JP5249080B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5249080B2 JP5249080B2 JP2009036590A JP2009036590A JP5249080B2 JP 5249080 B2 JP5249080 B2 JP 5249080B2 JP 2009036590 A JP2009036590 A JP 2009036590A JP 2009036590 A JP2009036590 A JP 2009036590A JP 5249080 B2 JP5249080 B2 JP 5249080B2
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Description
2 半導体素子
3 金属配線
4 入出力の金属端子
5 保護膜
6 応力緩衝層
7 ビアホール
8 下地金属
9 導電層
10 バンプ電極
11 再配線(第2の金属配線)
12 金属配線のビア
13 絶縁膜
21 第1の応力緩衝層
22 第2の応力緩衝層
23 第1の開口孔
24 第2の開口孔
25 再配線(第1の応力緩衝層の上の導電層)
26 バンプ電極(スクリーニング印刷)
Claims (2)
- 半導体基板と、
前記半導体基板に設けられた半導体素子上に配置された金属配線と、
前記金属配線の上に形成され、前記金属配線を保護する保護膜と、
前記保護膜の上に形成された、セラミック膜と前記セラミック膜より機械的剛性の小さい材料の2層からなる応力緩衝層と、
前記保護膜及び、前記応力緩衝層を貫通して、前記金属配線上に設けられたビアホールと、
前記ビアホールの内面及び前記金属配線の表面、及び前記応力緩衝層の表面に形成された下地金属膜と、
前記ビアホールを埋め込むように形成された導電層と、
前記導電層の上に形成されたバンプ電極を有し、
平面視にて、前記ビアホールは前記バンプ電極の中心を避けて、前記バンプ電極の下ではあるが周囲の領域に形成されていることを特徴とする半導体装置。 - 半導体基板と、
前記半導体基板に設けられた半導体素子上に配置された第1の金属配線と、
前記第1の金属配線の上に絶縁膜を介して配置された第2の金属配線と、
前記第2の金属配線の上に形成され、前記金属配線を保護する保護膜と、
前記保護膜の上に形成された、セラミック膜と前記セラミック膜より機械的剛性の小さい材料の2層からなる応力緩衝層と、
前記保護膜及び、前記応力緩衝層を貫通して、前記第2の金属配線上に設けられたビアホールと、
前記ビアホールの内面及び前記第2の金属配線の表面、及び前記応力緩衝層の表面に形成された下地金属膜と、
前記ビアホールを埋め込むように形成された導電層と、
前記導電層の上に形成されたバンプ電極と、
前記半導体素子上に前記第1の金属配線により形成された入出力のための金属端子と、を有し、
前記第2の金属配線は前記バンプ電極及び前記ビアホール内に形成された前記導電層と前記金属端子とを、前記金属端子上に設けられたビアを介してつなぐ再配線であり、
平面視にて、前記ビアホールは前記バンプ電極の中心を避けて、前記バンプ電極の下で
はあるが周囲の領域に形成されていることを特徴とする半導体装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009036590A JP5249080B2 (ja) | 2009-02-19 | 2009-02-19 | 半導体装置 |
TW099103347A TWI501364B (zh) | 2009-02-19 | 2010-02-04 | 半導體裝置 |
CN201010117406.XA CN101814476B (zh) | 2009-02-19 | 2010-02-12 | 半导体装置 |
KR1020100013796A KR20100094943A (ko) | 2009-02-19 | 2010-02-16 | 반도체 장치 |
US12/707,348 US20100207271A1 (en) | 2009-02-19 | 2010-02-17 | Semiconductor device |
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KR102012935B1 (ko) | 2012-06-13 | 2019-08-21 | 삼성전자주식회사 | 전기적 연결 구조 및 그의 제조방법 |
KR20140041975A (ko) | 2012-09-25 | 2014-04-07 | 삼성전자주식회사 | 범프 구조체 및 이를 포함하는 전기적 연결 구조체 |
US8772151B2 (en) | 2012-09-27 | 2014-07-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Passivation scheme |
KR102122456B1 (ko) | 2013-12-20 | 2020-06-12 | 삼성전자주식회사 | 실리콘 관통 비아 플러그들을 갖는 반도체 소자 및 이를 포함하는 반도체 패키지 |
KR102212559B1 (ko) | 2014-08-20 | 2021-02-08 | 삼성전자주식회사 | 반도체 발광소자 및 이를 이용한 반도체 발광소자 패키지 |
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-
2009
- 2009-02-19 JP JP2009036590A patent/JP5249080B2/ja active Active
-
2010
- 2010-02-04 TW TW099103347A patent/TWI501364B/zh not_active IP Right Cessation
- 2010-02-12 CN CN201010117406.XA patent/CN101814476B/zh not_active Expired - Fee Related
- 2010-02-16 KR KR1020100013796A patent/KR20100094943A/ko not_active Application Discontinuation
- 2010-02-17 US US12/707,348 patent/US20100207271A1/en not_active Abandoned
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US20100207271A1 (en) | 2010-08-19 |
TWI501364B (zh) | 2015-09-21 |
CN101814476B (zh) | 2014-08-27 |
KR20100094943A (ko) | 2010-08-27 |
TW201112366A (en) | 2011-04-01 |
CN101814476A (zh) | 2010-08-25 |
JP2010192747A (ja) | 2010-09-02 |
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