JP2008529301A5 - - Google Patents

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Publication number
JP2008529301A5
JP2008529301A5 JP2007553098A JP2007553098A JP2008529301A5 JP 2008529301 A5 JP2008529301 A5 JP 2008529301A5 JP 2007553098 A JP2007553098 A JP 2007553098A JP 2007553098 A JP2007553098 A JP 2007553098A JP 2008529301 A5 JP2008529301 A5 JP 2008529301A5
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JP
Japan
Prior art keywords
semiconductor layer
forming
sidewall
gate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2007553098A
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English (en)
Japanese (ja)
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JP4965462B2 (ja
JP2008529301A (ja
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Publication date
Priority claimed from US11/047,448 external-priority patent/US7202117B2/en
Application filed filed Critical
Publication of JP2008529301A publication Critical patent/JP2008529301A/ja
Publication of JP2008529301A5 publication Critical patent/JP2008529301A5/ja
Application granted granted Critical
Publication of JP4965462B2 publication Critical patent/JP4965462B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007553098A 2005-01-31 2005-12-14 プレーナ型ダブルゲートトランジスタを形成する方法 Expired - Fee Related JP4965462B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/047,448 2005-01-31
US11/047,448 US7202117B2 (en) 2005-01-31 2005-01-31 Method of making a planar double-gated transistor
PCT/US2005/045202 WO2006083401A2 (en) 2005-01-31 2005-12-14 Method of making a planar double-gated transistor

Publications (3)

Publication Number Publication Date
JP2008529301A JP2008529301A (ja) 2008-07-31
JP2008529301A5 true JP2008529301A5 (enExample) 2009-02-12
JP4965462B2 JP4965462B2 (ja) 2012-07-04

Family

ID=36757105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007553098A Expired - Fee Related JP4965462B2 (ja) 2005-01-31 2005-12-14 プレーナ型ダブルゲートトランジスタを形成する方法

Country Status (7)

Country Link
US (1) US7202117B2 (enExample)
EP (1) EP1846945A2 (enExample)
JP (1) JP4965462B2 (enExample)
KR (1) KR20070100777A (enExample)
CN (1) CN100514547C (enExample)
TW (1) TWI397128B (enExample)
WO (1) WO2006083401A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7999251B2 (en) 2006-09-11 2011-08-16 International Business Machines Corporation Nanowire MOSFET with doped epitaxial contacts for source and drain
US7872303B2 (en) * 2008-08-14 2011-01-18 International Business Machines Corporation FinFET with longitudinal stress in a channel
CN101901837A (zh) * 2010-06-24 2010-12-01 复旦大学 一种栅控pn场效应晶体管及其控制方法
US9087741B2 (en) 2011-07-11 2015-07-21 International Business Machines Corporation CMOS with dual raised source and drain for NMOS and PMOS
FR2995720B1 (fr) * 2012-09-18 2014-10-24 Commissariat Energie Atomique Procede de realisation d'un dispositif a effet de champ a double grille a grilles independantes
CN104702226A (zh) * 2015-03-31 2015-06-10 宜确半导体（苏州）有限公司 一种改进的共源共栅射频功率放大器
KR102527382B1 (ko) 2016-06-21 2023-04-28 삼성전자주식회사 반도체 소자
FR3060840B1 (fr) * 2016-12-15 2019-05-31 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de realisation d'un dispositif semi-conducteur a espaceurs internes auto-alignes
FR3060841B1 (fr) 2016-12-15 2021-02-12 Commissariat Energie Atomique Procede de realisation d'un dispositif semi-conducteur a espaceurs internes auto-alignes
US10921619B2 (en) 2019-03-12 2021-02-16 Cisco Technology, Inc. Optical modulator with region epitaxially re-grown over polycrystalline silicon

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3063191D1 (en) * 1979-11-29 1983-06-16 Tokyo Shibaura Electric Co Method for manufacturing a semiconductor integrated circuit
US5258635A (en) 1988-09-06 1993-11-02 Kabushiki Kaisha Toshiba MOS-type semiconductor integrated circuit device
US5604368A (en) * 1994-07-15 1997-02-18 International Business Machines Corporation Self-aligned double-gate MOSFET by selective lateral epitaxy
US5773331A (en) 1996-12-17 1998-06-30 International Business Machines Corporation Method for making single and double gate field effect transistors with sidewall source-drain contacts
JP2967477B2 (ja) * 1997-11-26 1999-10-25 日本電気株式会社 半導体装置の製造方法
US6339002B1 (en) 1999-02-10 2002-01-15 International Business Machines Corporation Method utilizing CMP to fabricate double gate MOSFETS with conductive sidewall contacts
US6365465B1 (en) * 1999-03-19 2002-04-02 International Business Machines Corporation Self-aligned double-gate MOSFET by selective epitaxy and silicon wafer bonding techniques
FR2799305B1 (fr) 1999-10-05 2004-06-18 St Microelectronics Sa Procede de fabrication d'un dispositif semi-conducteur a grille enveloppante et dispositif obtenu
WO2001028000A1 (en) 1999-10-14 2001-04-19 Shin-Etsu Handotai Co., Ltd. Method for manufacturing soi wafer, and soi wafer
TW490745B (en) * 2000-05-15 2002-06-11 Ibm Self-aligned double gate MOSFET with separate gates
US6642115B1 (en) * 2000-05-15 2003-11-04 International Business Machines Corporation Double-gate FET with planarized surfaces and self-aligned silicides
WO2002023624A2 (en) * 2000-09-14 2002-03-21 Infineon Technologies North America Corp. Field effect transistor and method of fabrication
US6413802B1 (en) * 2000-10-23 2002-07-02 The Regents Of The University Of California Finfet transistor structures having a double gate channel extending vertically from a substrate and methods of manufacture
FR2823010B1 (fr) * 2001-04-02 2003-08-15 St Microelectronics Sa Procede de fabrication d'un transistor vertical a grille isolee a quadruple canal de conduction, et circuit integre comportant un tel transistor
KR100414217B1 (ko) 2001-04-12 2004-01-07 삼성전자주식회사 게이트 올 어라운드형 트랜지스터를 가진 반도체 장치 및그 형성 방법
US6960806B2 (en) * 2001-06-21 2005-11-01 International Business Machines Corporation Double gated vertical transistor with different first and second gate materials
US6967351B2 (en) * 2001-12-04 2005-11-22 International Business Machines Corporation Finfet SRAM cell using low mobility plane for cell stability and method for forming
US6580132B1 (en) 2002-04-10 2003-06-17 International Business Machines Corporation Damascene double-gate FET
JP3793808B2 (ja) * 2002-05-02 2006-07-05 国立大学法人東京工業大学 電界効果トランジスタの製造方法
JP2004119693A (ja) * 2002-09-26 2004-04-15 Tokyo Inst Of Technol 強誘電体メモリデバイス及び強誘電体メモリデバイスの製造方法
JP2004128079A (ja) 2002-09-30 2004-04-22 Speedfam Co Ltd Ｓｏｉウェハーのための多段局所ドライエッチング方法
KR100481209B1 (ko) * 2002-10-01 2005-04-08 삼성전자주식회사 다중 채널을 갖는 모스 트랜지스터 및 그 제조방법
EP1519420A2 (en) * 2003-09-25 2005-03-30 Interuniversitaire Microelectronica Centrum vzw ( IMEC) Multiple gate semiconductor device and method for forming same
US7105390B2 (en) * 2003-12-30 2006-09-12 Intel Corporation Nonplanar transistors with metal gate electrodes

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