JP2004046189A5 - - Google Patents
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- Publication number
- JP2004046189A5 JP2004046189A5 JP2003194430A JP2003194430A JP2004046189A5 JP 2004046189 A5 JP2004046189 A5 JP 2004046189A5 JP 2003194430 A JP2003194430 A JP 2003194430A JP 2003194430 A JP2003194430 A JP 2003194430A JP 2004046189 A5 JP2004046189 A5 JP 2004046189A5
- Authority
- JP
- Japan
- Prior art keywords
- lens
- relay
- lens group
- relay lens
- group includes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39424402P | 2002-07-09 | 2002-07-09 | |
| US10/607,193 US7289277B2 (en) | 2002-07-09 | 2003-06-27 | Relay lens used in an illumination system of a lithography system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004046189A JP2004046189A (ja) | 2004-02-12 |
| JP2004046189A5 true JP2004046189A5 (enExample) | 2005-06-16 |
| JP4159936B2 JP4159936B2 (ja) | 2008-10-01 |
Family
ID=29740281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003194430A Expired - Fee Related JP4159936B2 (ja) | 2002-07-09 | 2003-07-09 | リソグラフィシステムの照明システムで使用されるリレーレンズ |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7289277B2 (enExample) |
| EP (1) | EP1380871B1 (enExample) |
| JP (1) | JP4159936B2 (enExample) |
| KR (2) | KR20040005677A (enExample) |
| CN (1) | CN1328608C (enExample) |
| DE (1) | DE60306042T2 (enExample) |
| SG (1) | SG105008A1 (enExample) |
| TW (1) | TWI301564B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100426462C (zh) * | 2005-02-03 | 2008-10-15 | 日立笠户机械股份有限公司 | 图案形成方法 |
| CN100388014C (zh) * | 2005-05-16 | 2008-05-14 | 中强光电股份有限公司 | 侧向照明式透镜组 |
| GB0800677D0 (en) * | 2008-01-16 | 2008-02-20 | Zeiss Carl Smt Ag | Illumination system of a microlithographic projection exposure apparatus |
| CN103293863B (zh) * | 2012-02-24 | 2015-11-18 | 上海微电子装备有限公司 | 一种光刻照明系统 |
| CN104777609B (zh) * | 2015-04-03 | 2018-07-13 | 中国科学院上海光学精密机械研究所 | 光刻机照明光瞳偏振态测量用光学系统 |
| US11442254B2 (en) | 2019-04-05 | 2022-09-13 | Inner Ray, Inc. | Augmented reality projection device |
| CN119717400B (zh) * | 2023-09-27 | 2025-09-16 | 光科芯图(北京)科技有限公司 | 基于平面波的照明系统及曝光设备 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US36832A (en) * | 1862-11-04 | Improvement in friction-couplings | ||
| JPH03230112A (ja) * | 1990-02-05 | 1991-10-14 | Minolta Camera Co Ltd | 投影レンズ系 |
| US5402267A (en) * | 1991-02-08 | 1995-03-28 | Carl-Zeiss-Stiftung | Catadioptric reduction objective |
| USRE38438E1 (en) * | 1994-08-23 | 2004-02-24 | Nikon Corporation | Catadioptric reduction projection optical system and exposure apparatus having the same |
| DE19653983A1 (de) * | 1996-12-21 | 1998-06-25 | Zeiss Carl Fa | REMA-Objektiv für Mikrolithographie-Projektionsbelichtungsanlagen |
| US6680803B2 (en) * | 1996-12-21 | 2004-01-20 | Carl-Zeiss Smt Ag | Partial objective in an illuminating systems |
| US5969882A (en) | 1997-04-01 | 1999-10-19 | Nikon Corporation | Catadioptric optical system |
| WO1999025008A1 (en) * | 1997-11-07 | 1999-05-20 | Nikon Corporation | Projection exposure device, projection exposure method, and method of manufacturing projection exposure device |
| JP2000143278A (ja) | 1998-11-10 | 2000-05-23 | Nikon Corp | 耐久性の向上された投影露光装置及び結像光学系の製造方法 |
| JP4432153B2 (ja) * | 1999-08-03 | 2010-03-17 | 株式会社ニコン | ズームレンズ |
| EP1115019A3 (en) | 1999-12-29 | 2004-07-28 | Carl Zeiss | Projection exposure lens with aspheric elements |
| JP2002055277A (ja) | 2000-08-11 | 2002-02-20 | Nikon Corp | リレー結像光学系、および該光学系を備えた照明光学装置並びに露光装置 |
| DE10113612A1 (de) | 2001-02-23 | 2002-09-05 | Zeiss Carl | Teilobjektiv in einem Beleuchtungssystem |
| JP3985937B2 (ja) * | 2001-07-10 | 2007-10-03 | オリンパス株式会社 | 蛍光用顕微鏡対物レンズ |
-
2003
- 2003-06-27 US US10/607,193 patent/US7289277B2/en not_active Expired - Lifetime
- 2003-07-08 TW TW092118620A patent/TWI301564B/zh not_active IP Right Cessation
- 2003-07-09 EP EP03015468A patent/EP1380871B1/en not_active Expired - Lifetime
- 2003-07-09 SG SG200304198A patent/SG105008A1/en unknown
- 2003-07-09 DE DE60306042T patent/DE60306042T2/de not_active Expired - Lifetime
- 2003-07-09 CN CNB031474225A patent/CN1328608C/zh not_active Expired - Lifetime
- 2003-07-09 KR KR1020030046329A patent/KR20040005677A/ko not_active Ceased
- 2003-07-09 JP JP2003194430A patent/JP4159936B2/ja not_active Expired - Fee Related
-
2007
- 2007-08-22 KR KR1020070084443A patent/KR100888011B1/ko not_active Expired - Fee Related