US20050279626A1 - Wastewater treatment equipment - Google Patents
Wastewater treatment equipment Download PDFInfo
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- US20050279626A1 US20050279626A1 US10/906,711 US90671105A US2005279626A1 US 20050279626 A1 US20050279626 A1 US 20050279626A1 US 90671105 A US90671105 A US 90671105A US 2005279626 A1 US2005279626 A1 US 2005279626A1
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- reaction tank
- equipment
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- 238000004065 wastewater treatment Methods 0.000 title abstract description 26
- 238000006243 chemical reaction Methods 0.000 claims abstract description 82
- 239000002245 particle Substances 0.000 claims abstract description 44
- 239000002351 wastewater Substances 0.000 claims description 54
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 description 49
- 230000008569 process Effects 0.000 description 36
- 238000009297 electrocoagulation Methods 0.000 description 16
- 238000010908 decantation Methods 0.000 description 14
- 238000003487 electrochemical reaction Methods 0.000 description 12
- 238000005868 electrolysis reaction Methods 0.000 description 12
- 239000010802 sludge Substances 0.000 description 11
- 230000015271 coagulation Effects 0.000 description 10
- 238000005345 coagulation Methods 0.000 description 10
- 230000005684 electric field Effects 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 8
- 238000005498 polishing Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
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- 239000011859 microparticle Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000007790 scraping Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000000084 colloidal system Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- -1 iron ion Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000701 coagulant Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
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- 239000010419 fine particle Substances 0.000 description 1
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- 229910001410 inorganic ion Inorganic materials 0.000 description 1
- 229910017053 inorganic salt Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002605 large molecules Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical group 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
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- 239000002002 slurry Substances 0.000 description 1
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- 238000000427 thin-film deposition Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
- C25F7/02—Regeneration of process liquids
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
- C02F1/463—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis by electrocoagulation
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
- C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers
Definitions
- the present invention relates to a wastewater treatment equipment. More particularly, the present invention relates to wastewater treatment equipment for collecting particles with high surface charge in the wastewater.
- the manufacturing direction of wafer has developed toward higher density, larger integration and more excellent performance.
- a global planarization process is necessary after the lithographic and thin film deposition processes.
- the global planarization process is performed by the chemical mechanical polishing (CMP) technology.
- CMP chemical mechanical polishing
- the CMP process consumes large amount of ultrapure water, and therefore wastewater carrying the slurry from the CMP process is produced.
- the polishing wastewater contains a plurality of nano-grade colloidal particles having the property of high surface charge and stable suspension, which further complicates the wastewater treatment.
- the diluted polishing wastewater can meet the discharge standard of the total suspended solid of the effluent, the fine polishing particles of the wastewater such as silicon, aluminum, tungsten may precipitate in the wastewater treatment plant and as a result, the performance of the wastewater treatment plant is weakened. Moreover, the biological processing unit of the wastewater treatment plant may become completely inactive.
- the conventional treatment methods of the polishing wastewater in the optoelectronic and semiconductor industry include chemical coagulation and membrane filtration.
- the chemical coagulation method is the conventional technology for removing suspended and colloidal particles in the wastewater.
- the removal mechanism of chemical coagulation is performed by using inorganic salt coagulating agent to agglomerate fine particles into large particles, and then the particles will precipitate by the gravity thereof.
- the drawback of the chemical coagulation method is that the properties of the polishing wastewater, such as the components, the turbidity or the conductivity, are not stable. Therefore, the exact amount of the agents in the chemical coagulation process is hard to determine, thus the effect of the coagulation deposition is not obvious.
- the oxidants of the CMP wastewater needs to be removed before the chemical coagulation method is performed, the space required for the method need to be large, the flexibility of the method is almost non-existent, and the sludge volume produced in the method is large.
- the membrane filtration method has been broadly applied for removing micro-colloidal particles, microbes, natural organic compounds or other inorganic ion contaminants.
- the removal mechanism of the membrane filtration method is performed by using external pressure to filter out large molecule contaminations from the water molecule by the membrane.
- the drawback of the method is that although the micro particles can be effectively separated from the water, they can easily clog up the pores of the membrane. As a result, the lifetime of the membrane is shortened since the reverse cleaning of the membrane is difficult.
- the size of the separated particles is highly dependent on the membrane pores and should be carefully monitored.
- the method is less ideal for processing polishing wastewater having a large amount of micro particles or high concentration micro particles.
- the conventional technology introduces a method using the electrochemical reactions comprising the electrophoresis effect due to electric field and the coagulation effect induced by sacrificial electrodes to separate the particles with high surface charge in the wastewater.
- the electrochemical reactions include electro-coagulation process and electro-decantation process.
- the electro-coagulation process is performed by using electric field to aggregate particles by the electrical attractions thereof, wherein the anodic plate releases metal ions after anodic oxidation reaction, thus the aggregated particles may be removed by the coagulation mechanism.
- the charged particles move to the electrode with opposite charge due to the electrophoresis effect by using electric field to aggregate high concentration particles near the electrode plate. After the aggregated concentration reaches a certain level, the particles may settle on the bottom of the electrolysis tank along the electrode plate.
- the electrolysis device includes an electrolysis tank having a plurality of staggered positive and negative charged electrode plates.
- a water inlet and a water outlet are disposed in both sides of the electrolysis tank, wherein the liquid enters the electrolysis tank from the water inlet, passes through every electrode plate, and then flows out through the water outlet.
- a plurality of scraping components are disposed between every two adjacent electrode plates, wherein each scraping component is driven by a portion of the repetition driving mechanism in the electrolysis tank to move repeatedly on each electrode plate to scrape on the surface of the electrode plate.
- the electrode plate described above is in a round shape, and the fluid passes through a round hole in the center of the electrode plate, the opportunity of the fluid flowing through the electrode plate is reduced.
- the edge of the electrode plate and the inner wall of the electrolysis tank are sealed, and thus the electrode plate is hard to dissemble.
- the scraping components and the repetition driving mechanism in the electrolysis tank may successfully scrape off the sludge, the complex design of mechanism will increase the cost of the whole equipment.
- a plurality of electrode plates are disposed in an electro-coagulation process tank to form a flow channel in the reaction tank.
- the electrode plates are connected to the power supply, whereby electrical currents are provided to form an electric field between the electrode plates, in order to ionize the electrode surface to react with the wastewater.
- a cyclone filter is disposed in the outlet terminal outside the reaction tank to separate the colloidal particles by centrifugal force.
- the colloidal particles are carried out from the reaction tank by the wastewater, then the colloidal particles are separated by cyclone filter. In other words, there is no device in the reaction tank that can directly separate the colloidal particles. In addition, the complex design of the machine inside the cyclone filter will also increase the cost of the equipment.
- the present invention is directed to providing a wastewater treatment equipment using electrochemical reactions comprising electro-coagulation process and electro-decantation process.
- a collection device at the bottom of the reaction tank is also provided to collect the colloidal particles with high surface charge in the wastewater so the treated wastewater can meet the effluent standard.
- an equipment for treating wastewater comprises, for example but not limited to, a reaction tank, a plurality of anodic plates, a plurality of cathodic plates, a power supply and a collection device.
- the reaction tank comprises an inlet and an outlet.
- the anodic plates and the cathodic plates are placed in stagger in the reaction tank.
- the power supply is electrically connected to the anodic plates and the cathodic plates, and provides an electrical current to each of the anodic plates.
- the electrical currents of all anodic plates may have equal amplitudes.
- the power supply may also be electrically connected to an outermost anodic plate of the anodic plates and an outermost cathodic plate of the cathodic plates, and provides an electrical current to the outermost anodic plate. Therefore, every two surfaces of each of the anodic plates and the cathodic plates except for the outermost anodic plate and the outermost cathodic plate will accumulate equal but opposite charges.
- the collection device is disposed at the bottom of the reaction tank for collecting the colloidal particles in the wastewater.
- the collection device comprises, for example but not limited to, a plurality of cones and a plurality of switch valves, wherein the top of the cones is connected to the reaction tank, and switch valves are disposed at the bottom of the corresponding cones.
- the collection device comprises, for example but not limited to, a plurality of collection pipelines, a plurality of switch valves and a pump. The collection pipelines are connected to the reaction tank, the switch valves are disposed in the corresponding collection pipelines, and the pump is connected to the collection pipelines.
- two opposite sidewalls of the reaction tank comprise a plurality of first plugs and a plurality of second plugs for installing the anodic plates and the cathodic plates respectively.
- the plugs also allow for the anodic and the cathodic plates to exchange with each other.
- the first plugs are extended to the bottom edge of the reaction tank, and the second plugs are not extended to the bottom edge of the reaction tank. Therefore, when the anodic and the cathodic plates are installed in the first plugs and the second plugs respectively, an upward and downward flow is generated between the anodic and the cathodic plates due to flow channel to increase the opportunity of the particles contacting the electrode plates.
- the position of the inlet is higher than that of the outlet.
- the reaction tank has an operational water level, wherein the height of the operational water level is maintained between the inlet and outlet to keep the equipment in a stable condition.
- the reaction tank has a deposition height, which is kept higher than the outlet to avoid draining out the deposited colloidal particles at the bottom layer produced during the electro-coagulation process or the concentrated solution at the bottom layer produced during the electrolysis in the reaction tank.
- the anodic plates comprise, for example but not limited to, iron plates or aluminum plates
- the cathodic plates comprise, for example but not limited to, stainless steel plates.
- the anodic plates and the cathodic plates comprise, for example but not limited to, stainless steel plates.
- the ratio of width to height of the reaction tank is within the range of about 1.0 to about 2.0.
- the distance between every anodic plate and every cathodic plate is within the range of about 2 cm to about 15 cm.
- the current density of the power supply is within the range of about 1.0 mA/cm2 to about 500 mA/cm2.
- the wastewater treatment equipment further comprises an inlet pipeline, wherein one terminal of the inlet pipeline is connected to the inlet of the reaction tank, and the other terminal of the inlet pipeline is connected to the wastewater collection tank.
- a pump is disposed in the inlet pipeline to pump the wastewater into the reaction tank for continuous treatment of the wastewater.
- a switch valve is disposed in the inlet pipeline and between the pump and the reaction tank.
- the pump is electrically connected to an automatic controller, which is applied to detect the water level, the pressure or the pH value of the reaction tank to control the suction speed.
- the wastewater treatment equipment further comprises an outlet pipeline, wherein one terminal of the outlet pipeline is connected to the outlet of the reaction tank, and the other terminal of the outlet pipeline is connected to the outlet collection tank.
- a switch valve is also disposed in the outlet pipeline.
- a suction device is disposed at the top of the reaction tank to draw out the hydrogen and oxygen gases produced between the electrode plates during the electrolysis of the water molecule in the wastewater.
- the present invention provides an equipment using electrochemical reactions of electro-coagulation process and electro-decantation process to separate colloidal particles with high surface charge from the wastewater.
- the collection device at the bottom of the reaction tank is provided to collect the colloids or particles deposited at the bottom. Therefore, the treated wastewater can meet the effluent standard.
- FIGS. 1A and 1B are schematic drawings of a wastewater treatment equipment according to embodiments of the present invention.
- FIGS. 2A and 2B are schematic drawings of a wastewater treatment equipment according to another embodiments of the present invention.
- FIGS. 1A and 1B are schematic drawings of a wastewater treatment equipment according to embodiments of the present invention.
- a wastewater treatment equipment 100 for treating wastewater having the property of nano-grade particles with high surface charge and stable suspension is provided.
- the wastewater treatment equipment 100 comprises, for example but not limited to, a reaction tank 110 , a plurality of anodic plates 120 , a plurality of cathodic plates 130 , a power supply 140 and a collection device 150 .
- FIG. 1B is similar FIG. 1B , wherein the differences between FIG. 1B and FIG. 1A will be described hereinafter.
- the reaction tank 110 comprises an inlet 111 and an outlet 112 , wherein the terminal of the inlet 111 is connected to one terminal of the inlet pipeline 160 , and the other terminal of the inlet pipeline 160 is connected to the wastewater collection tank 10 .
- a pump 162 is disposed in the inlet pipeline 160 to pump the wastewater in the wastewater collection tank 10 to the reaction tank 110 for continuous treatment of the wastewater.
- a switch valve 164 is disposed in the inlet pipeline 160 between the pump 162 and the reaction tank 110 to control the entrance of the wastewater to the reaction tank 110 .
- the outlet 112 of the reaction tank 110 is connected to the terminal of an outlet pipeline 170 , and the other terminal of the outlet pipeline 170 is connected to the outlet collection tank 20 .
- a switch valve 172 may also be disposed in the outlet pipeline 170 to control the exit of the wastewater from the reaction tank 110 .
- the anodic plates 120 and the cathodic plates 130 are disposed in the reaction tank 110 .
- the anodic plates 120 can be iron plates or aluminum plates.
- the cathodic plates 130 can be stainless steel plates.
- the anodic plates 120 and the cathodic plates 130 are placed in a staggered order.
- a plurality of first plugs 113 and a plurality of second plugs 114 are disposed on two opposite sidewalls of the reaction tank 110 respectively to install the anodic plates 120 and cathodic plates 130 .
- the design of plugs 113 and 114 enables exchangeability of the anodic and cathodic plates 120 and 130 during installation.
- the first plugs 113 are extended to the bottom edge of the reaction tank 110
- the second plugs 114 are not extended to the bottom edge of the reaction tank 110 . Therefore, after the anodic and cathodic plates 120 and 130 are installed in the first plugs 113 and the second plugs 114 respectively, an upward and downward flow between the anodic and cathodic plates 120 and 130 is generated by the flow channel thereof. As a result, the flow path of the wastewater is enlarged, and thus the opportunity of the particles contacting the electrode plates is increased.
- the ratio of width to height of the reaction tank 110 ranges between about 1.0 to about 2.0. The length of the reaction tank 110 is dependent on the number of the anodic and cathodic plates 120 and 130 .
- the power supply 140 is electrically connected to the anodic plates 120 and the cathodic plates 130 to provide an electrical current to each anodic plate 120 , therefore, each cathodic plate 130 will have corresponding electrical current in opposite direction.
- the electrical currents of all the anodic plates 120 may have equal amplitudes. Therefore, a dual polarized electric field is formed between the anodic plates 120 and the cathodic plates 130 .
- the power supply 140 provides a current density in a range of, for example but not limited to, about 1.0 mA/cm2 to about 500 mA/cm2.
- the distance between every anodic plate 120 and every cathodic plate 130 is in a range of, for example but not limited to, about 2 cm to about 15 cm.
- the power supply 140 may also be electrically connected to an outermost anodic plate 120 a of the anodic plates 120 and an outermost cathodic plate 130 a of the cathodic plates 130 to provide an electrical current to the anodic plate 120 a, therefore, the cathodic plate 130 a will have corresponding electrical current in opposite direction.
- every two surfaces of each of the anodic plates 120 and the cathodic plates 130 except for the outermost anodic plate 120 a and the outermost cathodic plate 130 a will accumulate equal but opposite charges. Therefore, a polarized electric field is formed between the anodic plates 120 and the cathodic plates 130 .
- the collection device 150 is disposed at the bottom of the reaction tank 110 to collect the colloidal particles in the wastewater.
- the collection device 150 comprises, for example but not limited to, a plurality of cones 152 and a plurality of switch valves 154 .
- the top of the cones 152 is connected to the reaction tank 110 , and the switch valves 154 are disposed at the bottom of the corresponding cones 152 .
- the anodic plates 120 e.g., an iron plate or an aluminum plate
- metal ion e.g., iron ion or aluminum ion
- the cones 152 of the collection device 150 facilitates the collection of the colloidal particles produced during the electro-coagulation process or the particles concentrated during the electro-decantation process. Thereafter, to remove the deposited sludge, first of all, the switch valve 164 of the inlet and the switch valve 172 of the outlet should be turn off. Then, the switch valve 154 is turned on to receive the sludge from the reaction tank 110 and forward the sludge to collection tank 30 .
- the anodic and cathodic electrodes may be connected reversibly to the power supply 140 to remove the accumulated particles on the anodic plate 120 . Therefore, the treated wastewater from the outlet 112 of the reaction tank 110 may meet the effluent standard.
- the position of the inlet 111 may be disposed higher than that of the outlet 112 .
- the wastewater flows into the reaction tank 110 in an operational water level A, which may be maintained between the height of inlet 111 and outlet 112 to keep the equipment in a stable condition.
- the deposited sludge at the bottom of the reaction tank has a deposition height B, which may be maintained higher than the outlet 112 . Therefore, when the treated wastewater exits the reaction tank, the deposited colloidal particles at the bottom layer produced during the electro-coagulation process or the concentrated solution at the bottom layer produced during the electrolysis process will not flow out with the treated wastewater.
- an automatic controller 180 may be connected to the pump 170 .
- the automatic controller 180 has a sensor component to detect the water level, the pressure or the pH value of the reaction tank 110 .
- the suction speed of the pump 170 can be adjusted by the automatic controller 180 to keep the equipment in a stable condition.
- the automatic controller 180 may also be electrically connected to the switch valve 154 . Therefore, the whole equipment may be automatically controlled at the switch of the switch valve 154 .
- the water molecule in the wastewater may generate hydrogen and oxygen gases in the anodic plates 120 and the cathodic plates 130 respectively.
- an enclosure and a suction device 190 may be disposed on top of the reaction tank 110 to draw out the gases.
- FIGS. 2A and 2B are schematic drawings of a wastewater treatment equipment according to another embodiments of the present invention. It is noted that, the embodiment of FIG. 2A / 2 B is similar FIG. 1A / 1 B, and the difference there-between will be described hereinafter.
- the wastewater treatment equipment 100 ′ has a structure similar to that described in the above embodiment except that the collection device 150 is replaced by a plurality of collection pipelines 156 , a plurality of switch valves 157 and the pump 158 .
- the collection pipelines 156 are connected to the reaction tank 110 , the switch valves 157 are disposed in the corresponding collection pipelines 156 , and the pump 158 is connected to the collection pipelines 156 .
- the switch valves 157 and the pump 158 are turned on to pump the sludge from the reaction tank 110 directly to the sludge collection tank 30 via the collection pipelines 156 .
- the present invention utilizes electrochemical reactions of electro-coagulation process and electro-decantation process to separate colloidal particles with high surface charge from the wastewater.
- the collection device at the bottom of the reaction tank is provided to collect the colloids or particles deposited at the bottom of the reaction tank. Therefore, the treated wastewater can meet the effluent standard.
- the wastewater treatment equipment performs electrochemical reactions of electro-coagulation process and electro-decantation process for treating wastewater.
- the wastewater treatment equipment is not limited to performing the electrochemical reactions of electro-coagulation process and electro-decantation process at the same time.
- the present invention can be used to only perform the electrochemical reaction of electro-decantation process. In other words, when the electrochemical reaction of the wastewater treatment equipment only comprises the electro-decantation process, the anodic plates and the cathodic plates can be stainless steel plates.
- the wastewater treatment equipment in the present invention has at least the following advantages.
- the electrochemical reactions of the present invention comprising the electro-coagulation process and the electro-decantation process can separate the nano-grade colloidal particles from the wastewater.
- the collection device is disposed at the bottom of the reaction tank to remove the deposited sludge at the bottom directly.
- the structure of the collection device is simple and can therefore reduce the cost of the equipment.
- the anodic and cathodic electrodes of the power supply may be reversed to facilitate the removal of the sludge accumulated on the anodic plates. Therefore, a complex mechanism of the scraped device can be spared. Furthermore, in the present invention, an upward and downward flow between the anodic and cathodic plates are generated due to the flow channel thereof. Therefore, the flow path of the wastewater is enlarged, and thus the opportunity for the particles contacting the electrode plates is increased.
- the plugs on the sidewall of the reaction tank in the present invention enables the exchangeability when installing the anodic and cathodic plates.
- the wastewater treatment equipment of the present invention is suitable for treating wastewater with high charge particles produced during the semiconductor, electronic, optoelectronic, wafer machining and surface polishing manufacturing process and is thus highly applicable.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
Abstract
A wastewater treatment equipment comprising a reaction tank, a plurality of anodic plates, a plurality of cathodic plates, a power supply and a collection device is provided. The reaction tank comprises an inlet and an outlet. The anodic plates and the cathodic plates are placed in a staggered order in the reaction tank. The power supply is electrically connected to the anodic plates and the cathodic plates. The collection device is disposed at the bottom of the reaction tank so the colloidal particles deposited at he bottom of the reaction tank can be removed.
Description
- This application claims the priority benefit of Taiwan application serial no. 93117445, filed on Jun. 17, 2004.
- 1. Field of the Invention
- The present invention relates to a wastewater treatment equipment. More particularly, the present invention relates to wastewater treatment equipment for collecting particles with high surface charge in the wastewater.
- 2. Description of the Related Art
- Recently, as the IC industry advances, the manufacturing direction of wafer has developed toward higher density, larger integration and more excellent performance. In order to increase the density and the number of conductive wire layers of the IC, a global planarization process is necessary after the lithographic and thin film deposition processes. Conventionally, the global planarization process is performed by the chemical mechanical polishing (CMP) technology. However, the CMP process consumes large amount of ultrapure water, and therefore wastewater carrying the slurry from the CMP process is produced. In general, the polishing wastewater contains a plurality of nano-grade colloidal particles having the property of high surface charge and stable suspension, which further complicates the wastewater treatment. In addition, although the diluted polishing wastewater can meet the discharge standard of the total suspended solid of the effluent, the fine polishing particles of the wastewater such as silicon, aluminum, tungsten may precipitate in the wastewater treatment plant and as a result, the performance of the wastewater treatment plant is weakened. Moreover, the biological processing unit of the wastewater treatment plant may become completely inactive.
- The conventional treatment methods of the polishing wastewater in the optoelectronic and semiconductor industry include chemical coagulation and membrane filtration. The chemical coagulation method is the conventional technology for removing suspended and colloidal particles in the wastewater. The removal mechanism of chemical coagulation is performed by using inorganic salt coagulating agent to agglomerate fine particles into large particles, and then the particles will precipitate by the gravity thereof. The drawback of the chemical coagulation method is that the properties of the polishing wastewater, such as the components, the turbidity or the conductivity, are not stable. Therefore, the exact amount of the agents in the chemical coagulation process is hard to determine, thus the effect of the coagulation deposition is not obvious. Also, among other disadvantages, the oxidants of the CMP wastewater needs to be removed before the chemical coagulation method is performed, the space required for the method need to be large, the flexibility of the method is almost non-existent, and the sludge volume produced in the method is large.
- Alternatively, the membrane filtration method has been broadly applied for removing micro-colloidal particles, microbes, natural organic compounds or other inorganic ion contaminants. The removal mechanism of the membrane filtration method is performed by using external pressure to filter out large molecule contaminations from the water molecule by the membrane. The drawback of the method is that although the micro particles can be effectively separated from the water, they can easily clog up the pores of the membrane. As a result, the lifetime of the membrane is shortened since the reverse cleaning of the membrane is difficult. In addition, in the method, the size of the separated particles is highly dependent on the membrane pores and should be carefully monitored. Moreover, the method is less ideal for processing polishing wastewater having a large amount of micro particles or high concentration micro particles.
- In solution, the conventional technology introduces a method using the electrochemical reactions comprising the electrophoresis effect due to electric field and the coagulation effect induced by sacrificial electrodes to separate the particles with high surface charge in the wastewater. The electrochemical reactions include electro-coagulation process and electro-decantation process. The electro-coagulation process is performed by using electric field to aggregate particles by the electrical attractions thereof, wherein the anodic plate releases metal ions after anodic oxidation reaction, thus the aggregated particles may be removed by the coagulation mechanism. Alternatively, in the electro-decantation process, the charged particles move to the electrode with opposite charge due to the electrophoresis effect by using electric field to aggregate high concentration particles near the electrode plate. After the aggregated concentration reaches a certain level, the particles may settle on the bottom of the electrolysis tank along the electrode plate.
- Hereinafter, the Taiwan Patent Publication No. 144872, entitled “Continuous Operation Electrolysis Device Of Processing Industry Wastewater By Using Electrochemical Method” will be briefly described. The electrolysis device includes an electrolysis tank having a plurality of staggered positive and negative charged electrode plates. A water inlet and a water outlet are disposed in both sides of the electrolysis tank, wherein the liquid enters the electrolysis tank from the water inlet, passes through every electrode plate, and then flows out through the water outlet. A plurality of scraping components are disposed between every two adjacent electrode plates, wherein each scraping component is driven by a portion of the repetition driving mechanism in the electrolysis tank to move repeatedly on each electrode plate to scrape on the surface of the electrode plate. It should be noted that, since the electrode plate described above is in a round shape, and the fluid passes through a round hole in the center of the electrode plate, the opportunity of the fluid flowing through the electrode plate is reduced. In addition, the edge of the electrode plate and the inner wall of the electrolysis tank are sealed, and thus the electrode plate is hard to dissemble. Moreover, although the scraping components and the repetition driving mechanism in the electrolysis tank may successfully scrape off the sludge, the complex design of mechanism will increase the cost of the whole equipment.
- Hereinafter, the U.S. Pat. No. 6,582,592, entitled “Apparatus For Removing Dissolved Metals Form Wastewater By Electro-Coagulation” will be briefly described. In the device of the pattern, a plurality of electrode plates are disposed in an electro-coagulation process tank to form a flow channel in the reaction tank. The electrode plates are connected to the power supply, whereby electrical currents are provided to form an electric field between the electrode plates, in order to ionize the electrode surface to react with the wastewater. In addition, a cyclone filter is disposed in the outlet terminal outside the reaction tank to separate the colloidal particles by centrifugal force. It should be noted that, the colloidal particles are carried out from the reaction tank by the wastewater, then the colloidal particles are separated by cyclone filter. In other words, there is no device in the reaction tank that can directly separate the colloidal particles. In addition, the complex design of the machine inside the cyclone filter will also increase the cost of the equipment.
- Therefore, the present invention is directed to providing a wastewater treatment equipment using electrochemical reactions comprising electro-coagulation process and electro-decantation process. In addition, a collection device at the bottom of the reaction tank is also provided to collect the colloidal particles with high surface charge in the wastewater so the treated wastewater can meet the effluent standard.
- In accordance with one embodiment of the present invention, an equipment for treating wastewater is provided. The wastewater treatment equipment comprises, for example but not limited to, a reaction tank, a plurality of anodic plates, a plurality of cathodic plates, a power supply and a collection device. The reaction tank comprises an inlet and an outlet. The anodic plates and the cathodic plates are placed in stagger in the reaction tank. The power supply is electrically connected to the anodic plates and the cathodic plates, and provides an electrical current to each of the anodic plates. In addition, the electrical currents of all anodic plates may have equal amplitudes. It should be noted that, in another embodiment of the present invention, the power supply may also be electrically connected to an outermost anodic plate of the anodic plates and an outermost cathodic plate of the cathodic plates, and provides an electrical current to the outermost anodic plate. Therefore, every two surfaces of each of the anodic plates and the cathodic plates except for the outermost anodic plate and the outermost cathodic plate will accumulate equal but opposite charges. The collection device is disposed at the bottom of the reaction tank for collecting the colloidal particles in the wastewater.
- In one embodiment of the present invention, the collection device comprises, for example but not limited to, a plurality of cones and a plurality of switch valves, wherein the top of the cones is connected to the reaction tank, and switch valves are disposed at the bottom of the corresponding cones. In another embodiment of the present invention, the collection device comprises, for example but not limited to, a plurality of collection pipelines, a plurality of switch valves and a pump. The collection pipelines are connected to the reaction tank, the switch valves are disposed in the corresponding collection pipelines, and the pump is connected to the collection pipelines.
- In one embodiment of the present invention, two opposite sidewalls of the reaction tank comprise a plurality of first plugs and a plurality of second plugs for installing the anodic plates and the cathodic plates respectively. The plugs also allow for the anodic and the cathodic plates to exchange with each other. In addition, the first plugs are extended to the bottom edge of the reaction tank, and the second plugs are not extended to the bottom edge of the reaction tank. Therefore, when the anodic and the cathodic plates are installed in the first plugs and the second plugs respectively, an upward and downward flow is generated between the anodic and the cathodic plates due to flow channel to increase the opportunity of the particles contacting the electrode plates.
- In one embodiment of the present invention, the position of the inlet is higher than that of the outlet. In addition, the reaction tank has an operational water level, wherein the height of the operational water level is maintained between the inlet and outlet to keep the equipment in a stable condition. Moreover, the reaction tank has a deposition height, which is kept higher than the outlet to avoid draining out the deposited colloidal particles at the bottom layer produced during the electro-coagulation process or the concentrated solution at the bottom layer produced during the electrolysis in the reaction tank.
- In one embodiment of the present invention, when the wastewater treatment equipment is provided to perform the electrochemical reactions of both electro-coagulation process and electro-decantation process, the anodic plates comprise, for example but not limited to, iron plates or aluminum plates, and the cathodic plates comprise, for example but not limited to, stainless steel plates. In another embodiment of the present invention, when the wastewater treatment equipment is only provided to perform the electrochemical reaction of electro-decantation process, the anodic plates and the cathodic plates comprise, for example but not limited to, stainless steel plates.
- In one embodiment of the present invention, the ratio of width to height of the reaction tank is within the range of about 1.0 to about 2.0. The distance between every anodic plate and every cathodic plate is within the range of about 2 cm to about 15 cm. The current density of the power supply is within the range of about 1.0 mA/cm2 to about 500 mA/cm2.
- In one embodiment of the present invention, the wastewater treatment equipment further comprises an inlet pipeline, wherein one terminal of the inlet pipeline is connected to the inlet of the reaction tank, and the other terminal of the inlet pipeline is connected to the wastewater collection tank. In addition, a pump is disposed in the inlet pipeline to pump the wastewater into the reaction tank for continuous treatment of the wastewater. Also, a switch valve is disposed in the inlet pipeline and between the pump and the reaction tank. Moreover, the pump is electrically connected to an automatic controller, which is applied to detect the water level, the pressure or the pH value of the reaction tank to control the suction speed.
- In one embodiment of the present invention, the wastewater treatment equipment further comprises an outlet pipeline, wherein one terminal of the outlet pipeline is connected to the outlet of the reaction tank, and the other terminal of the outlet pipeline is connected to the outlet collection tank. In addition, a switch valve is also disposed in the outlet pipeline. Moreover, a suction device is disposed at the top of the reaction tank to draw out the hydrogen and oxygen gases produced between the electrode plates during the electrolysis of the water molecule in the wastewater.
- Accordingly, the present invention provides an equipment using electrochemical reactions of electro-coagulation process and electro-decantation process to separate colloidal particles with high surface charge from the wastewater. In addition, the collection device at the bottom of the reaction tank is provided to collect the colloids or particles deposited at the bottom. Therefore, the treated wastewater can meet the effluent standard.
- One or part or all of these and other features and advantages of the present invention will become readily apparent to those skilled in this art from the following description wherein there is shown and described an embodiment of this invention, simply by way of illustration of one of the modes best suited to carry out the invention. As it will be realized, the invention is capable of different embodiments, and its several details are capable of modifications in various, obvious aspects all without departing from the invention. Accordingly, the drawings and descriptions will be regarded as illustrative in nature and not as restrictive.
- The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
-
FIGS. 1A and 1B are schematic drawings of a wastewater treatment equipment according to embodiments of the present invention. -
FIGS. 2A and 2B are schematic drawings of a wastewater treatment equipment according to another embodiments of the present invention. -
FIGS. 1A and 1B are schematic drawings of a wastewater treatment equipment according to embodiments of the present invention. Referring toFIG. 1A , awastewater treatment equipment 100 for treating wastewater having the property of nano-grade particles with high surface charge and stable suspension is provided. Thewastewater treatment equipment 100 comprises, for example but not limited to, areaction tank 110, a plurality ofanodic plates 120, a plurality ofcathodic plates 130, apower supply 140 and acollection device 150. It is noted that, the embodiment illustrated inFIG. 1B is similarFIG. 1B , wherein the differences betweenFIG. 1B andFIG. 1A will be described hereinafter. - The
reaction tank 110 comprises aninlet 111 and anoutlet 112, wherein the terminal of theinlet 111 is connected to one terminal of theinlet pipeline 160, and the other terminal of theinlet pipeline 160 is connected to thewastewater collection tank 10. In addition, apump 162 is disposed in theinlet pipeline 160 to pump the wastewater in thewastewater collection tank 10 to thereaction tank 110 for continuous treatment of the wastewater. Moreover, aswitch valve 164 is disposed in theinlet pipeline 160 between thepump 162 and thereaction tank 110 to control the entrance of the wastewater to thereaction tank 110. Furthermore, theoutlet 112 of thereaction tank 110 is connected to the terminal of anoutlet pipeline 170, and the other terminal of theoutlet pipeline 170 is connected to theoutlet collection tank 20. In addition, aswitch valve 172 may also be disposed in theoutlet pipeline 170 to control the exit of the wastewater from thereaction tank 110. - The
anodic plates 120 and thecathodic plates 130 are disposed in thereaction tank 110. Theanodic plates 120 can be iron plates or aluminum plates. Thecathodic plates 130 can be stainless steel plates. In addition, theanodic plates 120 and thecathodic plates 130 are placed in a staggered order. In one embodiment of the present embodiment, a plurality offirst plugs 113 and a plurality ofsecond plugs 114 are disposed on two opposite sidewalls of thereaction tank 110 respectively to install theanodic plates 120 andcathodic plates 130. The design ofplugs cathodic plates - In addition, it should be noted that the
first plugs 113 are extended to the bottom edge of thereaction tank 110, and thesecond plugs 114 are not extended to the bottom edge of thereaction tank 110. Therefore, after the anodic andcathodic plates first plugs 113 and thesecond plugs 114 respectively, an upward and downward flow between the anodic andcathodic plates reaction tank 110 ranges between about 1.0 to about 2.0. The length of thereaction tank 110 is dependent on the number of the anodic andcathodic plates - Referring to
FIG. 1A , in one embodiment of the present invention, thepower supply 140 is electrically connected to theanodic plates 120 and thecathodic plates 130 to provide an electrical current to eachanodic plate 120, therefore, eachcathodic plate 130 will have corresponding electrical current in opposite direction. In addition, for example, the electrical currents of all theanodic plates 120 may have equal amplitudes. Therefore, a dual polarized electric field is formed between theanodic plates 120 and thecathodic plates 130. In addition, thepower supply 140 provides a current density in a range of, for example but not limited to, about 1.0 mA/cm2 to about 500 mA/cm2. The distance between everyanodic plate 120 and everycathodic plate 130 is in a range of, for example but not limited to, about 2 cm to about 15 cm. - Referring to
FIG. 1B , in another embodiment of the present invention, thepower supply 140 may also be electrically connected to an outermostanodic plate 120 a of theanodic plates 120 and an outermostcathodic plate 130 a of thecathodic plates 130 to provide an electrical current to theanodic plate 120 a, therefore, thecathodic plate 130 a will have corresponding electrical current in opposite direction. In addition, every two surfaces of each of theanodic plates 120 and thecathodic plates 130 except for the outermostanodic plate 120 a and the outermostcathodic plate 130 a will accumulate equal but opposite charges. Therefore, a polarized electric field is formed between theanodic plates 120 and thecathodic plates 130. - The
collection device 150 is disposed at the bottom of thereaction tank 110 to collect the colloidal particles in the wastewater. In the present embodiment, thecollection device 150 comprises, for example but not limited to, a plurality ofcones 152 and a plurality ofswitch valves 154. The top of thecones 152 is connected to thereaction tank 110, and theswitch valves 154 are disposed at the bottom of the correspondingcones 152. - As shown in
FIG. 1A , when the wastewater flows through the electric field, particles with high surface charge in the wastewater may be directed by the electric field and attracted to the electrode plates having opposite charges. The moving of the charged particles to the electrode plates is called an electrophoresis effect. Therefore, charged particles are aggregated near the electrode plates with a high concentration. When the concentration is high enough, the particles will deposit at the bottom of thereaction tank 110 along the electrode plates and will be collected by thecollection device 150. Meanwhile, the anodic plates 120 (e.g., an iron plate or an aluminum plate) may release metal ion (e.g., iron ion or aluminum ion) due to anodic oxidation reaction. Therefore, metal oxides are produced in the wastewater, and the aggregated particles will deposit in the bottom of thereaction tank 110 due to coagulation mechanism, and will be collected by thecollection device 150. In other words, in the present embodiment, when the wastewater of thereaction tank 110 flows through the electric field, the electro-coagulation process and the electro-decantation process perform simultaneously for the colloidal particles to deposit in the bottom of thereaction tank 110. - It should be noted that, in the present embodiment, the
cones 152 of thecollection device 150 facilitates the collection of the colloidal particles produced during the electro-coagulation process or the particles concentrated during the electro-decantation process. Thereafter, to remove the deposited sludge, first of all, theswitch valve 164 of the inlet and theswitch valve 172 of the outlet should be turn off. Then, theswitch valve 154 is turned on to receive the sludge from thereaction tank 110 and forward the sludge tocollection tank 30. In addition, in the process of electro-coagulation, the anodic and cathodic electrodes may be connected reversibly to thepower supply 140 to remove the accumulated particles on theanodic plate 120. Therefore, the treated wastewater from theoutlet 112 of thereaction tank 110 may meet the effluent standard. - Accordingly, in order to facilitate the flow of the wastewater in the
reaction tank 110, the position of theinlet 111 may be disposed higher than that of theoutlet 112. In addition, the wastewater flows into thereaction tank 110 in an operational water level A, which may be maintained between the height ofinlet 111 andoutlet 112 to keep the equipment in a stable condition. Moreover, the deposited sludge at the bottom of the reaction tank has a deposition height B, which may be maintained higher than theoutlet 112. Therefore, when the treated wastewater exits the reaction tank, the deposited colloidal particles at the bottom layer produced during the electro-coagulation process or the concentrated solution at the bottom layer produced during the electrolysis process will not flow out with the treated wastewater. - Furthermore, in order to control the suction speed of the
pump 170 in theinlet pipeline 160, anautomatic controller 180 may be connected to thepump 170. Theautomatic controller 180 has a sensor component to detect the water level, the pressure or the pH value of thereaction tank 110. When a change of the water level, pressure or pH value of thereaction tank 110 is detected by the sensor component of theautomatic controller 180, the suction speed of thepump 170 can be adjusted by theautomatic controller 180 to keep the equipment in a stable condition. In one embodiment of the present invention, theautomatic controller 180 may also be electrically connected to theswitch valve 154. Therefore, the whole equipment may be automatically controlled at the switch of theswitch valve 154. - In addition, when the wastewater flows through the electric field, the water molecule in the wastewater may generate hydrogen and oxygen gases in the
anodic plates 120 and thecathodic plates 130 respectively. In addition, for the safety issue of the gases, an enclosure and asuction device 190 may be disposed on top of thereaction tank 110 to draw out the gases. -
FIGS. 2A and 2B are schematic drawings of a wastewater treatment equipment according to another embodiments of the present invention. It is noted that, the embodiment ofFIG. 2A /2B is similarFIG. 1A /1B, and the difference there-between will be described hereinafter. As shown inFIG. 2A , thewastewater treatment equipment 100′ has a structure similar to that described in the above embodiment except that thecollection device 150 is replaced by a plurality ofcollection pipelines 156, a plurality ofswitch valves 157 and thepump 158. Thecollection pipelines 156 are connected to thereaction tank 110, theswitch valves 157 are disposed in thecorresponding collection pipelines 156, and thepump 158 is connected to thecollection pipelines 156. When the deposited sludge is removed, theswitch valves 157 and thepump 158 are turned on to pump the sludge from thereaction tank 110 directly to thesludge collection tank 30 via thecollection pipelines 156. - Accordingly, the present invention utilizes electrochemical reactions of electro-coagulation process and electro-decantation process to separate colloidal particles with high surface charge from the wastewater. In addition, the collection device at the bottom of the reaction tank is provided to collect the colloids or particles deposited at the bottom of the reaction tank. Therefore, the treated wastewater can meet the effluent standard. In the present invention, the wastewater treatment equipment performs electrochemical reactions of electro-coagulation process and electro-decantation process for treating wastewater. However, in another embodiment of the present invention, the wastewater treatment equipment is not limited to performing the electrochemical reactions of electro-coagulation process and electro-decantation process at the same time. The present invention can be used to only perform the electrochemical reaction of electro-decantation process. In other words, when the electrochemical reaction of the wastewater treatment equipment only comprises the electro-decantation process, the anodic plates and the cathodic plates can be stainless steel plates.
- Accordingly, the wastewater treatment equipment in the present invention has at least the following advantages. First, the electrochemical reactions of the present invention comprising the electro-coagulation process and the electro-decantation process can separate the nano-grade colloidal particles from the wastewater. Next, in the present invention, the collection device is disposed at the bottom of the reaction tank to remove the deposited sludge at the bottom directly. The structure of the collection device is simple and can therefore reduce the cost of the equipment.
- Moreover, in the present invention, the anodic and cathodic electrodes of the power supply may be reversed to facilitate the removal of the sludge accumulated on the anodic plates. Therefore, a complex mechanism of the scraped device can be spared. Furthermore, in the present invention, an upward and downward flow between the anodic and cathodic plates are generated due to the flow channel thereof. Therefore, the flow path of the wastewater is enlarged, and thus the opportunity for the particles contacting the electrode plates is increased.
- In addition, the plugs on the sidewall of the reaction tank in the present invention enables the exchangeability when installing the anodic and cathodic plates. Also, the wastewater treatment equipment of the present invention is suitable for treating wastewater with high charge particles produced during the semiconductor, electronic, optoelectronic, wafer machining and surface polishing manufacturing process and is thus highly applicable.
- The foregoing description of the preferred embodiment of the present invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form or to exemplary embodiments disclosed. Accordingly, the foregoing description should be regarded as illustrative rather than restrictive. Obviously, many modifications and variations will be apparent to practitioners skilled in this art. The embodiments are chosen and described in order to best explain the principles of the invention and its best mode practical application, thereby to enable persons skilled in the art to understand the invention for various embodiments and with various modifications as are suited to the particular use or implementation contemplated. It is intended that the scope of the invention be defined by the claims appended hereto and their equivalents in which all terms are meant in their broadest reasonable sense unless otherwise indicated. It should be appreciated that variations may be made in the embodiments described by persons skilled in the art without departing from the scope of the present invention as defined by the following claims. Moreover, no element and component in the present disclosure is intended to be dedicated to the public regardless of whether the element or component is explicitly recited in the following claims.
Claims (19)
1. An equipment for treating wastewater, comprising:
a reaction tank comprising an inlet and an outlet;
a plurality of anodic plates disposed in the reaction tank;
a plurality of cathodic plates disposed in the reaction tank, wherein the anodic plates and the cathodic plates are disposed in a staggered order;
a power supply electrically connected in parallel with the anodic plates and the cathodic plates for providing an electrical current to each of the anodic plates in which the electrical currents have equal amplitudes, or electrically connected to an outermost anodic plate of the anodic plates and an outermost cathodic plate of the cathodic plates for providing an electrical current to the outermost anodic plate so that two surfaces of each of the anodic plates and the cathodic plates except for the outermost anodic plate and the outermost cathodic plate accumulate equal but opposite charges; and
a collection device disposed at a bottom of the reaction tank to collect colloidal particles in the wastewater.
2. The equipment of claim 1 , wherein the collection device comprises:
a plurality of cones, wherein a top of the cone is connected to the reaction tank; and
a plurality of switch valves, wherein each of the switch valves is disposed at a bottom of each of the cone.
3. The equipment of claim 1 , wherein the collection device comprises:
a plurality of collection pipelines connected to the reaction tank;
a plurality of switch valves, wherein each of the switch valve is disposed in each of the collection pipelines; and
a pump connected to the collection pipelines.
4. The equipment of claim 1 , wherein a plurality of first plugs and a plurality of second plugs are disposed on two opposite sidewalls of the reaction tank for installing the anodic plates and the cathodic plates respectively, and the first plugs are extended to a bottom edge of the reaction tank, and the second plugs are not extended to the bottom edge of the reaction tank.
5. The equipment of claim 1 , wherein a ratio of width to height of the reaction tank is in a range of about 1.0 to about 2.0.
6. The equipment of claim 1 , wherein a position of the inlet is higher than a position of the outlet.
7. The equipment of claim 1 , wherein the reaction tank comprises an operational water level, wherein a height of the operational water level is maintained between the inlet and the outlet.
8. The equipment of claim 1 , wherein the reaction tank comprises a deposition height, wherein the deposition height is higher than a height of the outlet.
9. The equipment of claim 1 , wherein the anodic plates comprise iron plates or aluminum plates, and the cathodic plates comprise stainless steel plates.
10. The equipment of claim 1 , wherein the anodic plates and the cathodic plates comprise stainless steel plates.
11. The equipment of claim 1 , wherein a distance between each of the anodic plates and each of the cathodic plates is in a range of about 0.5 cm to about 15 cm.
12. The equipment of claim 1 , wherein a current density provided by the power supply is in a range of about 1.0 mA/cm2 to about 500 mA/cm2.
13. The equipment of claim 1 , further comprising an inlet pipeline, wherein a terminal of the inlet pipeline is connected to the inlet of the reaction tank.
14. The equipment of claim 13 , further comprising a pump connected to the inlet pipeline to pump the wastewater into the reaction tank.
15. The equipment of claim 14 , further comprising a switch valve connected to the inlet pipeline and between the pump and the reaction tank.
16. The equipment of claim 14 , further comprising an automatic controller electrically connected to the pump for detecting a water level, a pressure or a pH value of the reaction tank to control a suction speed.
17. The equipment of claim 1 , further comprising an outlet pipeline, wherein the terminal of the outlet pipeline is connected to the outlet of the reaction tank.
18. The equipment of claim 17 , further comprising a switch valve disposed on the outlet pipeline.
19. The equipment of claim 1 , further comprising a suction device disposed on top of the reaction tank.
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TW093117445A TWI286998B (en) | 2004-06-17 | 2004-06-17 | Equipment for treating wastewater |
TW93117445 | 2004-06-17 |
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US10/906,711 Abandoned US20050279626A1 (en) | 2004-06-17 | 2005-03-03 | Wastewater treatment equipment |
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CN104291417A (en) * | 2013-07-16 | 2015-01-21 | 江苏源泰恒环境工程有限公司 | Novel mine-use full-automatic chemical pre-precipitating device |
WO2017178707A1 (en) * | 2016-04-13 | 2017-10-19 | Nbtec Oy | Apparatus and method for treatment of various types of water and wastewater based on electrocoagulation |
CN107827211A (en) * | 2017-12-13 | 2018-03-23 | 重庆大学 | A kind of electrochemical reaction cell for handling algae-containing water |
CN110902768A (en) * | 2019-12-31 | 2020-03-24 | 山西和风佳会电化学工程技术股份有限公司 | Descaling device for electrochemical reaction chamber |
CN112340902A (en) * | 2021-01-07 | 2021-02-09 | 山东龙安泰环保科技有限公司 | Industrial wastewater organic matter desorption treatment device based on electrocatalytic oxidation |
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CN102424457B (en) * | 2011-10-27 | 2013-06-12 | 湖南万容科技股份有限公司 | Treating system for industrial wastewater containing heavy metal and treating method thereof |
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TW200600465A (en) | 2006-01-01 |
TWI286998B (en) | 2007-09-21 |
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