JP2009533846A - 膜緻密化及び改善されたギャップ充填のための薄膜の多段階アニール - Google Patents
膜緻密化及び改善されたギャップ充填のための薄膜の多段階アニール Download PDFInfo
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Abstract
【選択図】 図7
Description
[0028]図1は、本発明の実施形態を行うことに適した装置100を示す概略図である。装置100は、種々のハードウエア要素(例えば、特に、ウエハ処理ロボット170、アイソレーションバルブ172及びマスフローコントローラ174及びその他)と接続されたプロセスチャンバ102とコントローラ180を備える。チャンバ102の詳細な説明は、1999年9月15日出願の“Method and Apparatus for Heating and Cooling Substrates”と称する共同譲渡された米国特許出願第09/396,007号に開示され、この開示内容は本明細書に援用されている。装置100の簡単な説明を以下に示す。
[0042]ここで図4を参照すると、本発明の実施形態に従ってアニールすることができる基板に形成された誘電体充填トレンチの一例が示されている。トレンチアイソレーション構造400は、基板402(例えば、シリコン基板)上に形成されるパッド酸化物層407上に形成された窒化物層409を含む。
[0051]図5は、本発明のアニール方法の一つの例による経時基板温度をプロットした図である。プロットは、温度T1(例えば、約400℃)で時間t1(例えば、約5分から約30秒)の基板から開始する。このプロットの部分は、アニールチャンバ内にあり、開始平衡温度T1に達する基板を表すものである。
誘電物質の密度の増加が援助される。しかしながら、上述のように、酸素含有ガスの存在下でのより高温のアニールは、ガス中の酸素を望ましくないシリコン(Si)のような基板を作る酸化しやすい物質と反応させる。従って、基板の酸化(と他の半導体デバイス要素の酸化)を避けるために、より高温のアニールが、酸素含有ガスの不在下で行われる。
[0069]図8を参照すると、従来の高温度アニールプロセスを受ける基板における誘電体充填トレンチの走査型電子顕微鏡写真を示す。誘電体堆積は、O3/TEOSHARPプロセスを用いて540℃の温度で600トールの圧力で行った。充填された基板は、1050℃で30分間関す窒素雰囲気下でアニールした。誘電物質内のボイドは、左からの一番目のトレンチ内に見られ、二つ以上のボイドは、真ん中のトレンチ(左から三番目)内の誘電物質にはっきり見られる。
Claims (28)
- 誘電物質を含有するトレンチを備える基板をアニールする方法であって:
該基板を酸素含有ガスを含む第一雰囲気中で約800℃以上の第一温度でアニールするステップと;
該基板を酸素を含まない第二雰囲気中で約800℃〜約1400℃の第二温度でアニールするステップと;
を含み、窒化シリコン層が該トレンチ内の該誘電物質の下に位置決めされている、前記方法。 - 該酸素含有ガスが、蒸気(H2O)、一酸化窒素(NO)、又は亜酸化窒素(N2O)を含む、請求項1に記載の方法。
- 該酸素含有ガスが、水素(H2)と酸素(O2)ガスの燃焼反応から得られるインサイチュ生成蒸気(ISSG)を含む、請求項1に記載の方法。
- 第一雰囲気が、窒素(N2)、水素(H2)、アンモニア(NH3)、ヘリウム(He)、ネオン(Ne)、アルゴン(Ar)、クリプトン(Kr)、又はキセノン(Xe)を含む、請求項1に記載の方法。
- 第二雰囲気が、窒素(N2)、水素(H2)、アンモニア(NH3)、ヘリウム(He)、ネオン(Ne)、アルゴン(Ar)、クリプトン(Kr)、又はキセノン(Xe)を含む、請求項1に記載の方法。
- 該基板が該第一温度で約30分間維持される、請求項1に記載の方法。
- 該基板が該第二温度で約30分間維持される、請求項1に記載の方法。
- 該第一温度が約900℃である、請求項1に記載の方法。
- 該第二温度が約900℃である、請求項1に記載の方法。
- アニールする前の該誘電物質と熱酸化物とのウェットエッチング速度比が約10:1以上である、請求項1に記載の方法。
- 該第二温度でアニールした後の該誘電物質と熱酸化物とのウェットエッチング速度比が約1.2:1以下である、請求項1に記載の方法。
- 該誘電物質が二酸化シリコンを含む、請求項1に記載の方法。
- 該基板がシリコンを含む、請求項1に記載の方法。
- 該トレンチのアスペクト比が約7:1以上である、請求項1に記載の方法。
- 該トレンチのテーパ角が約87°以上である、請求項1に記載の方法。
- 該トレンチが、約90°の角度をなす底部と側壁を持つ、請求項15に記載の方法。
- 該トレンチ内の該誘電物質が、化学気相堆積技術又はスピンオン誘電体技術を用いて堆積される、請求項1に記載の方法。
- 誘電物質を含有するトレンチを備える基板をアニールする方法であって:
該基板を第一段階において水蒸気の存在下に約800℃〜約1000℃でアニールするステップと;
該基板を第二段階において該水蒸気を含まない雰囲気中で約800℃〜約1100℃の温度でアニールするステップと;
を含み、窒化シリコン層が該トレンチ内の該誘電物質の下に位置決めされている、前記方法。 - 該水蒸気が、水素(H2)と酸素(O2)ガスの燃焼反応から得られるインサイチュ生成蒸気(ISSG)によって生成される、請求項18に記載の方法。
- 水蒸気を含まない該雰囲気が窒素(N2)を含む、請求項18に記載の方法。
- 該第一段階温度と第二段階温度が約900℃である。請求項18に記載の方法。
- 該第一段階の時間が約30分間である、請求項18に記載の方法。
- 該第二段階の時間が約30分間である、請求項18に記載の方法。
- 該誘電物質が酸化シリコンを含む、請求項18に記載の方法。
- 該基板がシリコンを含む、請求項18に記載の方法。
- 基板上に誘電物質を堆積させる方法であって:
該基板内にトレンチを準備するステップと;
該基板上に該誘電物質を堆積させる前に該トレンチ内にバリヤ層を形成するステップと;
該誘電物質を水蒸気を含む第一雰囲気中で約800℃以上の第一温度でアニールするステップと;
該誘電物質を水蒸気を含まない第二雰囲気中で約800℃〜約1400℃の第二温度でアニールするステップと;
を含む、前記方法。 - 該バリヤ層が窒化シリコンを含み、該誘電物質が酸化シリコンを含む、請求項26に記載の方法。
- 該第一温度と第二温度が900℃である、請求項26に記載の方法。
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US11/697,105 US20070212847A1 (en) | 2004-08-04 | 2007-04-05 | Multi-step anneal of thin films for film densification and improved gap-fill |
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EP (1) | EP2027599A1 (ja) |
JP (1) | JP2009533846A (ja) |
KR (1) | KR20090005159A (ja) |
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US20070212847A1 (en) | 2007-09-13 |
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WO2007118196A1 (en) | 2007-10-18 |
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