JP2009505379A - 半導体素子及び形成方法 - Google Patents
半導体素子及び形成方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 57
- 239000004065 semiconductor Substances 0.000 title claims abstract description 39
- 230000015572 biosynthetic process Effects 0.000 title description 5
- 239000012535 impurity Substances 0.000 claims abstract description 153
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 238000005468 ion implantation Methods 0.000 claims abstract description 40
- 238000002513 implantation Methods 0.000 claims abstract description 33
- 125000001475 halogen functional group Chemical group 0.000 claims abstract description 28
- 230000008569 process Effects 0.000 claims abstract description 22
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052796 boron Inorganic materials 0.000 claims description 31
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 28
- 150000002500 ions Chemical class 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 21
- 238000002347 injection Methods 0.000 claims description 15
- 239000007924 injection Substances 0.000 claims description 15
- 229910052698 phosphorus Inorganic materials 0.000 claims description 13
- 239000011574 phosphorus Substances 0.000 claims description 13
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 229910052785 arsenic Inorganic materials 0.000 claims description 11
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 10
- 229910052732 germanium Inorganic materials 0.000 claims description 9
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 239000007943 implant Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- -1 halo ion Chemical class 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 238000004151 rapid thermal annealing Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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Abstract
Description
Claims (20)
- 半導体基板を備える半導体素子の製造方法において、
前記基板のある領域に不純物をドープして第1不純物ウェルを形成する工程と、
前記第1不純物ウェルの一部分の内部のある領域に不純物をドープして第2不純物ウェルを形成する工程と、
ゲート電極を基板の表面の上に、かつゲート誘電体がゲート電極と基板との間に形成されるように形成する工程と、
前記第2不純物ウェルに、前記シリコン基板の前記表面に直交する軸に対してゼロよりも大きい角度にて不純物イオンを選択的に注入することによって、ハロイオン注入領域を、前記ゲート電極に自己整合し、かつ前記基板のソース側に位置するように形成する工程と、
前記第1不純物ウェルのある領域に不純物をドープして低濃度ドープドレイン(LDD)注入領域を、前記ゲート電極に自己整合し、かつ前記基板のドレイン側に位置するように形成する工程と、
前記ハロイオン注入領域のある領域に不純物をドープする工程と、
前記低濃度ドープドレイン(LDD)注入領域のある領域に不純物をドープする工程とからなる、半導体素子の製造方法。 - 前記基板のある領域に不純物をドープする工程は、ゲルマニウム(Ge)、砒素(As)、リン(P)、及びボロン(B)から成るグループから選択される材料を含むイオンを注入する工程を含む、請求項1記載の方法。
- 不純物イオンを前記第2不純物ウェルに選択的に注入する工程は、ゲルマニウム(Ge)、砒素(As)、リン(P)、及びボロン(B)から成るグループから選択される材料を含むイオンを注入する工程を含む、請求項1記載の方法。
- 前記基板のある領域に不純物をドープして第1不純物ウェルを形成する工程は、ボロンを1×1015/cm3の注入濃度で注入する工程を含む、請求項1記載の方法。
- 前記第1不純物ウェルの一部分の内部のある領域に不純物をドープして第2不純物ウェルを形成する工程は、ボロンを15KeV〜500KeVのエネルギーで、かつ1×1017/cm3〜2×1018/cm3の範囲の注入濃度でチェーン注入する工程を含む、請求項1記載の方法。
- 不純物イオンを前記第2不純物ウェルに選択的に注入する工程は、ボロンを30KeVのエネルギーで、かつ5×1018/cm3〜6×1018/cm3の範囲の注入濃度で注入する工程を含む、請求項1記載の方法。
- 前記第1不純物ウェルのある領域に不純物をドープして低濃度ドープドレイン(LDD)注入領域を形成する工程は、ボロンを30KeVのエネルギーで、かつ1×1018/cm3〜5×1018/cm3の範囲の注入濃度で注入する工程を含む、請求項1記載の方法。
- 前記ハロイオン注入領域のある領域に不純物をドープする工程ではソース領域を形成し、及び、不純物ドープ領域を前記低濃度ドープドレイン(LDD)注入領域に形成する前記工程では、ドレイン領域を形成する、請求項1記載の方法。
- 半導体基板を備えた半導体素子の製造方法において、
ドーピング材料を堆積させて不純物エピタキシャル層を前記基板の前記表面に形成する工程と、
不純物ドープ領域を前記不純物エピタキシャル層に不純物を注入することにより形成して不純物ウェルを形成する工程と、
ゲート電極を基板の表面の上に、かつゲート誘電体がゲート電極と基板との間に形成されるように形成する工程と、
前記不純物ウェルに、前記シリコン基板の前記表面に直交する軸に対してゼロよりも大きい角度にて、不純物イオンを選択的に注入することによって、前記不純物イオンがハロイオン注入領域を、前記ゲート電極に自己整合し、かつ前記基板のソース側に位置するように形成する工程と、
不純物ドープ領域を前記不純物エピタキシャル層に不純物を注入することにより形成して、低濃度ドープドレイン(LDD)注入領域を前記ゲート電極に自己整合し、かつ前記基板のドレイン側に位置するように形成する工程と、
絶縁スペーサを前記ゲート電極の周りに形成する工程と、
ソース領域を前記ハロイオン注入領域に不純物を注入することにより形成する工程と、
ドレイン領域を前記低濃度ドープドレイン(LDD)注入領域に不純物を注入することにより形成する工程とからなる、半導体素子の製造方法。 - 不純物イオンを前記不純物ウェルに選択的に注入する工程は、ゲルマニウム(Ge)、砒素(As)、リン(P)、及びボロン(B)から成るグループから選択される材料を含むイオンを注入する工程を含む、請求項9記載の方法。
- ドーピング材料を堆積させて不純物エピタキシャル層を形成する工程は、2×1014/cm3〜2×1015/cm3の濃度のボロンを気相成長中にドーピングする工程を含む、請求項9記載の方法。
- 不純物ドープ領域を前記不純物エピタキシャル層に不純物を注入することにより形成して不純物ウェルを形成する工程は、ボロンを30KeVのエネルギーで、かつ1×1017/cm3〜2×1018/cm3の範囲の注入濃度で注入する工程を含む、請求項9記載の方法。
- 不純物イオンを前記不純物ウェルに選択的に注入する工程は、ボロンを30KeVのエネルギーで、かつ5×1018/cm3〜6×1018/cm3の範囲の注入濃度で注入する工程を含む、請求項9記載の方法。
- 不純物ドープ領域を前記不純物エピタキシャル層に不純物を注入することにより形成して低濃度ドープドレイン(LDD)注入領域を形成する工程は、ボロンを30KeVのエネルギーで、かつ1×1018/cm3〜5×1018/cm3の範囲の注入濃度で注入する工程を含む、請求項9記載の方法。
- 半導体基板を備える半導体素子において、
前記基板の1つの表面に形成される不純物エピタキシャル層と、
前記不純物エピタキシャル層の上に設けられるゲート電極と、
前記不純物エピタキシャル層の内部に設けられ、かつ一部が前記ゲート電極の位置から離れてオフセットに設けられた第1不純物ドープ領域と、
前記第1不純物ドープ領域の内部に設けられる第2不純物ドープ領域と、
前記不純物エピタキシャル層の内部に配置され、かつ一部が前記ゲート電極の位置から離れてオフセットに設けられた第3不純物ドープ領域と、
前記第2不純物ドープ領域に形成されるソース領域と、
前記第3不純物ドープ領域に形成されるドレイン領域とからなる、半導体素子。 - 不純物エピタキシャル層は2×1015/cm3の不純物濃度を有する、請求項15記載の半導体素子。
- 第1不純物ドープ領域は、不純物エピタキシャル層に形成されるウェル領域であり、かつ1×1017/cm3〜8×1017/cm3の範囲の不純物濃度を有する、請求項15記載の半導体素子。
- 第2不純物ドープ領域はハロイオン注入領域であり、かつ5×1018/cm3〜6×1018/cm3の範囲の不純物濃度を有する、請求項15記載の半導体素子。
- 第3不純物ドープ領域はゲートオーバーラップ低濃度ドレイン(GOLD)であり、かつ1×1018/cm3〜5×1018/cm3の範囲の不純物濃度を有する、請求項15記載の半導体素子。
- ゲルマニウム(Ge)、砒素(As)、リン(P)、及びボロン(B)から成るグループから選択されるドーピング材料は、不純物エピタキシャル層、第1不純物ドープ領域、第2不純物ドープ領域、第3不純物ドープ領域、ソース領域、及びドレイン領域を形成する不純物となる、請求項15記載の半導体素子。
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US7649234B2 (en) | 2010-01-19 |
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