JP2009255289A5 - - Google Patents

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Publication number
JP2009255289A5
JP2009255289A5 JP2009145693A JP2009145693A JP2009255289A5 JP 2009255289 A5 JP2009255289 A5 JP 2009255289A5 JP 2009145693 A JP2009145693 A JP 2009145693A JP 2009145693 A JP2009145693 A JP 2009145693A JP 2009255289 A5 JP2009255289 A5 JP 2009255289A5
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JP
Japan
Prior art keywords
chamber
flap
carrier head
flexible
annular
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Granted
Application number
JP2009145693A
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English (en)
Japanese (ja)
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JP2009255289A (ja
JP5073714B2 (ja
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Priority claimed from US08/891,548 external-priority patent/US5964653A/en
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Publication of JP2009255289A publication Critical patent/JP2009255289A/ja
Publication of JP2009255289A5 publication Critical patent/JP2009255289A5/ja
Application granted granted Critical
Publication of JP5073714B2 publication Critical patent/JP5073714B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2009145693A 1997-07-11 2009-06-18 可撓膜を有するケミカルメカニカルポリシングシステム用キャリアヘット Expired - Lifetime JP5073714B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/891,548 US5964653A (en) 1997-07-11 1997-07-11 Carrier head with a flexible membrane for a chemical mechanical polishing system
US08/891,548 1997-07-11

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000501870A Division JP4413421B2 (ja) 1997-07-11 1998-07-10 可撓膜を有するケミカルメカニカルポリシングシステム用キャリヤヘッド

Publications (3)

Publication Number Publication Date
JP2009255289A JP2009255289A (ja) 2009-11-05
JP2009255289A5 true JP2009255289A5 (enExample) 2010-01-07
JP5073714B2 JP5073714B2 (ja) 2012-11-14

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ID=25398390

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000501870A Expired - Lifetime JP4413421B2 (ja) 1997-07-11 1998-07-10 可撓膜を有するケミカルメカニカルポリシングシステム用キャリヤヘッド
JP2009145693A Expired - Lifetime JP5073714B2 (ja) 1997-07-11 2009-06-18 可撓膜を有するケミカルメカニカルポリシングシステム用キャリアヘット

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2000501870A Expired - Lifetime JP4413421B2 (ja) 1997-07-11 1998-07-10 可撓膜を有するケミカルメカニカルポリシングシステム用キャリヤヘッド

Country Status (5)

Country Link
US (7) US5964653A (enExample)
JP (2) JP4413421B2 (enExample)
KR (1) KR100513573B1 (enExample)
TW (1) TW379380B (enExample)
WO (1) WO1999002304A1 (enExample)

Families Citing this family (166)

* Cited by examiner, † Cited by third party
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