TWI301564B - Relay lens used in an illumination system of a lithography system - Google Patents

Relay lens used in an illumination system of a lithography system Download PDF

Info

Publication number
TWI301564B
TWI301564B TW092118620A TW92118620A TWI301564B TW I301564 B TWI301564 B TW I301564B TW 092118620 A TW092118620 A TW 092118620A TW 92118620 A TW92118620 A TW 92118620A TW I301564 B TWI301564 B TW I301564B
Authority
TW
Taiwan
Prior art keywords
lens
lens group
lenses
plane
illumination beam
Prior art date
Application number
TW092118620A
Other languages
English (en)
Chinese (zh)
Other versions
TW200500819A (en
Inventor
Lev Ryzhikov
Stanislav Smirnov
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of TW200500819A publication Critical patent/TW200500819A/zh
Application granted granted Critical
Publication of TWI301564B publication Critical patent/TWI301564B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70066—Size and form of the illuminated area in the mask plane, e.g. reticle masking blades or blinds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
    • G02B13/143—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW092118620A 2002-07-09 2003-07-08 Relay lens used in an illumination system of a lithography system TWI301564B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39424402P 2002-07-09 2002-07-09
US10/607,193 US7289277B2 (en) 2002-07-09 2003-06-27 Relay lens used in an illumination system of a lithography system

Publications (2)

Publication Number Publication Date
TW200500819A TW200500819A (en) 2005-01-01
TWI301564B true TWI301564B (en) 2008-10-01

Family

ID=29740281

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092118620A TWI301564B (en) 2002-07-09 2003-07-08 Relay lens used in an illumination system of a lithography system

Country Status (8)

Country Link
US (1) US7289277B2 (enExample)
EP (1) EP1380871B1 (enExample)
JP (1) JP4159936B2 (enExample)
KR (2) KR20040005677A (enExample)
CN (1) CN1328608C (enExample)
DE (1) DE60306042T2 (enExample)
SG (1) SG105008A1 (enExample)
TW (1) TWI301564B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100426462C (zh) * 2005-02-03 2008-10-15 日立笠户机械股份有限公司 图案形成方法
CN100388014C (zh) * 2005-05-16 2008-05-14 中强光电股份有限公司 侧向照明式透镜组
GB0800677D0 (en) * 2008-01-16 2008-02-20 Zeiss Carl Smt Ag Illumination system of a microlithographic projection exposure apparatus
CN103293863B (zh) * 2012-02-24 2015-11-18 上海微电子装备有限公司 一种光刻照明系统
CN104777609B (zh) * 2015-04-03 2018-07-13 中国科学院上海光学精密机械研究所 光刻机照明光瞳偏振态测量用光学系统
US11442254B2 (en) 2019-04-05 2022-09-13 Inner Ray, Inc. Augmented reality projection device
CN119717400B (zh) * 2023-09-27 2025-09-16 光科芯图(北京)科技有限公司 基于平面波的照明系统及曝光设备

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US36832A (en) * 1862-11-04 Improvement in friction-couplings
JPH03230112A (ja) * 1990-02-05 1991-10-14 Minolta Camera Co Ltd 投影レンズ系
US5402267A (en) * 1991-02-08 1995-03-28 Carl-Zeiss-Stiftung Catadioptric reduction objective
USRE38438E1 (en) * 1994-08-23 2004-02-24 Nikon Corporation Catadioptric reduction projection optical system and exposure apparatus having the same
DE19653983A1 (de) * 1996-12-21 1998-06-25 Zeiss Carl Fa REMA-Objektiv für Mikrolithographie-Projektionsbelichtungsanlagen
US6680803B2 (en) * 1996-12-21 2004-01-20 Carl-Zeiss Smt Ag Partial objective in an illuminating systems
US5969882A (en) 1997-04-01 1999-10-19 Nikon Corporation Catadioptric optical system
WO1999025008A1 (en) * 1997-11-07 1999-05-20 Nikon Corporation Projection exposure device, projection exposure method, and method of manufacturing projection exposure device
JP2000143278A (ja) 1998-11-10 2000-05-23 Nikon Corp 耐久性の向上された投影露光装置及び結像光学系の製造方法
JP4432153B2 (ja) * 1999-08-03 2010-03-17 株式会社ニコン ズームレンズ
EP1115019A3 (en) 1999-12-29 2004-07-28 Carl Zeiss Projection exposure lens with aspheric elements
JP2002055277A (ja) 2000-08-11 2002-02-20 Nikon Corp リレー結像光学系、および該光学系を備えた照明光学装置並びに露光装置
DE10113612A1 (de) 2001-02-23 2002-09-05 Zeiss Carl Teilobjektiv in einem Beleuchtungssystem
JP3985937B2 (ja) * 2001-07-10 2007-10-03 オリンパス株式会社 蛍光用顕微鏡対物レンズ

Also Published As

Publication number Publication date
JP4159936B2 (ja) 2008-10-01
KR100888011B1 (ko) 2009-03-09
CN1495461A (zh) 2004-05-12
US20040008408A1 (en) 2004-01-15
DE60306042T2 (de) 2006-11-02
EP1380871B1 (en) 2006-06-14
US7289277B2 (en) 2007-10-30
KR20040005677A (ko) 2004-01-16
SG105008A1 (en) 2004-07-30
EP1380871A2 (en) 2004-01-14
DE60306042D1 (de) 2006-07-27
JP2004046189A (ja) 2004-02-12
CN1328608C (zh) 2007-07-25
EP1380871A3 (en) 2004-03-03
TW200500819A (en) 2005-01-01
KR20070093380A (ko) 2007-09-18

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