JPWO2012063901A1 - 半導体装置の製造方法および製造装置 - Google Patents
半導体装置の製造方法および製造装置 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 47
- 239000004065 semiconductor Substances 0.000 title claims abstract description 46
- 238000005530 etching Methods 0.000 claims abstract description 103
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 34
- 150000002367 halogens Chemical class 0.000 claims abstract description 34
- 239000007795 chemical reaction product Substances 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 239000007789 gas Substances 0.000 claims description 151
- 238000012545 processing Methods 0.000 claims description 136
- 238000000034 method Methods 0.000 claims description 53
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 51
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 51
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 33
- 230000007246 mechanism Effects 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000003672 processing method Methods 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- -1 ammonium fluorosilicate Chemical compound 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 184
- 229910052581 Si3N4 Inorganic materials 0.000 description 123
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 123
- 235000012431 wafers Nutrition 0.000 description 98
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 34
- 230000008569 process Effects 0.000 description 31
- 238000012546 transfer Methods 0.000 description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 21
- 229910001873 dinitrogen Inorganic materials 0.000 description 21
- 229910052786 argon Inorganic materials 0.000 description 17
- 238000001020 plasma etching Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 8
- 239000011261 inert gas Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76825—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by exposing the layer to particle radiation, e.g. ion implantation, irradiation with UV light or electrons etc.
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76826—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by contacting the layer with gases, liquids or plasmas
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7843—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being an applied insulating layer
Abstract
Description
1 半導体装置製造装置
4 PHT処理装置
5 エッチング処理装置
8 制御コンピュータ
40 チャンバー
41 処理室
101 ゲート電極
102 サイドウォール
103 トランジスタ
104 SiN膜
105 膜部分
105’反応生成物の膜部分
106 ハロゲン元素を含むガス(フッ化水素ガス)
Claims (9)
- 基板の表面のSiN膜をハロゲン元素を含むガスを用いてエッチングして半導体装置を製造する方法であって、
前記SiN膜の表面にハロゲン元素を含むガスを供給する工程の初期の段階で、塩基性ガスを含むガスを供給する、半導体装置の製造方法。 - 前記SiN膜の表面がSiNO膜によって覆われており、
前記SiNO膜の表面に、前記ハロゲン元素を含むガスと前記塩基性ガスを含むガスとを含む混合ガスが供給されることで、前記SiNO膜が反応生成物の膜に変化させられる、請求項1に記載の半導体装置の製造方法。 - 前記塩基性ガスを含むガスの供給が停止された後、前記反応生成物の膜が前記SiN膜の表面にある状態で、前記ハロゲン元素を含むガスによる前記SiN膜のエッチングが行われる、請求項2に記載の半導体装置の製造方法。
- 基板の表面のSiN膜をハロゲン元素を含むガスを用いてエッチングした後、基板を加熱する工程を有する、請求項1に記載の半導体装置の製造方法。
- 前記基板を加熱する工程において、基板の温度が90℃以上にされる、請求項4に記載の基板処理方法。
- 前記ハロゲン元素を含むガスはフッ化水素ガスを含む、請求項1に記載の半導体装置の製造方法。
- 前記塩基性ガスを含むガスはアンモニアガスを含む、請求項1に記載の半導体装置の製造方法。
- SiN膜は、基板の表面のトランジスタが形成された領域にストレスを与える応力膜である、請求項1に記載の半導体装置の製造方法。
- 処理室内に収納した基板表面のSiN膜をエッチングして半導体装置を製造する装置であって、
前記処理室内にハロゲン元素を含むガスと塩基性ガスを供給するガス供給機構と、前記ガス供給機構を制御する制御部を有し、
前記制御部の制御により、前記処理室内において、前記SiN膜の表面にハロゲン元素を含むガスを供給する初期の段階で、塩基性ガスを含むガスを供給する工程が行われることを特徴とする、半導体装置製造装置。
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JP2012542975A JP5881612B2 (ja) | 2010-11-11 | 2011-11-10 | 半導体装置の製造方法および製造装置 |
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PCT/JP2011/075942 WO2012063901A1 (ja) | 2010-11-11 | 2011-11-10 | 半導体装置の製造方法および製造装置 |
JP2012542975A JP5881612B2 (ja) | 2010-11-11 | 2011-11-10 | 半導体装置の製造方法および製造装置 |
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US (1) | US8828880B2 (ja) |
JP (1) | JP5881612B2 (ja) |
KR (1) | KR101678266B1 (ja) |
TW (1) | TWI496203B (ja) |
WO (1) | WO2012063901A1 (ja) |
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JP6161972B2 (ja) | 2013-06-25 | 2017-07-12 | 東京エレクトロン株式会社 | エッチング方法及び記録媒体 |
JP6176234B2 (ja) | 2014-12-26 | 2017-08-09 | トヨタ自動車株式会社 | 金属皮膜の成膜装置およびその成膜方法 |
JP6812284B2 (ja) * | 2017-03-28 | 2021-01-13 | 東京エレクトロン株式会社 | エッチング方法及び記録媒体 |
WO2019083735A1 (en) * | 2017-10-23 | 2019-05-02 | Lam Research Ag | SYSTEMS AND METHODS FOR PREVENTING THE STATIC FRICTION OF HIGH-SHAPE RATIO STRUCTURES AND / OR REPAIRING HIGH-SHAPE RATIO STRUCTURES |
CN111954923A (zh) * | 2018-03-23 | 2020-11-17 | 东京毅力科创株式会社 | 加热处理装置和加热处理方法 |
JP7414593B2 (ja) | 2020-03-10 | 2024-01-16 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
JP2021153141A (ja) * | 2020-03-24 | 2021-09-30 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
US20240035196A1 (en) * | 2022-07-26 | 2024-02-01 | Applied Materials, Inc. | Method of selective etching of dielectric materials |
Citations (4)
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JPH02256235A (ja) * | 1988-12-27 | 1990-10-17 | Toshiba Corp | 表面処理方法 |
JP2009158774A (ja) * | 2007-12-27 | 2009-07-16 | Tokyo Electron Ltd | 基板処理方法、基板処理装置及び記憶媒体 |
JP2009239056A (ja) * | 2008-03-27 | 2009-10-15 | Tokyo Electron Ltd | 熱処理装置および処理システム |
JP2010182730A (ja) * | 2009-02-03 | 2010-08-19 | Tokyo Electron Ltd | 窒化珪素膜のドライエッチング方法 |
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JP4933763B2 (ja) * | 2005-02-18 | 2012-05-16 | 東京エレクトロン株式会社 | 固体撮像素子の製造方法、薄膜デバイスの製造方法及びプログラム |
JP2008288364A (ja) | 2007-05-17 | 2008-11-27 | Sony Corp | 半導体装置および半導体装置の製造方法 |
US8252696B2 (en) * | 2007-10-22 | 2012-08-28 | Applied Materials, Inc. | Selective etching of silicon nitride |
JP4968861B2 (ja) * | 2009-03-19 | 2012-07-04 | 東京エレクトロン株式会社 | 基板のエッチング方法及びシステム |
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- 2011-11-10 WO PCT/JP2011/075942 patent/WO2012063901A1/ja active Application Filing
- 2011-11-11 TW TW100141334A patent/TWI496203B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02256235A (ja) * | 1988-12-27 | 1990-10-17 | Toshiba Corp | 表面処理方法 |
JP2009158774A (ja) * | 2007-12-27 | 2009-07-16 | Tokyo Electron Ltd | 基板処理方法、基板処理装置及び記憶媒体 |
JP2009239056A (ja) * | 2008-03-27 | 2009-10-15 | Tokyo Electron Ltd | 熱処理装置および処理システム |
JP2010182730A (ja) * | 2009-02-03 | 2010-08-19 | Tokyo Electron Ltd | 窒化珪素膜のドライエッチング方法 |
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JP5881612B2 (ja) | 2016-03-09 |
TWI496203B (zh) | 2015-08-11 |
KR20130141566A (ko) | 2013-12-26 |
TW201230180A (en) | 2012-07-16 |
KR101678266B1 (ko) | 2016-11-21 |
WO2012063901A1 (ja) | 2012-05-18 |
US8828880B2 (en) | 2014-09-09 |
US20130237061A1 (en) | 2013-09-12 |
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