JP2009133003A5 - - Google Patents

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Publication number
JP2009133003A5
JP2009133003A5 JP2008279957A JP2008279957A JP2009133003A5 JP 2009133003 A5 JP2009133003 A5 JP 2009133003A5 JP 2008279957 A JP2008279957 A JP 2008279957A JP 2008279957 A JP2008279957 A JP 2008279957A JP 2009133003 A5 JP2009133003 A5 JP 2009133003A5
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Japan
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antimony
germanium
containing precursor
telluride
film
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JP2008279957A
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Japanese (ja)
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JP2009133003A (ja
JP5650880B2 (ja
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Publication of JP2009133003A5 publication Critical patent/JP2009133003A5/ja
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JP2008279957A 2007-10-31 2008-10-30 非晶質Ｇｅ／Ｔｅ蒸着方法 Expired - Fee Related JP5650880B2 (ja)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US98437007P 2007-10-31 2007-10-31
US60/984,370 2007-10-31
US5017908P 2008-05-02 2008-05-02
US61/050,179 2008-05-02
US5127408P 2008-05-07 2008-05-07
US61/051,274 2008-05-07
US5201808P 2008-05-09 2008-05-09
US61/052,018 2008-05-09
US7642808P 2008-06-27 2008-06-27
US61/076,428 2008-06-27

Publications (3)

Publication Number Publication Date
JP2009133003A JP2009133003A (ja) 2009-06-18
JP2009133003A5 true JP2009133003A5 (enExample) 2011-12-15
JP5650880B2 JP5650880B2 (ja) 2015-01-07

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JP2008279957A Expired - Fee Related JP5650880B2 (ja) 2007-10-31 2008-10-30 非晶質Ｇｅ／Ｔｅ蒸着方法

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US (2) US8093140B2 (enExample)
EP (2) EP2479313A1 (enExample)
JP (1) JP5650880B2 (enExample)
KR (1) KR101065829B1 (enExample)
CN (2) CN101423929B (enExample)
SG (2) SG178736A1 (enExample)
TW (1) TWI477641B (enExample)

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