JP2012517705A5 - - Google Patents
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- JP2012517705A5 JP2012517705A5 JP2011549434A JP2011549434A JP2012517705A5 JP 2012517705 A5 JP2012517705 A5 JP 2012517705A5 JP 2011549434 A JP2011549434 A JP 2011549434A JP 2011549434 A JP2011549434 A JP 2011549434A JP 2012517705 A5 JP2012517705 A5 JP 2012517705A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- grating
- layer
- silicon layer
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 38
- 229910052710 silicon Inorganic materials 0.000 claims 38
- 239000010703 silicon Substances 0.000 claims 38
- 238000010168 coupling process Methods 0.000 claims 14
- 238000005859 coupling reaction Methods 0.000 claims 14
- 230000008878 coupling Effects 0.000 claims 13
- 238000000034 method Methods 0.000 claims 8
- 230000000737 periodic effect Effects 0.000 claims 6
- 239000000463 material Substances 0.000 claims 3
- 238000002310 reflectometry Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000000977 initiatory effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15163109P | 2009-02-11 | 2009-02-11 | |
| US61/151,631 | 2009-02-11 | ||
| EP09153659.9 | 2009-02-25 | ||
| EP09153659 | 2009-02-25 | ||
| PCT/DK2010/050015 WO2010091688A1 (en) | 2009-02-11 | 2010-01-22 | Hybrid vertical-cavity laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012517705A JP2012517705A (ja) | 2012-08-02 |
| JP2012517705A5 true JP2012517705A5 (enExample) | 2013-02-14 |
Family
ID=40580884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011549434A Pending JP2012517705A (ja) | 2009-02-11 | 2010-01-22 | ハイブリッド垂直キャビティレーザー |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9184562B2 (enExample) |
| EP (1) | EP2396861B1 (enExample) |
| JP (1) | JP2012517705A (enExample) |
| KR (1) | KR101834015B1 (enExample) |
| CN (1) | CN102388513B (enExample) |
| AU (1) | AU2010213223A1 (enExample) |
| WO (1) | WO2010091688A1 (enExample) |
Families Citing this family (63)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8217410B2 (en) * | 2009-03-27 | 2012-07-10 | Wisconsin Alumni Research Foundation | Hybrid vertical cavity light emitting sources |
| FR2954638B1 (fr) * | 2009-12-21 | 2012-03-23 | Commissariat Energie Atomique | Laser hybride couple a un guide d'onde |
| US8725001B2 (en) * | 2010-03-10 | 2014-05-13 | Ofs Fitel, Llc | Multicore fiber transmission systems and methods |
| US9991676B2 (en) | 2010-10-29 | 2018-06-05 | Hewlett Packard Enterprise Development Lp | Small-mode-volume, vertical-cavity, surface-emitting laser |
| WO2012149497A2 (en) * | 2011-04-29 | 2012-11-01 | The Regents Of The University Of California | Vertical cavity surface emitting lasers with silicon-on-insulator high contrast grating |
| CN103636084B (zh) * | 2011-07-04 | 2016-09-28 | 丹麦技术大学 | 激光器 |
| KR20130048628A (ko) * | 2011-11-02 | 2013-05-10 | 삼성전자주식회사 | 광 직접 회로의 멀티 포트 광원 |
| KR20140113911A (ko) | 2012-01-18 | 2014-09-25 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 고밀도 레이저 광학장치 |
| KR20130085763A (ko) * | 2012-01-20 | 2013-07-30 | 삼성전자주식회사 | 광 집적 회로용 혼성 레이저 광원 |
| WO2013110004A1 (en) * | 2012-01-20 | 2013-07-25 | The Regents Of The University Of California | Short cavity surface emitting laser with double high contrast gratings with and without airgap |
| CN102692682B (zh) * | 2012-06-12 | 2013-07-17 | 中国科学院上海微系统与信息技术研究所 | 一种光栅耦合器及其制作方法 |
| WO2014021813A1 (en) | 2012-07-30 | 2014-02-06 | Hewlett-Packard Development Company, L.P. | Compact photonic platforms |
| US10209445B2 (en) | 2012-07-30 | 2019-02-19 | Hewlett Packard Enterprise Development Lp | Method of fabricating a compact photonics platform |
| KR101928436B1 (ko) | 2012-10-10 | 2019-02-26 | 삼성전자주식회사 | 광 집적 회로용 하이브리드 수직 공명 레이저 |
| US9106048B2 (en) * | 2013-02-11 | 2015-08-11 | Oracle International Corporation | Waveguide-coupled vertical cavity laser |
| KR102050502B1 (ko) * | 2013-03-18 | 2020-01-08 | 삼성전자주식회사 | 하이브리드 수직 공진 레이저 및 그 제조방법 |
| TW201504599A (zh) * | 2013-05-30 | 2015-02-01 | Univ California | 具有高對比光柵及可作爲雙重用途之高對比光柵垂直腔表面發射雷射檢測器之二維週期結構的極化無關光檢測器 |
| WO2014191005A1 (en) | 2013-05-31 | 2014-12-04 | Danmarks Tekniske Universitet | A wavelength tunable photon source with sealed inner volume |
| FR3007589B1 (fr) | 2013-06-24 | 2015-07-24 | St Microelectronics Crolles 2 | Circuit integre photonique et procede de fabrication |
| EP3069420B1 (en) * | 2013-11-13 | 2017-10-04 | Danmarks Tekniske Universitet | Method for generating a compressed optical pulse |
| CN103633551B (zh) * | 2013-12-19 | 2016-04-20 | 武汉电信器件有限公司 | 用于片上光互连的激光器封装方法 |
| JP2015133426A (ja) * | 2014-01-14 | 2015-07-23 | 古河電気工業株式会社 | 面発光レーザ素子 |
| KR20170003560A (ko) * | 2014-04-07 | 2017-01-09 | 덴마크스 텍니스케 유니버시테트 | Vcsel 구조 |
| US10976493B2 (en) * | 2014-04-30 | 2021-04-13 | Hewlett Packard Enterprise Development Lp | Controllable diamond waveguide tuner |
| CN104051957A (zh) * | 2014-06-23 | 2014-09-17 | 天津工业大学 | 一种1550nm长波长垂直腔面发射激光器的制备方法及其应用 |
| WO2016014078A1 (en) | 2014-07-25 | 2016-01-28 | Hewlett-Packard Development Company, L.P. | Tunable optical device |
| US10366883B2 (en) | 2014-07-30 | 2019-07-30 | Hewlett Packard Enterprise Development Lp | Hybrid multilayer device |
| WO2016048268A1 (en) | 2014-09-22 | 2016-03-31 | Hewlett Packard Enterprise Development Lp | Single mode vertical-cavity surface-emitting laser |
| US10447011B2 (en) | 2014-09-22 | 2019-10-15 | Hewlett Packard Enterprise Development Lp | Single mode vertical-cavity surface-emitting laser |
| GB201418637D0 (en) | 2014-10-20 | 2014-12-03 | Univ St Andrews | Laser |
| SG11201703333XA (en) * | 2014-11-10 | 2017-05-30 | Agency Science Tech & Res | An optical device and a method for fabricating thereof |
| JP6581022B2 (ja) * | 2015-03-20 | 2019-09-25 | 株式会社東芝 | 半導体発光デバイスおよび光半導体デバイス |
| US10103514B2 (en) * | 2015-03-20 | 2018-10-16 | Kabushiki Kaisha Toshiba | Optical semiconductor device and method for manufacturing the same |
| WO2016184471A1 (en) | 2015-05-15 | 2016-11-24 | Danmarks Tekniske Universitet | Vertical cavity laser |
| US9874693B2 (en) | 2015-06-10 | 2018-01-23 | The Research Foundation For The State University Of New York | Method and structure for integrating photonics with CMOs |
| WO2017039674A1 (en) | 2015-09-03 | 2017-03-09 | Hewlett Packard Enterprise Development Lp | Defect free heterogeneous substrates |
| US10586847B2 (en) | 2016-01-15 | 2020-03-10 | Hewlett Packard Enterprise Development Lp | Multilayer device |
| US11088244B2 (en) | 2016-03-30 | 2021-08-10 | Hewlett Packard Enterprise Development Lp | Devices having substrates with selective airgap regions |
| US10109983B2 (en) * | 2016-04-28 | 2018-10-23 | Hewlett Packard Enterprise Development Lp | Devices with quantum dots |
| US10566765B2 (en) | 2016-10-27 | 2020-02-18 | Hewlett Packard Enterprise Development Lp | Multi-wavelength semiconductor lasers |
| US10680407B2 (en) | 2017-04-10 | 2020-06-09 | Hewlett Packard Enterprise Development Lp | Multi-wavelength semiconductor comb lasers |
| US10396521B2 (en) | 2017-09-29 | 2019-08-27 | Hewlett Packard Enterprise Development Lp | Laser |
| US10381801B1 (en) | 2018-04-26 | 2019-08-13 | Hewlett Packard Enterprise Development Lp | Device including structure over airgap |
| US10541214B2 (en) * | 2018-04-27 | 2020-01-21 | Juniper Networks, Inc. | Enhanced bonding between III-V material and oxide material |
| CN108683078B (zh) * | 2018-06-21 | 2023-06-09 | 中国科学院福建物质结构研究所 | 一种波长可调谐的半导体激光器 |
| JP2020047783A (ja) * | 2018-09-19 | 2020-03-26 | 株式会社東芝 | 半導体発光デバイスの製造方法及び半導体発光デバイス |
| JP7190865B2 (ja) | 2018-10-18 | 2022-12-16 | スタンレー電気株式会社 | 垂直共振器型発光素子 |
| JP7166871B2 (ja) | 2018-10-18 | 2022-11-08 | スタンレー電気株式会社 | 垂直共振器型発光素子 |
| CN111435781B (zh) * | 2019-01-15 | 2022-03-18 | 中国科学院半导体研究所 | 垂直腔面发射半导体激光器结构 |
| CN110265871A (zh) * | 2019-07-02 | 2019-09-20 | 深圳市柠檬光子科技有限公司 | 用于激光雷达的激光发射模组 |
| FR3101442B1 (fr) * | 2019-09-27 | 2022-04-22 | Commissariat Energie Atomique | Miroir de Bragg et procédé de réalisation d’un miroir de Bragg |
| CN110932091B (zh) * | 2019-12-06 | 2020-10-09 | 北京大学 | 一种基于能带反转光场限制效应的拓扑体态激光器及方法 |
| CN111106533A (zh) * | 2019-12-21 | 2020-05-05 | 江西德瑞光电技术有限责任公司 | 一种vcsel芯片及其制造方法 |
| US11243350B2 (en) | 2020-03-12 | 2022-02-08 | Globalfoundries U.S. Inc. | Photonic devices integrated with reflectors |
| CN111600198B (zh) * | 2020-05-26 | 2021-05-04 | 陕西源杰半导体科技股份有限公司 | 一种通讯用超大功率激光器及其制备方法 |
| CN111751830B (zh) * | 2020-07-08 | 2021-02-19 | 北京工业大学 | 一种基于vcsel混合激光的空间微弱目标红外探测系统 |
| US20220385041A1 (en) * | 2021-05-27 | 2022-12-01 | Lumentum Operations Llc | Emitter with variable light reflectivity |
| CN114498295B (zh) * | 2022-04-13 | 2022-06-24 | 常州纵慧芯光半导体科技有限公司 | 一种带增益耦合光栅的dfb激光器及其制备方法 |
| CN118263765A (zh) * | 2022-12-27 | 2024-06-28 | 青岛海信宽带多媒体技术有限公司 | 一种激光器及光模块 |
| DE102023104674A1 (de) * | 2023-02-27 | 2024-08-29 | Trumpf Photonic Components Gmbh | VCSEL zum Erzeugen eines Laserlichts |
| JP2025171590A (ja) * | 2024-05-10 | 2025-11-20 | 浜松ホトニクス株式会社 | 光集積回路 |
| JP2025171589A (ja) * | 2024-05-10 | 2025-11-20 | 浜松ホトニクス株式会社 | 光集積回路 |
| JP2025171584A (ja) * | 2024-05-10 | 2025-11-20 | 浜松ホトニクス株式会社 | 光集積回路 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6031243A (en) | 1996-10-16 | 2000-02-29 | Geoff W. Taylor | Grating coupled vertical cavity optoelectronic devices |
| US6330265B1 (en) | 1998-04-21 | 2001-12-11 | Kabushiki Kaisha Toshiba | Optical functional element and transmission device |
| FR2792734A1 (fr) | 1999-04-23 | 2000-10-27 | Centre Nat Rech Scient | Circuit photonique integre comprenant un composant optique resonant et procedes de fabrication de ce circuit |
| US6829286B1 (en) | 2000-05-26 | 2004-12-07 | Opticomp Corporation | Resonant cavity enhanced VCSEL/waveguide grating coupler |
| US6624444B1 (en) * | 2002-03-28 | 2003-09-23 | Intel Corporation | Electrical-optical package with capacitor DC shunts and associated methods |
| US6775448B2 (en) * | 2002-11-05 | 2004-08-10 | Mesophotonics Limited | Optical device |
| WO2005089098A2 (en) | 2004-01-14 | 2005-09-29 | The Regents Of The University Of California | Ultra broadband mirror using subwavelength grating |
| US7778305B2 (en) | 2005-12-22 | 2010-08-17 | Université Jean-Monnet | Mirror structure and laser device comprising such a mirror structure |
| US8110823B2 (en) * | 2006-01-20 | 2012-02-07 | The Regents Of The University Of California | III-V photonic integration on silicon |
| JP5037835B2 (ja) | 2006-02-28 | 2012-10-03 | キヤノン株式会社 | 垂直共振器型面発光レーザ |
| US7583712B2 (en) * | 2006-06-16 | 2009-09-01 | Pbc Lasers Gmbh | Optoelectronic device and method of making same |
| FR2909491B1 (fr) | 2006-12-05 | 2010-04-23 | Commissariat Energie Atomique | Dispositif laser a source laser et guide d'onde couples |
| CN100546135C (zh) * | 2007-12-28 | 2009-09-30 | 武汉光迅科技股份有限公司 | 可调谐半导体激光器的制作方法及可调谐半导体激光器 |
| US8116171B1 (en) * | 2009-11-11 | 2012-02-14 | Western Digital (Fremont), Llc | Method and system for providing energy assisted magnetic recording disk drive using a vertical surface emitting laser |
| US8257990B2 (en) * | 2009-12-30 | 2012-09-04 | Intel Corporation | Hybrid silicon vertical cavity laser with in-plane coupling |
| US8422342B1 (en) * | 2010-06-25 | 2013-04-16 | Western Digital (Fremont), Llc | Energy assisted magnetic recording disk drive using a distributed feedback laser |
| US8451695B2 (en) * | 2011-06-23 | 2013-05-28 | Seagate Technology Llc | Vertical cavity surface emitting laser with integrated mirror and waveguide |
-
2010
- 2010-01-22 EP EP10701195.9A patent/EP2396861B1/en not_active Not-in-force
- 2010-01-22 AU AU2010213223A patent/AU2010213223A1/en not_active Abandoned
- 2010-01-22 CN CN201080016327.8A patent/CN102388513B/zh not_active Expired - Fee Related
- 2010-01-22 KR KR1020117020785A patent/KR101834015B1/ko not_active Expired - Fee Related
- 2010-01-22 WO PCT/DK2010/050015 patent/WO2010091688A1/en not_active Ceased
- 2010-01-22 JP JP2011549434A patent/JP2012517705A/ja active Pending
- 2010-01-22 US US13/148,911 patent/US9184562B2/en not_active Expired - Fee Related
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