JP2007227408A - 圧電アクチュエータ、液体吐出ヘッドの製造方法及び液体吐出ヘッド並びに画像形成装置 - Google Patents
圧電アクチュエータ、液体吐出ヘッドの製造方法及び液体吐出ヘッド並びに画像形成装置 Download PDFInfo
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Abstract
【解決手段】Crを18重量パーセント以上含有するとともにAlを2.5重量パーセント以上含有するフェライト系耐熱SUSを振動板56に適用し、900℃〜1100℃で熱処理されると振動板56の表面にクロム酸化膜62とアルミニウム酸化膜64から成る金属酸化膜66が析出する。この金属酸化膜66上に圧電素子58を形成し、600℃〜800℃でアニール処理を施しても、振動板56に含有する鉄の圧電素子58への拡散が防止される。また、振動板56と圧電素子58の線膨張係数を合わせることで、振動板56の反りが低減される。
【選択図】図4
Description
請求項3に記載の発明は、請求項1記載の圧電アクチュエータの製造方法の一態様に係り、前記振動板は、クロムの含有比率が18重量パーセント以上であるとともに、アルミニウムの含有比率が2.98重量パーセント以上であり、前記焼成工程は、800度以上の温度条件による熱処理を含むことを特徴とする。
図1は、本発明の実施形態に係るインクジェット記録装置の概略を示す全体構成図である。図1に示すように、このインクジェット記録装置10は、インクの色毎に設けられた複数のヘッド12K、12C、12M、12Yを有する印字部12と、各ヘッド12K、12C、12M、12Yに供給するインクを貯蔵しておくインク貯蔵/装填部14と、記録紙16を供給する給紙部18と、記録紙16のカールを除去するデカール処理部20と、ヘッド12K、12C、12M、12Yのノズル面(インク吐出面)に対向して配置され、記録紙16(記録媒体)の平面性を保持しながら記録紙16を搬送する吸着ベルト搬送部22と、印字部12による印字結果を読み取る印字検出部24と、印画済みの記録紙(プリント物)を外部に排紙する排紙部26と、を備えている。
次に、ヘッドの構造について説明する。色別の各ヘッド12K,12C,12M,12Yの構造は共通しているので、以下、これらを代表して符号50によってヘッドを示すものとする。
図5はインクジェット記録装置10のシステム構成を示す要部ブロック図である。インクジェット記録装置10は、通信インターフェース70、システムコントローラ72、メモリ74、モータドライバ76、ヒータドライバ78、プリント制御部80、画像バッファメモリ82、ヘッドドライバ84等を備えている。
次に、図6及び図7を用いて、ヘッド50の製造方法について説明する。
Claims (12)
- 酸素を含む気体中において、鉄、クロム及びアルミニウムを含有するステンレスの振動板に熱処理を施し、前記振動板の第1の面及び前記第1の面と反対側の第2の面のうち少なくとも何れか一方の面にアルミニウム酸化膜を形成するとともに、該アルミニウム酸化膜と前記振動板との間にクロム酸化膜を形成する酸化膜形成工程と、
前記振動板のクロム酸化膜及びアルミニウム酸化膜が形成された面に下部電極を形成する下部電極形成工程と、
前記下部電極の前記クロム酸化膜及び前記アルミニウム酸化膜と反対側に圧電体を成膜する圧電体成膜工程と、
前記圧電体の前記下部電極と反対側の面に上部電極を形成する上部電極形成工程と、
前記圧電体が形成された前記振動板に熱処理を施して前記圧電体を焼成する焼成工程と、
を含むことを特徴とする圧電アクチュエータの製造方法。 - 前記振動板は、クロムの含有比率が18重量パーセント以上であるとともに、アルミニウムの含有比率が2.5重量パーセント以上であり、
前記焼成工程は、600度以上800度未満の温度条件による熱処理を含むことを特徴とする請求項1記載の圧電アクチュエータの製造方法。 - 前記振動板は、クロムの含有比率が18重量パーセント以上であるとともに、アルミニウムの含有比率が2.98重量パーセント以上であり、
前記焼成工程は、800度以上の温度条件による熱処理を含むことを特徴とする請求項1記載の圧電アクチュエータの製造方法。 - 前記クロム酸化膜は酸化クロム(Cr2O3)を含み、前記アルミニウム酸化膜は酸化アルミニウム(Al2O3)を含むことを特徴する請求項1、2又は3記載の圧電アクチュエータの製造方法。
- 前記振動板は、フェライト系ステンレス基板を含むことを特徴とする請求項1乃至4のうち何れか1項に記載の圧電アクチュエータの製造方法。
- 前記圧電体は、エアロゾルデポジション法によって成膜されることを特徴とする請求項1乃至5のうち何れか1項に記載の圧電アクチュエータの製造方法。
- 鉄、クロム及びアルミニウムを含有するステンレス基板を用いた振動板と、圧力室となる空間が形成されたクロム及びアルミニウムを含有するステンレス基板を用いた圧力室形成基板と、を拡散接合する接合工程と、
酸素を含む気体において、前記接合工程により形成された前記振動板及び前記圧力室形成基板を接合した構造体に熱処理を施し、前記構造体の表面にアルミニウム酸化膜を形成し、該アルミニウム酸化膜と前記構造体との間にクロム酸化膜を形成する酸化膜形成工程と、
前記振動板の前記圧力室と反対側のクロム酸化膜及びアルミニウム酸化膜が形成された面に下部電極を形成する下部電極形成工程と、
前記下部電極の前記クロム酸化膜及び前記アルミニウム酸化膜と反対側に圧電体を成膜する圧電体成膜工程と、
前記圧電体の前記下部電極と反対側の面に上部電極を形成する上部電極形成工程と、
前記振動板に前記圧電体が形成された前記構造体に熱処理を施して前記圧電体を焼成する焼成工程と、
を含むことを特徴とする液体吐出ヘッドの製造方法。 - 前記振動板及び前記圧力室形成基板は、フェライト系ステンレス基板を含むことを特徴とする請求項7記載の液体吐出ヘッドの製造方法。
- 前記圧力室形成基板は、複数の基板を積層し拡散接合により接合して形成されることを特徴とする請求項7又は8記載の液体吐出ヘッドの製造方法。
- 請求項1乃至6のうち何れか1項に記載の圧電アクチュエータ製造方法を用いて製造された圧電アクチュエータを備えたことを特徴とする液体吐出ヘッド。
- 請求項1乃至6のうち何れか1項に記載の圧電アクチュエータ製造方法を用いて製造された圧電アクチュエータを備えた液体吐出ヘッドを有することを特徴とする画像形成装置。
- 請求項7乃至9のうち何れか1項に記載の液体吐出ヘッドの製造方法を用いて製造された液体吐出ヘッドを備えたことを特徴とする画像形成装置。
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US11/637,149 US7661180B2 (en) | 2005-12-13 | 2006-12-12 | Method of manufacturing a piezoelectric actuator and liquid ejection head |
US12/548,252 US8500253B2 (en) | 2005-12-13 | 2009-08-26 | Piezoelectric actuator and liquid ejection head |
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US8186029B2 (en) | 2007-12-29 | 2012-05-29 | Brother Kogyo Kabushiki Kaisha | Method for producing piezoelectric actuator and method for producing liquid discharge head |
JP2014159167A (ja) * | 2014-04-09 | 2014-09-04 | Brother Ind Ltd | 圧電アクチュエータの製造方法及び液体移送装置の製造方法 |
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US8230596B2 (en) | 2012-07-31 |
US20070130740A1 (en) | 2007-06-14 |
JP4911669B2 (ja) | 2012-04-04 |
US20090313826A1 (en) | 2009-12-24 |
US20090309936A1 (en) | 2009-12-17 |
US8500253B2 (en) | 2013-08-06 |
US7661180B2 (en) | 2010-02-16 |
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