JP5714201B2 - 入射瞳のバック・フォーカスが負である投影対物レンズおよび投影露光装置 - Google Patents

入射瞳のバック・フォーカスが負である投影対物レンズおよび投影露光装置 Download PDF

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JP5714201B2
JP5714201B2 JP2007081783A JP2007081783A JP5714201B2 JP 5714201 B2 JP5714201 B2 JP 5714201B2 JP 2007081783 A JP2007081783 A JP 2007081783A JP 2007081783 A JP2007081783 A JP 2007081783A JP 5714201 B2 JP5714201 B2 JP 5714201B2
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mirror
projection objective
plane
image
projection
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Expired - Fee Related
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JP2007264636A5 (enExample
JP2007264636A (ja
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ドクター・ハンス−ユルゲン・マン
ドクター・ウォルフガング・シンゲル
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カール・ツァイス・エスエムティー・ゲーエムベーハー
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
    • G02B17/0615—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in wich all of the mirrors share a common axis of rotational symmetry
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0657—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/7025—Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067—Construction details

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Microscoopes, Condenser (AREA)
JP2007081783A 2006-03-27 2007-03-27 入射瞳のバック・フォーカスが負である投影対物レンズおよび投影露光装置 Expired - Fee Related JP5714201B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US78674406P 2006-03-27 2006-03-27
DE102006014380A DE102006014380A1 (de) 2006-03-27 2006-03-27 Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille
US60/786,744 2006-03-27
DE102006014380.9 2006-03-27

Related Child Applications (1)

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JP2012285891A Division JP5883778B2 (ja) 2006-03-27 2012-12-27 入射瞳のバック・フォーカスが負である投影対物系および投影露光装置

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JP2007264636A JP2007264636A (ja) 2007-10-11
JP2007264636A5 JP2007264636A5 (enExample) 2010-05-13
JP5714201B2 true JP5714201B2 (ja) 2015-05-07

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JP2007081783A Expired - Fee Related JP5714201B2 (ja) 2006-03-27 2007-03-27 入射瞳のバック・フォーカスが負である投影対物レンズおよび投影露光装置
JP2012285891A Expired - Fee Related JP5883778B2 (ja) 2006-03-27 2012-12-27 入射瞳のバック・フォーカスが負である投影対物系および投影露光装置

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US (3) US7869138B2 (enExample)
EP (1) EP1840622A3 (enExample)
JP (2) JP5714201B2 (enExample)
KR (3) KR101121817B1 (enExample)
DE (1) DE102006014380A1 (enExample)
TW (2) TWI456250B (enExample)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100962911B1 (ko) * 2005-09-13 2010-06-10 칼 짜이스 에스엠테 아게 마이크로리소그라피 투영 광학 시스템, 디바이스 제작 방법 및 광학 표면을 설계하기 위한 방법
DE102006014380A1 (de) * 2006-03-27 2007-10-11 Carl Zeiss Smt Ag Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille
DE102006056035A1 (de) * 2006-11-28 2008-05-29 Carl Zeiss Smt Ag Beleuchtungsoptik für die EUV-Projektions-Mikrolithographie, Beleuchtungssystem mit einer derartigen Beleuchtungsoptik, Projektionsbelichtungsanlage mit einem derartigen Beleuchtungssystem, Verfahren zur Herstellung eines mikrostrukturierten Bauteils sowie durch das Verfahren hergestelltes mikrostrukturiertes Bauteil
EP1950594A1 (de) * 2007-01-17 2008-07-30 Carl Zeiss SMT AG Abbildende Optik, Projektionsbelichtunsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik, Verfahren zur Herstellung eines mikrostrukturierten Bauteils mit einer derartigen Projektionsbelichtungsanlage, durch das Herstellungsverfahren gefertigtes mikrostrukturiertes Bauelement sowie Verwendung einer derartigen abbildenden Optik
DE102008002377A1 (de) * 2007-07-17 2009-01-22 Carl Zeiss Smt Ag Beleuchtungssystem sowie Projektionsbelichtungsanlage für die Mikrolithografie mit einem derartigen Beleuchtungssystem
DE102008033342A1 (de) 2008-07-16 2010-01-21 Carl Zeiss Smt Ag Projektionsobjektiv für die Mikrolithographie
DE102008000800A1 (de) 2008-03-20 2009-09-24 Carl Zeiss Smt Ag Projektionsobjektiv für die Mikrolithographie
KR101656534B1 (ko) * 2008-03-20 2016-09-09 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피용 투영 대물렌즈
DE102008000967B4 (de) * 2008-04-03 2015-04-09 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die EUV-Mikrolithographie
DE102008033340B3 (de) * 2008-07-16 2010-04-08 Carl Zeiss Smt Ag Abbildende Optik
DE102008046699B4 (de) 2008-09-10 2014-03-13 Carl Zeiss Smt Gmbh Abbildende Optik
WO2010032753A1 (ja) * 2008-09-18 2010-03-25 株式会社ニコン 開口絞り、光学系、露光装置及び電子デバイスの製造方法
DE102008049588B4 (de) * 2008-09-30 2018-04-05 Carl Zeiss Smt Gmbh Optische Abbildungseinrichtung, Mikroskop und Abbildungsverfahren für die Mikroskopie
DE102008049589A1 (de) * 2008-09-30 2010-04-08 Carl Zeiss Smt Ag Optische Abbildungseinrichtung und Abbildungsverfahren für die Mikroskopie
KR20100044625A (ko) * 2008-10-22 2010-04-30 삼성전자주식회사 주기적으로 활성화되는 복제 경로를 구비하는 지연 동기 루프를 구비하는 반도체 장치
JP5525550B2 (ja) 2009-03-06 2014-06-18 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ用の照明光学系及び光学系
US8743342B2 (en) * 2009-11-17 2014-06-03 Nikon Corporation Reflective imaging optical system, exposure apparatus, and method for producing device
EP2506061A4 (en) 2009-11-24 2017-12-20 Nikon Corporation Image-forming optical system, exposure apparatus, and device producing method
US8317344B2 (en) 2010-06-08 2012-11-27 Nikon Corporation High NA annular field catoptric projection optics using Zernike polynomial mirror surfaces
DE102010041623A1 (de) * 2010-09-29 2012-03-29 Carl Zeiss Smt Gmbh Spiegel
US20120170014A1 (en) * 2011-01-04 2012-07-05 Northwestern University Photolithography system using a solid state light source
DE102011076752A1 (de) * 2011-05-31 2012-12-06 Carl Zeiss Smt Gmbh Abbildende Optik
DE102011086345A1 (de) * 2011-11-15 2013-05-16 Carl Zeiss Smt Gmbh Spiegel
CN102402135B (zh) * 2011-12-07 2013-06-05 北京理工大学 一种极紫外光刻投影物镜设计方法
KR102330570B1 (ko) 2012-02-06 2021-11-25 가부시키가이샤 니콘 반사 결상 광학계, 노광 장치, 및 디바이스 제조 방법
DE102012204273B4 (de) 2012-03-19 2015-08-13 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die EUV-Projektionslithografie
WO2014019617A1 (en) 2012-08-01 2014-02-06 Carl Zeiss Smt Gmbh Imaging optical unit for a projection exposure apparatus
DE102013218130A1 (de) * 2013-09-11 2015-03-12 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die EUV-Projektionslithografie
DE102013218132A1 (de) 2013-09-11 2015-03-12 Carl Zeiss Smt Gmbh Kollektor
DE102013218128A1 (de) 2013-09-11 2015-03-12 Carl Zeiss Smt Gmbh Beleuchtungssystem
JP6215009B2 (ja) * 2013-11-15 2017-10-18 株式会社東芝 撮像装置及び撮像方法
JP5854295B2 (ja) * 2014-04-11 2016-02-09 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ用の照明光学系及び光学系
DE102014216801A1 (de) 2014-08-25 2016-02-25 Carl Zeiss Smt Gmbh Facettenspiegel für eine Beleuchtungsoptik für die Projektionslithographie
CN105511231B (zh) * 2014-10-16 2019-03-29 中芯国际集成电路制造(上海)有限公司 Euv光源和曝光装置
DE102014223811B4 (de) 2014-11-21 2016-09-29 Carl Zeiss Smt Gmbh Abbildende Optik für die EUV-Projektionslithographie, Projektionsbelichtungsanlage und Verfahren zur Herstellung eines strukturierten Bauteils
JP6370255B2 (ja) * 2015-04-07 2018-08-08 信越化学工業株式会社 ペリクル用フレーム及びそれを用いたペリクル
DE102017217251A1 (de) 2017-09-27 2019-03-28 Carl Zeiss Smt Gmbh Verfahren und Anordnung zur Analyse der Wellenfrontwirkung eines optischen Systems
RU2760443C1 (ru) * 2020-12-07 2021-11-25 Общество с Ограниченной Ответственностью Научно Исследовательский Центр «Астрофизика» Устройство фокусировки для лазерной обработки
DE102021206953A1 (de) 2021-07-02 2022-06-02 Carl Zeiss Smt Gmbh Optisches system, lithographieanlage und verfahren zum betreiben eines optischen systems
DE102022206110A1 (de) * 2022-06-20 2023-12-21 Carl Zeiss Smt Gmbh Abbildende EUV-Optik zur Abbildung eines Objektfeldes in ein Bildfeld
DE102022209908A1 (de) 2022-09-21 2024-03-21 Carl Zeiss Smt Gmbh Facettenspiegel, Beleuchtungsoptik, Anordnung eines Facettenspiegels, Projektionsbelichtungsanlage und Verfahren zur Herstellung eines nanostrukturierten Bauelements

Family Cites Families (100)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US666560A (en) * 1899-07-25 1901-01-22 William S Rowland Wire fence.
DE3343868A1 (de) 1983-12-03 1985-06-13 Zeiss Carl Fa Objektiv mit kegelschnittflaechen fuer die mikrozonenabbildung
US4650292A (en) 1983-12-28 1987-03-17 Polaroid Corporation Analytic function optical component
US5003567A (en) * 1989-02-09 1991-03-26 Hawryluk Andrew M Soft x-ray reduction camera for submicron lithography
JP2691226B2 (ja) 1989-07-10 1997-12-17 株式会社ニコン 赤外線撮像光学装置
US5071240A (en) 1989-09-14 1991-12-10 Nikon Corporation Reflecting optical imaging apparatus using spherical reflectors and producing an intermediate image
US5063586A (en) 1989-10-13 1991-11-05 At&T Bell Laboratories Apparatus for semiconductor lithography
US5212588A (en) * 1991-04-09 1993-05-18 The United States Of America As Represented By The United States Department Of Energy Reflective optical imaging system for extreme ultraviolet wavelengths
US5309276A (en) 1991-08-29 1994-05-03 Optical Research Associates Catoptric optical system including concave and convex reflectors
JPH0736959A (ja) 1993-07-15 1995-02-07 Hitachi Ltd 自由曲面光学系の設計方法
DE4327656A1 (de) * 1993-08-17 1995-02-23 Steinheil Optronik Gmbh Infrarot-Objektiv
CA2177170A1 (en) 1993-11-23 1995-06-01 Oleg Vladimirovich Selifanov An abrasive material for precision surface treatment and a method for the manufacturing thereof
JP3358097B2 (ja) 1994-04-12 2002-12-16 株式会社ニコン Ｘ線投影露光装置
US6166866A (en) 1995-02-28 2000-12-26 Canon Kabushiki Kaisha Reflecting type optical system
EP0730180B1 (en) 1995-02-28 2002-09-04 Canon Kabushiki Kaisha Reflecting type of zoom lens
US6021004A (en) 1995-02-28 2000-02-01 Canon Kabushiki Kaisha Reflecting type of zoom lens
US5815310A (en) * 1995-12-12 1998-09-29 Svg Lithography Systems, Inc. High numerical aperture ring field optical reduction system
JP3041328B2 (ja) 1996-03-21 2000-05-15 株式会社那須板金工業 平板葺き屋根構造
US5686728A (en) * 1996-05-01 1997-11-11 Lucent Technologies Inc Projection lithography system and method using all-reflective optical elements
JPH11110791A (ja) 1997-09-30 1999-04-23 Pioneer Electron Corp 光情報記録媒体の再生ピックアップ装置
TW594438B (en) * 1997-11-07 2004-06-21 Koninkl Philips Electronics Nv Three-mirror system for lithographic projection, and projection apparatus comprising such a mirror system
EP1039510A4 (en) * 1997-11-14 2003-11-12 Nikon Corp EXPOSURE DEVICE, MANUFACTURING METHOD THEREOF, AND EXPOSURE METHOD
US6240158B1 (en) * 1998-02-17 2001-05-29 Nikon Corporation X-ray projection exposure apparatus with a position detection optical system
US6226346B1 (en) 1998-06-09 2001-05-01 The Regents Of The University Of California Reflective optical imaging systems with balanced distortion
JP2000091209A (ja) 1998-09-14 2000-03-31 Nikon Corp 露光装置の製造方法、露光装置、及びデバイス製造方法
JP4238390B2 (ja) * 1998-02-27 2009-03-18 株式会社ニコン 照明装置、該照明装置を備えた露光装置および該露光装置を用いて半導体デバイスを製造する方法
US6859328B2 (en) 1998-05-05 2005-02-22 Carl Zeiss Semiconductor Illumination system particularly for microlithography
EP0955641B1 (de) * 1998-05-05 2004-04-28 Carl Zeiss Beleuchtungssystem insbesondere für die EUV-Lithographie
US7186983B2 (en) * 1998-05-05 2007-03-06 Carl Zeiss Smt Ag Illumination system particularly for microlithography
DE10138313A1 (de) 2001-01-23 2002-07-25 Zeiss Carl Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm
US6396067B1 (en) 1998-05-06 2002-05-28 Koninklijke Philips Electronics N.V. Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system
US6577443B2 (en) 1998-05-30 2003-06-10 Carl-Zeiss Stiftung Reduction objective for extreme ultraviolet lithography
DE19923609A1 (de) * 1998-05-30 1999-12-02 Zeiss Carl Fa Ringfeld-4-Spiegelsysteme mit konvexem Primärspiegel für die EUV-Lithographie
EP1293832A1 (en) * 1998-06-08 2003-03-19 Nikon Corporation Projection exposure apparatus and method
US6072852A (en) 1998-06-09 2000-06-06 The Regents Of The University Of California High numerical aperture projection system for extreme ultraviolet projection lithography
US6213610B1 (en) 1998-09-21 2001-04-10 Nikon Corporation Catoptric reduction projection optical system and exposure apparatus and method using same
JP2000100694A (ja) 1998-09-22 2000-04-07 Nikon Corp 反射縮小投影光学系、該光学系を備えた投影露光装置および該装置を用いた露光方法
US6195201B1 (en) * 1999-01-27 2001-02-27 Svg Lithography Systems, Inc. Reflective fly's eye condenser for EUV lithography
EP1035445B1 (de) 1999-02-15 2007-01-31 Carl Zeiss SMT AG Mikrolithographie-Reduktionsobjektiveinrichtung sowie Projektionsbelichtungsanlage
US6600552B2 (en) 1999-02-15 2003-07-29 Carl-Zeiss Smt Ag Microlithography reduction objective and projection exposure apparatus
US7151592B2 (en) 1999-02-15 2006-12-19 Carl Zeiss Smt Ag Projection system for EUV lithography
WO2002048796A2 (en) 2000-12-12 2002-06-20 Carl Zeiss Smt Ag Projection system for euv lithography
US6033079A (en) 1999-03-15 2000-03-07 Hudyma; Russell High numerical aperture ring field projection system for extreme ultraviolet lithography
WO2000055849A1 (en) 1999-03-15 2000-09-21 Matsushita Electric Industrial Co., Ltd. Convergent device, optical head, optical information recording/reproducing and optical information recording/reproducing method
JP2000286189A (ja) * 1999-03-31 2000-10-13 Nikon Corp 露光装置および露光方法ならびにデバイス製造方法
US6426506B1 (en) 1999-05-27 2002-07-30 The Regents Of The University Of California Compact multi-bounce projection system for extreme ultraviolet projection lithography
JP4212721B2 (ja) 1999-06-10 2009-01-21 三菱電機株式会社 広角反射光学系
JP4717974B2 (ja) 1999-07-13 2011-07-06 株式会社ニコン 反射屈折光学系及び該光学系を備える投影露光装置
US6557443B1 (en) 1999-09-09 2003-05-06 Larue Mark C. Bar feeder for machining center
EP1093021A3 (en) * 1999-10-15 2004-06-30 Nikon Corporation Projection optical system as well as equipment and methods making use of said system
US6621557B2 (en) * 2000-01-13 2003-09-16 Nikon Corporation Projection exposure apparatus and exposure methods
TW538256B (en) * 2000-01-14 2003-06-21 Zeiss Stiftung Microlithographic reduction projection catadioptric objective
US6867913B2 (en) * 2000-02-14 2005-03-15 Carl Zeiss Smt Ag 6-mirror microlithography projection objective
JP2002015979A (ja) 2000-06-29 2002-01-18 Nikon Corp 投影光学系、露光装置及び露光方法
JP2004512552A (ja) 2000-10-20 2004-04-22 カール　ツァイス　シュティフトゥング　トレイディング　アズ　カール　ツァイス ８反射鏡型マイクロリソグラフィ用投影光学系
DE10052289A1 (de) * 2000-10-20 2002-04-25 Zeiss Carl 8-Spiegel-Mikrolithographie-Projektionsobjektiv
TW573234B (en) 2000-11-07 2004-01-21 Asml Netherlands Bv Lithographic projection apparatus and integrated circuit device manufacturing method
KR100831706B1 (ko) 2001-01-09 2008-05-22 칼 짜이스 에스엠티 에이지 극자외선 리소그라피를 위한 투영시스템
US6387723B1 (en) 2001-01-19 2002-05-14 Silicon Light Machines Reduced surface charging in silicon-based devices
US20020171047A1 (en) * 2001-03-28 2002-11-21 Chan Kin Foeng Integrated laser diode array and applications
JP4349550B2 (ja) 2001-03-29 2009-10-21 フジノン株式会社 反射型投映用光学系
TW594043B (en) 2001-04-11 2004-06-21 Matsushita Electric Industrial Co Ltd Reflection type optical apparatus and photographing apparatus using the same, multi-wavelength photographing apparatus, monitoring apparatus for vehicle
JP2002329655A (ja) * 2001-05-01 2002-11-15 Canon Inc 反射型縮小投影光学系、露光装置及びデバイス製造方法
DE10139177A1 (de) * 2001-08-16 2003-02-27 Zeiss Carl Objektiv mit Pupillenobskuration
JP4134544B2 (ja) 2001-10-01 2008-08-20 株式会社ニコン 結像光学系および露光装置
JP2003114387A (ja) 2001-10-04 2003-04-18 Nikon Corp 反射屈折光学系および該光学系を備える投影露光装置
JP3581689B2 (ja) 2002-01-31 2004-10-27 キヤノン株式会社 位相測定装置
EP1333260A3 (en) 2002-01-31 2004-02-25 Canon Kabushiki Kaisha Phase measuring method and apparatus
JP2003233001A (ja) 2002-02-07 2003-08-22 Canon Inc 反射型投影光学系、露光装置及びデバイス製造方法
JP2003233005A (ja) 2002-02-07 2003-08-22 Canon Inc 反射型投影光学系、露光装置及びデバイス製造方法
JP2003233002A (ja) 2002-02-07 2003-08-22 Canon Inc 反射型投影光学系、露光装置及びデバイス製造方法
US6989922B2 (en) 2002-06-21 2006-01-24 Nikon Corporation Deformable mirror actuation system
JP2004029625A (ja) 2002-06-28 2004-01-29 Nikon Corp 投影光学系、露光装置及び露光方法
JP2004170869A (ja) * 2002-11-22 2004-06-17 Nikon Corp 結像光学系、露光装置および露光方法
JP3938040B2 (ja) 2002-12-27 2007-06-27 キヤノン株式会社 反射型投影光学系、露光装置及びデバイス製造方法
US7268891B2 (en) * 2003-01-15 2007-09-11 Asml Holding N.V. Transmission shear grating in checkerboard configuration for EUV wavefront sensor
JP2004252358A (ja) * 2003-02-21 2004-09-09 Canon Inc 反射型投影光学系及び露光装置
JP2004252363A (ja) * 2003-02-21 2004-09-09 Canon Inc 反射型投影光学系
JP2004258541A (ja) 2003-02-27 2004-09-16 Canon Inc 反射型光学系
JP2005003943A (ja) * 2003-06-12 2005-01-06 Fuji Xerox Co Ltd 光学素子およびその製造方法
JP4428947B2 (ja) 2003-06-30 2010-03-10 キヤノン株式会社 結像光学系
JP2005055553A (ja) 2003-08-08 2005-03-03 Nikon Corp ミラー、温度調整機構付きミラー及び露光装置
US7085075B2 (en) 2003-08-12 2006-08-01 Carl Zeiss Smt Ag Projection objectives including a plurality of mirrors with lenses ahead of mirror M3
JP2005166778A (ja) 2003-12-01 2005-06-23 Canon Inc 露光装置、デバイスの製造方法
DE10359576A1 (de) 2003-12-18 2005-07-28 Carl Zeiss Smt Ag Verfahren zur Herstellung einer optischen Einheit
DE10360414A1 (de) 2003-12-19 2005-07-21 Carl Zeiss Smt Ag EUV-Projektionsobjektiv sowie Verfahren zu dessen Herstellung
WO2005083759A1 (ja) * 2004-02-27 2005-09-09 Nikon Corporation 露光装置、及び微細パターンを有するデバイスの製造方法
JP2005294608A (ja) 2004-04-01 2005-10-20 Nikon Corp 放電光源ユニット、照明光学装置、露光装置および露光方法
JP2005294087A (ja) 2004-04-01 2005-10-20 Nikon Corp 光源ユニット、照明光学装置、露光装置および露光方法
JP4338577B2 (ja) * 2004-04-28 2009-10-07 株式会社ブイ・テクノロジー 露光装置
US7114818B2 (en) 2004-05-06 2006-10-03 Olympus Corporation Optical system, and electronic equipment that incorporates the same
WO2006069725A1 (de) * 2004-12-23 2006-07-06 Carl Zeiss Smt Ag Hochaperturiges objektiv mit obskurierter pupille
DE102005042005A1 (de) 2004-12-23 2006-07-06 Carl Zeiss Smt Ag Hochaperturiges Objektiv mit obskurierter Pupille
JP2006245147A (ja) 2005-03-01 2006-09-14 Canon Inc 投影光学系、露光装置及びデバイスの製造方法
JP2006253487A (ja) 2005-03-11 2006-09-21 Nikon Corp 照明装置、投影露光方法、投影露光装置、及びマイクロデバイスの製造方法
JP2006351586A (ja) 2005-06-13 2006-12-28 Nikon Corp 照明装置、投影露光装置、及びマイクロデバイスの製造方法
KR100604942B1 (ko) 2005-06-18 2006-07-31 삼성전자주식회사 비축상(ｏｆｆ-ａｘｉｓ) 프로젝션 광학계 및 이를 적용한극자외선 리소그래피 장치
KR100962911B1 (ko) 2005-09-13 2010-06-10 칼 짜이스 에스엠테 아게 마이크로리소그라피 투영 광학 시스템, 디바이스 제작 방법 및 광학 표면을 설계하기 위한 방법
DE102006003375A1 (de) 2006-01-24 2007-08-09 Carl Zeiss Smt Ag Gruppenweise korrigiertes Objektiv
DE102006014380A1 (de) 2006-03-27 2007-10-11 Carl Zeiss Smt Ag Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille

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US7869138B2 (en) 2011-01-11
US8094380B2 (en) 2012-01-10
US8810927B2 (en) 2014-08-19
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TW200741244A (en) 2007-11-01
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TWI550305B (zh) 2016-09-21
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