JP2009535826A5 - - Google Patents
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- Publication number
- JP2009535826A5 JP2009535826A5 JP2009508116A JP2009508116A JP2009535826A5 JP 2009535826 A5 JP2009535826 A5 JP 2009535826A5 JP 2009508116 A JP2009508116 A JP 2009508116A JP 2009508116 A JP2009508116 A JP 2009508116A JP 2009535826 A5 JP2009535826 A5 JP 2009535826A5
- Authority
- JP
- Japan
- Prior art keywords
- carrier substrate
- radiation emitting
- semiconductor
- semiconductor layer
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 111
- 239000000758 substrate Substances 0.000 claims 46
- 230000005855 radiation Effects 0.000 claims 44
- 238000000034 method Methods 0.000 claims 28
- 239000000463 material Substances 0.000 claims 11
- 150000001875 compounds Chemical class 0.000 claims 4
- 230000005670 electromagnetic radiation Effects 0.000 claims 3
- -1 phosphorus compound Chemical class 0.000 claims 3
- 239000000945 filler Substances 0.000 claims 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims 2
- 229910017464 nitrogen compound Inorganic materials 0.000 claims 2
- 150000002830 nitrogen compounds Chemical class 0.000 claims 2
- 229910052698 phosphorus Inorganic materials 0.000 claims 2
- 239000011574 phosphorus Substances 0.000 claims 2
- 229910052594 sapphire Inorganic materials 0.000 claims 2
- 239000010980 sapphire Substances 0.000 claims 2
- 239000004698 Polyethylene Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000004033 plastic Substances 0.000 claims 1
- 229920003023 plastic Polymers 0.000 claims 1
- 229920000573 polyethylene Polymers 0.000 claims 1
- 238000005476 soldering Methods 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006020537 | 2006-05-03 | ||
| DE102006020537.5 | 2006-05-03 | ||
| DE102006033502.3 | 2006-07-19 | ||
| DE102006033502A DE102006033502A1 (de) | 2006-05-03 | 2006-07-19 | Strahlungsemittierender Halbleiterkörper mit Trägersubstrat und Verfahren zur Herstellung eines solchen |
| PCT/DE2007/000793 WO2007124737A1 (de) | 2006-05-03 | 2007-05-03 | Strahlungsemittierender halbleiterkörper mit trägersubstrat und verfahren zur herstellung eines solchen |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009535826A JP2009535826A (ja) | 2009-10-01 |
| JP2009535826A5 true JP2009535826A5 (enExample) | 2011-06-16 |
| JP5138675B2 JP5138675B2 (ja) | 2013-02-06 |
Family
ID=38332444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009508116A Expired - Fee Related JP5138675B2 (ja) | 2006-05-03 | 2007-05-03 | キャリア基板を有する放射線放射半導体ボディおよびその形成方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US8088649B2 (enExample) |
| EP (1) | EP2013917A1 (enExample) |
| JP (1) | JP5138675B2 (enExample) |
| KR (1) | KR101329435B1 (enExample) |
| CN (1) | CN101432900B (enExample) |
| DE (1) | DE102006033502A1 (enExample) |
| TW (1) | TWI343662B (enExample) |
| WO (1) | WO2007124737A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008009108A1 (de) | 2008-02-14 | 2009-08-20 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterlasers sowie Halbleiterlaser |
| JP2009212179A (ja) * | 2008-03-03 | 2009-09-17 | Sanyo Electric Co Ltd | 半導体レーザ素子および半導体レーザ素子の製造方法 |
| KR100999779B1 (ko) * | 2010-02-01 | 2010-12-08 | 엘지이노텍 주식회사 | 발광소자, 발광소자의 제조방법 및 발광소자 패키지 |
| WO2011111937A2 (ko) * | 2010-03-09 | 2011-09-15 | 신왕균 | 투명 엘이디 웨이퍼 모듈 및 그 제조방법 |
| KR101159782B1 (ko) | 2010-02-05 | 2012-06-26 | 신왕균 | 투명 엘이디 웨이퍼 모듈 및 그 제조방법 |
| GB2480873B (en) * | 2010-06-04 | 2014-06-11 | Plastic Logic Ltd | Reducing defects in electronic apparatus |
| DE102010032813A1 (de) * | 2010-07-30 | 2012-02-02 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines optoelektronischen Halbleiterbauteils und optoelektronisches Halbleiterbauteil |
| TWI463620B (zh) * | 2012-08-22 | 2014-12-01 | 矽品精密工業股份有限公司 | 封裝基板之製法 |
| DE102013111120A1 (de) * | 2013-10-08 | 2015-04-09 | Osram Opto Semiconductors Gmbh | Halbleiterchip und Verfahren zum Vereinzeln eines Verbundes in Halbleiterchips |
| WO2017004497A1 (en) * | 2015-07-01 | 2017-01-05 | Sensor Electronic Technology, Inc. | Substrate structure removal |
| US10950747B2 (en) * | 2015-07-01 | 2021-03-16 | Sensor Electronic Technology, Inc. | Heterostructure for an optoelectronic device |
| US10363629B2 (en) * | 2017-06-01 | 2019-07-30 | Applied Materials, Inc. | Mitigation of particle contamination for wafer dicing processes |
| DE102017130131B4 (de) * | 2017-12-15 | 2021-08-19 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung von optoelektronischen Halbleiterbauteilen und optoelektronisches Halbleiterbauteil |
| FR3080487B1 (fr) * | 2018-04-20 | 2020-06-12 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de fabrication d’un dispositif optoelectronique a matrice de diodes |
| DE102019108701A1 (de) * | 2019-04-03 | 2020-10-08 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung einer Mehrzahl von Bauteilen, Bauteil und Bauteilverbund aus Bauteilen |
| CN112993755B (zh) * | 2019-11-29 | 2022-02-18 | 山东华光光电子股份有限公司 | 一种半导体激光器芯片及其应用方法 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR910003735B1 (ko) * | 1988-12-17 | 1991-06-10 | 삼성전자 주식회사 | 발광장치 |
| US5329529A (en) | 1993-04-02 | 1994-07-12 | Thomson Consumer Electronics, Inc. | Digital data arbitration apparatus |
| US5486826A (en) | 1994-05-19 | 1996-01-23 | Ps Venture 1 Llc | Method and apparatus for iterative compression of digital data |
| JPH09277595A (ja) * | 1996-02-13 | 1997-10-28 | Oki Data:Kk | 光プリントヘッド |
| US5684309A (en) | 1996-07-11 | 1997-11-04 | North Carolina State University | Stacked quantum well aluminum indium gallium nitride light emitting diodes |
| DE19640594B4 (de) | 1996-10-01 | 2016-08-04 | Osram Gmbh | Bauelement |
| WO1998031055A1 (en) | 1997-01-09 | 1998-07-16 | Nichia Chemical Industries, Ltd. | Nitride semiconductor device |
| US5831277A (en) | 1997-03-19 | 1998-11-03 | Northwestern University | III-nitride superlattice structures |
| JP3395620B2 (ja) * | 1997-12-16 | 2003-04-14 | 日亜化学工業株式会社 | 半導体発光素子及びその製造方法 |
| JP2000012959A (ja) * | 1998-06-22 | 2000-01-14 | Mitsubishi Electric Corp | 半導体発光装置 |
| DE19955747A1 (de) | 1999-11-19 | 2001-05-23 | Osram Opto Semiconductors Gmbh | Optische Halbleitervorrichtung mit Mehrfach-Quantentopf-Struktur |
| DE10017337C2 (de) * | 2000-04-07 | 2002-04-04 | Vishay Semiconductor Gmbh | Verfahren zum Herstellen lichtaussendender Halbleiterbauelemente |
| JP2003092450A (ja) * | 2001-09-19 | 2003-03-28 | Sharp Corp | 半導体発光装置 |
| JP2003124151A (ja) * | 2001-10-17 | 2003-04-25 | Disco Abrasive Syst Ltd | サファイア基板のダイシング方法 |
| US6955976B2 (en) * | 2002-02-01 | 2005-10-18 | Hewlett-Packard Development Company, L.P. | Method for dicing wafer stacks to provide access to interior structures |
| US20030189215A1 (en) | 2002-04-09 | 2003-10-09 | Jong-Lam Lee | Method of fabricating vertical structure leds |
| JP2004037485A (ja) * | 2002-06-28 | 2004-02-05 | Mitsubishi Electric Corp | 半導体光変調器と半導体光装置 |
| CN100530705C (zh) * | 2003-01-31 | 2009-08-19 | 奥斯兰姆奥普托半导体有限责任公司 | 用于制造一个半导体元器件的方法 |
| DE10339985B4 (de) | 2003-08-29 | 2008-12-04 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement mit einer transparenten Kontaktschicht und Verfahren zu dessen Herstellung |
| JP4195352B2 (ja) * | 2003-09-10 | 2008-12-10 | 三星エスディアイ株式会社 | 発光素子基板およびそれを用いた発光素子 |
| JP3801160B2 (ja) * | 2003-09-11 | 2006-07-26 | セイコーエプソン株式会社 | 半導体素子、半導体装置、半導体素子の製造方法、半導体装置の製造方法及び電子機器 |
| US20050205883A1 (en) * | 2004-03-19 | 2005-09-22 | Wierer Jonathan J Jr | Photonic crystal light emitting device |
| TWI232604B (en) | 2004-07-23 | 2005-05-11 | Supernova Optoelectronics Corp | Manufacturing method of metal reflection layer for gallium nitride based light-emitting diode |
| JP2006054246A (ja) | 2004-08-10 | 2006-02-23 | Disco Abrasive Syst Ltd | ウエーハの分離方法 |
| TWI235511B (en) | 2004-11-03 | 2005-07-01 | Chipmos Technologies Inc | Method of manufacturing light emitting diode package and structure of the same |
| TWI251355B (en) | 2004-12-22 | 2006-03-11 | Opto Tech Corp | A LED array package structure and method thereof |
| TWI251357B (en) | 2005-06-21 | 2006-03-11 | Epitech Technology Corp | Light-emitting diode and method for manufacturing the same |
-
2006
- 2006-07-19 DE DE102006033502A patent/DE102006033502A1/de not_active Withdrawn
-
2007
- 2007-04-27 TW TW096114899A patent/TWI343662B/zh not_active IP Right Cessation
- 2007-05-03 US US12/299,446 patent/US8088649B2/en not_active Expired - Fee Related
- 2007-05-03 EP EP07722350A patent/EP2013917A1/de not_active Withdrawn
- 2007-05-03 KR KR1020087029410A patent/KR101329435B1/ko not_active Expired - Fee Related
- 2007-05-03 JP JP2009508116A patent/JP5138675B2/ja not_active Expired - Fee Related
- 2007-05-03 CN CN2007800156056A patent/CN101432900B/zh not_active Expired - Fee Related
- 2007-05-03 WO PCT/DE2007/000793 patent/WO2007124737A1/de not_active Ceased
-
2011
- 2011-04-13 US US13/085,976 patent/US8258521B2/en not_active Expired - Fee Related
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