JP2005174766A - 走査電子顕微鏡 - Google Patents
走査電子顕微鏡 Download PDFInfo
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- JP2005174766A JP2005174766A JP2003413782A JP2003413782A JP2005174766A JP 2005174766 A JP2005174766 A JP 2005174766A JP 2003413782 A JP2003413782 A JP 2003413782A JP 2003413782 A JP2003413782 A JP 2003413782A JP 2005174766 A JP2005174766 A JP 2005174766A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
【解決手段】対物レンズ1の下部の1次電子線3の照射口に近い部位に数V〜数十Vの負電位が印加される第1補助電極13を設置し、第1補助電極の2次電子検出器5側に正電圧を印加する第2補助電極14を設置して2次電子軌道を修正制御する。更に、2次電子検出器5には試料2から発生した2次電子を補集補助する第3補助電極12を検出器前面に設置する。
【選択図】 図5
Description
Claims (8)
- 試料を保持する試料ステージと、収束した1次電子線を試料に照射する対物レンズと、電子線照射によって試料から発生した2次電子を検出する2次電子検出器とを含む走査電子顕微鏡において、
前記対物レンズ下部の1次電子線照射口近くに負電位の第1補助電極を設置したことを特徴とする走査電子顕微鏡。 - 請求項1記載の走査電子顕微鏡において、前記第1補助電極の少なくとも2次電子検出器側に正電位の第2補助電極を設置したことを特徴とする走査電子顕微鏡。
- 請求項1又は2記載の走査電子顕微鏡において、前記第1補助電極はリング状又は前記2次検出器に向いた側が開放したU字状の形状を有し、前記第2補助電極は前記第1補助電極より径の大きいリング状又は前記2次電子検出器に向いた側が閉じたU字状の形状を有することを特徴とする走査電子顕微鏡。
- 請求項1〜3のいずれか1項記載の走査電子顕微鏡において、前記第1補助電極の電位は−5〜−20Vであり、前記第2補助電極の電位は+5〜+20Vであることを特徴とする走査電子顕微鏡。
- 請求項1〜4のいずれか1項記載の走査電子顕微鏡において、前記2次電子検出器と試料との間に正電位の第3補助電極を設置したことを特徴とする走査電子顕微鏡。
- 試料を保持する試料ステージと、収束した1次電子線を試料に照射する対物レンズと、電子線照射によって試料から発生された2次電子を検出する2次電子検出器とを含む走査電子顕微鏡において、
前記対物レンズ下部に1次電子線通過穴を有する環状の反射電子検出器を備え、前記反射電子検出器は前記1次電子線通過穴の近くに負電位の第1補助電極を有し、外周側に正電位の第2補助電極を有することを特徴とする走査電子顕微鏡。 - 請求項6記載の走査電子顕微鏡において、前記第1補助電極の電位は−5〜−20Vであり、前記第2補助電極の電位は+5〜+20Vであることを特徴とする走査電子顕微鏡。
- 請求項1〜7のいずれか1項記載の走査電子顕微鏡において、前記補助電極の電位を正電位に切換えて印加可能であることを特徴とする走査電子顕微鏡。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003413782A JP4292068B2 (ja) | 2003-12-11 | 2003-12-11 | 走査電子顕微鏡 |
US11/006,556 US7154089B2 (en) | 2003-12-11 | 2004-12-08 | Scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003413782A JP4292068B2 (ja) | 2003-12-11 | 2003-12-11 | 走査電子顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005174766A true JP2005174766A (ja) | 2005-06-30 |
JP4292068B2 JP4292068B2 (ja) | 2009-07-08 |
Family
ID=34650516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003413782A Expired - Fee Related JP4292068B2 (ja) | 2003-12-11 | 2003-12-11 | 走査電子顕微鏡 |
Country Status (2)
Country | Link |
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US (1) | US7154089B2 (ja) |
JP (1) | JP4292068B2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008047310A (ja) * | 2006-08-11 | 2008-02-28 | Hitachi High-Tech Science Systems Corp | 走査電子顕微鏡 |
JP2008078142A (ja) * | 2006-09-23 | 2008-04-03 | Carl Zeiss Smt Ltd | 荷電粒子ビーム器具および荷電粒子を検出する方法 |
JP2010129516A (ja) * | 2008-12-01 | 2010-06-10 | Jeol Ltd | 走査電子顕微鏡、放出電子検出値推定方法、sem像シミュレーション方法、及びそのプログラム |
DE112021002456T5 (de) | 2020-09-25 | 2023-03-02 | Hitachi High-Tech Corporation | Elektronenmikroskop |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4636897B2 (ja) * | 2005-02-18 | 2011-02-23 | 株式会社日立ハイテクサイエンスシステムズ | 走査電子顕微鏡 |
KR101152123B1 (ko) * | 2005-07-18 | 2012-06-15 | 삼성전자주식회사 | 액정 표시 장치 및 그 구동 방법 |
US8890066B1 (en) * | 2005-08-26 | 2014-11-18 | Kla-Tencor Corporation | Sharp scattering angle trap for electron beam apparatus |
US7514682B2 (en) * | 2005-09-30 | 2009-04-07 | Applied Materials, Inc. | Electron anti-fogging baffle used as a detector |
JP4906409B2 (ja) * | 2006-06-22 | 2012-03-28 | 株式会社アドバンテスト | 電子ビーム寸法測定装置及び電子ビーム寸法測定方法 |
WO2012016198A2 (en) * | 2010-07-30 | 2012-02-02 | Pulsetor, Llc | Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and x-ray detector employing same |
US8581188B2 (en) | 2011-08-05 | 2013-11-12 | Pulsetor, Llc | Electron detector including one or more intimately-coupled scintillator-photomultiplier combinations, and electron microscope employing same |
EP2682978B1 (en) * | 2012-07-05 | 2016-10-19 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Contamination reduction electrode for particle detector |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4897545A (en) * | 1987-05-21 | 1990-01-30 | Electroscan Corporation | Electron detector for use in a gaseous environment |
JPH06103951A (ja) | 1992-09-17 | 1994-04-15 | Hitachi Ltd | 二次電子検出器 |
JPH09147782A (ja) | 1995-11-28 | 1997-06-06 | Shimadzu Corp | 電子線マイクロアナライザ |
JP4236742B2 (ja) * | 1998-10-29 | 2009-03-11 | 株式会社日立製作所 | 走査形電子顕微鏡 |
-
2003
- 2003-12-11 JP JP2003413782A patent/JP4292068B2/ja not_active Expired - Fee Related
-
2004
- 2004-12-08 US US11/006,556 patent/US7154089B2/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008047310A (ja) * | 2006-08-11 | 2008-02-28 | Hitachi High-Tech Science Systems Corp | 走査電子顕微鏡 |
JP2008078142A (ja) * | 2006-09-23 | 2008-04-03 | Carl Zeiss Smt Ltd | 荷電粒子ビーム器具および荷電粒子を検出する方法 |
JP2010129516A (ja) * | 2008-12-01 | 2010-06-10 | Jeol Ltd | 走査電子顕微鏡、放出電子検出値推定方法、sem像シミュレーション方法、及びそのプログラム |
DE112021002456T5 (de) | 2020-09-25 | 2023-03-02 | Hitachi High-Tech Corporation | Elektronenmikroskop |
Also Published As
Publication number | Publication date |
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JP4292068B2 (ja) | 2009-07-08 |
US7154089B2 (en) | 2006-12-26 |
US20050127294A1 (en) | 2005-06-16 |
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