JP2007184426A5 - - Google Patents
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- Publication number
- JP2007184426A5 JP2007184426A5 JP2006001802A JP2006001802A JP2007184426A5 JP 2007184426 A5 JP2007184426 A5 JP 2007184426A5 JP 2006001802 A JP2006001802 A JP 2006001802A JP 2006001802 A JP2006001802 A JP 2006001802A JP 2007184426 A5 JP2007184426 A5 JP 2007184426A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- manufacturing
- semiconductor element
- semiconductor device
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 18
- 239000004065 semiconductor Substances 0.000 claims 13
- 238000004519 manufacturing process Methods 0.000 claims 6
- 239000000463 material Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000035515 penetration Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006001802A JP2007184426A (ja) | 2006-01-06 | 2006-01-06 | 半導体装置の製造方法 |
| EP06256362A EP1806782B1 (en) | 2006-01-06 | 2006-12-14 | Method for manufacturing semiconductor device |
| TW095147438A TW200807751A (en) | 2006-01-06 | 2006-12-18 | Method for manufacturing semiconductor device |
| US11/641,336 US7494898B2 (en) | 2006-01-06 | 2006-12-19 | Method for manufacturing semiconductor device |
| KR1020060131037A KR20070074460A (ko) | 2006-01-06 | 2006-12-20 | 반도체 장치의 제조 방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006001802A JP2007184426A (ja) | 2006-01-06 | 2006-01-06 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007184426A JP2007184426A (ja) | 2007-07-19 |
| JP2007184426A5 true JP2007184426A5 (enExample) | 2008-12-25 |
Family
ID=37876964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006001802A Pending JP2007184426A (ja) | 2006-01-06 | 2006-01-06 | 半導体装置の製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7494898B2 (enExample) |
| EP (1) | EP1806782B1 (enExample) |
| JP (1) | JP2007184426A (enExample) |
| KR (1) | KR20070074460A (enExample) |
| TW (1) | TW200807751A (enExample) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007184426A (ja) * | 2006-01-06 | 2007-07-19 | Shinko Electric Ind Co Ltd | 半導体装置の製造方法 |
| US9780268B2 (en) | 2006-04-04 | 2017-10-03 | Cree, Inc. | Submount based surface mount device (SMD) light emitter components and methods |
| TW200843135A (en) * | 2007-04-23 | 2008-11-01 | Augux Co Ltd | Method of packaging light emitting diode with high heat-dissipating efficiency and the structure thereof |
| JP4809308B2 (ja) * | 2007-09-21 | 2011-11-09 | 新光電気工業株式会社 | 基板の製造方法 |
| JP5248084B2 (ja) * | 2007-10-26 | 2013-07-31 | 新光電気工業株式会社 | シリコンインターポーザとこれを用いた半導体装置用パッケージおよび半導体装置 |
| DE102008014927A1 (de) | 2008-02-22 | 2009-08-27 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer Mehrzahl von strahlungsemittierenden Bauelementen und strahlungsemittierendes Bauelement |
| JP5108579B2 (ja) * | 2008-03-21 | 2012-12-26 | シチズンファインテックミヨタ株式会社 | 電子部品パッケージの製造方法および電子部品パッケージ |
| KR100992778B1 (ko) | 2008-05-23 | 2010-11-05 | 엘지이노텍 주식회사 | 발광소자 패키지 및 그 제조방법 |
| US20100176507A1 (en) * | 2009-01-14 | 2010-07-15 | Hymite A/S | Semiconductor-based submount with electrically conductive feed-throughs |
| KR101064026B1 (ko) * | 2009-02-17 | 2011-09-08 | 엘지이노텍 주식회사 | 발광 디바이스 패키지 및 그 제조방법 |
| US8609512B2 (en) * | 2009-03-27 | 2013-12-17 | Electro Scientific Industries, Inc. | Method for laser singulation of chip scale packages on glass substrates |
| US7892950B2 (en) * | 2009-04-29 | 2011-02-22 | Freescale Semiconductor, Inc. | Methodology for processing a panel during semiconductor device fabrication |
| JP2011040621A (ja) * | 2009-08-12 | 2011-02-24 | Renesas Electronics Corp | 半導体装置の設計方法および半導体装置の製造方法 |
| JP2011222623A (ja) * | 2010-04-06 | 2011-11-04 | Disco Abrasive Syst Ltd | 光デバイスウエーハの加工方法 |
| JP2012186309A (ja) * | 2011-03-04 | 2012-09-27 | Omron Corp | ウエハレベルパッケージの製造方法、及びウエハレベルパッケージ |
| US10134961B2 (en) | 2012-03-30 | 2018-11-20 | Cree, Inc. | Submount based surface mount device (SMD) light emitter components and methods |
| US10222032B2 (en) | 2012-03-30 | 2019-03-05 | Cree, Inc. | Light emitter components and methods having improved electrical contacts |
| US9735198B2 (en) * | 2012-03-30 | 2017-08-15 | Cree, Inc. | Substrate based light emitter devices, components, and related methods |
| KR101524044B1 (ko) * | 2013-11-21 | 2015-06-02 | 주식회사 루멘스 | 발광 소자 패키지, 백라이트 유닛 및 조명 장치 |
| WO2015076591A1 (ko) | 2013-11-21 | 2015-05-28 | 주식회사 루멘스 | 발광 소자 패키지, 백라이트 유닛, 조명 장치 및 발광 소자 패키지의 제작 방법 |
| KR101524046B1 (ko) * | 2013-11-21 | 2015-06-01 | 주식회사 루멘스 | 발광 소자 패키지, 백라이트 유닛, 조명 장치 및 발광 소자 패키지의 제작 방법 |
| CN104752584A (zh) * | 2013-12-25 | 2015-07-01 | 苏州矩阵光电有限公司 | 一种led封装结构 |
| US9196592B2 (en) | 2014-01-10 | 2015-11-24 | International Business Machines Corporation | Methods of managing metal density in dicing channel and related integrated circuit structures |
| CN103822143A (zh) * | 2014-02-18 | 2014-05-28 | 江苏新广联绿色照明工程有限公司 | 硅基led路灯光源模块 |
| CN103887238A (zh) * | 2014-04-01 | 2014-06-25 | 惠州硕贝德无线科技股份有限公司 | 一种完成bga封装之后的晶圆的切割分粒方法 |
| US9691949B2 (en) | 2014-05-30 | 2017-06-27 | Cree, Inc. | Submount based light emitter components and methods |
| CN107438899B (zh) | 2015-03-31 | 2021-04-30 | 科锐Led公司 | 具有包封的发光二极管和方法 |
| US12364074B2 (en) | 2015-03-31 | 2025-07-15 | Creeled, Inc. | Light emitting diodes and methods |
| JP2018060988A (ja) * | 2016-10-04 | 2018-04-12 | 日本特殊陶業株式会社 | 蓋部材、発光装置、およびこれらの製造方法 |
| JP6866664B2 (ja) * | 2017-02-06 | 2021-04-28 | 日亜化学工業株式会社 | 発光装置の製造方法 |
| US10347806B2 (en) * | 2017-04-12 | 2019-07-09 | Luminus, Inc. | Packaged UV-LED device with anodic bonded silica lens and no UV-degradable adhesive |
| US10672957B2 (en) | 2017-07-19 | 2020-06-02 | Cree, Inc. | LED apparatuses and methods for high lumen output density |
| EP3439050B1 (en) * | 2017-08-02 | 2020-10-28 | Lg Innotek Co. Ltd | Light emitting device package |
| US10957736B2 (en) | 2018-03-12 | 2021-03-23 | Cree, Inc. | Light emitting diode (LED) components and methods |
| KR102684757B1 (ko) | 2019-08-22 | 2024-07-16 | 삼성디스플레이 주식회사 | 표시 장치 |
| DE102020107409B4 (de) * | 2020-03-18 | 2023-11-02 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Gehäuse für ein optoelektronisches halbleiterbauelement und optoelektronisches halbleiterbauelement |
| DE102024202118A1 (de) * | 2024-03-07 | 2025-09-11 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung und Vereinzelung von MEMS-Bauelementen |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0611071B2 (ja) * | 1983-09-07 | 1994-02-09 | 三洋電機株式会社 | 化合物半導体基板の分割方法 |
| JPH10261808A (ja) * | 1997-01-17 | 1998-09-29 | Hitachi Cable Ltd | ホトセンサ素子搭載用プラスチック回路成形品及びホトセンサの製造方法 |
| US6573028B1 (en) * | 1998-02-10 | 2003-06-03 | Nissha Printing Co., Ltd. | Base sheet for semiconductor module, method for manufacturing base sheet for semiconductor module, and semiconductor module |
| US20050263854A1 (en) * | 1998-10-23 | 2005-12-01 | Shelton Bryan S | Thick laser-scribed GaN-on-sapphire optoelectronic devices |
| US6413839B1 (en) * | 1998-10-23 | 2002-07-02 | Emcore Corporation | Semiconductor device separation using a patterned laser projection |
| JP2001345289A (ja) | 2000-05-31 | 2001-12-14 | Nec Corp | 半導体装置の製造方法 |
| JP3616872B2 (ja) * | 2000-09-14 | 2005-02-02 | 住友電気工業株式会社 | ダイヤモンドウエハのチップ化方法 |
| US7307775B2 (en) * | 2000-12-07 | 2007-12-11 | Texas Instruments Incorporated | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| US6744072B2 (en) * | 2001-10-02 | 2004-06-01 | Xerox Corporation | Substrates having increased thermal conductivity for semiconductor structures |
| US6962834B2 (en) * | 2002-03-22 | 2005-11-08 | Stark David H | Wafer-level hermetic micro-device packages |
| US6960813B2 (en) * | 2002-06-10 | 2005-11-01 | New Wave Research | Method and apparatus for cutting devices from substrates |
| US6806544B2 (en) * | 2002-11-05 | 2004-10-19 | New Wave Research | Method and apparatus for cutting devices from conductive substrates secured during cutting by vacuum pressure |
| US6580054B1 (en) * | 2002-06-10 | 2003-06-17 | New Wave Research | Scribing sapphire substrates with a solid state UV laser |
| JP4271904B2 (ja) * | 2002-06-24 | 2009-06-03 | 富士フイルム株式会社 | 固体撮像装置の製造方法 |
| US6995032B2 (en) * | 2002-07-19 | 2006-02-07 | Cree, Inc. | Trench cut light emitting diodes and methods of fabricating same |
| US6982470B2 (en) * | 2002-11-27 | 2006-01-03 | Seiko Epson Corporation | Semiconductor device, method of manufacturing the same, cover for semiconductor device, and electronic equipment |
| CA2504099A1 (en) * | 2002-12-20 | 2004-07-15 | Cree, Inc. | Methods of forming semiconductor devices including mesa structures and multiple passivation layers and related devices |
| TWI248244B (en) * | 2003-02-19 | 2006-01-21 | J P Sercel Associates Inc | System and method for cutting using a variable astigmatic focal beam spot |
| US6949449B2 (en) * | 2003-07-11 | 2005-09-27 | Electro Scientific Industries, Inc. | Method of forming a scribe line on a ceramic substrate |
| JP4259979B2 (ja) | 2003-10-22 | 2009-04-30 | 新光電気工業株式会社 | 光透過性カバー及びこれを備えたデバイス並びにそれらの製造方法 |
| US7847411B2 (en) * | 2003-11-07 | 2010-12-07 | Shinko Electric Industries Co., Ltd. | Electronic device and method of manufacturing the same |
| US7008861B2 (en) * | 2003-12-11 | 2006-03-07 | Cree, Inc. | Semiconductor substrate assemblies and methods for preparing and dicing the same |
| JP2005260154A (ja) * | 2004-03-15 | 2005-09-22 | Tokyo Seimitsu Co Ltd | チップ製造方法 |
| US7202141B2 (en) * | 2004-03-29 | 2007-04-10 | J.P. Sercel Associates, Inc. | Method of separating layers of material |
| US7087463B2 (en) * | 2004-08-04 | 2006-08-08 | Gelcore, Llc | Laser separation of encapsulated submount |
| JP2006086516A (ja) * | 2004-08-20 | 2006-03-30 | Showa Denko Kk | 半導体発光素子の製造方法 |
| WO2006038713A1 (en) * | 2004-10-07 | 2006-04-13 | Showa Denko K.K. | Production method for semiconductor device |
| US7378288B2 (en) * | 2005-01-11 | 2008-05-27 | Semileds Corporation | Systems and methods for producing light emitting diode array |
| US7306975B2 (en) * | 2005-07-01 | 2007-12-11 | Texas Instruments Incorporated | Semiconductor wafer cutting blade and method |
| JP2007184426A (ja) * | 2006-01-06 | 2007-07-19 | Shinko Electric Ind Co Ltd | 半導体装置の製造方法 |
-
2006
- 2006-01-06 JP JP2006001802A patent/JP2007184426A/ja active Pending
- 2006-12-14 EP EP06256362A patent/EP1806782B1/en not_active Not-in-force
- 2006-12-18 TW TW095147438A patent/TW200807751A/zh unknown
- 2006-12-19 US US11/641,336 patent/US7494898B2/en active Active
- 2006-12-20 KR KR1020060131037A patent/KR20070074460A/ko not_active Withdrawn
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