JP2009004488A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2009004488A5 JP2009004488A5 JP2007162514A JP2007162514A JP2009004488A5 JP 2009004488 A5 JP2009004488 A5 JP 2009004488A5 JP 2007162514 A JP2007162514 A JP 2007162514A JP 2007162514 A JP2007162514 A JP 2007162514A JP 2009004488 A5 JP2009004488 A5 JP 2009004488A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- optical waveguide
- optical
- protective film
- ridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 25
- 230000001681 protective effect Effects 0.000 claims 6
- 238000005253 cladding Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052787 antimony Inorganic materials 0.000 claims 1
- 229910052785 arsenic Inorganic materials 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- 210000001503 joint Anatomy 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 230000001902 propagating effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007162514A JP5047704B2 (ja) | 2007-06-20 | 2007-06-20 | 光集積素子 |
| US11/843,682 US7711229B2 (en) | 2007-06-20 | 2007-08-23 | Optical integrated device and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007162514A JP5047704B2 (ja) | 2007-06-20 | 2007-06-20 | 光集積素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009004488A JP2009004488A (ja) | 2009-01-08 |
| JP2009004488A5 true JP2009004488A5 (enExample) | 2010-04-30 |
| JP5047704B2 JP5047704B2 (ja) | 2012-10-10 |
Family
ID=40136586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007162514A Expired - Fee Related JP5047704B2 (ja) | 2007-06-20 | 2007-06-20 | 光集積素子 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7711229B2 (enExample) |
| JP (1) | JP5047704B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013016648A (ja) * | 2011-07-04 | 2013-01-24 | Sumitomo Electric Ind Ltd | 半導体光集積素子の製造方法 |
| JP5957856B2 (ja) * | 2011-11-21 | 2016-07-27 | 住友電気工業株式会社 | 半導体集積素子 |
| JP5957855B2 (ja) * | 2011-11-21 | 2016-07-27 | 住友電気工業株式会社 | 半導体集積素子 |
| JP6487195B2 (ja) | 2014-12-09 | 2019-03-20 | 日本オクラロ株式会社 | 半導体光集積素子、半導体光集積素子の製造方法及び光モジュール |
| DE112017007590B4 (de) * | 2017-05-29 | 2023-05-04 | Mitsubishi Electric Corporation | Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62194691A (ja) * | 1986-02-21 | 1987-08-27 | Kokusai Denshin Denwa Co Ltd <Kdd> | 光導波路領域を有する半導体光集積装置の製造方法 |
| JP2842292B2 (ja) * | 1994-09-16 | 1998-12-24 | 日本電気株式会社 | 半導体光集積装置および製造方法 |
| JPH11103130A (ja) * | 1997-09-29 | 1999-04-13 | Mitsubishi Electric Corp | 半導体光素子，及びその製造方法 |
| JP3941296B2 (ja) * | 1999-09-20 | 2007-07-04 | 三菱電機株式会社 | 変調器と変調器付き半導体レーザ装置並びにその製造方法 |
| JP4058245B2 (ja) | 2001-02-22 | 2008-03-05 | 日本オプネクスト株式会社 | 半導体光集積素子の製造方法 |
| US6503768B2 (en) * | 2001-03-29 | 2003-01-07 | Agere Systems Inc. | Method for monolithic integration of multiple devices on an optoelectronic substrate |
| JP2002324948A (ja) * | 2001-04-25 | 2002-11-08 | Furukawa Electric Co Ltd:The | 半導体レーザ及びレーザモジュール |
| JP2002329921A (ja) | 2001-05-01 | 2002-11-15 | Sumitomo Electric Ind Ltd | 光集積素子の製造方法および光集積素子 |
| SE0200751D0 (sv) * | 2002-03-13 | 2002-03-13 | Optillion Ab | Method for manufacturing a photonic device and photonic device |
| JP4457578B2 (ja) | 2003-05-21 | 2010-04-28 | 住友電気工業株式会社 | 半導体光素子を製造する方法、及び半導体光素子 |
-
2007
- 2007-06-20 JP JP2007162514A patent/JP5047704B2/ja not_active Expired - Fee Related
- 2007-08-23 US US11/843,682 patent/US7711229B2/en active Active