GB0800677D0 - Illumination system of a microlithographic projection exposure apparatus - Google Patents

Illumination system of a microlithographic projection exposure apparatus

Info

Publication number
GB0800677D0
GB0800677D0 GB0800677A GB0800677A GB0800677D0 GB 0800677 D0 GB0800677 D0 GB 0800677D0 GB 0800677 A GB0800677 A GB 0800677A GB 0800677 A GB0800677 A GB 0800677A GB 0800677 D0 GB0800677 D0 GB 0800677D0
Authority
GB
United Kingdom
Prior art keywords
exposure apparatus
illumination system
projection exposure
microlithographic projection
microlithographic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0800677A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to GB0800677A priority Critical patent/GB0800677D0/en
Publication of GB0800677D0 publication Critical patent/GB0800677D0/en
Priority to PCT/EP2009/000049 priority patent/WO2009090007A2/en
Ceased legal-status Critical Current

Links

GB0800677A 2008-01-16 2008-01-16 Illumination system of a microlithographic projection exposure apparatus Ceased GB0800677D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0800677A GB0800677D0 (en) 2008-01-16 2008-01-16 Illumination system of a microlithographic projection exposure apparatus
PCT/EP2009/000049 WO2009090007A2 (en) 2008-01-16 2009-01-08 Illumination system of a microlithographic projection exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0800677A GB0800677D0 (en) 2008-01-16 2008-01-16 Illumination system of a microlithographic projection exposure apparatus

Publications (1)

Publication Number Publication Date
GB0800677D0 true GB0800677D0 (en) 2008-02-20

Family

ID=39144948

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0800677A Ceased GB0800677D0 (en) 2008-01-16 2008-01-16 Illumination system of a microlithographic projection exposure apparatus

Country Status (2)

Country Link
GB (1) GB0800677D0 (en)
WO (1) WO2009090007A2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002055277A (en) * 2000-08-11 2002-02-20 Nikon Corp Relay image-formation optical system, and illumination optical device and exposure device equipped with the optical system
US7289277B2 (en) * 2002-07-09 2007-10-30 Asml Holding N.V. Relay lens used in an illumination system of a lithography system
US8873151B2 (en) * 2005-04-26 2014-10-28 Carl Zeiss Smt Gmbh Illumination system for a microlithgraphic exposure apparatus

Also Published As

Publication number Publication date
WO2009090007A3 (en) 2009-09-24
WO2009090007A2 (en) 2009-07-23

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)