JP4291109B2 - 複合型荷電粒子ビーム装置 - Google Patents
複合型荷電粒子ビーム装置 Download PDFInfo
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- JP4291109B2 JP4291109B2 JP2003367445A JP2003367445A JP4291109B2 JP 4291109 B2 JP4291109 B2 JP 4291109B2 JP 2003367445 A JP2003367445 A JP 2003367445A JP 2003367445 A JP2003367445 A JP 2003367445A JP 4291109 B2 JP4291109 B2 JP 4291109B2
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Description
2 二次イオン検出器 6 印加電圧可変手段
3p,3n 引き込み電極
4 レベル検出器
Claims (8)
- 二次イオン検出器と二次電子検出器を併設する複合型荷電粒子ビーム装置であって、前記二次イオン検出器と二次電子検出器の検出信号レベルを検知する手段と、前記二次イオン検出器及び二次電子検出器の引き込み電極と試料表面間には電界調整手段が設けられると共に、前記検出信号レベルに基づいて前記電界調整手段を制御する手段とを備え、前記電界調整手段は、それぞれの検出器の検出信号レベルをモニタし、どちらかのレベルが基準値よりも大きいか小さいときはそのレベルの大小に応じてそれぞれの引き込み電圧の印加電圧を調整し、前記二次イオン検出器と二次電子検出器と試料表面間の電界を調整することを特徴とする複合型荷電粒子ビーム装置。
- 電界調整手段は、一方の検出器の検出信号レベルが基準値よりも大きいか小さいときはそのレベルの大小に応じて、他方の引き込み電圧の印加電圧を調整することを特徴とする請求項1に記載の複合型荷電粒子ビーム装置。
- 二次イオン検出器と二次電子検出器の引き込み電極と試料表面間に設けられた電界調整手段は、二次イオン検出器と二次電子検出器の引き込み電極に印加電圧可変手段が設けられたものである請求項1また2に記載の複合型荷電粒子ビーム装置。
- 二次イオン検出器及び二次電子検出器の引き込み電極と試料表面間に設けられた電界調整手段は、二次イオン検出器と二次電子検出器の前段に別途設けられた引き込み電極に印加電圧可変手段が設けられたものである請求項1または2に記載の複合型荷電粒子ビーム装置。
- 二次イオン検出器及び二次電子検出器の引き込み電極と試料表面間に設けられた電界調整手段は、試料表面の電位を調整するように試料ステージに印加電圧可変手段が設けられたものである請求項1または2に記載の複合型荷電粒子ビーム装置。
- 二次イオン検出器の信号は走査型イオン顕微鏡像として、また、二次電子検出器の信号は走査型電子顕微鏡像として用いられるものである請求項1から5のいずれかに記載の複合型荷電粒子ビーム装置。
- 二次イオン検出器と二次電子検出器は、互いに180°対抗する位置に配置されていることを特徴とする請求項1から6のいずれかに記載の複合型荷電粒子ビーム装置。
- 二次イオン検出器と二次電子検出器を併設するFIBとSEMの複合型荷電粒子ビーム装置であって、SEMの一次電子ビームの電流量をFIBの一次イオンビームの電流量よりも多くすることを特徴とする請求項1から7のいずれかに記載の複合型荷電粒子ビーム装置。
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JP2003367445A JP4291109B2 (ja) | 2003-10-28 | 2003-10-28 | 複合型荷電粒子ビーム装置 |
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JP2003367445A JP4291109B2 (ja) | 2003-10-28 | 2003-10-28 | 複合型荷電粒子ビーム装置 |
Publications (2)
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JP2005135611A JP2005135611A (ja) | 2005-05-26 |
JP4291109B2 true JP4291109B2 (ja) | 2009-07-08 |
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JP2003367445A Expired - Fee Related JP4291109B2 (ja) | 2003-10-28 | 2003-10-28 | 複合型荷電粒子ビーム装置 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5020483B2 (ja) * | 2005-07-08 | 2012-09-05 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
GB2442027B (en) * | 2006-09-23 | 2009-08-26 | Zeiss Carl Smt Ltd | Charged particle beam instrument and method of detecting charged particles |
EP2006881A3 (en) * | 2007-06-18 | 2010-01-06 | FEI Company | In-chamber electron detector |
JP2011233249A (ja) * | 2010-04-23 | 2011-11-17 | Tokyo Institute Of Technology | イオンビーム照射位置決め装置 |
KR101321049B1 (ko) * | 2013-02-22 | 2013-10-23 | 한국기계연구원 | 전자 검출기 |
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- 2003-10-28 JP JP2003367445A patent/JP4291109B2/ja not_active Expired - Fee Related
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