JP2010073846A - 基板加工装置及び基板加工方法 - Google Patents
基板加工装置及び基板加工方法 Download PDFInfo
- Publication number
- JP2010073846A JP2010073846A JP2008238895A JP2008238895A JP2010073846A JP 2010073846 A JP2010073846 A JP 2010073846A JP 2008238895 A JP2008238895 A JP 2008238895A JP 2008238895 A JP2008238895 A JP 2008238895A JP 2010073846 A JP2010073846 A JP 2010073846A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- router bit
- processing
- router
- wear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
- H05K3/0052—Depaneling, i.e. dividing a panel into circuit boards; Working of the edges of circuit boards
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0042—Devices for removing chips
- B23Q11/0046—Devices for removing chips by sucking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
- B23Q17/2233—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work for adjusting the tool relative to the workpiece
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09063—Holes or slots in insulating substrate not used for electrical connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/0909—Preformed cutting or breaking line
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/0228—Cutting, sawing, milling or shearing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T408/00—Cutting by use of rotating axially moving tool
- Y10T408/16—Cutting by use of rotating axially moving tool with control means energized in response to activator stimulated by condition sensor
- Y10T408/17—Cutting by use of rotating axially moving tool with control means energized in response to activator stimulated by condition sensor to control infeed
- Y10T408/172—Responsive to Tool
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/303752—Process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/303752—Process
- Y10T409/303808—Process including infeeding
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/304144—Means to trim edge
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/306664—Milling including means to infeed rotary cutter toward work
- Y10T409/306776—Axially
- Y10T409/306832—Axially with infeed control means energized in response to activator stimulated by condition sensor
- Y10T409/306888—In response to cutter condition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/306664—Milling including means to infeed rotary cutter toward work
- Y10T409/306776—Axially
- Y10T409/307056—Axially and laterally
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/306664—Milling including means to infeed rotary cutter toward work
- Y10T409/307224—Milling including means to infeed rotary cutter toward work with infeed control means energized in response to activator stimulated by condition sensor
- Y10T409/30728—In response to cutter condition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/30784—Milling including means to adustably position cutter
- Y10T409/307952—Linear adjustment
- Y10T409/308008—Linear adjustment with control for adjustment means responsive to activator stimulated by condition sensor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Milling Processes (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
【解決手段】ルータビット6を用いて接続部を切断する加工を行うことにより多数個取り基板40から複数の基板を切り出す基板加工装置において、ルータビット6を多数個取り基板40に対して昇降させるルータ移動ロボットと、ルータビット6の摩耗量を検出する摩耗検出装置と、摩耗検出装置で検出されるルータビット6の摩耗量が既定の寿命摩耗量を超えた際、ルータ移動ロボットを駆動してルータビット6を上昇又は下降させ、ルータビット6の多数個取り基板40に対する加工位置Pxを寿命摩耗量となった加工位置(例えば、P1)から異なる加工位置(例えば、P2)に移動させる。
【選択図】図8
Description
6を交換することが行われていた。
(付記1)
ルータビットを用いて基板の被加工部の加工を行う基板加工装置において、
前記ルータビットを前記基板に対して昇降させる移動装置と、
前記ルータビットの摩耗量を検出する摩耗検出装置と、
前記摩耗検出装置で検出される前記ルータビットの摩耗量が寿命摩耗量を超えた際、前記移動装置を駆動して前記ルータビットを上昇又は下降させ、前記ルータビットの前記基板に対する加工位置を、前記寿命摩耗量となった加工位置から異なる位置に移動させる加工位置移動装置とを有する基板加工装置。
(付記2)
更に、前記基板の前記被加工部の長さと、前記基板の前記被加工部の個数を取得する加工条件取得装置を設け、
前記摩耗検出装置は、加工を行った前記被加工部の長さと前記被加工部の個数とに基づき前記摩耗量を演算する付記1記載の基板加工装置。
(付記3)
前記摩耗検出装置は、前記ルータビットの形状を検出することにより前記摩耗量を求める付記1記載の基板加工装置。
(付記4)
前記加工条件取得装置は、前記基板の厚さを取得し、前記ルータビットの刃長を前記基板の厚さに応じて複数の加工領域を設定し、
前記加工位置移動装置は、前記ルータビットの摩耗量が寿命摩耗量となった際、前記ルータビットの前記基板を加工する加工領域を、前記寿命摩耗量となった加工領域から異なる加工領域に移動させる付記1乃至3のいずれか一項に記載の基板加工装置。
(付記5)
前記基板は多数個取り基板であり、前記多数個取り基板が固定される基板固定パレットが装着されることにより、複数の前記基板を一定の高さに保持する装着台を有する付記1乃至4のいずれか一項に記載の基板加工装置。
(付記6)
ルータビットを用いて基板の被加工部の加工を行う基板加工方法において、
前記被加工部を除去する加工により摩耗する前記ルータビットの摩耗量を求め、
該摩耗量が寿命摩耗量を超えた際、前記ルータビットを上昇又は下降させ、前記ルータビットの前記基板に対する加工位置を、前記寿命摩耗量となった加工位置から異なる位置に移動させる基板加工方法。
(付記7)
前記ルータビットの摩耗量を前記被加工部の長さと、前記被加工部の個数と、前記多数個取り基板の加工枚数とに基づき演算する付記6記載の基板加工方法。
(付記8)
前記ルータビットの摩耗量を、前記ルータビットの形状を検出することにより求める付記6記載の基板加工方法。
(付記9)
前記ルータビットの刃長を前記基板の厚さに応じて複数の加工領域を設定しておき、前記ルータビットの摩耗量が既定の寿命摩耗量となった際、前記ルータビットの前記多数個取り基板を加工する加工領域を、前記寿命摩耗量となった加工領域から異なる加工領域に移動させる付記6乃至8のいずれか一項に記載の基板加工方法。
2 基台
3 加工装置本体
4 集塵装置
5 ルータヘッド
6 ルータビット
7X,7Y,7Z ルータ移動ロボット
8 装着台
9 集塵チャンバ
10 集塵機
12 メインコントローラ
13 ルータコントローラ
14 ロボットコントローラ
15 オペレーションパネル
20 基板固定パレット
21 パレット本体
22 蓋体
36 蓋開状態保持機構
40 被加工物
41 基板
42 接続部
43 分離溝
44 枠状部
50 固定用突起
L 接続部の長さ
M 接続部の個数
N 処理予定枚数
n 加工枚数
W 多数個取り基板の厚さ
T ルータビット6の刃長
Px 加工領域
X 加工領域値
Dn 積算加工距離
Dmax 寿命摩耗距離
Xmax 最大加工領域数
Claims (5)
- ルータビットを用いて基板の被加工部の加工を行う基板加工装置において、
前記ルータビットを前記基板に対して昇降させる移動装置と、
前記ルータビットの摩耗量を検出する摩耗検出装置と、
前記摩耗検出装置で検出される前記ルータビットの摩耗量が寿命摩耗量を超えた際、前記移動装置を駆動して前記ルータビットを上昇又は下降させ、前記ルータビットの前記基板に対する加工位置を、前記寿命摩耗量となった加工位置から異なる位置に移動させる加工位置移動装置とを有する基板加工装置。 - 更に、前記基板の前記被加工部の長さと、前記基板の前記被加工部の個数を取得する加工条件取得装置を設け、
前記摩耗検出装置は、加工を行った前記被加工部の長さと前記被加工部の個数とに基づき前記摩耗量を演算する請求項1記載の基板加工装置。 - 前記加工条件取得装置は、前記基板の厚さを取得し、前記ルータビットの刃長を前記基板の厚さに応じて複数の加工領域を設定し、
前記加工位置移動装置は、前記ルータビットの摩耗量が寿命摩耗量となった際、前記ルータビットの前記基板を加工する加工領域を、前記寿命摩耗量となった加工領域から異なる加工領域に移動させる請求項2に記載の基板加工装置。 - 前記基板は多数個取り基板であり、前記多数個取り基板が固定される基板固定パレットが装着されることにより、複数の前記基板を一定の高さに保持する装着台を有する請求項1乃至3のいずれか一項に記載の基板加工装置。
- ルータビットを用いて基板の被加工部の加工を行う基板加工方法において、
前記被加工部を除去する加工により摩耗する前記ルータビットの摩耗量を求め、
該摩耗量が寿命摩耗量を超えた際、前記ルータビットを上昇又は下降させ、前記ルータビットの前記基板に対する加工位置を、前記寿命摩耗量となった加工位置から異なる位置に移動させる基板加工方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008238895A JP4998419B2 (ja) | 2008-09-18 | 2008-09-18 | 基板加工装置及び基板加工方法 |
US12/561,499 US8534967B2 (en) | 2008-09-18 | 2009-09-17 | Processing apparatus and processing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008238895A JP4998419B2 (ja) | 2008-09-18 | 2008-09-18 | 基板加工装置及び基板加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010073846A true JP2010073846A (ja) | 2010-04-02 |
JP4998419B2 JP4998419B2 (ja) | 2012-08-15 |
Family
ID=42007376
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008238895A Expired - Fee Related JP4998419B2 (ja) | 2008-09-18 | 2008-09-18 | 基板加工装置及び基板加工方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8534967B2 (ja) |
JP (1) | JP4998419B2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010161181A (ja) * | 2009-01-07 | 2010-07-22 | Denso Corp | 基板分割用刃具及び基板分割方法 |
KR101479633B1 (ko) | 2013-07-22 | 2015-01-07 | 바이옵트로 주식회사 | 클램핑 장치 |
WO2020105984A1 (ko) * | 2018-11-20 | 2020-05-28 | 한국생산기술연구원 | 공구 마모를 고려한 공구 위치 가변 가공 장치 및 이를 이용한 공구 위치 제어 방법 |
JP2021027093A (ja) * | 2019-08-01 | 2021-02-22 | 株式会社竹原理研 | 基板分割装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011009507A1 (de) * | 2011-01-26 | 2012-07-26 | Gas - Automation Gmbh | Leiterplattentrenneinrichtung |
CN103182658A (zh) * | 2011-12-28 | 2013-07-03 | 鸿富锦精密工业(深圳)有限公司 | 机械加工装置 |
US9849553B2 (en) * | 2013-03-12 | 2017-12-26 | Christopher R. Bialy | Drilling safety system |
WO2015120293A1 (en) * | 2014-02-06 | 2015-08-13 | Arizona Board Of Regents On Behalf Of Arizona State University | Systems and methods for real-time monitoring of micromilling tool wear |
EP2942135B1 (fr) * | 2014-05-07 | 2023-11-29 | Airbus (Sas) | Procédé de perçage d'un empilage de matériaux, et dispositif de perçage |
JP6487475B2 (ja) | 2017-02-24 | 2019-03-20 | ファナック株式会社 | 工具状態推定装置及び工作機械 |
US10656629B2 (en) * | 2018-02-13 | 2020-05-19 | Ford Motor Company | Method and system for linking fixture alignment modifications with a workpiece |
CN111790933A (zh) * | 2020-07-19 | 2020-10-20 | 麻城高科自动化设备有限公司 | 一种液压阀块精加工用双面铣床 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04105813A (ja) * | 1990-08-27 | 1992-04-07 | Hitachi Seiko Ltd | プリント基板外形加工方法 |
JPH04316393A (ja) * | 1991-04-15 | 1992-11-06 | Oiles Ind Co Ltd | プリント基板用ルータ装置 |
JP2002036182A (ja) * | 2000-07-18 | 2002-02-05 | Denso Corp | プリント基板分割装置 |
JP2002178295A (ja) * | 2000-12-11 | 2002-06-25 | Hitachi Ltd | プリント基板分割装置 |
JP2008149431A (ja) * | 2006-12-20 | 2008-07-03 | Sony Corp | 基板分割装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US535939A (en) * | 1895-03-19 | Drill foe boeing metal | ||
US4230194A (en) * | 1979-02-23 | 1980-10-28 | Logan Jr Clifford K | Rotary drill bit |
US4629372A (en) * | 1981-02-02 | 1986-12-16 | Manchester Tool Company | Chip-controlling insert |
US4802095A (en) * | 1986-12-24 | 1989-01-31 | The Boeing Company | Method for indicating end mill wear |
JP3041651B2 (ja) | 1991-03-25 | 2000-05-15 | 株式会社リコー | 実装プリント基板切断装置 |
JP3455239B2 (ja) | 1992-10-02 | 2003-10-14 | 株式会社河原 | 重量の重いワ−クに対する自動深穴明け加工方法及び該方法の実施に用いる重量の重いワ−クに対する自動深穴明け加工システム |
JPH10277420A (ja) | 1997-04-09 | 1998-10-20 | Toshiba Corp | 裁断装置及び裁断方法 |
US5882152A (en) * | 1997-06-09 | 1999-03-16 | Janitzki; Bernhard M. | Multi-bit drill |
JP2001156423A (ja) | 1999-11-30 | 2001-06-08 | Icom Inc | プリント基板分割装置 |
DE602004020497D1 (de) * | 2004-08-12 | 2009-05-20 | Makino Milling Machine | Verfahren zur maschinellen bearbeitung eines werkstücks |
-
2008
- 2008-09-18 JP JP2008238895A patent/JP4998419B2/ja not_active Expired - Fee Related
-
2009
- 2009-09-17 US US12/561,499 patent/US8534967B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04105813A (ja) * | 1990-08-27 | 1992-04-07 | Hitachi Seiko Ltd | プリント基板外形加工方法 |
JPH04316393A (ja) * | 1991-04-15 | 1992-11-06 | Oiles Ind Co Ltd | プリント基板用ルータ装置 |
JP2002036182A (ja) * | 2000-07-18 | 2002-02-05 | Denso Corp | プリント基板分割装置 |
JP2002178295A (ja) * | 2000-12-11 | 2002-06-25 | Hitachi Ltd | プリント基板分割装置 |
JP2008149431A (ja) * | 2006-12-20 | 2008-07-03 | Sony Corp | 基板分割装置 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010161181A (ja) * | 2009-01-07 | 2010-07-22 | Denso Corp | 基板分割用刃具及び基板分割方法 |
KR101479633B1 (ko) | 2013-07-22 | 2015-01-07 | 바이옵트로 주식회사 | 클램핑 장치 |
WO2020105984A1 (ko) * | 2018-11-20 | 2020-05-28 | 한국생산기술연구원 | 공구 마모를 고려한 공구 위치 가변 가공 장치 및 이를 이용한 공구 위치 제어 방법 |
KR20200059358A (ko) * | 2018-11-20 | 2020-05-29 | 한국생산기술연구원 | 공구 마모를 고려한 공구 위치 가변 가공 장치 및 이를 이용한 공구 위치 제어 방법 |
KR102201173B1 (ko) * | 2018-11-20 | 2021-01-13 | 한국생산기술연구원 | 공구 마모를 고려한 공구 위치 가변 가공 장치 및 이를 이용한 공구 위치 제어 방법 |
JP2021027093A (ja) * | 2019-08-01 | 2021-02-22 | 株式会社竹原理研 | 基板分割装置 |
JP2021122055A (ja) * | 2019-08-01 | 2021-08-26 | 株式会社竹原理研 | 基板分割装置 |
Also Published As
Publication number | Publication date |
---|---|
US8534967B2 (en) | 2013-09-17 |
US20100067998A1 (en) | 2010-03-18 |
JP4998419B2 (ja) | 2012-08-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4998419B2 (ja) | 基板加工装置及び基板加工方法 | |
JP5571331B2 (ja) | 切削装置 | |
CN108074841B (zh) | 封装基板切断用治具工作台 | |
JP4079152B2 (ja) | ドーナツ状ガラス基板を作成する方法 | |
JP2005153085A (ja) | 面取り砥石のツルーイング方法及び面取り装置 | |
KR101393680B1 (ko) | 휴대폰 케이스 표면가공장치 및 방법 | |
JP5380956B2 (ja) | 基板固定パレット及び基板加工装置 | |
JP4795377B2 (ja) | レーザ加工装置 | |
KR102644406B1 (ko) | 가공 장치 | |
KR20180037116A (ko) | 절삭 장치 | |
JP2007061980A (ja) | 切削加工装置および切削加工方法 | |
JP4381755B2 (ja) | 切削装置 | |
JP5148925B2 (ja) | フレームクランプ | |
JP5148924B2 (ja) | ダイシング用フレームユニット | |
JP2006339373A (ja) | 溝形成方法 | |
JP4436641B2 (ja) | 切削装置におけるアライメント方法 | |
KR20110109861A (ko) | 프린트 기판 천공기 | |
JP2018161733A (ja) | ウェーハの加工方法 | |
JP2008114293A (ja) | 加工装置 | |
CN107901103B (zh) | 一种电路板自动切割设备及方法 | |
KR20220002089A (ko) | 척 테이블 | |
CN112530837A (zh) | 加工装置和晶片的加工方法 | |
JP2014079833A (ja) | 切削装置 | |
CN110539239A (zh) | 预备加工装置、加工装置及加工状态检测装置 | |
JP7138321B2 (ja) | 加工システム及びその制御方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110613 |
|
TRDD | Decision of grant or rejection written | ||
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120412 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120417 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120430 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4998419 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150525 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |