JP2009514214A5 - - Google Patents
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- Publication number
- JP2009514214A5 JP2009514214A5 JP2008537740A JP2008537740A JP2009514214A5 JP 2009514214 A5 JP2009514214 A5 JP 2009514214A5 JP 2008537740 A JP2008537740 A JP 2008537740A JP 2008537740 A JP2008537740 A JP 2008537740A JP 2009514214 A5 JP2009514214 A5 JP 2009514214A5
- Authority
- JP
- Japan
- Prior art keywords
- transistor
- pull
- active region
- bit cell
- vertical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims 7
- 238000000034 method Methods 0.000 claims 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 230000000873 masking effect Effects 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/257,972 US7452768B2 (en) | 2005-10-25 | 2005-10-25 | Multiple device types including an inverted-T channel transistor and method therefor |
| US11/257,972 | 2005-10-25 | ||
| PCT/US2006/039651 WO2007050288A2 (en) | 2005-10-25 | 2006-10-10 | Multiple device types including an inverted-t channel transistor and method therefor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009514214A JP2009514214A (ja) | 2009-04-02 |
| JP2009514214A5 true JP2009514214A5 (https=) | 2009-11-26 |
| JP5283507B2 JP5283507B2 (ja) | 2013-09-04 |
Family
ID=37968335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008537740A Active JP5283507B2 (ja) | 2005-10-25 | 2006-10-10 | 逆t字チャネル型トランジスタを含む複数の型のデバイス、及びその製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US7452768B2 (https=) |
| EP (1) | EP1943671A4 (https=) |
| JP (1) | JP5283507B2 (https=) |
| KR (1) | KR101313473B1 (https=) |
| TW (1) | TWI420603B (https=) |
| WO (1) | WO2007050288A2 (https=) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070166971A1 (en) * | 2006-01-17 | 2007-07-19 | Atmel Corporation | Manufacturing of silicon structures smaller than optical resolution limits |
| US20070166903A1 (en) * | 2006-01-17 | 2007-07-19 | Bohumil Lojek | Semiconductor structures formed by stepperless manufacturing |
| KR101108711B1 (ko) * | 2007-08-23 | 2012-01-30 | 삼성전자주식회사 | 액티브 패턴 구조물 및 그 형성 방법, 비휘발성 메모리소자 및 그 제조 방법. |
| US8158484B2 (en) * | 2007-10-03 | 2012-04-17 | Freescale Semiconductor, Inc. | Method of forming an inverted T shaped channel structure for an inverted T channel field effect transistor device |
| US7820512B2 (en) * | 2007-12-28 | 2010-10-26 | Intel Corporation | Spacer patterned augmentation of tri-gate transistor gate length |
| US9245805B2 (en) | 2009-09-24 | 2016-01-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Germanium FinFETs with metal gates and stressors |
| US20110291188A1 (en) * | 2010-05-25 | 2011-12-01 | International Business Machines Corporation | Strained finfet |
| US8987831B2 (en) | 2012-01-12 | 2015-03-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | SRAM cells and arrays |
| CN103367432B (zh) * | 2012-03-31 | 2016-02-03 | 中芯国际集成电路制造(上海)有限公司 | 多栅极场效应晶体管及其制造方法 |
| US9583398B2 (en) | 2012-06-29 | 2017-02-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit having FinFETS with different fin profiles |
| JP2015053477A (ja) * | 2013-08-05 | 2015-03-19 | 株式会社半導体エネルギー研究所 | 半導体装置および半導体装置の作製方法 |
| US9373550B2 (en) | 2014-04-23 | 2016-06-21 | International Business Machines Corporation | Selectively degrading current resistance of field effect transistor devices |
| US9391065B1 (en) | 2015-06-29 | 2016-07-12 | Globalfoundries Inc. | Electrostatic discharge and passive structures integrated in a vertical gate fin-type field effect diode |
| US9893171B2 (en) | 2016-06-03 | 2018-02-13 | International Business Machines Corporation | Fin field effect transistor fabrication and devices having inverted T-shaped gate |
| US10396075B2 (en) * | 2017-05-01 | 2019-08-27 | International Business Machines Corporation | Very narrow aspect ratio trapping trench structure with smooth trench sidewalls |
| US10741566B2 (en) | 2018-06-26 | 2020-08-11 | Micron Technology, Inc. | Integrated arrangements of pull-up transistors and pull-down transistors, and integrated static memory |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5738731A (en) * | 1993-11-19 | 1998-04-14 | Mega Chips Corporation | Photovoltaic device |
| JP2571004B2 (ja) * | 1993-12-22 | 1997-01-16 | 日本電気株式会社 | 薄膜トランジスタ |
| JPH0878537A (ja) * | 1994-09-02 | 1996-03-22 | Fujitsu Ltd | スタティック型半導体記憶装置 |
| KR0144165B1 (ko) | 1995-05-12 | 1998-07-01 | 문정환 | 인버스 티(t)형 트랜지스터의 개선된 제조방법 |
| US6140684A (en) * | 1997-06-24 | 2000-10-31 | Stmicroelectronic, Inc. | SRAM cell structure with dielectric sidewall spacers and drain and channel regions defined along sidewall spacers |
| US6034417A (en) | 1998-05-08 | 2000-03-07 | Micron Technology, Inc. | Semiconductor structure having more usable substrate area and method for forming same |
| US20020036347A1 (en) | 1998-10-28 | 2002-03-28 | Theodore W Houston | Local interconnect structures and methods |
| US6630712B2 (en) * | 1999-08-11 | 2003-10-07 | Advanced Micro Devices, Inc. | Transistor with dynamic source/drain extensions |
| US6252284B1 (en) * | 1999-12-09 | 2001-06-26 | International Business Machines Corporation | Planarized silicon fin device |
| US6413802B1 (en) * | 2000-10-23 | 2002-07-02 | The Regents Of The University Of California | Finfet transistor structures having a double gate channel extending vertically from a substrate and methods of manufacture |
| US6475890B1 (en) | 2001-02-12 | 2002-11-05 | Advanced Micro Devices, Inc. | Fabrication of a field effect transistor with an upside down T-shaped semiconductor pillar in SOI technology |
| JP2003229575A (ja) * | 2002-02-04 | 2003-08-15 | Hitachi Ltd | 集積半導体装置及びその製造方法 |
| US20040059703A1 (en) | 2002-09-23 | 2004-03-25 | Jerry Chappell | Cascading behavior of package generation/installation based on variable parameters |
| US6864519B2 (en) * | 2002-11-26 | 2005-03-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | CMOS SRAM cell configured using multiple-gate transistors |
| CN100351994C (zh) * | 2002-12-19 | 2007-11-28 | 国际商业机器公司 | 使用反向FinFET薄膜晶体管的FinFET SRAM单元 |
| JP2004214413A (ja) | 2002-12-27 | 2004-07-29 | Toshiba Corp | 半導体装置 |
| JP2005005465A (ja) | 2003-06-11 | 2005-01-06 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
| US6867433B2 (en) * | 2003-04-30 | 2005-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor-on-insulator chip incorporating strained-channel partially-depleted, fully-depleted, and multiple-gate transistors |
| US6909147B2 (en) * | 2003-05-05 | 2005-06-21 | International Business Machines Corporation | Multi-height FinFETS |
| US7192876B2 (en) * | 2003-05-22 | 2007-03-20 | Freescale Semiconductor, Inc. | Transistor with independent gate structures |
| US7301206B2 (en) | 2003-08-01 | 2007-11-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor-on-insulator SRAM configured using partially-depleted and fully-depleted transistors |
| KR100496891B1 (ko) | 2003-08-14 | 2005-06-23 | 삼성전자주식회사 | 핀 전계효과 트랜지스터를 위한 실리콘 핀 및 그 제조 방법 |
| JP4904815B2 (ja) * | 2003-10-09 | 2012-03-28 | 日本電気株式会社 | 半導体装置及びその製造方法 |
| KR100935988B1 (ko) | 2003-12-08 | 2010-01-08 | 인터내셔널 비지네스 머신즈 코포레이션 | 증가된 노드 커패시턴스를 갖는 반도체 메모리 장치 |
| US7388258B2 (en) * | 2003-12-10 | 2008-06-17 | International Business Machines Corporation | Sectional field effect devices |
| US7385247B2 (en) | 2004-01-17 | 2008-06-10 | Samsung Electronics Co., Ltd. | At least penta-sided-channel type of FinFET transistor |
| US7060539B2 (en) | 2004-03-01 | 2006-06-13 | International Business Machines Corporation | Method of manufacture of FinFET devices with T-shaped fins and devices manufactured thereby |
| WO2005094254A2 (en) | 2004-03-17 | 2005-10-13 | The Board Of Trustees Of The Leland Stanford Junior University | Crystalline-type device and approach therefor |
| KR100549008B1 (ko) | 2004-03-17 | 2006-02-02 | 삼성전자주식회사 | 등방성식각 기술을 사용하여 핀 전계효과 트랜지스터를제조하는 방법 |
| KR100541054B1 (ko) | 2004-03-23 | 2006-01-11 | 삼성전자주식회사 | 하드마스크 스페이서를 채택하여 3차원 모오스 전계효과트랜지스터를 제조하는 방법 |
| US7098477B2 (en) | 2004-04-23 | 2006-08-29 | International Business Machines Corporation | Structure and method of manufacturing a finFET device having stacked fins |
| US7122412B2 (en) | 2004-04-30 | 2006-10-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of fabricating a necked FINFET device |
| US6972461B1 (en) * | 2004-06-30 | 2005-12-06 | International Business Machines Corporation | Channel MOSFET with strained silicon channel on strained SiGe |
| US7193279B2 (en) | 2005-01-18 | 2007-03-20 | Intel Corporation | Non-planar MOS structure with a strained channel region |
| US7589387B2 (en) | 2005-10-05 | 2009-09-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | SONOS type two-bit FinFET flash memory cell |
| KR100653711B1 (ko) | 2005-11-14 | 2006-12-05 | 삼성전자주식회사 | 쇼트키 배리어 핀 펫 소자 및 그 제조방법 |
| US7564081B2 (en) | 2005-11-30 | 2009-07-21 | International Business Machines Corporation | finFET structure with multiply stressed gate electrode |
-
2005
- 2005-10-25 US US11/257,972 patent/US7452768B2/en not_active Expired - Lifetime
-
2006
- 2006-10-10 EP EP06816683A patent/EP1943671A4/en not_active Withdrawn
- 2006-10-10 JP JP2008537740A patent/JP5283507B2/ja active Active
- 2006-10-10 WO PCT/US2006/039651 patent/WO2007050288A2/en not_active Ceased
- 2006-10-10 KR KR1020087009819A patent/KR101313473B1/ko not_active Expired - Fee Related
- 2006-10-16 TW TW095138069A patent/TWI420603B/zh not_active IP Right Cessation
-
2008
- 2008-10-15 US US12/251,746 patent/US8643066B2/en active Active
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