JP2007523350A - 装置のプロービング - Google Patents
装置のプロービング Download PDFInfo
- Publication number
- JP2007523350A JP2007523350A JP2006554211A JP2006554211A JP2007523350A JP 2007523350 A JP2007523350 A JP 2007523350A JP 2006554211 A JP2006554211 A JP 2006554211A JP 2006554211 A JP2006554211 A JP 2006554211A JP 2007523350 A JP2007523350 A JP 2007523350A
- Authority
- JP
- Japan
- Prior art keywords
- electronic device
- probe
- terminal
- terminals
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
Description
Claims (20)
- 表面および複数の端子を備える電子装置をプロービングする方法であって、該方法は、
該電子装置および複数のプローブを配置する工程であって、該プローブが該複数の端子のうちのいくつかの端子に隣接するようにする、工程と、
該複数の端子のうちの該いくつかの端子を該プローブに接触させるために、該電子装置および該プローブの相対的な動きを生じさせる工程と
を包含し、
該相対的な動きが、該電子装置の該表面に対して並行な成分を含む、方法。 - 前記複数の端子のうちの前記いくつかの端子が、前記電子装置の前記表面から距離「d」だけ、延びており、前記電子装置および複数のプローブを配置する工程が、該電子装置の該表面から、該距離「d」よりも短い間隔で、先端部の接触部分を配置する工程を包含する、請求項1に記載の方法。
- 前記端子が、前記電子装置の表面の上に隆起された要素を備える、請求項1に記載の方法。
- 前記端子が平面のパッドを備える、請求項1に記載の方法。
- 前記端子が部分的な球体を含む、請求項1に記載の方法。
- 前記プローブのそれぞれが複数の先端部を備える、請求項1に記載の方法。
- 前記相対的な動きが、前記電子装置の前記表面に対して垂直である成分をさらに含む、請求項1に記載の方法。
- 前記プローブが前記複数の端子のうちの前記いくつかの端子と接触する間において、前記電子装置を試験する工程をさらに包含する、請求項1に記載の方法。
- 前記電子装置が半導体デバイスを含む、請求項1に記載の方法。
- 前記電子装置が半導体ウエハを含む、請求項1に記載の方法。
- 前記電子装置が半導体デバイスのパッケージを含む、請求項1に記載の方法。
- 前記電子装置が複数の半導体デバイスのパッケージを含む、請求項1に記載の方法。
- 前記半導体デバイスが半導体ダイを含む、請求項1に記載の方法。
- 前記電子装置が複数の半導体ダイを含む、請求項1に記載の方法。
- 前記電子装置がプリント回路基板を含む、請求項1に記載の方法。
- 前記電子装置がセラミック・スペーストランスフォーマを含む、請求項1に記載の方法。
- 前記電子装置が、
配線基板と、
該配線基板に電気的に接続される複数の半導体デバイスと
を備える、請求項1に記載の方法。 - 制御器に、プロービング機械を制御する方法を実行させるための機械実行可能な命令を含む媒体であって、該プロービング機械はチャックを備え、該方法は、
該電子デバイスおよび複数のプローブを配置するために第1の信号を生成し、該プローブが、該チャック上に配置される電子装置のいくつかの端子に隣接するようにする、工程と、
該いくつかの端子を該プローブに接触させるために、該電子装置および該プローブの相対的な動きを生じさせる第2の信号を生成する工程と
を包含し、
該相対的な動きが、該電子装置の表面に対して並行な成分を含む、媒体。 - 前記端子が、前記電子装置の表面から距離「d」だけ、延びており、前記第1の信号を生成する工程が、該電子装置の該表面から、該距離「d」よりも短い間隔で、先端部の接触部分を配置する工程を包含する、請求項18に記載の媒体。
- 前記プローブのそれぞれが複数の先端部を含む、請求項18に記載の媒体。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/781,369 US7218127B2 (en) | 2004-02-18 | 2004-02-18 | Method and apparatus for probing an electronic device in which movement of probes and/or the electronic device includes a lateral component |
PCT/US2005/005087 WO2005081001A1 (en) | 2004-02-18 | 2005-02-15 | Probing a device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007523350A true JP2007523350A (ja) | 2007-08-16 |
JP2007523350A5 JP2007523350A5 (ja) | 2008-04-03 |
Family
ID=34838722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006554211A Pending JP2007523350A (ja) | 2004-02-18 | 2005-02-15 | 装置のプロービング |
Country Status (7)
Country | Link |
---|---|
US (3) | US7218127B2 (ja) |
EP (1) | EP1716422A4 (ja) |
JP (1) | JP2007523350A (ja) |
KR (1) | KR20070007101A (ja) |
CN (1) | CN1950709B (ja) |
TW (1) | TWI392873B (ja) |
WO (1) | WO2005081001A1 (ja) |
Cited By (2)
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---|---|---|---|---|
US8395401B2 (en) | 2009-03-31 | 2013-03-12 | Tokyo Electron Limited | Method for setting contact parameter and recording medium having program for setting contact parameter recorded thereon |
TWI637177B (zh) * | 2016-12-23 | 2018-10-01 | 台灣福雷電子股份有限公司 | 用於測試半導體元件之系統及方法 |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6525555B1 (en) * | 1993-11-16 | 2003-02-25 | Formfactor, Inc. | Wafer-level burn-in and test |
US7202682B2 (en) * | 2002-12-20 | 2007-04-10 | Formfactor, Inc. | Composite motion probing |
US7342402B2 (en) * | 2003-04-10 | 2008-03-11 | Formfactor, Inc. | Method of probing a device using captured image of probe structure in which probe tips comprise alignment features |
US7218127B2 (en) * | 2004-02-18 | 2007-05-15 | Formfactor, Inc. | Method and apparatus for probing an electronic device in which movement of probes and/or the electronic device includes a lateral component |
US9476911B2 (en) | 2004-05-21 | 2016-10-25 | Microprobe, Inc. | Probes with high current carrying capability and laser machining methods |
USRE43503E1 (en) | 2006-06-29 | 2012-07-10 | Microprobe, Inc. | Probe skates for electrical testing of convex pad topologies |
US7659739B2 (en) * | 2006-09-14 | 2010-02-09 | Micro Porbe, Inc. | Knee probe having reduced thickness section for control of scrub motion |
US7759949B2 (en) * | 2004-05-21 | 2010-07-20 | Microprobe, Inc. | Probes with self-cleaning blunt skates for contacting conductive pads |
US9097740B2 (en) * | 2004-05-21 | 2015-08-04 | Formfactor, Inc. | Layered probes with core |
US7733101B2 (en) * | 2004-05-21 | 2010-06-08 | Microprobe, Inc. | Knee probe having increased scrub motion |
US8988091B2 (en) * | 2004-05-21 | 2015-03-24 | Microprobe, Inc. | Multiple contact probes |
US7271606B1 (en) * | 2005-08-04 | 2007-09-18 | National Semiconductor Corporation | Spring-based probe pin that allows kelvin testing |
US7378734B2 (en) * | 2006-05-30 | 2008-05-27 | Touchdown Technologies, Inc. | Stacked contact bump |
US20070075717A1 (en) * | 2005-09-14 | 2007-04-05 | Touchdown Technologies, Inc. | Lateral interposer contact design and probe card assembly |
US20070057685A1 (en) * | 2005-09-14 | 2007-03-15 | Touchdown Technologies, Inc. | Lateral interposer contact design and probe card assembly |
US7649367B2 (en) * | 2005-12-07 | 2010-01-19 | Microprobe, Inc. | Low profile probe having improved mechanical scrub and reduced contact inductance |
JP2007183193A (ja) * | 2006-01-10 | 2007-07-19 | Micronics Japan Co Ltd | プロービング装置 |
US20070205269A1 (en) * | 2006-03-02 | 2007-09-06 | Lindon Mark L | Method and system for the resale of prepaid cards and paper gift certificates |
US7312617B2 (en) | 2006-03-20 | 2007-12-25 | Microprobe, Inc. | Space transformers employing wire bonds for interconnections with fine pitch contacts |
US8436636B2 (en) * | 2006-10-10 | 2013-05-07 | Apple Inc. | Methods and apparatuses for testing circuit boards |
US8907689B2 (en) | 2006-10-11 | 2014-12-09 | Microprobe, Inc. | Probe retention arrangement |
US7786740B2 (en) * | 2006-10-11 | 2010-08-31 | Astria Semiconductor Holdings, Inc. | Probe cards employing probes having retaining portions for potting in a potting region |
US8362793B2 (en) * | 2006-11-07 | 2013-01-29 | Apple Inc. | Circuit boards including removable test point portions and configurable testing platforms |
US7514948B2 (en) * | 2007-04-10 | 2009-04-07 | Microprobe, Inc. | Vertical probe array arranged to provide space transformation |
US8723546B2 (en) * | 2007-10-19 | 2014-05-13 | Microprobe, Inc. | Vertical guided layered probe |
US7671610B2 (en) * | 2007-10-19 | 2010-03-02 | Microprobe, Inc. | Vertical guided probe array providing sideways scrub motion |
US8230593B2 (en) * | 2008-05-29 | 2012-07-31 | Microprobe, Inc. | Probe bonding method having improved control of bonding material |
DE202008013982U1 (de) * | 2008-10-20 | 2009-01-08 | Rosenberger Hochfrequenztechnik Gmbh & Co. Kg | Messsystem zum Bestimmen von Streuparametern |
US8073019B2 (en) * | 2009-03-02 | 2011-12-06 | Jian Liu | 810 nm ultra-short pulsed fiber laser |
US9329204B2 (en) | 2009-04-21 | 2016-05-03 | Johnstech International Corporation | Electrically conductive Kelvin contacts for microcircuit tester |
JP5695637B2 (ja) | 2009-04-21 | 2015-04-08 | ジョンステック インターナショナル コーポレーションJohnstech International Corporation | 超小型回路試験器の導電ケルビン接点 |
US9229029B2 (en) | 2011-11-29 | 2016-01-05 | Formfactor, Inc. | Hybrid electrical contactor |
US20130271172A1 (en) * | 2012-04-13 | 2013-10-17 | Texas Instruments Incorporated | Probe apparatus and method |
KR101410991B1 (ko) * | 2012-11-20 | 2014-06-23 | 리노정밀(주) | 지그 장치 |
JP6155725B2 (ja) * | 2013-03-19 | 2017-07-05 | 富士電機株式会社 | 半導体装置の検査方法及びその方法を用いた半導体装置の製造方法 |
US10302677B2 (en) * | 2015-04-29 | 2019-05-28 | Kla-Tencor Corporation | Multiple pin probes with support for performing parallel measurements |
CN106935524B (zh) * | 2015-12-24 | 2020-04-21 | 台湾积体电路制造股份有限公司 | 探针卡和晶圆测试系统及晶圆测试方法 |
JP6877025B2 (ja) * | 2016-03-23 | 2021-05-26 | ヤマハファインテック株式会社 | 回路基板の検査方法、検査装置、及びプログラム |
KR20190021101A (ko) | 2017-08-22 | 2019-03-05 | 삼성전자주식회사 | 프로브 카드, 프로브 카드를 포함한 테스트 장치, 그 프로브 카드를 이용한 테스트 방법 및 반도체 소자 제조방법 |
CN107942222A (zh) * | 2017-11-21 | 2018-04-20 | 德淮半导体有限公司 | 测试机台及测试方法 |
TWI794990B (zh) * | 2021-09-23 | 2023-03-01 | 牧德科技股份有限公司 | 電測治具扎針位置估算方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08153761A (ja) * | 1994-11-25 | 1996-06-11 | Shikahama Seisakusho:Kk | プローブヘッドおよびプローブヘッドの支持機構 |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2487098A1 (fr) | 1980-07-18 | 1982-01-22 | Vandeputte Fils & Cie | Dispositif de visualisation de donnees |
US4506215A (en) * | 1981-06-30 | 1985-03-19 | International Business Machines Corporation | Modular test probe |
US4780836A (en) * | 1985-08-14 | 1988-10-25 | Kabushiki Kaisha Toshiba | Method of testing semiconductor devices using a probe card |
US5012186A (en) | 1990-06-08 | 1991-04-30 | Cascade Microtech, Inc. | Electrical probe with contact force protection |
JP3208734B2 (ja) * | 1990-08-20 | 2001-09-17 | 東京エレクトロン株式会社 | プローブ装置 |
US5207585A (en) * | 1990-10-31 | 1993-05-04 | International Business Machines Corporation | Thin interface pellicle for dense arrays of electrical interconnects |
US5974662A (en) * | 1993-11-16 | 1999-11-02 | Formfactor, Inc. | Method of planarizing tips of probe elements of a probe card assembly |
US5773987A (en) * | 1996-02-26 | 1998-06-30 | Motorola, Inc. | Method for probing a semiconductor wafer using a motor controlled scrub process |
US6140828A (en) * | 1997-05-08 | 2000-10-31 | Tokyo Electron Limited | Prober and probe method |
JP3423979B2 (ja) * | 1997-07-11 | 2003-07-07 | 東京エレクトロン株式会社 | プローブ方法及びプローブ装置 |
DE19733861A1 (de) | 1997-08-05 | 1999-02-25 | Siemens Ag | Vorrichtung und Verfahren zur Kontaktierung einer Meß-Sonde |
JPH1174322A (ja) | 1997-08-28 | 1999-03-16 | Mitsubishi Electric Corp | ウエハプローバー |
JP3586106B2 (ja) * | 1998-07-07 | 2004-11-10 | 株式会社アドバンテスト | Ic試験装置用プローブカード |
JP3484365B2 (ja) | 1999-01-19 | 2004-01-06 | シャープ株式会社 | 半導体装置用パッケージ、この半導体装置用パッケージのテスト時に使用するプローブカード、および、このプローブカードを用いたパッケージのテスト方法 |
JP3745184B2 (ja) | 1999-03-25 | 2006-02-15 | 株式会社東京カソード研究所 | プローブカード用探針及びその製造方法 |
US6250933B1 (en) * | 2000-01-20 | 2001-06-26 | Advantest Corp. | Contact structure and production method thereof |
KR100350513B1 (ko) * | 2000-04-03 | 2002-08-28 | 박태욱 | 피디피 전극 검사 프로브장치 |
JP2001356134A (ja) * | 2000-04-13 | 2001-12-26 | Innotech Corp | プローブカード装置およびそれに用いられるプローブ |
DE10039336C2 (de) | 2000-08-04 | 2003-12-11 | Infineon Technologies Ag | Verfahren zum Testen von Halbleiterschaltungen und Testvorrichtung zur Durchführung des Verfahrens |
CN2444311Y (zh) * | 2000-08-15 | 2001-08-22 | 陈文杰 | 晶片测试装置 |
US6507207B2 (en) | 2001-02-20 | 2003-01-14 | Vinh T. Nguyen | Contact probe pin for wafer probing apparatus |
US6773987B1 (en) * | 2001-11-17 | 2004-08-10 | Altera Corporation | Method and apparatus for reducing charge loss in a nonvolatile memory cell |
KR20040069259A (ko) * | 2001-12-25 | 2004-08-05 | 스미토모덴키고교가부시키가이샤 | 컨택트 프로브 |
JP2003254995A (ja) * | 2001-12-25 | 2003-09-10 | Sumitomo Electric Ind Ltd | コンタクトプローブ |
JP2003194847A (ja) * | 2001-12-26 | 2003-07-09 | Sumitomo Electric Ind Ltd | コンタクトプローブ |
US6668628B2 (en) * | 2002-03-29 | 2003-12-30 | Xerox Corporation | Scanning probe system with spring probe |
US7202682B2 (en) * | 2002-12-20 | 2007-04-10 | Formfactor, Inc. | Composite motion probing |
JP4099412B2 (ja) | 2003-03-19 | 2008-06-11 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
US7342402B2 (en) * | 2003-04-10 | 2008-03-11 | Formfactor, Inc. | Method of probing a device using captured image of probe structure in which probe tips comprise alignment features |
JP2005072143A (ja) | 2003-08-21 | 2005-03-17 | Tokyo Seimitsu Co Ltd | プローブ装置 |
US7218127B2 (en) | 2004-02-18 | 2007-05-15 | Formfactor, Inc. | Method and apparatus for probing an electronic device in which movement of probes and/or the electronic device includes a lateral component |
US7068056B1 (en) | 2005-07-18 | 2006-06-27 | Texas Instruments Incorporated | System and method for the probing of a wafer |
-
2004
- 2004-02-18 US US10/781,369 patent/US7218127B2/en not_active Expired - Fee Related
-
2005
- 2005-02-15 KR KR1020067019009A patent/KR20070007101A/ko not_active Application Discontinuation
- 2005-02-15 EP EP05723223A patent/EP1716422A4/en not_active Withdrawn
- 2005-02-15 JP JP2006554211A patent/JP2007523350A/ja active Pending
- 2005-02-15 WO PCT/US2005/005087 patent/WO2005081001A1/en active Application Filing
- 2005-02-15 CN CN2005800089461A patent/CN1950709B/zh not_active Expired - Fee Related
- 2005-02-18 TW TW094104927A patent/TWI392873B/zh not_active IP Right Cessation
-
2007
- 2007-05-15 US US11/748,988 patent/US7463043B2/en not_active Expired - Fee Related
-
2008
- 2008-12-09 US US12/331,163 patent/US7701243B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08153761A (ja) * | 1994-11-25 | 1996-06-11 | Shikahama Seisakusho:Kk | プローブヘッドおよびプローブヘッドの支持機構 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8395401B2 (en) | 2009-03-31 | 2013-03-12 | Tokyo Electron Limited | Method for setting contact parameter and recording medium having program for setting contact parameter recorded thereon |
TWI637177B (zh) * | 2016-12-23 | 2018-10-01 | 台灣福雷電子股份有限公司 | 用於測試半導體元件之系統及方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1950709A (zh) | 2007-04-18 |
US7463043B2 (en) | 2008-12-09 |
TWI392873B (zh) | 2013-04-11 |
WO2005081001A1 (en) | 2005-09-01 |
EP1716422A1 (en) | 2006-11-02 |
EP1716422A4 (en) | 2012-01-04 |
US7218127B2 (en) | 2007-05-15 |
US20070262767A1 (en) | 2007-11-15 |
KR20070007101A (ko) | 2007-01-12 |
TW200538741A (en) | 2005-12-01 |
CN1950709B (zh) | 2010-10-06 |
US20050179455A1 (en) | 2005-08-18 |
US7701243B2 (en) | 2010-04-20 |
US20090085592A1 (en) | 2009-04-02 |
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