JP2007134691A5 - - Google Patents

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Publication number
JP2007134691A5
JP2007134691A5 JP2006276945A JP2006276945A JP2007134691A5 JP 2007134691 A5 JP2007134691 A5 JP 2007134691A5 JP 2006276945 A JP2006276945 A JP 2006276945A JP 2006276945 A JP2006276945 A JP 2006276945A JP 2007134691 A5 JP2007134691 A5 JP 2007134691A5
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JP
Japan
Prior art keywords
copper
film
gate
alloy
gate line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006276945A
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English (en)
Japanese (ja)
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JP2007134691A (ja
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Publication date
Priority claimed from KR1020050106274A external-priority patent/KR20070049278A/ko
Application filed filed Critical
Publication of JP2007134691A publication Critical patent/JP2007134691A/ja
Publication of JP2007134691A5 publication Critical patent/JP2007134691A5/ja
Withdrawn legal-status Critical Current

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JP2006276945A 2005-11-08 2006-10-10 配線、これを含む薄膜トランジスタ基板、及びその製造方法 Withdrawn JP2007134691A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050106274A KR20070049278A (ko) 2005-11-08 2005-11-08 배선, 이를 포함하는 박막 트랜지스터 기판과 그 제조 방법

Publications (2)

Publication Number Publication Date
JP2007134691A JP2007134691A (ja) 2007-05-31
JP2007134691A5 true JP2007134691A5 (enExample) 2009-10-15

Family

ID=38083037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006276945A Withdrawn JP2007134691A (ja) 2005-11-08 2006-10-10 配線、これを含む薄膜トランジスタ基板、及びその製造方法

Country Status (5)

Country Link
US (1) US20070122649A1 (enExample)
JP (1) JP2007134691A (enExample)
KR (1) KR20070049278A (enExample)
CN (1) CN1964067A (enExample)
TW (1) TW200727491A (enExample)

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KR101326128B1 (ko) * 2006-09-29 2013-11-06 삼성디스플레이 주식회사 표시 장치용 배선, 식각액, 박막 트랜지스터 표시판 및 그제조 방법
JP5510769B2 (ja) * 2007-08-24 2014-06-04 日立金属株式会社 Ｃｕ系配線膜の成膜方法
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US8449818B2 (en) * 2010-06-30 2013-05-28 H. C. Starck, Inc. Molybdenum containing targets
EP2426720A1 (en) * 2010-09-03 2012-03-07 Applied Materials, Inc. Staggered thin film transistor and method of forming the same
EP2707520B1 (en) 2011-05-10 2018-05-02 H.C. STARCK, Inc. Composite target
KR101934977B1 (ko) * 2011-08-02 2019-03-19 삼성디스플레이 주식회사 박막 트랜지스터 표시판 및 그 제조 방법
CN102983101B (zh) * 2011-08-04 2015-06-17 东友精细化工有限公司 液晶显示装置用阵列基板的制造方法
KR20130043063A (ko) * 2011-10-19 2013-04-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
CN103229301B (zh) * 2011-11-29 2017-02-08 株式会社日本有机雷特显示器 薄膜晶体管以及薄膜晶体管的制造方法
CN102664193A (zh) * 2012-04-01 2012-09-12 京东方科技集团股份有限公司 导电结构及制造方法、薄膜晶体管、阵列基板和显示装置
KR101968115B1 (ko) * 2012-04-23 2019-08-13 엘지디스플레이 주식회사 어레이 기판 및 이의 제조방법
US9334565B2 (en) 2012-05-09 2016-05-10 H.C. Starck Inc. Multi-block sputtering target with interface portions and associated methods and articles
KR102069158B1 (ko) * 2012-05-10 2020-01-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 배선의 형성 방법, 반도체 장치, 및 반도체 장치의 제작 방법
US20140014948A1 (en) * 2012-07-12 2014-01-16 Semiconductor Energy Laboratory Co. Ltd. Semiconductor device
WO2014067463A1 (zh) * 2012-11-02 2014-05-08 京东方科技集团股份有限公司 薄膜晶体管及其制作方法、阵列基板、显示装置和阻挡层
KR102164308B1 (ko) * 2013-12-30 2020-10-12 엘지디스플레이 주식회사 박막 트랜지스터 기판 및 그를 이용한 액정표시장치
KR20150087617A (ko) * 2014-01-22 2015-07-30 삼성디스플레이 주식회사 표시 기판용 박막 트랜지스터, 표시 기판 및 표시 기판의 제조 방법
RU2585112C2 (ru) * 2014-01-22 2016-05-27 Алексей Владиславович Сагалович Композиционное покрытие для алюминия или его сплавов
CN104332476B (zh) * 2014-09-18 2017-05-31 京东方科技集团股份有限公司 单元像素、阵列基板、显示装置及其制造方法
KR102378773B1 (ko) * 2014-11-05 2022-03-28 닛샤 가부시키가이샤 전기 배선 부재의 제조 방법 및 전기 배선 부재
TWI671913B (zh) * 2018-05-02 2019-09-11 友達光電股份有限公司 半導體裝置及其製造方法
CN110233154B (zh) * 2018-11-26 2021-07-30 友达光电股份有限公司 元件基板
CN110571276A (zh) * 2019-08-05 2019-12-13 深圳市华星光电技术有限公司 一种薄膜晶体管及其制备方法
CN111403336A (zh) * 2020-03-31 2020-07-10 成都中电熊猫显示科技有限公司 阵列基板、显示面板以及阵列基板的制作方法
CN111965884A (zh) * 2020-08-12 2020-11-20 Tcl华星光电技术有限公司 液晶面板用黑色矩阵和液晶面板
CN113078107A (zh) * 2021-06-04 2021-07-06 苏州华星光电技术有限公司 一种阵列基板的制备方法、阵列基板及显示面板
CN118284842A (zh) 2022-10-31 2024-07-02 京东方科技集团股份有限公司 线路板、发光基板、背光模组及显示装置

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JP5214125B2 (ja) * 2006-09-11 2013-06-19 三星ディスプレイ株式會社 配線構造と配線形成方法及び薄膜トランジスタ基板とその製造方法

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