JP2008124275A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 61
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 52
- 229910017566 Cu-Mn Inorganic materials 0.000 claims abstract description 133
- 229910017871 Cu—Mn Inorganic materials 0.000 claims abstract description 133
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 133
- 239000000956 alloy Substances 0.000 claims abstract description 133
- 230000004888 barrier function Effects 0.000 claims abstract description 43
- 238000000151 deposition Methods 0.000 claims abstract description 34
- 238000006243 chemical reaction Methods 0.000 claims abstract description 18
- 238000011049 filling Methods 0.000 claims abstract description 13
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 81
- 230000015572 biosynthetic process Effects 0.000 claims description 25
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 claims description 23
- 229910052760 oxygen Inorganic materials 0.000 claims description 19
- 235000019253 formic acid Nutrition 0.000 claims description 15
- 238000004544 sputter deposition Methods 0.000 claims description 13
- 239000007795 chemical reaction product Substances 0.000 claims description 10
- 238000010574 gas phase reaction Methods 0.000 claims description 10
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 claims description 8
- 150000001735 carboxylic acids Chemical class 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 6
- 238000009713 electroplating Methods 0.000 claims description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 4
- 239000000047 product Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 235
- 239000010408 film Substances 0.000 description 189
- 239000011572 manganese Substances 0.000 description 64
- 239000011229 interlayer Substances 0.000 description 56
- 230000008569 process Effects 0.000 description 47
- 238000005755 formation reaction Methods 0.000 description 26
- 125000004429 atom Chemical group 0.000 description 24
- 238000009792 diffusion process Methods 0.000 description 21
- 239000000758 substrate Substances 0.000 description 18
- 238000010438 heat treatment Methods 0.000 description 16
- 238000005530 etching Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 239000001257 hydrogen Substances 0.000 description 13
- 229910052739 hydrogen Inorganic materials 0.000 description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 12
- 239000001301 oxygen Substances 0.000 description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 10
- 238000007747 plating Methods 0.000 description 9
- 238000012546 transfer Methods 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N acetic acid Substances CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 229910017028 MnSi Inorganic materials 0.000 description 3
- 229910017278 MnxOy Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000003848 UV Light-Curing Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910000914 Mn alloy Inorganic materials 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 229910020177 SiOF Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- ICBUGLMSHZDVLP-UHFFFAOYSA-N [Si]=O.[Mn] Chemical compound [Si]=O.[Mn] ICBUGLMSHZDVLP-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76814—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
- H01L21/76861—Post-treatment or after-treatment not introducing additional chemical elements into the layer
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
- H01L21/76861—Post-treatment or after-treatment not introducing additional chemical elements into the layer
- H01L21/76862—Bombardment with particles, e.g. treatment in noble gas plasmas; UV irradiation
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
- H01L21/76861—Post-treatment or after-treatment not introducing additional chemical elements into the layer
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76873—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for electroplating
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- H01L2221/10—Applying interconnections to be used for carrying current between separate components within a device
- H01L2221/1068—Formation and after-treatment of conductors
- H01L2221/1073—Barrier, adhesion or liner layers
- H01L2221/1084—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L2221/1089—Stacks of seed layers
Abstract
【解決手段】前記Cu−Mn合金層の形成の後、大気に露出することなく、前記Cu−Mn合金層上に前記第1のCu層を堆積する工程を設ける。
【選択図】図8
Description
前記内壁面をCu−Mn合金層により覆う工程と、前記Cu−Mn合金層上に第1のCu層を堆積する工程と、前記第1のCu層上に第2のCu層を堆積し、前記第2のCu層により前記開口部を充填する工程と、前記内壁面上に、前記Cu−Mn合金層中のMn原子と前記絶縁膜との反応により、バリア層を形成する工程と、を含む半導体装置の製造方法であって、前記Cu−Mn合金層の形成工程の後、前記Cu−Mn合金層を大気に露出することなく真空環境に維持し、前記Cu−Mn合金層上に前記第1のCu層を堆積する工程を含むことを特徴とする半導体装置の製造方法を提供する。
図4(A)〜6(I)は、本発明の第1の実施形態によるCu配線構造を有する半導体装置の製造工程を示す。
さらに前記図5(F)の工程において、同一の成膜装置、例えば前記Cu−Mn合金層26をスパッタリング法により形成した場合には同じスパッタ装置、CVD法により形成した場合には同じCVD装置、ALD法により形成した場合には同じALD装置中において、前記Cu−Mn合金層26の成膜に引き続き、真空を破ることなく、Cu層27aを、例えば5〜100nmの膜厚に形成する。これにより、前記開口部内壁Cu−Mn合金層26上に厚さが約3〜10nmのCu層が形成される。
HCOOH+Mn→Mn(HCOO)2+H2 (1)
により、気相反応生成物Mn(HCOO)2およびH2を形成し、その結果、Mnは前記Cu層27から系外へと、連続的に除去される。なお、上記除去工程においては、蟻酸以外に、カルボン酸、ヘキサフルオロアセチルアセトネート、H2O、CO2などを使うことも可能である。
4HCOOH+2MnO2→Mn(HCOO)2+H2O+O2 (2)
により、気相反応生成物Mn(HCOO)2、H2OおよびO2を形成し、その結果、Mnは前記Cu層27から系外へと、連続的に除去される。
[第2の実施形態]
次に本発明の第2の実施形態によるCu配線構造の作製工程を、図9(A)〜(C)を参照しながら説明する。ただし図中、先に説明した部分に対応する部分には同一の参照符号を付し、説明を省略する。
[第3の実施形態]
次に本発明の第3の実施形態によるCu配線構造の作製工程を、図10(A)〜(D)を参照しながら説明する。ただし図中、先に説明した部分に対応する部分には同一の参照符号を付し、説明を省略する。
[第4の実施形態]
次に本発明の第4の実施形態によるCu配線構造の作製工程を、図11(A)〜(C)を参照しながら説明する。ただし図中、先に説明した部分に対応する部分には同一の参照符号を付し、説明を省略する。
[第5の実施形態]
次に本発明の第5の実施形態によるCu配線構造の作製工程を、図12(A)〜(C)を参照しながら説明する。ただし図中、先に説明した部分に対応する部分には同一の参照符号を付し、説明を省略する。
[第6の実施形態]
図13は、本発明の方法により作製されたCu多層配線構造を有する半導体装置40の構成を示す。
前記内壁面をCu−Mn合金層により覆う工程と、
前記Cu−Mn合金層上に第1のCu層を堆積する工程と、
前記第1のCu層上に第2のCu層を堆積し、前記第2のCu層により前記開口部を充填する工程と、
前記内壁面上に、前記Cu−Mn合金層中のMn原子と前記絶縁膜との反応により、バリア層を形成する工程と、
を含む半導体装置の製造方法であって、
前記Cu−Mn合金層の形成工程の後、前記Cu−Mn合金層を大気に露出することなく真空環境に維持し、前記Cu−Mn合金層上に前記第1のCu層を堆積する工程を含むことを特徴とする半導体装置の製造方法。
前記内壁面をCu−Mn合金層により覆う工程と、
前記Cu−Mn合金層上にCu層を堆積し、前記Cu層により前記開口部を充填する工程と、
前記内壁面上に、前記Cu−Mn合金層中のMn原子と前記絶縁膜との反応により、バリア層を形成する工程と、
を含む半導体装置の製造方法であって、
前記Cu−Mn合金層形成工程の後で前記Cu層の堆積工程の前に、前記Cu−Mn合金層表面を水素終端する工程を含むことを特徴とする半導体装置の製造方法。
前記内壁面をCu−Mn合金層により覆う工程と、
前記Cu−Mn合金層上に第1のCu層を堆積する工程と、
前記第1のCu層上に第2のCu層を堆積し、前記第2のCu層により前記開口部を充填する工程と、
前記内壁面上に、前記Cu−Mn合金層中のMn原子と前記絶縁膜との反応により、バリア層を形成する工程と、
を含む半導体装置の製造方法であって、
前記Cu−Mn合金層形成工程の後で前記第1のCu層の堆積工程の前に、前記Cu−Mn合金層表面をリスパッタする工程を含むことを特徴とする半導体装置の製造方法。
前記内壁面をCu−Mn合金層により覆う工程と、
前記Cu−Mn合金層上にCu層を堆積する工程と、
前記内壁面上に、前記Cu−Mn合金層中のMn原子と前記絶縁膜との反応により、バリア層を形成する工程と、
を含む半導体装置の製造方法であって、
前記Cu−Mn合金層形成工程の後で前記Cu層の堆積工程の前に、前記Cu−Mn合金層表面をMn酸化物と反応して気相反応生成物を形成するガスに曝露する工程を含むことを特徴とする半導体装置の製造方法。
12,14,22,24 エッチングストッパ膜
13A,23A ビアホール
15A,25A 配線溝
16,26 Cu−Mn合金膜
17,27 Cu層
18M,28M 拡散バリア膜
18,28 酸化マンガン膜
40 半導体装置
41 シリコン基板
41A 素子領域
41B 素子分離領域
41a,41b,41c,41d 拡散領域
42 ゲート絶縁膜
43 ゲート電極
43a,43b 側壁絶縁膜
44〜47 層間絶縁膜
44P,44Q,46P,46W,47P,47Q コンタクトプラグ
45A,45B,46A〜46C,47A,47B Cu配線パターン
45a,45b,46a〜46c,47a,47b 拡散バリア膜
Claims (10)
- 絶縁膜中に、内壁面で画成された開口部を形成する工程と、
前記内壁面をCu−Mn合金層により覆う工程と、
前記Cu−Mn合金層上に第1のCu層を堆積する工程と、
前記第1のCu層上に第2のCu層を堆積し、前記第2のCu層により前記開口部を充填する工程と、
前記内壁面上に、前記Cu−Mn合金層中のMn原子と前記絶縁膜との反応により、バリア層を形成する工程と、
を含む半導体装置の製造方法であって、
前記Cu−Mn合金層の形成工程の後、前記Cu−Mn合金層を大気に露出することなく真空環境に維持し、前記Cu−Mn合金層上に前記第1のCu層を堆積する工程を含むことを特徴とする半導体装置の製造方法。 - 前記真空環境は、10-7Pa以下の真空度を有することを特徴とする請求項1記載の半導体装置の製造方法。
- 前記Cu−Mn合金層はスパッタリング法を用いて形成され、前記第1のCu層はスパッタリング法を用いて形成され、前記第2のCu層は電解メッキ法を用いて形成されることを特徴とする請求項1または2記載の半導体装置の製造方法。
- 前記第1のCu層は、前記開口部の内壁面において3〜10nmの膜厚に形成されることを特徴とする請求項1乃至3のいずれか一項に記載の半導体装置の製造方法。
- 絶縁膜中に、内壁面で画成された開口部を形成する工程と、
前記内壁面をCu−Mn合金層により覆う工程と、
前記Cu−Mn合金層上にCu層を堆積し、前記Cu層により前記開口部を充填する工程と、
前記内壁面上に、前記Cu−Mn合金層中のMn原子と前記絶縁膜との反応により、バリア層を形成する工程と、
を含む半導体装置の製造方法であって、
前記Cu−Mn合金層形成工程の後で前記Cu層の堆積工程の前に、前記Cu−Mn合金層表面を水素終端する工程を含むことを特徴とする半導体装置の製造方法。 - 絶縁膜中に、内壁面で画成された開口部を形成する工程と、
前記内壁面をCu−Mn合金層により覆う工程と、
前記Cu−Mn合金層上に第1のCu層を堆積する工程と、
前記第1のCu層上に第2のCu層を堆積し、前記第2のCu層により前記開口部を充填する工程と、
前記内壁面上に、前記Cu−Mn合金層中のMn原子と前記絶縁膜との反応により、バリア層を形成する工程と、
を含む半導体装置の製造方法であって、
前記Cu−Mn合金層形成工程の後で前記第1のCu層の堆積工程の前に、前記Cu−Mn合金層表面をリスパッタする工程を含むことを特徴とする半導体装置の製造方法。 - 絶縁膜中に、内壁面で画成された開口部を形成する工程と、
前記内壁面をCu−Mn合金層により覆う工程と、
前記Cu−Mn合金層上にCu層を堆積する工程と、
前記内壁面上に、前記Cu−Mn合金層中のMn原子と前記絶縁膜との反応により、バリア層を形成する工程と、
を含む半導体装置の製造方法であって、
前記Cu−Mn合金層形成工程の後で前記Cu層の堆積工程の前に、前記Cu−Mn合金層表面をMn酸化物と反応して気相反応生成物を形成するガスに曝露する工程を含むことを特徴とする半導体装置の製造方法。 - 前記Mn酸化物と反応して前記気相反応生成物を形成する前記ガスに曝露する工程は、100〜400℃で行われることを特徴とする請求項7記載の半導体装置の製造方法。
- 前記バリア層を形成する工程は、Mnと反応して気相生成物を形成する雰囲気に曝露しながら実行されることを特徴とする請求項1〜8のうち、いずれか一項記載の半導体装置の製造方法。
- 前記MnまたはMn酸化物と反応して前記気相反応生成物を形成する前記ガスは、蟻酸、カルボン酸、ヘキサフルオロアセチルアセトネート、H2O、CO2の少なくとも一つを含むガスであることを特徴とする請求項8または9記載の半導体装置の製造方法。
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