GB0800677D0 - Illumination system of a microlithographic projection exposure apparatus - Google Patents
Illumination system of a microlithographic projection exposure apparatusInfo
- Publication number
- GB0800677D0 GB0800677D0 GB0800677A GB0800677A GB0800677D0 GB 0800677 D0 GB0800677 D0 GB 0800677D0 GB 0800677 A GB0800677 A GB 0800677A GB 0800677 A GB0800677 A GB 0800677A GB 0800677 D0 GB0800677 D0 GB 0800677D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- exposure apparatus
- illumination system
- projection exposure
- microlithographic projection
- microlithographic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0800677A GB0800677D0 (en) | 2008-01-16 | 2008-01-16 | Illumination system of a microlithographic projection exposure apparatus |
PCT/EP2009/000049 WO2009090007A2 (en) | 2008-01-16 | 2009-01-08 | Illumination system of a microlithographic projection exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0800677A GB0800677D0 (en) | 2008-01-16 | 2008-01-16 | Illumination system of a microlithographic projection exposure apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0800677D0 true GB0800677D0 (en) | 2008-02-20 |
Family
ID=39144948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0800677A Ceased GB0800677D0 (en) | 2008-01-16 | 2008-01-16 | Illumination system of a microlithographic projection exposure apparatus |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB0800677D0 (en) |
WO (1) | WO2009090007A2 (en) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002055277A (en) * | 2000-08-11 | 2002-02-20 | Nikon Corp | Relay image-formation optical system, and illumination optical device and exposure device equipped with the optical system |
US7289277B2 (en) * | 2002-07-09 | 2007-10-30 | Asml Holding N.V. | Relay lens used in an illumination system of a lithography system |
US8873151B2 (en) * | 2005-04-26 | 2014-10-28 | Carl Zeiss Smt Gmbh | Illumination system for a microlithgraphic exposure apparatus |
-
2008
- 2008-01-16 GB GB0800677A patent/GB0800677D0/en not_active Ceased
-
2009
- 2009-01-08 WO PCT/EP2009/000049 patent/WO2009090007A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2009090007A3 (en) | 2009-09-24 |
WO2009090007A2 (en) | 2009-07-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |