JP2009026750A5 - - Google Patents

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Publication number
JP2009026750A5
JP2009026750A5 JP2008158789A JP2008158789A JP2009026750A5 JP 2009026750 A5 JP2009026750 A5 JP 2009026750A5 JP 2008158789 A JP2008158789 A JP 2008158789A JP 2008158789 A JP2008158789 A JP 2008158789A JP 2009026750 A5 JP2009026750 A5 JP 2009026750A5
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JP
Japan
Prior art keywords
charged particle
particle beam
scintillator
sample
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008158789A
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English (en)
Japanese (ja)
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JP2009026750A (ja
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Publication date
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Publication of JP2009026750A publication Critical patent/JP2009026750A/ja
Publication of JP2009026750A5 publication Critical patent/JP2009026750A5/ja
Pending legal-status Critical Current

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JP2008158789A 2007-06-18 2008-06-18 チャンバ内電子検出器 Pending JP2009026750A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US94479207P 2007-06-18 2007-06-18

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014086925A Division JP2014132598A (ja) 2007-06-18 2014-04-18 チャンバ内電子検出器

Publications (2)

Publication Number Publication Date
JP2009026750A JP2009026750A (ja) 2009-02-05
JP2009026750A5 true JP2009026750A5 (enExample) 2011-08-04

Family

ID=39671425

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008158789A Pending JP2009026750A (ja) 2007-06-18 2008-06-18 チャンバ内電子検出器
JP2014086925A Pending JP2014132598A (ja) 2007-06-18 2014-04-18 チャンバ内電子検出器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014086925A Pending JP2014132598A (ja) 2007-06-18 2014-04-18 チャンバ内電子検出器

Country Status (3)

Country Link
US (2) US8164059B2 (enExample)
EP (1) EP2006881A3 (enExample)
JP (2) JP2009026750A (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5758577B2 (ja) * 2007-02-06 2015-08-05 エフ・イ−・アイ・カンパニー 高圧荷電粒子ビーム・システム
EP2006881A3 (en) * 2007-06-18 2010-01-06 FEI Company In-chamber electron detector
US7847268B2 (en) * 2008-05-30 2010-12-07 El-Mul Technologies, Ltd. Three modes particle detector
WO2010132124A1 (en) * 2009-05-15 2010-11-18 Aspex Corporation Electron microscope with integrated detector(s)
DE102010001346B4 (de) * 2010-01-28 2014-05-08 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät und Verfahren zum Betreiben eines Teilchenstrahlgeräts
JP5801891B2 (ja) * 2010-07-30 2015-10-28 パルセータ, エルエルシーPulsetor, Llc 電子イメージングを用いて試料の画像を作成する荷電粒子線装置及び方法
US9679741B2 (en) 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
JP2012138324A (ja) * 2010-12-28 2012-07-19 Topcon Corp 二次電子検出器、及び荷電粒子ビーム装置
EP2739958B1 (en) 2011-08-05 2016-01-20 Pulsetor, LLC Electron detector including one or more intimately-coupled scintillator-photomultiplier combinations, and electron microscope employing same
US8770037B2 (en) * 2011-10-14 2014-07-08 Chrysler Group Llc System and method for structure stiffness determination
JP6014688B2 (ja) * 2013-01-31 2016-10-25 株式会社日立ハイテクノロジーズ 複合荷電粒子線装置
JP6271189B2 (ja) * 2013-09-02 2018-01-31 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置
CN107342205B (zh) * 2016-05-03 2019-07-23 睿励科学仪器（上海）有限公司 一种带电粒子探测装置
US9972474B2 (en) 2016-07-31 2018-05-15 Fei Company Electron microscope with multiple types of integrated x-ray detectors arranged in an array
JP7266745B2 (ja) * 2020-03-02 2023-04-28 株式会社日立ハイテク 荷電粒子検出器、荷電粒子線装置、放射線検出器および放射線検出装置
US12362130B2 (en) * 2021-02-15 2025-07-15 E.A. Fischione Instruments, Inc. System and method for uniform ion milling
DE102021125639A1 (de) * 2021-10-04 2023-04-06 Carl Zeiss Microscopy Gmbh Teilchenstrahlsystem

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope
US3538328A (en) 1968-03-04 1970-11-03 Varian Associates Scintillation-type ion detector employing a secondary emitter target surrounding the ion path
US3783281A (en) * 1972-02-03 1974-01-01 Perkin Elmer Corp Electron microscope
US3894233A (en) 1972-10-27 1975-07-08 Hitachi Ltd Ion microprobe analyzer
DE2534796C3 (de) 1975-08-04 1979-07-05 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Rotationssymetrischer Ionen-Elektronen-Konverter
FR2408910A1 (fr) 1977-11-15 1979-06-08 Commissariat Energie Atomique Spectrographe de masse
FR2447559A1 (fr) 1979-01-23 1980-08-22 Commissariat Energie Atomique Detecteur panoramique d'ions
FR2575597B1 (fr) * 1984-12-28 1987-03-20 Onera (Off Nat Aerospatiale) Appareil pour la micro-analyse ionique a tres haute resolution d'un echantillon solide
JPS6371680A (ja) 1986-09-16 1988-04-01 Hitachi Ltd イオン検出器
JPS63293847A (ja) * 1987-05-26 1988-11-30 Matsushita Electric Ind Co Ltd 半導体検査装置
JPH0815064B2 (ja) 1987-11-25 1996-02-14 株式会社日立製作所 集束エネルギービーム加工装置および加工方法
JPH01220352A (ja) * 1988-02-26 1989-09-04 Hitachi Ltd 走査電子顕微鏡及びその類似装置
JPH0369853U (enExample) * 1989-11-10 1991-07-11
US5065029A (en) * 1990-08-03 1991-11-12 Gatan, Inc. Cooled CCD camera for an electron microscope
JPH06187940A (ja) 1992-12-18 1994-07-08 Hitachi Ltd 荷電粒子検出器
DE4316805C2 (de) 1993-05-19 1997-03-06 Bruker Franzen Analytik Gmbh Nachweis schwerer Ionen in einem Flugzeitmassenspektrometer
JPH07142022A (ja) * 1993-11-19 1995-06-02 Hitachi Ltd 集束イオンビーム装置及び荷電粒子検出器
JP3221797B2 (ja) * 1994-06-14 2001-10-22 株式会社日立製作所 試料作成方法及びその装置
US5635720A (en) * 1995-10-03 1997-06-03 Gatan, Inc. Resolution-enhancement device for an optically-coupled image sensor for an electron microscope
JPH09106777A (ja) * 1995-10-11 1997-04-22 Hamamatsu Photonics Kk 電子顕微鏡用電子増倍器
DE19644713A1 (de) 1996-10-28 1998-05-07 Bruker Franzen Analytik Gmbh Hochauflösender Hochmassendetektor für Flugzeitmassenspektrometer
EP0986092B1 (en) * 1996-11-06 2003-02-19 Hamamatsu Photonics K.K. Electron multiplier
US5866901A (en) 1996-12-05 1999-02-02 Mks Instruments, Inc. Apparatus for and method of ion detection using electron multiplier over a range of high pressures
US6194719B1 (en) * 1997-06-13 2001-02-27 Gatan, Inc. Methods and apparatus for improving resolution and reducing noise in an image detector for an electron microscope
JPH1116531A (ja) * 1997-06-23 1999-01-22 Apuko:Kk 二次電子検出器
US5990483A (en) * 1997-10-06 1999-11-23 El-Mul Technologies Ltd. Particle detection and particle detector devices
JPH11154479A (ja) * 1997-11-20 1999-06-08 Hitachi Ltd ２次電子画像検出方法及びその装置並びに集束荷電粒子ビームによる処理方法及びその装置
US6828729B1 (en) 2000-03-16 2004-12-07 Burle Technologies, Inc. Bipolar time-of-flight detector, cartridge and detection method
DE50113837D1 (de) * 2000-07-07 2008-05-21 Zeiss Carl Nts Gmbh Detektor für variierende druckbereiche und elektronenmikroskop mit einem entsprechenden detektor
JP2002075264A (ja) * 2000-08-29 2002-03-15 Jeol Ltd 低真空走査電子顕微鏡
JP4178741B2 (ja) * 2000-11-02 2008-11-12 株式会社日立製作所 荷電粒子線装置および試料作製装置
JP4246995B2 (ja) 2001-01-31 2009-04-02 浜松ホトニクス株式会社 電子線検出器、走査型電子顕微鏡、質量分析装置、及び、イオン検出器
US7009187B2 (en) * 2002-08-08 2006-03-07 Fei Company Particle detector suitable for detecting ions and electrons
US6906318B2 (en) 2003-02-13 2005-06-14 Micromass Uk Limited Ion detector
JP2004294282A (ja) * 2003-03-27 2004-10-21 Renesas Technology Corp 結晶解析装置
EP1501115B1 (en) * 2003-07-14 2009-07-01 FEI Company Dual beam system
JP4291109B2 (ja) * 2003-10-28 2009-07-08 エスアイアイ・ナノテクノロジー株式会社 複合型荷電粒子ビーム装置
WO2006120005A1 (en) 2005-05-11 2006-11-16 El-Mul Technologies Ltd. Particle detector for secondary ions and direct and or indirect secondary electrons
EP2006881A3 (en) * 2007-06-18 2010-01-06 FEI Company In-chamber electron detector
EP2739958B1 (en) * 2011-08-05 2016-01-20 Pulsetor, LLC Electron detector including one or more intimately-coupled scintillator-photomultiplier combinations, and electron microscope employing same

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