JP2008166698A - トランジスタ、トランジスタの製造方法及び平板表示装置 - Google Patents
トランジスタ、トランジスタの製造方法及び平板表示装置 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 claims abstract description 94
- 239000002184 metal Substances 0.000 claims abstract description 94
- 239000003054 catalyst Substances 0.000 claims abstract description 84
- 238000000034 method Methods 0.000 claims abstract description 53
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 48
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 48
- 239000010703 silicon Substances 0.000 claims abstract description 48
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000013078 crystal Substances 0.000 claims abstract description 29
- 239000010410 layer Substances 0.000 claims description 198
- 238000002425 crystallisation Methods 0.000 claims description 114
- 230000008025 crystallization Effects 0.000 claims description 81
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 59
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 52
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 239000011229 interlayer Substances 0.000 claims description 10
- 150000004767 nitrides Chemical class 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- 229910052787 antimony Inorganic materials 0.000 claims description 5
- 229910052793 cadmium Inorganic materials 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 229910052703 rhodium Inorganic materials 0.000 claims description 5
- 229910052707 ruthenium Inorganic materials 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- 229910004205 SiNX Inorganic materials 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 3
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000009413 insulation Methods 0.000 abstract 2
- 239000010408 film Substances 0.000 description 32
- 238000010438 heat treatment Methods 0.000 description 18
- 239000010409 thin film Substances 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000012297 crystallization seed Substances 0.000 description 4
- 238000007715 excimer laser crystallization Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000006356 dehydrogenation reaction Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000010944 silver (metal) Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000007790 solid phase Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
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- 230000006698 induction Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
【解決手段】本発明のトランジスタは、基板101と、基板101上に形成されたソース領域、チャンネル領域及びドレイン領域を含むアクティブ領域111と、アクティブ領域111上に形成されたゲート絶縁膜112と、ゲート絶縁膜112上に形成されたゲート電極113とを含み、アクティブ領域111は大型シリコン結晶化法を利用して結晶化され、結晶化された結晶粒は第1結晶化工程により形成された第1結晶化部分と第2結晶化工程により形成された第2結晶化部分が異なることを特徴とする。
【選択図】図3
Description
ここで、固相結晶化法は、薄膜トランジスタが適用されるディスプレー装置の基板を形成する物質であるガラスの変形温度約700℃以下の温度で、非晶質シリコン層を数時間乃至数十時間かけてアニーリング(annealing)する方法である。エキシマレーザー結晶化法はエキシマレーザーをシリコン層に走査して非常に短い時間、局部的に高い温度に加熱して結晶化する方法であり、金属誘導結晶化法はニッケル、パラジウム、金、アルミニウムなどの金属を非晶質シリコン層と接触させて注入し、上記金属により非晶質シリコンからポリシリコンに相変化が誘導される現象を利用する方法である。また、金属誘導側面結晶化法は金属とシリコンが反応して生成されたシリサイドを側面に続けて伝播しながら順にシリコンの結晶化を誘導する方法を利用してシリコン層を結晶化する方法である。
104…キャッピング層
105…金属触媒層
106…第1熱処理する第1結晶化工程
108…第2熱処理する第2結晶化工程
110…多結晶シリコン
Claims (28)
- 基板と、
前記基板上に形成されたソース領域、チャネル領域及びドレイン領域を含むアクティブ領域と、
前記アクティブ領域上に形成されたゲート絶縁膜と、
前記ゲート絶縁膜の上に形成されたゲート電極とを含み、
前記アクティブ領域は、大型シリコン結晶化法を利用して結晶化され、結晶化された結晶粒は第1結晶化工程により形成された第1結晶化部分と第2結晶化工程により形成された第2結晶化部分が異なることを特徴とするトランジスタ。 - 前記アクティブ領域では、前記第1結晶化部分が第2結晶化部分よりも小さいことを特徴とする請求項1に記載のトランジスタ。
- 前記アクティブ領域は、金属触媒を含むことを特徴とする請求項1または請求項2に記載のトランジスタ。
- 前記アクティブ領域は、前記第1結晶化部分が前記第2結晶化部分より金属触媒の濃度が高いことを特徴とする請求項3に記載のトランジスタ。
- 前記金属触媒は、Ni、Pd、Ti、Ag、Au、Al、Sn、Sb、Cu、Co、Mo、Tr、Ru、Rh、Cd及びPtの中から選択されるいずれか一つ、またはこれらの組み合わせであることを特徴とする請求項3または請求項4に記載のトランジスタ。
- 前記アクティブ領域のうち、ソース領域及びドレイン領域は、p型不純物がドーピングされて形成されていることを特徴とする請求項1乃至請求項5のいずれか1項に記載のトランジスタ。
- 前記アクティブ領域のうち、ソース領域及びドレイン領域は、n型不純物がドーピングされて形成されていることを特徴とする請求項1乃至請求項5のいずれか1項に記載のトランジスタ。
- 前記ゲート電極は、MoW、Ti、Cu、AlNd、Al、Cr、Mo合金、Cu合金及びAl合金の中から選択されるいずれか一つであることを特徴とする請求項1乃至請求項7のいずれか1項に記載のトランジスタ。
- 前記基板と前記アクティブ領域との間には、バッファ層がさらに形成されていることを特徴とする請求項1乃至請求項8のいずれか1項に記載のトランジスタ。
- 前記ゲート絶縁膜及び前記ゲート電極の表面に形成された層間絶縁膜と、
前記層間絶縁膜及び前記ゲート絶縁膜を貫通して前記ソース領域に接続されたソース電極と、
前記層間絶縁膜及び前記ゲート絶縁膜を貫通して前記ドレイン領域に接続されたドレイン電極と
をさらに含むことを特徴とする請求項1乃至請求項9のいずれか1項に記載のトランジスタ。 - 前記大型シリコン結晶化法により形成されたアクティブ領域には、結晶粒の境界が存在しないことを特徴とする請求項1乃至請求項10のいずれか1項に記載のトランジスタ。
- 前記大型シリコン結晶化法により形成されたアクティブ領域には、多くても一つの結晶粒の境界が存在することを特徴とする請求項1乃至請求項10のいずれか1項に記載のトランジスタ。
- 基板を準備する段階と、
前記基板上に非晶質シリコン層を形成する段階と、
前記非晶質シリコン層上にキャッピング層を形成する段階と、
前記キャッピング層上に金属触媒層を形成する段階と、
前記金属触媒層の金属触媒が前記キャッピング層を貫通して前記非晶質シリコン層まで拡散し、大型シリコン結晶化法によって非晶質シリコンを多結晶シリコンに初期結晶化する第1結晶化段階と、
前記金属触媒層と前記キャッピング層とを除去する段階と、
前記金属触媒により前記非晶質シリコンを大型シリコン結晶化法によって前記多結晶シリコンに結晶化する第2結晶化段階と
を含むことを特徴とするトランジスタの製造方法。 - 前記第2結晶化段階の後に、
前記多結晶シリコン層をパターニングして半導体層を形成する段階と、
前記基板上にゲート絶縁膜、ゲート電極、層間絶縁膜及びソース/ドレイン電極を形成する段階とをさらに含むことを特徴とする請求項13に記載のトランジスタの製造方法。 - 前記金属触媒層と前記キャッピング層とを除去する段階は、
前記金属触媒が結晶化されてそれぞれの結晶粒の大きさが、金属触媒の平均距離の半分以下のときに、前記金属触媒層と前記キャッピング層とを除去することを特徴とする請求項13または請求項14に記載のトランジスタの製造方法。 - 前記基板上に非晶質シリコン層を形成する段階の前に、バッファ層を形成する段階をさらに含むことを特徴とする請求項13乃至請求項15のいずれか1項に記載のトランジスタの製造方法。
- 前記第1結晶化段階で生成された多結晶シリコン層は、前記第2結晶化段階で生成された多結晶シリコン層と結晶性が異なることを特徴とする請求項13乃至請求項16のいずれか1項に記載のトランジスタの製造方法。
- 前記第1結晶化段階で生成された多結晶シリコン層の結晶粒は、前記第2結晶化段階で生成された多結晶シリコン層の結晶粒より小さいことを特徴とする請求項13乃至請求項17のいずれか1項に記載のトランジスタの製造方法。
- 前記第1結晶化段階で生成された多結晶シリコン層は、前記第2結晶化段階で生成された多結晶シリコン層より前記金属触媒の濃度が高いことを特徴とする請求項13乃至請求項18のいずれか1項に記載のトランジスタの製造方法。
- 前記大型シリコン結晶化法により第1結晶化段階で形成された多結晶シリコン層には、結晶粒の境界が存在しないことを特徴とする請求項13乃至請求項19のいずれか1項に記載のトランジスタの製造方法。
- 前記大型シリコン結晶化法により第1結晶化段階で形成された多結晶シリコン層には、多くても一つの結晶粒の境界が存在することを特徴とする請求項13乃至請求項19のいずれか1項に記載のトランジスタの製造方法。
- 前記大型シリコン結晶化法により第2結晶化段階で形成された多結晶シリコン層には、結晶粒の境界が存在しないことを特徴とする請求項13乃至請求項19のいずれか1項に記載のトランジスタの製造方法。
- 前記大型シリコン結晶化法により第2結晶化段階で形成された多結晶シリコン層には、多くても一つの結晶粒の境界が存在することを特徴とする請求項13乃至請求項19のいずれか1項に記載のトランジスタの製造方法。
- 前記金属触媒層は、Ni、Pd、Ti、Ag、Au、Al、Sn、Sb、Cu、Co、Mo、Tr、Ru、Rh、Cd及びPtの中から選択されるいずれか一つ、またはこれらの組み合わせであることを特徴とする請求項13乃至請求項23のいずれか1項に記載のトランジスタの製造方法。
- 前記キャッピング層は、絶縁膜であることを特徴とする請求項13乃至請求項24のいずれか1項に記載のトランジスタの製造方法。
- 前記キャッピング層は、酸化膜及び窒化膜(ナイトライド(SiNx))の中から選択されるいずれか一つであることを特徴とする請求項13乃至請求項24のいずれか1項に記載のトランジスタの製造方法。
- 前記酸化膜は、二酸化ケイ素(SiO2)、アルミナ(Al2O3)、二酸化ハフニウム(HfO2)、ジルコニア(ZrO2)の中から選択されるいずれか一つの物質から形成されることを特徴とする請求項26に記載のトランジスタの製造方法。
- 請求項13乃至請求項27のいずれか1項に記載された方法で製造されたトランジスタを含むことを特徴とする平板表示装置。
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EP1953810A3 (en) | 2008-10-22 |
CN101211979B (zh) | 2010-08-25 |
CN101211979A (zh) | 2008-07-02 |
EP1953810A2 (en) | 2008-08-06 |
US20100219415A1 (en) | 2010-09-02 |
KR100839735B1 (ko) | 2008-06-19 |
US8247316B2 (en) | 2012-08-21 |
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US20080157083A1 (en) | 2008-07-03 |
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