JP2009507743A5 - - Google Patents

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Publication number
JP2009507743A5
JP2009507743A5 JP2008531285A JP2008531285A JP2009507743A5 JP 2009507743 A5 JP2009507743 A5 JP 2009507743A5 JP 2008531285 A JP2008531285 A JP 2008531285A JP 2008531285 A JP2008531285 A JP 2008531285A JP 2009507743 A5 JP2009507743 A5 JP 2009507743A5
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JP
Japan
Prior art keywords
conveyor
substrate carrier
cradle
assembly
destination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008531285A
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English (en)
Japanese (ja)
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JP2009507743A (ja
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Priority claimed from PCT/US2006/035688 external-priority patent/WO2007033257A2/en
Publication of JP2009507743A publication Critical patent/JP2009507743A/ja
Publication of JP2009507743A5 publication Critical patent/JP2009507743A5/ja
Withdrawn legal-status Critical Current

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JP2008531285A 2005-09-14 2006-09-14 バンド間搬送モジュール用の方法及び装置 Withdrawn JP2009507743A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US71715005P 2005-09-14 2005-09-14
US71733505P 2005-09-14 2005-09-14
US71733605P 2005-09-14 2005-09-14
PCT/US2006/035688 WO2007033257A2 (en) 2005-09-14 2006-09-14 Methods and apparatus for a band to band transfer module

Publications (2)

Publication Number Publication Date
JP2009507743A JP2009507743A (ja) 2009-02-26
JP2009507743A5 true JP2009507743A5 (enExample) 2009-11-05

Family

ID=37865553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008531285A Withdrawn JP2009507743A (ja) 2005-09-14 2006-09-14 バンド間搬送モジュール用の方法及び装置

Country Status (6)

Country Link
US (3) US7577487B2 (enExample)
JP (1) JP2009507743A (enExample)
KR (1) KR100932812B1 (enExample)
CN (3) CN100481365C (enExample)
TW (3) TW200716466A (enExample)
WO (3) WO2007033249A2 (enExample)

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