JP2007264636A5 - - Google Patents

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Publication number
JP2007264636A5
JP2007264636A5 JP2007081783A JP2007081783A JP2007264636A5 JP 2007264636 A5 JP2007264636 A5 JP 2007264636A5 JP 2007081783 A JP2007081783 A JP 2007081783A JP 2007081783 A JP2007081783 A JP 2007081783A JP 2007264636 A5 JP2007264636 A5 JP 2007264636A5
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mirror
projection objective
plane
concave
objective lens
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JP2007081783A
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Japanese (ja)
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JP2007264636A (ja
JP5714201B2 (ja
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Priority claimed from DE102006014380A external-priority patent/DE102006014380A1/de
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JP2007081783A 2006-03-27 2007-03-27 入射瞳のバック・フォーカスが負である投影対物レンズおよび投影露光装置 Expired - Fee Related JP5714201B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US78674406P 2006-03-27 2006-03-27
DE102006014380A DE102006014380A1 (de) 2006-03-27 2006-03-27 Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille
US60/786,744 2006-03-27
DE102006014380.9 2006-03-27

Related Child Applications (1)

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JP2012285891A Division JP5883778B2 (ja) 2006-03-27 2012-12-27 入射瞳のバック・フォーカスが負である投影対物系および投影露光装置

Publications (3)

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JP2007264636A JP2007264636A (ja) 2007-10-11
JP2007264636A5 true JP2007264636A5 (enExample) 2010-05-13
JP5714201B2 JP5714201B2 (ja) 2015-05-07

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JP2007081783A Expired - Fee Related JP5714201B2 (ja) 2006-03-27 2007-03-27 入射瞳のバック・フォーカスが負である投影対物レンズおよび投影露光装置
JP2012285891A Expired - Fee Related JP5883778B2 (ja) 2006-03-27 2012-12-27 入射瞳のバック・フォーカスが負である投影対物系および投影露光装置

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Country Status (6)

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US (3) US7869138B2 (enExample)
EP (1) EP1840622A3 (enExample)
JP (2) JP5714201B2 (enExample)
KR (3) KR101121817B1 (enExample)
DE (1) DE102006014380A1 (enExample)
TW (2) TWI456250B (enExample)

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KR100604942B1 (ko) 2005-06-18 2006-07-31 삼성전자주식회사 비축상(ｏｆｆ-ａｘｉｓ) 프로젝션 광학계 및 이를 적용한극자외선 리소그래피 장치
KR100962911B1 (ko) 2005-09-13 2010-06-10 칼 짜이스 에스엠테 아게 마이크로리소그라피 투영 광학 시스템, 디바이스 제작 방법 및 광학 표면을 설계하기 위한 방법
DE102006003375A1 (de) 2006-01-24 2007-08-09 Carl Zeiss Smt Ag Gruppenweise korrigiertes Objektiv
DE102006014380A1 (de) 2006-03-27 2007-10-11 Carl Zeiss Smt Ag Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille

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