JP2007500445A5 - - Google Patents
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- Publication number
- JP2007500445A5 JP2007500445A5 JP2006521883A JP2006521883A JP2007500445A5 JP 2007500445 A5 JP2007500445 A5 JP 2007500445A5 JP 2006521883 A JP2006521883 A JP 2006521883A JP 2006521883 A JP2006521883 A JP 2006521883A JP 2007500445 A5 JP2007500445 A5 JP 2007500445A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- conductive
- conductive structure
- insulating layer
- electronic device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 13
- 229910052782 aluminium Inorganic materials 0.000 claims 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 7
- 239000010936 titanium Substances 0.000 claims 7
- 229910052719 titanium Inorganic materials 0.000 claims 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 6
- 229910052802 copper Inorganic materials 0.000 claims 6
- 239000010949 copper Substances 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 5
- 229910052721 tungsten Inorganic materials 0.000 claims 5
- 239000010937 tungsten Substances 0.000 claims 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 4
- 239000004642 Polyimide Substances 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229920001721 polyimide Polymers 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 229910000679 solder Inorganic materials 0.000 claims 2
- WXHLLJAMBQLULT-UHFFFAOYSA-N 2-[[6-[4-(2-hydroxyethyl)piperazin-1-yl]-2-methylpyrimidin-4-yl]amino]-n-(2-methyl-6-sulfanylphenyl)-1,3-thiazole-5-carboxamide;hydrate Chemical compound O.C=1C(N2CCN(CCO)CC2)=NC(C)=NC=1NC(S1)=NC=C1C(=O)NC1=C(C)C=CC=C1S WXHLLJAMBQLULT-UHFFFAOYSA-N 0.000 claims 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims 1
- 239000012964 benzotriazole Substances 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 claims 1
- 229910052939 potassium sulfate Inorganic materials 0.000 claims 1
- 235000011151 potassium sulphates Nutrition 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US49034003P | 2003-07-25 | 2003-07-25 | |
| US50758703P | 2003-10-01 | 2003-10-01 | |
| PCT/US2004/022949 WO2005013339A2 (en) | 2003-07-25 | 2004-07-16 | Methods of forming conductive structures including titanium-tungsten base layers and related structures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007500445A JP2007500445A (ja) | 2007-01-11 |
| JP2007500445A5 true JP2007500445A5 (enExample) | 2007-09-13 |
Family
ID=34118827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006521883A Pending JP2007500445A (ja) | 2003-07-25 | 2004-07-16 | チタン・タングステンのベース層および関連構造体を含む導電構造体を形成する方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US7244671B2 (enExample) |
| EP (1) | EP1649508A2 (enExample) |
| JP (1) | JP2007500445A (enExample) |
| KR (1) | KR20060034716A (enExample) |
| TW (1) | TW200524054A (enExample) |
| WO (1) | WO2005013339A2 (enExample) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI229930B (en) * | 2003-06-09 | 2005-03-21 | Advanced Semiconductor Eng | Chip structure |
| CN100517831C (zh) * | 2003-06-24 | 2009-07-22 | 松下电器产业株式会社 | 高分子电解质型燃料电池 |
| US7455787B2 (en) * | 2003-08-01 | 2008-11-25 | Sunpower Corporation | Etching of solar cell materials |
| TWI232571B (en) * | 2004-04-09 | 2005-05-11 | Advanced Semiconductor Eng | Wafer structure and method for forming a redistribution layer therein |
| US7172786B2 (en) * | 2004-05-14 | 2007-02-06 | Hitachi Global Storage Technologies Netherlands B.V. | Methods for improving positioning performance of electron beam lithography on magnetic wafers |
| DE102004035080A1 (de) * | 2004-05-27 | 2005-12-29 | Infineon Technologies Ag | Anordnung zur Verringerung des elektrischen Übersprechens auf einem Chip |
| CN101138084B (zh) * | 2004-10-29 | 2010-06-02 | 弗利普芯片国际有限公司 | 具有覆在聚合体层上的隆起的半导体器件封装 |
| TWI258176B (en) * | 2005-05-12 | 2006-07-11 | Siliconware Precision Industries Co Ltd | Semiconductor device and fabrication method thereof |
| EP1949437B2 (en) * | 2005-11-02 | 2021-08-04 | Second Sight Medical Products, Inc. | Implantable microelectronic device and method of manufacture |
| TWI294151B (en) * | 2005-11-15 | 2008-03-01 | Advanced Semiconductor Eng | Wafer structure and method for fabricating the same |
| KR100652443B1 (ko) | 2005-11-17 | 2006-12-01 | 삼성전자주식회사 | 재배선층을 갖는 웨이퍼 레벨 패키지 및 그 형성방법 |
| JP4611943B2 (ja) * | 2006-07-13 | 2011-01-12 | Ｏｋｉセミコンダクタ株式会社 | 半導体装置 |
| TWI337386B (en) * | 2007-02-16 | 2011-02-11 | Chipmos Technologies Inc | Semiconductor device and method for forming packaging conductive structure of the semiconductor device |
| US7682959B2 (en) | 2007-03-21 | 2010-03-23 | Stats Chippac, Ltd. | Method of forming solder bump on high topography plated Cu |
| JP2008244134A (ja) * | 2007-03-27 | 2008-10-09 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
| US7973418B2 (en) | 2007-04-23 | 2011-07-05 | Flipchip International, Llc | Solder bump interconnect for improved mechanical and thermo-mechanical performance |
| JP2008300557A (ja) * | 2007-05-30 | 2008-12-11 | Mitsubishi Electric Corp | 半導体装置 |
| US7667335B2 (en) * | 2007-09-20 | 2010-02-23 | Stats Chippac, Ltd. | Semiconductor package with passivation island for reducing stress on solder bumps |
| KR101483273B1 (ko) * | 2008-09-29 | 2015-01-16 | 삼성전자주식회사 | 구리 패드와 패드 장벽층을 포함하는 반도체 소자와 그의 배선 구조 및 그 제조 방법들 |
| JP5296567B2 (ja) * | 2009-02-06 | 2013-09-25 | ラピスセミコンダクタ株式会社 | 半導体装置の製造方法 |
| JP5249080B2 (ja) * | 2009-02-19 | 2013-07-31 | セイコーインスツル株式会社 | 半導体装置 |
| US8759209B2 (en) | 2010-03-25 | 2014-06-24 | Stats Chippac, Ltd. | Semiconductor device and method of forming a dual UBM structure for lead free bump connections |
| CN103718292A (zh) * | 2011-08-11 | 2014-04-09 | 弗利普芯片国际有限公司 | 用于高密度电感器的薄膜结构和晶片级封装中的重分布 |
| US9159686B2 (en) | 2012-01-24 | 2015-10-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Crack stopper on under-bump metallization layer |
| US9111949B2 (en) | 2012-04-09 | 2015-08-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods and apparatus of wafer level package for heterogeneous integration technology |
| TWI485826B (zh) * | 2012-05-25 | 2015-05-21 | 財團法人工業技術研究院 | 晶片堆疊結構以及晶片堆疊結構的製作方法 |
| KR101452587B1 (ko) * | 2012-06-28 | 2014-10-22 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 이종 집적 기술에 대한 웨이퍼 레벨 패키지의 방법 및 장치 |
| US8871634B2 (en) * | 2012-08-30 | 2014-10-28 | Intel Corporation | Chip package incorporating interfacial adhesion through conductor sputtering |
| US9355906B2 (en) | 2013-03-12 | 2016-05-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Packaging devices and methods of manufacture thereof |
| US9373594B2 (en) | 2014-02-13 | 2016-06-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Under bump metallization |
| US9401328B2 (en) | 2014-12-22 | 2016-07-26 | Stmicroelectronics S.R.L. | Electric contact structure having a diffusion barrier for an electronic device and method for manufacturing the electric contact structure |
| US9859213B2 (en) * | 2015-12-07 | 2018-01-02 | Dyi-chung Hu | Metal via structure |
| US10651052B2 (en) | 2018-01-12 | 2020-05-12 | Advanced Semiconductor Engineering, Inc. | Semiconductor package structure and method for manufacturing the same |
| TWI744498B (zh) * | 2018-03-05 | 2021-11-01 | 矽品精密工業股份有限公司 | 基板結構及其製法 |
| US20220165694A1 (en) * | 2020-11-26 | 2022-05-26 | Mediatek Inc. | Semiconductor structure |
| EP4033525A3 (en) * | 2020-11-26 | 2023-08-02 | Mediatek Inc. | Semiconductor structure |
| US11990369B2 (en) | 2021-08-20 | 2024-05-21 | Applied Materials, Inc. | Selective patterning with molecular layer deposition |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8701184A (nl) | 1987-05-18 | 1988-12-16 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting. |
| JP2778127B2 (ja) * | 1989-06-29 | 1998-07-23 | 日本電気株式会社 | 半導体装置の製造方法 |
| JPH0555213A (ja) * | 1991-08-23 | 1993-03-05 | Hitachi Ltd | 配線部材の形成方法 |
| US5162257A (en) | 1991-09-13 | 1992-11-10 | Mcnc | Solder bump fabrication method |
| US5234149A (en) | 1992-08-28 | 1993-08-10 | At&T Bell Laboratories | Debondable metallic bonding method |
| US6388203B1 (en) | 1995-04-04 | 2002-05-14 | Unitive International Limited | Controlled-shaped solder reservoirs for increasing the volume of solder bumps, and structures formed thereby |
| WO1996031905A1 (en) | 1995-04-05 | 1996-10-10 | Mcnc | A solder bump structure for a microelectronic substrate |
| US5849641A (en) * | 1997-03-19 | 1998-12-15 | Lam Research Corporation | Methods and apparatus for etching a conductive layer to improve yield |
| US6015505A (en) | 1997-10-30 | 2000-01-18 | International Business Machines Corporation | Process improvements for titanium-tungsten etching in the presence of electroplated C4's |
| US6511901B1 (en) * | 1999-11-05 | 2003-01-28 | Atmel Corporation | Metal redistribution layer having solderable pads and wire bondable pads |
| JP2001244372A (ja) * | 2000-03-01 | 2001-09-07 | Seiko Epson Corp | 半導体装置およびその製造方法 |
| US6492197B1 (en) | 2000-05-23 | 2002-12-10 | Unitive Electronics Inc. | Trilayer/bilayer solder bumps and fabrication methods therefor |
| US6319745B1 (en) * | 2000-05-31 | 2001-11-20 | International Business Machines Corporation | Formation of charge-coupled-device with image pick-up array |
| US6674161B1 (en) * | 2000-10-03 | 2004-01-06 | Rambus Inc. | Semiconductor stacked die devices |
| JP3526548B2 (ja) | 2000-11-29 | 2004-05-17 | 松下電器産業株式会社 | 半導体装置及びその製造方法 |
| US6462426B1 (en) | 2000-12-14 | 2002-10-08 | National Semiconductor Corporation | Barrier pad for wafer level chip scale packages |
| US20020121702A1 (en) | 2001-03-01 | 2002-09-05 | Siemens Dematic Electronics Assembly Systems, Inc. | Method and structure of in-situ wafer scale polymer stud grid array contact formation |
| US6768210B2 (en) * | 2001-11-01 | 2004-07-27 | Texas Instruments Incorporated | Bumpless wafer scale device and board assembly |
| US6914332B2 (en) * | 2002-01-25 | 2005-07-05 | Texas Instruments Incorporated | Flip-chip without bumps and polymer for board assembly |
| TWI225899B (en) * | 2003-02-18 | 2005-01-01 | Unitive Semiconductor Taiwan C | Etching solution and method for manufacturing conductive bump using the etching solution to selectively remove barrier layer |
-
2004
- 2004-06-29 US US10/879,411 patent/US7244671B2/en not_active Expired - Lifetime
- 2004-07-16 KR KR1020067001547A patent/KR20060034716A/ko not_active Withdrawn
- 2004-07-16 JP JP2006521883A patent/JP2007500445A/ja active Pending
- 2004-07-16 WO PCT/US2004/022949 patent/WO2005013339A2/en not_active Ceased
- 2004-07-16 EP EP04778453A patent/EP1649508A2/en not_active Withdrawn
- 2004-07-23 TW TW093122171A patent/TW200524054A/zh unknown
-
2007
- 2007-06-20 US US11/765,648 patent/US7550849B2/en not_active Expired - Lifetime
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