JP2006527067A - 廃水の処理方法および装置 - Google Patents

廃水の処理方法および装置 Download PDF

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Publication number
JP2006527067A
JP2006527067A JP2006507724A JP2006507724A JP2006527067A JP 2006527067 A JP2006527067 A JP 2006527067A JP 2006507724 A JP2006507724 A JP 2006507724A JP 2006507724 A JP2006507724 A JP 2006507724A JP 2006527067 A JP2006527067 A JP 2006527067A
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Prior art keywords
wastewater
copper
treatment
water
waste water
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Pending
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JP2006507724A
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English (en)
Japanese (ja)
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JP2006527067A5 (enExample
Inventor
創太 中川
晶二 赤堀
誠 柏木
恵治 舞鴫
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Ebara Corp
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Ebara Corp
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Publication of JP2006527067A publication Critical patent/JP2006527067A/ja
Publication of JP2006527067A5 publication Critical patent/JP2006527067A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
    • C02F1/4693—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/467—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis by electrochemical disinfection; by electrooxydation or by electroreduction
    • C02F1/4676—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis by electrochemical disinfection; by electrooxydation or by electroreduction by electroreduction
    • C02F1/4678—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis by electrochemical disinfection; by electrooxydation or by electroreduction by electroreduction of metals
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B15/00—Obtaining copper
    • C22B15/0063—Hydrometallurgy
    • C22B15/0084—Treating solutions
    • C22B15/0086—Treating solutions by physical methods
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C1/00—Electrolytic production, recovery or refining of metals by electrolysis of solutions
    • C25C1/12—Electrolytic production, recovery or refining of metals by electrolysis of solutions of copper
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/16—Regeneration of process solutions
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
    • C02F1/4693—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis
    • C02F1/4695—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis electrodeionisation
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
    • C02F1/5236—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using inorganic agents
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
    • C02F1/54—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using organic material
    • C02F1/56—Macromolecular compounds
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/70—Treatment of water, waste water, or sewage by reduction
    • C02F1/705—Reduction by metals
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/46109—Electrodes
    • C02F2001/46152—Electrodes characterised by the shape or form
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00—Nature of the contaminant
    • C02F2101/10—Inorganic compounds
    • C02F2101/20—Heavy metals or heavy metal compounds
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
    • C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/4612—Controlling or monitoring
    • C02F2201/46125—Electrical variables
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B7/00—Working up raw materials other than ores, e.g. scrap, to produce non-ferrous metals and compounds thereof; Methods of a general interest or applied to the winning of more than two metals
    • C22B7/006—Wet processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/20—Recycling

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Hydrology & Water Resources (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Removal Of Specific Substances (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
JP2006507724A 2003-04-30 2004-04-28 廃水の処理方法および装置 Pending JP2006527067A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003125889 2003-04-30
JP2003165798 2003-06-10
PCT/JP2004/006167 WO2004096717A2 (en) 2003-04-30 2004-04-28 Method and apparatus for treating waste water

Publications (2)

Publication Number Publication Date
JP2006527067A true JP2006527067A (ja) 2006-11-30
JP2006527067A5 JP2006527067A5 (enExample) 2007-06-21

Family

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Family Applications (1)

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JP2006507724A Pending JP2006527067A (ja) 2003-04-30 2004-04-28 廃水の処理方法および装置

Country Status (3)

Country Link
US (1) US20060243604A1 (enExample)
JP (1) JP2006527067A (enExample)
WO (1) WO2004096717A2 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010059502A (ja) * 2008-09-04 2010-03-18 Takuo Kawahara 銅エッチング廃液の処理方法及び装置
WO2010113918A1 (ja) * 2009-04-03 2010-10-07 栗田工業株式会社 過酸化水素水処理装置
KR101487566B1 (ko) * 2007-02-05 2015-01-29 인텔 코포레이션 폐액 처리 방법
JP2017196591A (ja) * 2016-04-28 2017-11-02 田中貴金属工業株式会社 廃液処理システム
JP2021137804A (ja) * 2020-03-04 2021-09-16 エーティーアンドエス オーストリア テクノロジー アンド システムテクニック アクツィエンゲゼルシャフト サーキットボードおよび／または基板製造の部分ストリームからの金属塩含有溶媒を処理する方法

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006187708A (ja) * 2005-01-05 2006-07-20 Japan Organo Co Ltd 排水回収方法及び排水回収装置
JP4126307B2 (ja) 2005-03-16 2008-07-30 株式会社コガネイ 循環水の浄化方法とその装置
DE102005038415B4 (de) * 2005-08-12 2007-05-03 Areva Np Gmbh Verfahren zum Reinigen von Wässern nukleartechnischer Anlagen
EP2347413B1 (en) * 2008-10-16 2016-06-22 ATOTECH Deutschland GmbH Metal plating additive, and method for plating substrates and products therefrom
JP5412805B2 (ja) * 2008-11-19 2014-02-12 栗田工業株式会社 アゾール系銅用防食剤含有水の処理方法
US20110152770A1 (en) 2009-07-30 2011-06-23 Tandem Diabetes Care, Inc. Infusion pump system with disposable cartridge having pressure venting and pressure feedback
US8404121B2 (en) 2009-08-11 2013-03-26 Anaergia Inc. Method for separating suspended solids from a waste fluid
US9145318B2 (en) 2010-05-24 2015-09-29 Baxter International Inc. Systems and methods for removing hydrogen peroxide from water purification systems
US9695070B2 (en) 2011-10-27 2017-07-04 Pentair Residential Filtration, Llc Regeneration of a capacitive deionization system
US8961770B2 (en) 2011-10-27 2015-02-24 Pentair Residential Filtration, Llc Controller and method of operation of a capacitive deionization system
US9010361B2 (en) 2011-10-27 2015-04-21 Pentair Residential Filtration, Llc Control valve assembly
US9637397B2 (en) 2011-10-27 2017-05-02 Pentair Residential Filtration, Llc Ion removal using a capacitive deionization system
US8671985B2 (en) 2011-10-27 2014-03-18 Pentair Residential Filtration, Llc Control valve assembly
US20130319941A1 (en) * 2012-06-05 2013-12-05 American Water Works Company, Inc. Simultaneous recovery of coagulant and acid
US9751778B2 (en) 2012-06-05 2017-09-05 American Water Works Company, Inc. Simultaneous recovery of coagulant and acid
CN102912142B (zh) * 2012-11-06 2013-12-04 赣州聚环科技有限公司 多级错流与逆流联用回收蚀刻液中铜的方法
US9139459B2 (en) 2013-05-27 2015-09-22 LUSIA KLING MILLER, Trustee of the Miller Family Trust and Luisa Kling Miller Survivor's Trust Process and system for removal of naphthenic acid from an aqueous solution
CN203741421U (zh) * 2013-12-13 2014-07-30 陶克（苏州）机械设备有限公司 酸性蚀刻液再生设备
WO2015099383A1 (ko) * 2013-12-23 2015-07-02 한국지질자원연구원 금속회수반응기 및 금속회수시스템
CN105174563B (zh) * 2015-09-22 2018-01-30 青岛琅琊台集团股份有限公司 一种叶酸废水的处理方法
CN105671317B (zh) * 2016-03-24 2018-10-12 中山品高电子材料有限公司 一种电镀用贵金属回收系统
US10399877B2 (en) * 2016-09-23 2019-09-03 Lehigh University In-situ, self-adjusting stability control of methane-producing anaerobic biological reactors through novel use of ion exchange fibers
CN109868476B (zh) * 2019-01-28 2021-04-20 湖北永绍科技股份有限公司 一种含铜离子和硝酸根的刻蚀液回收再利用方法
CN111499086B (zh) * 2020-04-17 2023-09-19 生态环境部华南环境科学研究所 一种化学镀铜废液的在线资源化处理方法
CN112575196B (zh) * 2020-12-24 2023-11-03 中国石油化工股份有限公司 从烯烃聚合工业废酸渣中提取高纯度钛液的方法及其设备
CN113060819B (zh) * 2021-03-31 2021-11-30 南京理工大学 一种实现非均相芬顿氧化过程中自由基靶向氧化的装置及方法
CN114956286B (zh) * 2022-06-07 2022-12-27 广东嘉元科技股份有限公司 一种铜箔废水预处理后的铜回收利用装置
CN117550765B (zh) * 2024-01-12 2024-04-12 国工恒昌新材料(义乌)有限公司 一种循环利用的铜钛合金制备用污水处理系统及方法
US20250320141A1 (en) * 2024-04-12 2025-10-16 PowerTech Water, Inc. Hydrogen peroxide removal system

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JPS5294650A (en) * 1976-02-04 1977-08-09 Hitachi Cable Ltd Method of reproducing waste deriving from acid water washing metals
JPS5443134A (en) * 1977-09-13 1979-04-05 Hitachi Cable Ltd Metal washing water treatment system
JPH0489316A (ja) * 1990-08-01 1992-03-23 Toagosei Chem Ind Co Ltd 塩酸含有塩化銅水溶液から硫酸銅を回収する方法
JPH08966A (ja) * 1994-06-24 1996-01-09 Chlorine Eng Corp Ltd 電気透析精製法
JPH1133560A (ja) * 1997-07-15 1999-02-09 Kurita Water Ind Ltd Ｃｍｐ排液の凝集処理方法
JPH11188369A (ja) * 1997-12-26 1999-07-13 Toshiba Mach Co Ltd Ｃｍｐ装置の研磨廃液の処理方法
JP2000126768A (ja) * 1998-10-21 2000-05-09 Kurita Water Ind Ltd Ｃｍｐ排液の処理方法および装置
JP2000306873A (ja) * 1999-04-20 2000-11-02 Tokuyama Corp 研磨方法
JP2002520142A (ja) * 1998-07-10 2002-07-09 ユナイテッド・ステイツ・フィルター・コーポレイション 廃水からの金属イオンのイオン交換除去
JP2002520144A (ja) * 1998-07-13 2002-07-09 ナルコ ケミカル カンパニー 半導体及びプリント回路板プロセッシングからの廃水からの銅の検出及び除去
JP2003047971A (ja) * 2001-08-02 2003-02-18 Japan Organo Co Ltd 排水処理方法

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JPS6220838A (ja) * 1985-07-18 1987-01-29 Nippon Mining Co Ltd 酸洗廃液及び固形物残渣処理設備
JPS62280373A (ja) * 1986-05-29 1987-12-05 Nec Corp 化学銅めつき液の再生装置
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Patent Citations (11)

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Publication number Priority date Publication date Assignee Title
JPS5294650A (en) * 1976-02-04 1977-08-09 Hitachi Cable Ltd Method of reproducing waste deriving from acid water washing metals
JPS5443134A (en) * 1977-09-13 1979-04-05 Hitachi Cable Ltd Metal washing water treatment system
JPH0489316A (ja) * 1990-08-01 1992-03-23 Toagosei Chem Ind Co Ltd 塩酸含有塩化銅水溶液から硫酸銅を回収する方法
JPH08966A (ja) * 1994-06-24 1996-01-09 Chlorine Eng Corp Ltd 電気透析精製法
JPH1133560A (ja) * 1997-07-15 1999-02-09 Kurita Water Ind Ltd Ｃｍｐ排液の凝集処理方法
JPH11188369A (ja) * 1997-12-26 1999-07-13 Toshiba Mach Co Ltd Ｃｍｐ装置の研磨廃液の処理方法
JP2002520142A (ja) * 1998-07-10 2002-07-09 ユナイテッド・ステイツ・フィルター・コーポレイション 廃水からの金属イオンのイオン交換除去
JP2002520144A (ja) * 1998-07-13 2002-07-09 ナルコ ケミカル カンパニー 半導体及びプリント回路板プロセッシングからの廃水からの銅の検出及び除去
JP2000126768A (ja) * 1998-10-21 2000-05-09 Kurita Water Ind Ltd Ｃｍｐ排液の処理方法および装置
JP2000306873A (ja) * 1999-04-20 2000-11-02 Tokuyama Corp 研磨方法
JP2003047971A (ja) * 2001-08-02 2003-02-18 Japan Organo Co Ltd 排水処理方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101487566B1 (ko) * 2007-02-05 2015-01-29 인텔 코포레이션 폐액 처리 방법
JP2010059502A (ja) * 2008-09-04 2010-03-18 Takuo Kawahara 銅エッチング廃液の処理方法及び装置
WO2010113918A1 (ja) * 2009-04-03 2010-10-07 栗田工業株式会社 過酸化水素水処理装置
JP2017196591A (ja) * 2016-04-28 2017-11-02 田中貴金属工業株式会社 廃液処理システム
JP2021137804A (ja) * 2020-03-04 2021-09-16 エーティーアンドエス オーストリア テクノロジー アンド システムテクニック アクツィエンゲゼルシャフト サーキットボードおよび／または基板製造の部分ストリームからの金属塩含有溶媒を処理する方法
JP7152123B2 (ja) 2020-03-04 2022-10-12 エーティーアンドエス オーストリア テクノロジー アンド システムテクニック アクツィエンゲゼルシャフト サーキットボードおよび／または基板製造の部分ストリームからの金属塩含有溶媒を処理する方法
JP2022191277A (ja) * 2020-03-04 2022-12-27 エーティーアンドエス オーストリア テクノロジー アンド システムテクニック アクツィエンゲゼルシャフト 有用材料サイクルにおけるサーキットボードおよび／または基板の製造

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US20060243604A1 (en) 2006-11-02
WO2004096717A2 (en) 2004-11-11
WO2004096717A3 (en) 2005-03-03

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