JP2010147153A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2010147153A JP2010147153A JP2008321038A JP2008321038A JP2010147153A JP 2010147153 A JP2010147153 A JP 2010147153A JP 2008321038 A JP2008321038 A JP 2008321038A JP 2008321038 A JP2008321038 A JP 2008321038A JP 2010147153 A JP2010147153 A JP 2010147153A
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- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
【解決手段】第1配線基板10と、第1配線基板10の上にフリップチップ実装されて、上面が鏡面処理された半導体チップ30と、半導体チップ30の上面に形成された密着層40と、第1配線基板10の上にバンプ電極62を介して接続されて積層され、半導体チップ30を収容する収容部を構成する第2配線基板50と、第1配線基板10と第2配線基板50との間に充填されたモールド樹脂76とを含む。密着層40は離型材を含まない樹脂又はカップリング材から形成される。
【選択図】図5
Description
本発明の実施形態を説明する前に、本発明に関連する関連技術の問題点について説明する。図1は関連技術の半導体装置の製造方法を示す断面図である。
図2〜図5は本発明の第1実施形態の半導体装置の製造方法を示す断面図である。第1実施形態の半導体装置の製造方法では、まず、図2(a)に示すような第1配線基板10を用意する。第1配線基板10では、ガラスエポキシ樹脂などの絶縁材料からなるコア基板12にスルーホールTHが設けられている。コア基板12の両面側にはスルーホールTH内に充填された貫通電極14を介して相互接続された配線層20がそれぞれ形成されている。
図6及び図7は本発明の第2実施形態の半導体装置の製造方法を示す断面図である。
Claims (10)
- 第1配線基板と、
前記第1配線基板の上にフリップチップ実装されて、上面が鏡面処理された半導体チップと、
前記半導体チップの上面に形成された密着層と、
前記第1配線基板の上にバンプ電極を介して接続されて積層され、前記半導体チップを収容する収容部を構成する第2配線基板と、
前記第1配線基板と前記第2配線基板との間に充填されたモールド樹脂とを有することを特徴とする半導体装置。 - 前記半導体チップ上の前記密着層の上面と前記第2配線基板の下面との間に前記モールド樹脂が介在していることを特徴とする請求項1に記載の半導体装置。
- 前記半導体チップ上の前記密着層は前記第2配線基板の下面に接触しており、前記モールド樹脂は前記半導体チップ及び前記密着層を取り囲むように形成されていることを特徴とする請求項1に記載の半導体装置。
- 前記密着層は離型材を含まない樹脂又はカップリング材から形成され、前記モールド樹脂は前記離型材を含んでいることを特徴とする請求項1乃至3のいずれか一項に記載の半導体装置。
- 前記半導体チップの下側の隙間にアンダーフィル樹脂が充填されており、前記密着層は前記アンダーフィル樹脂と同一樹脂からなることを特徴とする請求項1乃至3のいずれか一項に記載の半導体装置。
- 第1配線基板の上に、上面が鏡面処理された半導体チップをフリップチップ実装する工程と、
前記半導体チップの上に密着層を形成する工程と、
前記第1配線基板の上にバンプ電極を介して第2配線基板を積層することにより、前記第1配線基板と前記第2配線基板との間に前記半導体チップを収容する工程と、
トランスファモールド工法により、前記第1配線基板と前記第2配線基板との間にモールド樹脂を充填する工程とを有することを特徴とする半導体装置の製造方法。 - 前記半導体チップを収容する工程において、
前記半導体チップ上の前記密着層の上面と前記第2配線基板の下面との間に隙間が設けられ、
前記モールド樹脂を充填する工程において、
前記隙間に前記モールド樹脂が充填されることを特徴とする請求項6に記載の半導体装置の製造方法。 - 前記半導体チップを収容する工程において、
前記半導体チップ上の前記密着層が前記第2配線基板の下面に接触した状態で前記第2配線基板が配置され、
前記モールド樹脂を充填する工程において、
前記半導体チップ及び前記密着層を取り囲むように、前記モールド樹脂が充填されることを特徴とする請求項6に記載の半導体装置の製造方法。 - 前記密着層は離型材を含まない樹脂又はカップリング材から形成され、前記モールド樹脂は前記離型材を含んでいることを特徴とする請求項6乃至8のいずれか一項に記載の半導体装置の製造方法。
- 前記半導体チップをフリップチップ実装する工程の後に、
前記半導体チップの下側の隙間にアンダーフィル樹脂を充填する工程をさらに有し、
前記密着層は前記アンダーフィル樹脂と同一の樹脂から形成されることを特徴とする請求項6乃至8のいずれか一項に記載の半導体装置の製造方法。
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