KR20060034716A - 티타늄-텅스텐 베이스층을 포함하는 도전 구조를 형성하는방법 및 관련 구조 - Google Patents

티타늄-텅스텐 베이스층을 포함하는 도전 구조를 형성하는방법 및 관련 구조 Download PDF

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KR20060034716A
KR20060034716A KR1020067001547A KR20067001547A KR20060034716A KR 20060034716 A KR20060034716 A KR 20060034716A KR 1020067001547 A KR1020067001547 A KR 1020067001547A KR 20067001547 A KR20067001547 A KR 20067001547A KR 20060034716 A KR20060034716 A KR 20060034716A
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layer
conductive
conductive structure
insulating layer
titanium
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Korean (ko)
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다니엘 제이. 미스
딘 젠더
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유나이티브 인터내셔널 리미티드
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Publication of KR20060034716A publication Critical patent/KR20060034716A/ko
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  • Condensed Matter Physics & Semiconductors (AREA)
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KR1020067001547A 2003-07-25 2004-07-16 티타늄-텅스텐 베이스층을 포함하는 도전 구조를 형성하는방법 및 관련 구조 Withdrawn KR20060034716A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US49034003P 2003-07-25 2003-07-25
US60/490,340 2003-07-25
US50758703P 2003-10-01 2003-10-01
US60/507,587 2003-10-01

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KR20060034716A true KR20060034716A (ko) 2006-04-24

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KR1020067001547A Withdrawn KR20060034716A (ko) 2003-07-25 2004-07-16 티타늄-텅스텐 베이스층을 포함하는 도전 구조를 형성하는방법 및 관련 구조

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Country Link
US (2) US7244671B2 (enExample)
EP (1) EP1649508A2 (enExample)
JP (1) JP2007500445A (enExample)
KR (1) KR20060034716A (enExample)
TW (1) TW200524054A (enExample)
WO (1) WO2005013339A2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100699659B1 (ko) * 2003-06-24 2007-03-23 마쯔시다덴기산교 가부시키가이샤 고분자 전해질형 연료전지
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