JP2007524226A5 - - Google Patents

Download PDF

Info

Publication number
JP2007524226A5
JP2007524226A5 JP2006517266A JP2006517266A JP2007524226A5 JP 2007524226 A5 JP2007524226 A5 JP 2007524226A5 JP 2006517266 A JP2006517266 A JP 2006517266A JP 2006517266 A JP2006517266 A JP 2006517266A JP 2007524226 A5 JP2007524226 A5 JP 2007524226A5
Authority
JP
Japan
Prior art keywords
core support
coolant
flow path
housing
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006517266A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007524226A (ja
Filing date
Publication date
Priority claimed from US10/607,407 external-priority patent/US7002443B2/en
Application filed filed Critical
Publication of JP2007524226A publication Critical patent/JP2007524226A/ja
Publication of JP2007524226A5 publication Critical patent/JP2007524226A5/ja
Pending legal-status Critical Current

Links

JP2006517266A 2003-06-25 2004-06-14 磁気回路要素を冷却する方法及び装置 Pending JP2007524226A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/607,407 US7002443B2 (en) 2003-06-25 2003-06-25 Method and apparatus for cooling magnetic circuit elements
PCT/US2004/018941 WO2005001853A2 (en) 2003-06-25 2004-06-14 Method and apparatus for cooling magnetic circuit elements

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011092788A Division JP5606987B2 (ja) 2003-06-25 2011-04-19 磁気回路要素を冷却する方法及び装置

Publications (2)

Publication Number Publication Date
JP2007524226A JP2007524226A (ja) 2007-08-23
JP2007524226A5 true JP2007524226A5 (https=) 2007-10-04

Family

ID=33540258

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2006517266A Pending JP2007524226A (ja) 2003-06-25 2004-06-14 磁気回路要素を冷却する方法及び装置
JP2011092788A Expired - Lifetime JP5606987B2 (ja) 2003-06-25 2011-04-19 磁気回路要素を冷却する方法及び装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011092788A Expired - Lifetime JP5606987B2 (ja) 2003-06-25 2011-04-19 磁気回路要素を冷却する方法及び装置

Country Status (7)

Country Link
US (1) US7002443B2 (https=)
EP (1) EP1644945A4 (https=)
JP (2) JP2007524226A (https=)
KR (1) KR101151260B1 (https=)
CN (1) CN1809903B (https=)
TW (1) TWI282993B (https=)
WO (1) WO2005001853A2 (https=)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050259709A1 (en) 2002-05-07 2005-11-24 Cymer, Inc. Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
US7087914B2 (en) * 2004-03-17 2006-08-08 Cymer, Inc High repetition rate laser produced plasma EUV light source
US20060222034A1 (en) * 2005-03-31 2006-10-05 Cymer, Inc. 6 Khz and above gas discharge laser system
US20070071047A1 (en) * 2005-09-29 2007-03-29 Cymer, Inc. 6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements
US7679029B2 (en) * 2005-10-28 2010-03-16 Cymer, Inc. Systems and methods to shape laser light as a line beam for interaction with a substrate having surface variations
US7471455B2 (en) 2005-10-28 2008-12-30 Cymer, Inc. Systems and methods for generating laser light shaped as a line beam
US7317179B2 (en) * 2005-10-28 2008-01-08 Cymer, Inc. Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate
US7864825B2 (en) * 2006-08-10 2011-01-04 Lasertel, Inc. Method and system for a laser diode bar array assembly
US12009144B2 (en) * 2007-04-05 2024-06-11 Grant A. MacLennan Cooled / cast inductor apparatus and method of use thereof
JP2009212147A (ja) * 2008-02-29 2009-09-17 Shinshu Univ 大電流用インダクタ及びその製造方法
JP5348948B2 (ja) * 2008-06-20 2013-11-20 株式会社東芝 変圧器
US20090322460A1 (en) * 2008-06-25 2009-12-31 Lin Hsun-I High-frequency switching-type direct-current rectifier
KR101711145B1 (ko) * 2010-09-03 2017-03-13 삼성전자주식회사 휴대용 4중극자 이온트랩 질량분석기
DE102011005778A1 (de) * 2011-03-18 2012-09-20 Carl Zeiss Smt Gmbh Optisches Element
US9524820B2 (en) 2012-11-13 2016-12-20 Raytheon Company Apparatus and method for thermal management of magnetic devices
US9349523B2 (en) 2013-07-15 2016-05-24 Raytheon Company Compact magnetics assembly
US10892140B2 (en) * 2018-07-27 2021-01-12 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
US9373436B2 (en) * 2014-07-07 2016-06-21 Hamilton Sundstrand Corporation Liquid cooled inductors
US9911532B2 (en) 2014-08-25 2018-03-06 Raytheon Company Forced convection liquid cooling of fluid-filled high density pulsed power capacitor with native fluid
CN104319072A (zh) * 2014-10-21 2015-01-28 国家电网公司 变压器降温换热装置
US9564266B2 (en) 2014-10-31 2017-02-07 Raytheon Company Power converter magnetics assembly
US9730366B2 (en) 2015-02-10 2017-08-08 Raytheon Company Electromagnetic interference suppressing shield
JPWO2016143033A1 (ja) * 2015-03-09 2018-02-01 ギガフォトン株式会社 高電圧パルス発生装置
US10804886B2 (en) 2016-06-21 2020-10-13 Eagle Harbor Technologies, Inc. High voltage pre-pulsing
US10141095B2 (en) * 2016-11-04 2018-11-27 Ford Global Technologies, Llc Inductor cooling systems and methods
US10529479B2 (en) * 2016-11-04 2020-01-07 Ford Global Technologies, Llc Inductor cooling systems and methods
US11025031B2 (en) 2016-11-29 2021-06-01 Leonardo Electronics Us Inc. Dual junction fiber-coupled laser diode and related methods
EP3330983B1 (en) * 2016-11-30 2023-10-04 Danfoss Editron Oy An inductive device
EP3567619B1 (en) 2018-05-08 2020-11-25 Abiomed Europe GmbH Corrosion-resistant permanent magnet and intravascular blood pump comprising the magnet
US11810761B2 (en) 2018-07-27 2023-11-07 Eagle Harbor Technologies, Inc. Nanosecond pulser ADC system
US11406004B2 (en) 2018-08-13 2022-08-02 Leonardo Electronics Us Inc. Use of metal-core printed circuit board (PCB) for generation of ultra-narrow, high-current pulse driver
DE102019121924B4 (de) 2018-08-14 2026-01-22 Leonardo Electronics Us Inc. Laserbaugruppe und zugehörige verfahren
US11348717B2 (en) 2018-10-31 2022-05-31 Hamilton Sundstrand Corporation Thermal management of high power inductors
US11296481B2 (en) 2019-01-09 2022-04-05 Leonardo Electronics Us Inc. Divergence reshaping array
TWI749546B (zh) 2019-05-14 2021-12-11 美商希瑪有限責任公司 用於調變光源波長的裝置及方法
US12374853B2 (en) 2019-05-22 2025-07-29 Cymer, Llc Control system for a plurality of deep ultraviolet optical oscillators
KR102562520B1 (ko) 2019-05-22 2023-08-01 사이머 엘엘씨 다수의 레이저 빔을 생성하는 장치 및 방법
US11752571B1 (en) 2019-06-07 2023-09-12 Leonardo Electronics Us Inc. Coherent beam coupler
EP3792683A1 (en) 2019-09-16 2021-03-17 Leonardo Electronics US Inc. Asymmetric input intensity hexagonal homogenizer
US11594364B2 (en) * 2020-03-18 2023-02-28 Hamilton Sundstrand Corporation Systems and methods for thermal management in inductors
US11967484B2 (en) 2020-07-09 2024-04-23 Eagle Harbor Technologies, Inc. Ion current droop compensation
US12100541B2 (en) * 2020-09-14 2024-09-24 Intel Corporation Embedded cooling channel in magnetics
DE102020212388A1 (de) * 2020-09-30 2022-03-31 Mahle International Gmbh Bodenbaugruppe für eine induktive Ladevorrichtung
US12040118B2 (en) * 2020-11-30 2024-07-16 Hamilton Sundstrand Corporation Cooling system for a transformer and a method of cooling a transformer
KR20230124593A (ko) 2020-12-22 2023-08-25 사이머 엘엘씨 하이브리드 비선형 자성 재료를 이용한 펄스형 파워 회로 및 이를 포함하는 인덕터
KR20220157048A (ko) * 2021-05-20 2022-11-29 삼성전기주식회사 코일 부품
WO2023287518A1 (en) 2021-07-15 2023-01-19 Cymer, Llc Pulsed power systems with controlled reactor reset
CN118202535A (zh) 2021-10-21 2024-06-14 西默有限公司 调节激光电极的装置和方法
US20230403817A1 (en) * 2022-05-17 2023-12-14 Hamilton Sundstrand Corporation Fluid-cooled electrical component
US11824542B1 (en) 2022-06-29 2023-11-21 Eagle Harbor Technologies, Inc. Bipolar high voltage pulser
JP7833099B2 (ja) 2022-09-29 2026-03-18 イーグル ハーバー テクノロジーズ，インク． 高電圧プラズマ制御
CN115831643A (zh) * 2022-11-07 2023-03-21 北京科益虹源光电技术有限公司 磁芯散热器及磁脉冲压缩开关、高压脉冲电源

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2547065A (en) * 1947-10-30 1951-04-03 Ohio Crankshaft Co Fluid cooled core for electromagnetic apparatus
JPS5138045B2 (https=) * 1971-08-20 1976-10-19
JPS53141319U (https=) * 1977-04-14 1978-11-08
JPS54147656U (https=) * 1978-04-06 1979-10-13
GB2096403B (en) * 1981-04-03 1985-10-02 Marconi Co Ltd An inductor
JPS5893206A (ja) * 1981-11-30 1983-06-02 Toshiba Corp 変圧器
US4716013A (en) * 1983-04-29 1987-12-29 Westinghouse Electric Corp. Nuclear reactor
US4770846A (en) * 1984-02-03 1988-09-13 Westinghouse Electric Corp. Replacement support pin for guide tubes in operating plants
US4696792A (en) * 1984-07-30 1987-09-29 General Electric Company Nuclear reactor coolant recirculation
JPS63117411A (ja) * 1986-11-06 1988-05-21 Toshiba Corp 箔巻変圧器の冷却パネル
US4764339A (en) * 1986-12-16 1988-08-16 The United States Of America As Represented By The United States Department Of Energy High flux reactor
JPS63197311A (ja) * 1987-02-12 1988-08-16 Toshiba Corp 箔巻変圧器
JPH0198206A (ja) * 1987-06-11 1989-04-17 Hitachi Metals Ltd 高電圧パルス発生装置用磁性部品
JPH0670922B2 (ja) * 1988-08-25 1994-09-07 日立金属株式会社 高電圧パルス発生装置用磁性部品
US4902998A (en) * 1988-11-21 1990-02-20 Westinghouse Electric Corp. Inductor assembly with cooled winding turns
JP2703631B2 (ja) * 1989-08-22 1998-01-26 ニチコン株式会社 鉄芯の冷却方法
US5100609A (en) * 1990-11-19 1992-03-31 General Electric Company Enhancing load-following and/or spectral shift capability in single-sparger natural circulation boiling water reactors
DE69110273T2 (de) * 1991-04-26 1996-01-25 Ibm Koaxiale schwingungsdämpfende Anordnung eines Ringkerntransformators.
US5325407A (en) * 1993-03-22 1994-06-28 Westinghouse Electric Corporation Core barrel and support plate assembly for pressurized water nuclear reactor
DE9307081U1 (de) * 1993-05-10 1993-07-01 Siemens AG, 8000 München Flüssigkeitsgekühlte Ventildrossel
US5448580A (en) * 1994-07-05 1995-09-05 The United States Of America As Represented By The United States Department Of Energy Air and water cooled modulator
EP0769572A1 (en) * 1995-06-06 1997-04-23 ENTHONE-OMI, Inc. Electroless nickel cobalt phosphorous composition and plating process
CN2298590Y (zh) * 1997-03-03 1998-11-25 湖南省资兴市东屋机电制造有限责任公司 变压器用的复式冷却装置
US5936988A (en) * 1997-12-15 1999-08-10 Cymer, Inc. High pulse rate pulse power system
US6151346A (en) * 1997-12-15 2000-11-21 Cymer, Inc. High pulse rate pulse power system with fast rise time and low current
US6240112B1 (en) * 1997-12-15 2001-05-29 Cymer, Inc. High pulse rate pulse power system with liquid cooling
US5940421A (en) * 1997-12-15 1999-08-17 Cymer, Inc. Current reversal prevention circuit for a pulsed gas discharge laser
US6442181B1 (en) * 1998-07-18 2002-08-27 Cymer, Inc. Extreme repetition rate gas discharge laser
US6477193B2 (en) * 1998-07-18 2002-11-05 Cymer, Inc. Extreme repetition rate gas discharge laser with improved blower motor
JP2000057534A (ja) * 1998-08-12 2000-02-25 Read Rite Smi Kk 複合型薄膜磁気ヘッド
JP2001250726A (ja) * 2000-03-07 2001-09-14 Hitachi Metals Ltd 可飽和リアクトルおよびこれを用いた電力変換装置
JP2002166361A (ja) * 2000-11-29 2002-06-11 Nippei Toyama Corp ローラ軸支装置
JP4119628B2 (ja) * 2001-08-31 2008-07-16 株式会社日立国際電気 基板処理装置

Similar Documents

Publication Publication Date Title
JP2007524226A5 (https=)
JP5711459B2 (ja) チャネル型冷却構造を備える冷却装置
KR102525397B1 (ko) 웨이퍼 배치 장치
JP7221737B2 (ja) ウエハ載置装置
JP5908975B2 (ja) カートリッジベース熱電システム
EP2772717B1 (en) Channel member, heat exchanger, and semiconductor unit including the same
TW200509153A (en) Method and apparatus for cooling magnetic circuit elements
TWI721952B (zh) 具有獨立隔離的加熱器區域的晶圓載體
US8528628B2 (en) Carbon-based apparatus for cooling of electronic devices
JP4267823B2 (ja) ３回路プレート熱交換器
KR101994516B1 (ko) 정전 척
KR102524609B1 (ko) 반도체 웨이퍼 홀더를 위한 열 디퓨저
US20030140957A1 (en) Thermoelectric module
KR101897012B1 (ko) 워크처리장치
US20170268828A1 (en) Liquid-cooling heat dissipating apparatus and heat dissipating structure thereof
JP2013511812A5 (https=)
CN103547879B (zh) 具有螺旋流体路径的热传递装置
JPS60163448A (ja) 電力用半導体モジユール
CN102870211B (zh) 流分布器
JP7126398B2 (ja) 保持装置
JP2012510157A (ja) 静電チャック
CN101754658A (zh) 散热装置
WO2010047129A1 (ja) 冷却装置を有するリニアモータコイル組立体
JP7016347B2 (ja) ウエハ加熱装置
US10043609B2 (en) Cooling structure for electromagnetic coil, and electromagnetic actuator