JP2007535816A5 - - Google Patents

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Publication number
JP2007535816A5
JP2007535816A5 JP2007510763A JP2007510763A JP2007535816A5 JP 2007535816 A5 JP2007535816 A5 JP 2007535816A5 JP 2007510763 A JP2007510763 A JP 2007510763A JP 2007510763 A JP2007510763 A JP 2007510763A JP 2007535816 A5 JP2007535816 A5 JP 2007535816A5
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JP
Japan
Prior art keywords
showerhead electrode
gas
electrode assembly
distribution member
showerhead
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JP2007510763A
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English (en)
Japanese (ja)
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JP4980890B2 (ja
JP2007535816A (ja
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Priority claimed from US10/835,456 external-priority patent/US8317968B2/en
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Publication of JP2007535816A5 publication Critical patent/JP2007535816A5/ja
Application granted granted Critical
Publication of JP4980890B2 publication Critical patent/JP4980890B2/ja
Anticipated expiration legal-status Critical
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JP2007510763A 2004-04-30 2005-04-11 シャワーヘッド電極アセンブリ、真空室及びプラズマエッチングの制御方法 Expired - Lifetime JP4980890B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/835,456 US8317968B2 (en) 2004-04-30 2004-04-30 Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing
US10/835,456 2004-04-30
PCT/US2005/012210 WO2005111267A2 (en) 2004-04-30 2005-04-11 Gas distribution member supplying process gas and rf power for plasma processing

Publications (3)

Publication Number Publication Date
JP2007535816A JP2007535816A (ja) 2007-12-06
JP2007535816A5 true JP2007535816A5 (enExample) 2008-05-29
JP4980890B2 JP4980890B2 (ja) 2012-07-18

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JP2007510763A Expired - Lifetime JP4980890B2 (ja) 2004-04-30 2005-04-11 シャワーヘッド電極アセンブリ、真空室及びプラズマエッチングの制御方法

Country Status (8)

Country Link
US (2) US8317968B2 (enExample)
EP (1) EP1769101A4 (enExample)
JP (1) JP4980890B2 (enExample)
KR (1) KR101280184B1 (enExample)
CN (1) CN101018884B (enExample)
IL (1) IL178684A (enExample)
TW (1) TWI406599B (enExample)
WO (1) WO2005111267A2 (enExample)

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