JP2008533743A - 自己不動態化相互接続の形成方法及び該方法を用いた装置 - Google Patents
自己不動態化相互接続の形成方法及び該方法を用いた装置 Download PDFInfo
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- JP2008533743A JP2008533743A JP2008502081A JP2008502081A JP2008533743A JP 2008533743 A JP2008533743 A JP 2008533743A JP 2008502081 A JP2008502081 A JP 2008502081A JP 2008502081 A JP2008502081 A JP 2008502081A JP 2008533743 A JP2008533743 A JP 2008533743A
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Abstract
Description
Claims (32)
- 導電性金属及び元素を含む接合構造を第1の基板上に形成する形成工程;
前記導電性金属及び前記元素を含む接合構造を第2の基板上に形成する形成工程;及び
前記第1の基板と前記第2の基板との間に相互接続を形成するために前記第1の基板の前記接合構造を前記第2の基板の前記接合構造に接合する接合工程であり、前記元素が前記接合構造の自由表面に移動して前記相互接続にパッシベーション層を形成する、接合工程;
を有する方法。 - 酸素の存在下で前記接合工程を実行することを更に有し、前記パッシベーション層は前記元素の酸化物を有する、請求項1に記載の方法。
- 窒素の存在下で前記接合工程を実行することを更に有し、前記パッシベーション層は前記元素の窒化物を有する、請求項1に記載の方法。
- 真空下で前記接合工程を実行することを更に有し、前記パッシベーション層は実質的に前記元素を有する、請求項1に記載の方法。
- 前記第1の基板は多数のダイ用の集積回路を有する第1の半導体ウェハを有し、前記第2の基板は一致する数のダイ用の集積回路を有する第2の半導体ウェハを有する、請求項1に記載の方法。
- 前記接合構造の少なくとも一方を形成する工程は、前記導電性金属と前記元素との合金から該接合構造を形成することを有する、請求項1に記載の方法。
- 前記接合構造の少なくとも一方を形成する工程は、前記導電性金属と前記元素との合金から該接合構造の第1部分を形成すること、及び実質的に前記導電性金属から該接合構造の第2部分を形成することを有する、請求項1に記載の方法。
- 前記導電性金属は銅を有する、請求項1に記載の方法。
- 前記元素は金属を有する、請求項1に記載の方法。
- 前記元素は非金属を有する、請求項1に記載の方法。
- 前記接合構造の少なくとも一方は、前記元素を含むとともに1つの更なる元素を更に含み、前記更なる元素は前記接合構造の前記自由表面に移動し、前記元素と組み合わさって前記パッシベーション層を形成する、請求項1に記載の方法。
- 第1の集積回路ダイ;
第2の集積回路ダイ;
前記第1のダイと前記第2のダイとの間に延在する複数の相互接続であり、該相互接続の各々は導電性金属を含む、複数の相互接続;及び
前記相互接続の各々を覆うように配置されたパッシベーション層であり、前記導電性金属を通って自由表面まで移動することが可能な元素を含むパッシベーション層;
を有する装置。 - 前記パッシベーション層は前記元素の酸化物を有する、請求項12に記載の装置。
- 前記パッシベーション層は前記元素の窒化物を有する、請求項12に記載の装置。
- 前記パッシベーション層は実質的に前記元素を有する、請求項12に記載の装置。
- 前記導電性金属は銅を有する、請求項12に記載の装置。
- 前記元素は、アルミニウム、錫、コバルト、マグネシウム、及びチタンから成るグループから選択された金属を有する、請求項16に記載の装置。
- 前記元素は非金属を有する、請求項12に記載の装置。
- 前記パッシベーション層は、前記導電性金属を通って前記自由表面まで移動することが可能な少なくとも1つの更なる元素を含む、請求項12に記載の装置。
- 多数のダイ用の回路を含む第1の半導体ウェハ上に複数の接合パッドを形成する形成工程であり、該接合パッドの各々は銅及び第2の金属を含む、形成工程;
一致する数のダイ用の回路を含む第2の半導体ウェハ上に複数の接合パッドを形成する形成工程であり、該接合パッドの各々は銅及び前記第2の金属を含む、形成工程;及び
前記第1のウェハと前記第2のウェハとの間に複数の相互接続を形成するために、前記第1のウェハ上の前記複数の接合パッドの各々を前記第2のウェハ上の前記複数の接合パッドの内の対となる1つに接合する接合工程であり、前記第2の金属が前記接合パッドの自由表面に移動して前記相互接続の各々にパッシベーション層を形成する、接合工程;
を有する方法。 - 前記第2の金属は、アルミニウム、錫、コバルト、マグネシウム、及びチタンから成るグループから選択された金属を有する、請求項20に記載の方法。
- 前記パッシベーション層は前記第2の金属の酸化物又は前記第2の金属の窒化物を有する、請求項20に記載の方法。
- 接合された前記ウェハを多数の積層化されたダイに切り分ける切断工程であり、前記積層化されたダイの各々は、前記第1のウェハからの1つのダイ、前記第2のウェハからの1つのダイ、及びこれら2つのダイを電気的に結合する前記相互接続の一部を含む、切断工程、を更に有する請求項20に記載の方法。
- 導電性金属及び元素を含む接合構造を第1の基板上に形成する形成工程;
前記導電性金属を含む接合構造を第2の基板上に形成する形成工程;及び
前記第1の基板と前記第2の基板との間に相互接続を形成するために前記第1の基板の前記接合構造を前記第2の基板の前記接合構造に接合する接合工程であり、前記元素が前記接合構造の自由表面に移動して前記相互接続にパッシベーション層を形成する、接合工程;
を有する方法。 - 酸素の存在下で前記接合工程を実行することを更に有し、前記パッシベーション層は前記元素の酸化物を有する、請求項24に記載の方法。
- 窒素の存在下で前記接合工程を実行することを更に有し、前記パッシベーション層は前記元素の窒化物を有する、請求項24に記載の方法。
- 真空下で前記接合工程を実行することを更に有し、前記パッシベーション層は実質的に前記元素を有する、請求項24に記載の方法。
- 前記第1の基板の前記接合構造を形成する工程は、前記導電性金属と前記元素との合金から該接合構造を形成することを有する、請求項24に記載の方法。
- 前記第1の基板の前記接合構造を形成する工程は、前記導電性金属と前記元素との合金から該接合構造の第1部分を形成すること、及び実質的に前記導電性金属から該接合構造の第2部分を形成することを有する、請求項24に記載の方法。
- 前記元素は金属を有する、請求項24に記載の方法。
- 前記元素は非金属を有する、請求項24に記載の方法。
- 前記第1の基板の前記接合構造は1つの更なる元素を更に含み、前記更なる元素は前記接合構造の前記自由表面に移動し、前記元素と組み合わさって前記パッシベーション層を形成する、請求項24に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/081,187 US7402509B2 (en) | 2005-03-16 | 2005-03-16 | Method of forming self-passivating interconnects and resulting devices |
US11/081,187 | 2005-03-16 | ||
PCT/US2006/009661 WO2006102046A1 (en) | 2005-03-16 | 2006-03-16 | Method of forming self-passivating interconnects and resulting devices |
Publications (2)
Publication Number | Publication Date |
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JP2008533743A true JP2008533743A (ja) | 2008-08-21 |
JP4777415B2 JP4777415B2 (ja) | 2011-09-21 |
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US (1) | US7402509B2 (ja) |
JP (1) | JP4777415B2 (ja) |
CN (1) | CN100561714C (ja) |
DE (1) | DE112006000647B4 (ja) |
TW (1) | TWI301306B (ja) |
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JP2017517810A (ja) * | 2014-06-30 | 2017-06-29 | インテル・コーポレーション | スケーラブルなgpuにおけるデータ配信ファブリック |
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US9064937B2 (en) * | 2013-05-30 | 2015-06-23 | International Business Machines Corporation | Substrate bonding with diffusion barrier structures |
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US10790262B2 (en) * | 2018-04-11 | 2020-09-29 | Invensas Bonding Technologies, Inc. | Low temperature bonded structures |
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US11424215B2 (en) * | 2020-11-10 | 2022-08-23 | Sandisk Technologies Llc | Bonded assembly formed by hybrid wafer bonding using selectively deposited metal liners |
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- 2006-03-16 JP JP2008502081A patent/JP4777415B2/ja not_active Expired - Fee Related
- 2006-03-16 DE DE112006000647T patent/DE112006000647B4/de active Active
- 2006-03-16 CN CNB2006800050451A patent/CN100561714C/zh not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
---|---|
DE112006000647T5 (de) | 2008-03-20 |
DE112006000647B4 (de) | 2010-09-23 |
CN101120444A (zh) | 2008-02-06 |
WO2006102046A1 (en) | 2006-09-28 |
TW200723443A (en) | 2007-06-16 |
CN100561714C (zh) | 2009-11-18 |
JP4777415B2 (ja) | 2011-09-21 |
US20060220197A1 (en) | 2006-10-05 |
US7402509B2 (en) | 2008-07-22 |
TWI301306B (en) | 2008-09-21 |
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