JP2008519437A5 - - Google Patents
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- Publication number
- JP2008519437A5 JP2008519437A5 JP2007539213A JP2007539213A JP2008519437A5 JP 2008519437 A5 JP2008519437 A5 JP 2008519437A5 JP 2007539213 A JP2007539213 A JP 2007539213A JP 2007539213 A JP2007539213 A JP 2007539213A JP 2008519437 A5 JP2008519437 A5 JP 2008519437A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- group
- metal
- layer
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 44
- 229910052751 metal Inorganic materials 0.000 claims 12
- 239000002184 metal Substances 0.000 claims 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 6
- 229910052802 copper Inorganic materials 0.000 claims 6
- 239000010949 copper Substances 0.000 claims 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 5
- 238000004100 electronic packaging Methods 0.000 claims 5
- 229910052750 molybdenum Inorganic materials 0.000 claims 5
- 239000011733 molybdenum Substances 0.000 claims 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 5
- 229910052721 tungsten Inorganic materials 0.000 claims 5
- 239000010937 tungsten Substances 0.000 claims 5
- 229910045601 alloy Inorganic materials 0.000 claims 3
- 239000000956 alloy Substances 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- 230000000737 periodic effect Effects 0.000 claims 3
- 229910001316 Ag alloy Inorganic materials 0.000 claims 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims 2
- 229910001182 Mo alloy Inorganic materials 0.000 claims 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 2
- 229910000831 Steel Inorganic materials 0.000 claims 2
- 229910001080 W alloy Inorganic materials 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 238000005477 sputtering target Methods 0.000 claims 2
- 239000010959 steel Substances 0.000 claims 2
- 239000002131 composite material Substances 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000002071 nanotube Substances 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/978,940 US7416789B2 (en) | 2004-11-01 | 2004-11-01 | Refractory metal substrate with improved thermal conductivity |
| PCT/US2005/039150 WO2006050205A2 (en) | 2004-11-01 | 2005-10-27 | Refractory metal substrate with improved thermal conductivity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008519437A JP2008519437A (ja) | 2008-06-05 |
| JP2008519437A5 true JP2008519437A5 (enExample) | 2008-12-04 |
Family
ID=36010454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007539213A Pending JP2008519437A (ja) | 2004-11-01 | 2005-10-27 | 改良された熱伝導性を有する耐熱金属基板 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7416789B2 (enExample) |
| EP (1) | EP1810330A2 (enExample) |
| JP (1) | JP2008519437A (enExample) |
| KR (1) | KR20070085553A (enExample) |
| CN (1) | CN101160658A (enExample) |
| AU (1) | AU2005302402A1 (enExample) |
| MY (1) | MY139827A (enExample) |
| WO (1) | WO2006050205A2 (enExample) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI388042B (zh) * | 2004-11-04 | 2013-03-01 | 台灣積體電路製造股份有限公司 | 基於奈米管基板之積體電路 |
| JP3862737B1 (ja) * | 2005-10-18 | 2006-12-27 | 栄樹 津島 | クラッド材およびその製造方法、クラッド材の成型方法、クラッド材を用いた放熱基板 |
| TW200737486A (en) * | 2006-03-24 | 2007-10-01 | Lightuning Tech Inc | Semiconductor integrated circuit chip with nano-structure-surface resin passivation and method of fabricating the same |
| US8502373B2 (en) * | 2008-05-05 | 2013-08-06 | Qualcomm Incorporated | 3-D integrated circuit lateral heat dissipation |
| US7956446B2 (en) * | 2008-05-13 | 2011-06-07 | Infineon Technologies Ag | Semiconductor device and method |
| AT11107U1 (de) | 2008-11-20 | 2010-04-15 | Plansee Se | Wärmesenke sowie verfahren zu deren herstellung |
| JP5279639B2 (ja) * | 2009-07-08 | 2013-09-04 | 京セラ株式会社 | グラファイトシート |
| FR2951020B1 (fr) * | 2009-10-01 | 2012-03-09 | Nat De Metrologie Et D Essais Lab | Materiau composite multicouche utilise pour la fabrication de substrats de modules electroniques et procede de fabrication correspondant |
| CN102054804A (zh) * | 2009-11-04 | 2011-05-11 | 江苏鼎启科技有限公司 | 铜钼铜热沉材料及制备方法 |
| CN102051498A (zh) * | 2009-11-04 | 2011-05-11 | 江苏鼎启科技有限公司 | 钨铜、钼铜合金热沉材料及制备方法 |
| US20110129189A1 (en) * | 2009-11-30 | 2011-06-02 | Venkata Adiseshaiah Bhagavatula | Clad metal substrates in optical packages |
| US8563160B2 (en) * | 2010-01-29 | 2013-10-22 | GM Global Technology Operations LLC | Interconnect member for a battery module |
| JP6008117B2 (ja) * | 2012-02-15 | 2016-10-19 | パナソニックIpマネジメント株式会社 | グラファイト構造体およびそれを用いた電子デバイス |
| JP5938577B2 (ja) * | 2012-04-19 | 2016-06-22 | パナソニックIpマネジメント株式会社 | 熱伝導シートおよびその製造方法およびこれを用いた熱伝導体 |
| CN103981382A (zh) * | 2014-05-22 | 2014-08-13 | 武汉理工大学 | 一种高导热金刚石/铜基复合材料的制备方法 |
| JP6227803B2 (ja) | 2014-12-09 | 2017-11-08 | インテル・コーポレーション | 銅合金導電性経路構造体を備えるマイクロ電子基板 |
| US20160192488A1 (en) * | 2014-12-30 | 2016-06-30 | Samsung Electro-Mechanics Co., Ltd. | Circuit board, multilayered substrate having the circuit board and method of manufacturing the circuit board |
| CN104538836B (zh) * | 2014-12-31 | 2018-02-02 | 西安炬光科技股份有限公司 | 一种用于高功率半导体激光器的液体制冷片 |
| WO2017221105A1 (en) | 2016-06-23 | 2017-12-28 | Manoj Harilal Akkad | Method for enhancing resistance to delamination of a coating layer applied to a rigid, monolithic substrate |
| JP6304670B1 (ja) * | 2017-04-14 | 2018-04-04 | 株式会社半導体熱研究所 | 放熱基板、放熱基板電極、半導体パッケージ、及び半導体モジュール |
| EP3471138B1 (en) * | 2017-10-12 | 2021-06-16 | The Goodsystem Corp. | Heat sink plate |
| JP6544727B2 (ja) * | 2017-11-20 | 2019-07-17 | 株式会社半導体熱研究所 | 放熱基板、放熱基板電極、半導体パッケージ、及び半導体モジュール、並びに放熱基板の製造方法 |
| CN110181898A (zh) * | 2018-02-23 | 2019-08-30 | 福特环球技术公司 | 竹纤维复合板及其制造方法 |
| EP3905315A4 (en) | 2019-03-07 | 2022-10-19 | Absolics Inc. | PACKAGING SUBSTRATE AND SEMICONDUCTOR DEVICE EQUIPPED WITH THE SAME |
| JP7433318B2 (ja) | 2019-03-07 | 2024-02-19 | アブソリックス インコーポレイテッド | パッケージング基板及びこれを含む半導体装置 |
| ES3033139T3 (en) | 2019-03-12 | 2025-07-31 | Absolics Inc | Packaging substrate and semiconductor device comprising same |
| CN113272951B (zh) | 2019-03-12 | 2024-04-16 | 爱玻索立克公司 | 封装基板及包括其的半导体装置 |
| KR102622608B1 (ko) | 2019-03-12 | 2024-01-08 | 앱솔릭스 인코포레이티드 | 패키징 기판 및 이의 제조방법 |
| CN113424304B (zh) | 2019-03-12 | 2024-04-12 | 爱玻索立克公司 | 装载盒及对象基板的装载方法 |
| EP3910667B1 (en) * | 2019-03-29 | 2025-08-13 | Absolics Inc. | Packaging glass substrate for semiconductor, packaging substrate for semiconductor, and semiconductor device |
| KR20220089715A (ko) | 2019-08-23 | 2022-06-28 | 앱솔릭스 인코포레이티드 | 패키징 기판 및 이를 포함하는 반도체 장치 |
| JP2021106202A (ja) * | 2019-12-26 | 2021-07-26 | 住友電気工業株式会社 | 板材、放熱材及び板材の製造方法 |
| CN111009496B (zh) * | 2019-12-31 | 2021-07-06 | 长春理工大学 | 一种具有高热导率的半导体衬底及其制备方法 |
| CN111261594A (zh) * | 2020-03-12 | 2020-06-09 | 哈尔滨铸鼎工大新材料科技有限公司 | 一种带有导热通道的铜钼铜载体基板及其制造方法 |
| US11774190B2 (en) * | 2020-04-14 | 2023-10-03 | International Business Machines Corporation | Pierced thermal interface constructions |
| US12224223B1 (en) * | 2020-11-23 | 2025-02-11 | Raytheon Company | Adaptive structure for thermal regulation and optimization |
| CN112941430B (zh) * | 2021-02-01 | 2022-03-04 | 吉林大学 | 一种金刚石复合散热材料的粉末冶金制备方法 |
| EP4466733A4 (en) * | 2022-01-20 | 2025-12-10 | Ericsson Telefon Ab L M | HEAT DISSIPATOR AND ELECTRONIC MODULE |
| WO2023168114A1 (en) * | 2022-03-04 | 2023-09-07 | The Regents Of The University Of California | Bioinspired coatings, materials, and structures for thermal management |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4325776A (en) * | 1977-06-20 | 1982-04-20 | Siemens Aktiengesellschaft | Method for preparing coarse-crystal or single-crystal metal films |
| DE3063506D1 (en) * | 1979-08-31 | 1983-07-07 | Fujitsu Ltd | A tantalum thin film capacitor and process for producing the same |
| JPH0759936B2 (ja) * | 1987-08-08 | 1995-06-28 | 三信工業株式会社 | 船舶推進機の内燃機関制御装置 |
| CA1316303C (en) | 1988-12-23 | 1993-04-20 | Thijs Eerkes | Composite structure |
| US5300809A (en) * | 1989-12-12 | 1994-04-05 | Sumitomo Special Metals Co., Ltd. | Heat-conductive composite material |
| US5011655A (en) * | 1989-12-22 | 1991-04-30 | Inco Alloys International, Inc. | Process of forming a composite structure |
| JPH0738428B2 (ja) | 1990-01-29 | 1995-04-26 | インコ、リミテッド | 複合構造物 |
| EP0537965B1 (en) | 1991-10-12 | 1997-03-05 | Sumitomo Special Metals Company Limited | Process of manufacturing a heat-conductive material |
| US5156923A (en) * | 1992-01-06 | 1992-10-20 | Texas Instruments Incorporated | Heat-transferring circuit substrate with limited thermal expansion and method for making |
| GEP20002074B (en) * | 1992-05-19 | 2000-05-10 | Westaim Tech Inc Ca | Modified Material and Method for its Production |
| JP3462308B2 (ja) * | 1995-06-16 | 2003-11-05 | 住友特殊金属株式会社 | 熱伝導複合材料の製造方法 |
| JP2765621B2 (ja) | 1995-07-31 | 1998-06-18 | 日本電気株式会社 | 半導体装置用パッケージ |
| JPH09312361A (ja) * | 1996-05-22 | 1997-12-02 | Hitachi Metals Ltd | 電子部品用複合材料およびその製造方法 |
| US6139699A (en) * | 1997-05-27 | 2000-10-31 | Applied Materials, Inc. | Sputtering methods for depositing stress tunable tantalum and tantalum nitride films |
| US6555762B2 (en) * | 1999-07-01 | 2003-04-29 | International Business Machines Corporation | Electronic package having substrate with electrically conductive through holes filled with polymer and conductive composition |
| US20010038140A1 (en) | 2000-04-06 | 2001-11-08 | Karker Jeffrey A. | High rigidity, multi-layered semiconductor package and method of making the same |
| JP3841633B2 (ja) * | 2000-10-16 | 2006-11-01 | ヤマハ株式会社 | 半導体レーザモジュール |
| US7651658B2 (en) * | 2002-01-24 | 2010-01-26 | H.C. Starck Inc. | Refractory metal and alloy refining by laser forming and melting |
-
2004
- 2004-11-01 US US10/978,940 patent/US7416789B2/en not_active Expired - Fee Related
-
2005
- 2005-10-27 EP EP20050814799 patent/EP1810330A2/en not_active Withdrawn
- 2005-10-27 AU AU2005302402A patent/AU2005302402A1/en not_active Abandoned
- 2005-10-27 US US11/742,607 patent/US20080102304A1/en not_active Abandoned
- 2005-10-27 KR KR1020077012164A patent/KR20070085553A/ko not_active Withdrawn
- 2005-10-27 WO PCT/US2005/039150 patent/WO2006050205A2/en not_active Ceased
- 2005-10-27 CN CNA2005800457228A patent/CN101160658A/zh active Pending
- 2005-10-27 JP JP2007539213A patent/JP2008519437A/ja active Pending
- 2005-10-28 MY MYPI20055110A patent/MY139827A/en unknown
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