JP2009239056A - 熱処理装置および処理システム - Google Patents
熱処理装置および処理システム Download PDFInfo
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- JP2009239056A JP2009239056A JP2008083882A JP2008083882A JP2009239056A JP 2009239056 A JP2009239056 A JP 2009239056A JP 2008083882 A JP2008083882 A JP 2008083882A JP 2008083882 A JP2008083882 A JP 2008083882A JP 2009239056 A JP2009239056 A JP 2009239056A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】シリコン基板Wを熱処理する熱処理装置4であって、シリコン基板Wを載置させて加熱する載置台23を備え、載置台23の上面に、シリコン、炭化シリコン、窒化アルミニウムのいずれかからなるカバー35を配置した。載置台23の上面をシリコン等のカバー35で覆うことにより、シリコン基板W下面の金属汚染を抑制する。
【選択図】図4
Description
GAS FREE)処理することも試みた。しかしながら、ウェハ下面の金属汚染を十分に抑制することができなかった。
1 処理システム
4 PHT処理装置
5 COR処理装置
8 制御コンピュータ
20 チャンバー
21 処理空間
23 載置台
26 ガス供給機構
28 排気機構
35 カバー
36 ウェハ昇降機構
40、41 支持ピン
42 凹部
43 ヒータ
Claims (6)
- シリコン基板を熱処理する熱処理装置であって、
シリコン基板を載置させて加熱する載置台を備え、
前記載置台の上面に、シリコン、炭化シリコン、窒化アルミニウムのいずれかからなるカバーを配置したことを特徴とする、熱処理装置。 - 前記カバーは円板形状であり、前記載置台上に載置される円板形状のシリコン基板よりも大きい直径を有することを特徴とする、請求項1に記載の熱処理装置。
- 前記カバーの上面に、シリコン基板の下面を支持する複数の支持ピンが設けられていることを特徴とする、請求項1または2に記載の熱処理装置。
- 前記カバーの下面に、前記載置台の上面に設けられた複数の支持ピンを受容するための凹部が設けられていることを特徴とする、請求項1〜3のいずれかに記載の熱処理装置。
- シリコン基板の上面には、フッ化水素ガスおよびアンモニアガスを含む混合ガスとの化学反応によりシリコン酸化膜を変質させた反応生成物膜が形成されていることを特徴とする、請求項1〜4のいずれかに記載の熱処理装置。
- シリコン基板の上面に形成されたシリコン酸化膜を除去する処理システムであって、
シリコン基板の上面にフッ化水素ガスおよびアンモニアガスを含む混合ガスを供給することにより、シリコン基板の上面に形成されたシリコン酸化膜を反応生成物膜に変質させるCOR処理装置と、請求項1〜5のいずれかに記載の熱処理装置を備えることを特徴とする、処理システム。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008083882A JP5352103B2 (ja) | 2008-03-27 | 2008-03-27 | 熱処理装置および処理システム |
CN200910129357A CN101546699A (zh) | 2008-03-27 | 2009-03-24 | 热处理装置和处理系统 |
US12/409,664 US20090242129A1 (en) | 2008-03-27 | 2009-03-24 | Thermal processing apparatus and processing system |
TW098109965A TWI437660B (zh) | 2008-03-27 | 2009-03-26 | Heat treatment device and processing system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008083882A JP5352103B2 (ja) | 2008-03-27 | 2008-03-27 | 熱処理装置および処理システム |
Publications (3)
Publication Number | Publication Date |
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JP2009239056A true JP2009239056A (ja) | 2009-10-15 |
JP2009239056A5 JP2009239056A5 (ja) | 2011-05-12 |
JP5352103B2 JP5352103B2 (ja) | 2013-11-27 |
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Application Number | Title | Priority Date | Filing Date |
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JP2008083882A Active JP5352103B2 (ja) | 2008-03-27 | 2008-03-27 | 熱処理装置および処理システム |
Country Status (4)
Country | Link |
---|---|
US (1) | US20090242129A1 (ja) |
JP (1) | JP5352103B2 (ja) |
CN (1) | CN101546699A (ja) |
TW (1) | TWI437660B (ja) |
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WO2012063901A1 (ja) * | 2010-11-11 | 2012-05-18 | 東京エレクトロン株式会社 | 半導体装置の製造方法および製造装置 |
JP2015528647A (ja) * | 2012-09-17 | 2015-09-28 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 差異的な酸化ケイ素エッチング |
CN105051871A (zh) * | 2013-03-28 | 2015-11-11 | 芝浦机械电子株式会社 | 放置台及等离子体处理装置 |
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JP5352103B2 (ja) | 2013-11-27 |
US20090242129A1 (en) | 2009-10-01 |
TWI437660B (zh) | 2014-05-11 |
TW201003831A (en) | 2010-01-16 |
CN101546699A (zh) | 2009-09-30 |
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