特徴とする請求項2に記載の半導体装置。
- 前記空間部は、前記バンプ表面に溝状に形成されていることを特徴とする請求項1に記載の半導体装置。
- 前記空間部は、前記バンプの内部に筒状に形成されていることを特徴とする請求項1に記載の半導体装置。
- 前記請求項1項に記載の半導体装置を製造する方法であって、
前記基板電極に前記半田をプリコートするステップと、
前記バンプを前記基板電極上にアライメントして前記半導体素子を前記半導体キャリア基板上に載置するステップと、
前記バンプが載置された状態で、前記半田の融点以上の温度に加熱して当該半田を溶融させて、当該バンプと前記基板電極とを接続すると共に、当該接続に関して過剰な半田を前記空間部に保持させるステップとを備える半導体装置の製造方法。 - 前記バンプは、
揮発性バインダ中に伝導性微細粒子を分散させたペーストを前記電極パッド上に印刷し、
前記バインダを揮発或いは蒸発により除去して、
構成されることを特徴とする請求項6に記載の半導体装置の製造方法。 - 前記伝導性微細粒子の融点は前記半田の溶融温度より10°C以上高いことを特徴とする請求項7に記載の半導体装置の製造方法。
- 前記伝導性微細粒子は250℃以上の融点を持つ物質で構成されることを特徴とする請求項8に記載の半導体装置の製造方法。
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JP2009127874A JP5320165B2 (ja) | 2009-05-27 | 2009-05-27 | 半導体装置 |
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JP5320165B2 JP5320165B2 (ja) | 2013-10-23 |
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Cited By (7)
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JP2016512929A (ja) * | 2013-03-22 | 2016-05-09 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 相互接続部材をプレコーティングすることを含むフリップチップ組立方法 |
JP2017034031A (ja) * | 2015-07-30 | 2017-02-09 | シチズン電子株式会社 | 半導体素子および発光装置 |
US9966332B2 (en) | 2012-03-22 | 2018-05-08 | Toyoda Gosei Co., Ltd. | Solid-state device including a conductive bump connected to a metal pattern and method of manufacturing the same |
JP2019062009A (ja) * | 2017-09-25 | 2019-04-18 | 新光電気工業株式会社 | 配線基板装置 |
CN112331689A (zh) * | 2020-10-30 | 2021-02-05 | 湖北长江新型显示产业创新中心有限公司 | 一种阵列基板、显示面板及其制备方法、显示装置 |
WO2022176563A1 (ja) * | 2021-02-19 | 2022-08-25 | ソニーセミコンダクタソリューションズ株式会社 | 電子機器 |
CN116613157A (zh) * | 2023-07-21 | 2023-08-18 | 荣耀终端有限公司 | 芯片堆叠结构及其制作方法、电子设备 |
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JP2021044278A (ja) | 2019-09-06 | 2021-03-18 | キオクシア株式会社 | 半導体装置 |
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Cited By (10)
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US9966332B2 (en) | 2012-03-22 | 2018-05-08 | Toyoda Gosei Co., Ltd. | Solid-state device including a conductive bump connected to a metal pattern and method of manufacturing the same |
JP2016512929A (ja) * | 2013-03-22 | 2016-05-09 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 相互接続部材をプレコーティングすることを含むフリップチップ組立方法 |
JP2017034031A (ja) * | 2015-07-30 | 2017-02-09 | シチズン電子株式会社 | 半導体素子および発光装置 |
JP2019062009A (ja) * | 2017-09-25 | 2019-04-18 | 新光電気工業株式会社 | 配線基板装置 |
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CN112331689A (zh) * | 2020-10-30 | 2021-02-05 | 湖北长江新型显示产业创新中心有限公司 | 一种阵列基板、显示面板及其制备方法、显示装置 |
WO2022176563A1 (ja) * | 2021-02-19 | 2022-08-25 | ソニーセミコンダクタソリューションズ株式会社 | 電子機器 |
CN116613157A (zh) * | 2023-07-21 | 2023-08-18 | 荣耀终端有限公司 | 芯片堆叠结构及其制作方法、电子设备 |
CN116613157B (zh) * | 2023-07-21 | 2024-03-19 | 荣耀终端有限公司 | 芯片堆叠结构及其制作方法、电子设备 |
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