JP2009120946A5 - - Google Patents

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Publication number
JP2009120946A5
JP2009120946A5 JP2008271476A JP2008271476A JP2009120946A5 JP 2009120946 A5 JP2009120946 A5 JP 2009120946A5 JP 2008271476 A JP2008271476 A JP 2008271476A JP 2008271476 A JP2008271476 A JP 2008271476A JP 2009120946 A5 JP2009120946 A5 JP 2009120946A5
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JP
Japan
Prior art keywords
shadow mask
substrate
deposition
region
light
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
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JP2008271476A
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English (en)
Japanese (ja)
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JP2009120946A (ja
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Priority to JP2008271476A priority Critical patent/JP2009120946A/ja
Priority claimed from JP2008271476A external-priority patent/JP2009120946A/ja
Publication of JP2009120946A publication Critical patent/JP2009120946A/ja
Publication of JP2009120946A5 publication Critical patent/JP2009120946A5/ja
Withdrawn legal-status Critical Current

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JP2008271476A 2007-10-23 2008-10-22 成膜方法および発光装置の作製方法 Withdrawn JP2009120946A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008271476A JP2009120946A (ja) 2007-10-23 2008-10-22 成膜方法および発光装置の作製方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007274900 2007-10-23
JP2008271476A JP2009120946A (ja) 2007-10-23 2008-10-22 成膜方法および発光装置の作製方法

Publications (2)

Publication Number Publication Date
JP2009120946A JP2009120946A (ja) 2009-06-04
JP2009120946A5 true JP2009120946A5 (https=) 2011-11-10

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JP2008271476A Withdrawn JP2009120946A (ja) 2007-10-23 2008-10-22 成膜方法および発光装置の作製方法

Country Status (5)

Country Link
US (1) US20090104721A1 (https=)
JP (1) JP2009120946A (https=)
KR (1) KR20090041316A (https=)
CN (1) CN101691652A (https=)
TW (1) TWI500787B (https=)

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WO2012053532A1 (ja) * 2010-10-20 2012-04-26 株式会社アルバック 有機膜形成装置及び有機膜形成方法
CN104862669B (zh) * 2010-12-16 2018-05-22 潘重光 任意尺寸底板及显示屏的气相沉积荫罩板系统及其方法
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EP2781296B1 (de) * 2013-03-21 2020-10-21 Corning Laser Technologies GmbH Vorrichtung und verfahren zum ausschneiden von konturen aus flächigen substraten mittels laser
KR20150007740A (ko) * 2013-07-12 2015-01-21 삼성디스플레이 주식회사 전사용 도너 기판 및 유기 발광 표시 장치의 제조 방법
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US10293436B2 (en) 2013-12-17 2019-05-21 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
JP6475251B2 (ja) * 2013-12-31 2019-02-27 昆山工研院新型平板顕示技術中心有限公司Kunshan New Flat Panel Display Technology Center Co., Ltd. 有機発光表示装置及び視野角特性を改善したトップエミッション型oled装置
WO2015138226A1 (en) * 2014-03-12 2015-09-17 Advantech Global, Ltd Small mask tiling for larger area depositions
TWI730945B (zh) 2014-07-08 2021-06-21 美商康寧公司 用於雷射處理材料的方法與設備
KR20170028943A (ko) 2014-07-14 2017-03-14 코닝 인코포레이티드 조정가능한 레이저 빔 촛점 라인을 사용하여 투명한 재료를 처리하는 방법 및 시스템
KR102181239B1 (ko) 2014-09-03 2020-11-23 삼성디스플레이 주식회사 박막 형성 장치 및 그를 이용한 박막 형성 방법
CN105679967B (zh) * 2014-11-18 2018-06-26 昆山国显光电有限公司 掩膜板、制备有机发光显示装置的方法
CN104362170B (zh) * 2014-11-28 2017-04-12 京东方科技集团股份有限公司 一种有机电致发光显示器件、其驱动方法及相关装置
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CN104911548B (zh) * 2015-06-30 2017-05-03 合肥鑫晟光电科技有限公司 一种真空蒸镀装置及蒸镀方法
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