JP2007123520A - 積層型半導体モジュール - Google Patents
積層型半導体モジュール Download PDFInfo
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- JP2007123520A JP2007123520A JP2005313186A JP2005313186A JP2007123520A JP 2007123520 A JP2007123520 A JP 2007123520A JP 2005313186 A JP2005313186 A JP 2005313186A JP 2005313186 A JP2005313186 A JP 2005313186A JP 2007123520 A JP2007123520 A JP 2007123520A
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- semiconductor
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- semiconductor substrate
- semiconductor chip
- connection terminal
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Abstract
【解決手段】積層型半導体モジュール100は、第1の半導体基板111に第1の半導体チップ112が搭載された第1の半導体装置110上に、第2の半導体基板151の上面に第2の半導体チップ152が搭載された第2の半導体装置150が積層されてなる。第1の半導体基板111の上に第1の接続用端子116が設けられていると共に、第1の半導体基板111の下面に外部接続用端子118が設けられている。第2の半導体基板151の下面における第2の半導体チップ152と対向する領域に第2の接続用端子156が設けられている。第1の接続用端子116と第2の接続用端子156とは、導電性接続部材180により接続されている。
【選択図】図1
Description
図1は、本発明の第1の実施の形態にかかる積層型半導体モジュール100の断面構造を示し、図2は、積層型半導体モジュール100の平面構造を示している。
図5は、本発明の第2の実施の形態にかかる積層型半導体モジュール200の断面構造を示し、図6は、積層型半導体モジュール200の平面構造を示している。
図8は、本発明の第3の実施の形態にかかる積層型半導体モジュール300の断面構造を示している。
図9は、本発明の第4の実施の形態にかかる積層型半導体モジュール400の断面構造を示している。積層型半導体モジュール400は、第1の半導体基板411に第1の半導体チップ412が搭載された第1の半導体装置410の上に、第2の半導体基板451の上面に第2の半導体チップ452が搭載された第2の半導体装置450が積層された構成である。第4の本実施形態の特徴は、第2の半導体チップ452が複数個の半導体チップを積層して第2の半導体基板451に搭載されていると同時に、第1の半導体チップ412も複数個の半導体チップを積層して第1の半導体基板411に搭載されている構成である。
110 第1の半導体装置
111 第1の半導体基板
112 第1の半導体チップ
115 貫通導体
116 第1の接続用端子
117 チップ接続用端子
118 外部接続用端子
119 外部接続用突起電極
121 チップ接続用突起電極
122 樹脂
150,150B 第2の半導体装置
151 第2の半導体基板
152,152A 第2の半導体チップ
155 貫通導体
156 第2の接続用端子
157 チップ接続用端子
158 インナービア
159 内層配線
160,160B 表層配線
161 チップ接続用突起電極
162 樹脂
171 電子部品
180 導電性接続部材
200,200A 積層型半導体モジュール
210 第1の半導体装置
211 第1の半導体基板
212 第1の半導体チップ
215 貫通導体
216 第1の接続用端子
217 チップ接続用端子
218 外部接続用端子
219 外部接続用突起電極
221 チップ接続用突起電極
222 樹脂
250 第2の半導体装置
251 第2の半導体基板
252,252A,252B 第2の半導体チップ
255 貫通導体
256 第2の接続用端子
257 チップ接続用端子
258 インナービア
259 内層配線
260 表層配線
261,261A,261B チップ接続用突起電極
262 樹脂
280 導電性接続部材
300 積層型半導体モジュール
310 第1の半導体装置
311 第1の半導体基板
312 第1の半導体チップ
315 貫通導体
316 第1の接続用端子
317 チップ接続用端子
318 外部接続用端子
319 外部接続用突起電極
321 チップ接続用突起電極
322 樹脂
350 第2の半導体装置
351 第2の半導体基板
352 第2の半導体チップ
355 貫通導体
356 第2の接続用端子
357 チップ接続用端子
358 インナービア
359 内層配線
360 表層配線
361 チップ接続用突起電極
362 樹脂
380 導電性接続部材
400 積層型半導体モジュール
410 第1の半導体装置
411 第1の半導体基板
412,412A,412B 第1の半導体チップ
415 貫通導体
416 第1の接続用端子
417 チップ接続用端子
418 外部接続用端子
419 外部接続用突起電極
421 チップ接続用突起電極
422 樹脂
423 ワイヤーリード
424 保護樹脂
450 第2の半導体装置
451 第2の半導体基板
452,452A,452B 第2の半導体チップ
455 貫通導体
456 第2の接続用端子
457 チップ接続用端子
461 チップ接続用突起電極
462 樹脂
463 ワイヤーリード
464 保護樹脂
480 導電性接続部材
Claims (5)
- 第1の半導体基板に第1の半導体チップが搭載された第1の半導体装置の上に、第2の半導体基板の上面に第2の半導体チップが搭載された第2の半導体装置が積層されてなる積層型半導体モジュールであって、
前記第1の半導体基板の上面に第1の接続用端子が設けられていると共に、前記第1の半導体基板の下面に外部接続用端子が設けられ、
前記第2の半導体基板の下面における前記第2の半導体チップと対向する領域に第2の接続用端子が設けられ、
前記第1の接続用端子と前記第2の接続用端子とは、導電性接続部材により接続されていることを特徴とする積層型半導体モジュール。 - 前記第1の半導体チップは、前記第1の半導体基板の中央部に搭載されていることを特徴とする請求項1に記載の積層型半導体モジュール。
- 前記第2の半導体チップが搭載されている領域は、前記第1の半導体チップが搭載されている領域より大きいことを特徴とする請求項1又は2に記載の積層型半導体モジュール。
- 前記第2の半導体チップは、同一平面上に配置された複数個の半導体チップよりなることを特徴とする請求項1〜3のいずれか1項に記載の積層型半導体モジュール。
- 前記第2の半導体チップは、積層された複数個の半導体チップよりなることを特徴とする請求項1〜3のいずれか1項に記載の積層型半導体モジュール。
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JP2005313186A JP4512545B2 (ja) | 2005-10-27 | 2005-10-27 | 積層型半導体モジュール |
KR1020060036595A KR20070045894A (ko) | 2005-10-27 | 2006-04-24 | 적층형 반도체모듈 |
US11/491,033 US7667313B2 (en) | 2005-10-27 | 2006-07-24 | Stacked semiconductor module |
CNA2006101086043A CN1956190A (zh) | 2005-10-27 | 2006-07-25 | 层叠型半导体模块 |
US12/645,256 US8008766B2 (en) | 2005-10-27 | 2009-12-22 | Stacked semiconductor module |
US12/710,025 US8159061B2 (en) | 2005-10-27 | 2010-02-22 | Stacked semiconductor module |
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JP2010103129A (ja) * | 2008-10-21 | 2010-05-06 | Panasonic Corp | 積層型半導体装置及び電子機器 |
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US8648453B2 (en) | 2008-12-16 | 2014-02-11 | Renesas Electronics Corporation | Semiconductor device and method for manufacturing the same |
JP2012175099A (ja) * | 2011-02-17 | 2012-09-10 | Samsung Electronics Co Ltd | スルー基板ビアを有するインターポーザを含む半導体パッケージ及びその製造方法 |
KR101817159B1 (ko) * | 2011-02-17 | 2018-02-22 | 삼성전자 주식회사 | Tsv를 가지는 인터포저를 포함하는 반도체 패키지 및 그 제조 방법 |
JP2017503360A (ja) * | 2014-12-15 | 2017-01-26 | インテル コーポレイション | オポッサム・ダイ型パッケージ・オン・パッケージ装置 |
Also Published As
Publication number | Publication date |
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US7667313B2 (en) | 2010-02-23 |
US20100096739A1 (en) | 2010-04-22 |
JP4512545B2 (ja) | 2010-07-28 |
CN1956190A (zh) | 2007-05-02 |
US20070096334A1 (en) | 2007-05-03 |
US20100148342A1 (en) | 2010-06-17 |
KR20070045894A (ko) | 2007-05-02 |
US8159061B2 (en) | 2012-04-17 |
US8008766B2 (en) | 2011-08-30 |
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