JP2006522489A5 - - Google Patents
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- Publication number
- JP2006522489A5 JP2006522489A5 JP2006509505A JP2006509505A JP2006522489A5 JP 2006522489 A5 JP2006522489 A5 JP 2006522489A5 JP 2006509505 A JP2006509505 A JP 2006509505A JP 2006509505 A JP2006509505 A JP 2006509505A JP 2006522489 A5 JP2006522489 A5 JP 2006522489A5
- Authority
- JP
- Japan
- Prior art keywords
- base region
- collector layer
- manufacturing
- protection device
- esd protection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 6
- 230000015556 catabolic process Effects 0.000 claims 4
- 239000002019 doping agent Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/407,687 US7074687B2 (en) | 2003-04-04 | 2003-04-04 | Method for forming an ESD protection device |
| PCT/US2004/009815 WO2004090940A2 (en) | 2003-04-04 | 2004-03-31 | Esd protection device and method making the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006522489A JP2006522489A (ja) | 2006-09-28 |
| JP2006522489A5 true JP2006522489A5 (enExample) | 2007-05-17 |
| JP4532480B2 JP4532480B2 (ja) | 2010-08-25 |
Family
ID=33097596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006509505A Expired - Fee Related JP4532480B2 (ja) | 2003-04-04 | 2004-03-31 | Esd保護デバイスの製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7074687B2 (enExample) |
| JP (1) | JP4532480B2 (enExample) |
| KR (1) | KR101054664B1 (enExample) |
| CN (1) | CN100587924C (enExample) |
| TW (1) | TW200509358A (enExample) |
| WO (1) | WO2004090940A2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7723823B2 (en) * | 2008-07-24 | 2010-05-25 | Freescale Semiconductor, Inc. | Buried asymmetric junction ESD protection device |
| US9356443B2 (en) * | 2012-07-31 | 2016-05-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | ESD clamp for multiple power rails |
| CN206946908U (zh) * | 2017-06-28 | 2018-01-30 | 罗伯特·博世有限公司 | 高侧栅极驱动器 |
| TWI841213B (zh) * | 2018-12-24 | 2024-05-01 | 晶元光電股份有限公司 | 半導體元件 |
| CN111599859B (zh) * | 2019-02-21 | 2023-06-23 | 株洲中车时代半导体有限公司 | 一种具有过压保护功能的晶闸管及制造方法 |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1436703A (en) * | 1921-03-07 | 1922-11-28 | Herman W Fisher | Rope handle |
| US1584122A (en) * | 1924-08-07 | 1926-05-11 | Mark M Moore | Skipping device |
| DE1930746U (de) * | 1965-01-13 | 1966-01-05 | Jan Hendrik Otto | Sprungseil. |
| US4090705A (en) * | 1977-03-21 | 1978-05-23 | Ross Young | Jump rope |
| US4505474A (en) * | 1984-05-25 | 1985-03-19 | Mattox Ernest M | Weighted elastomeric jumping device |
| US4801137A (en) * | 1987-10-26 | 1989-01-31 | Shane Douglass | Variable weight hand held exercise apparatus |
| US4890829A (en) * | 1988-09-19 | 1990-01-02 | Priscilla Burton | Jump rope |
| JPH04291953A (ja) * | 1991-03-20 | 1992-10-16 | Fujitsu Ltd | 保護回路 |
| IT1253682B (it) | 1991-09-12 | 1995-08-22 | Sgs Thomson Microelectronics | Struttura di protezione dalle scariche elettrostatiche |
| US5284458A (en) * | 1992-02-05 | 1994-02-08 | Perry Deborah A | Exercise device |
| US5215509A (en) * | 1992-05-18 | 1993-06-01 | Meyer/Glass Design | Rope jumping device |
| US5477414A (en) | 1993-05-03 | 1995-12-19 | Xilinx, Inc. | ESD protection circuit |
| JP2601143B2 (ja) * | 1993-06-17 | 1997-04-16 | 日本電気株式会社 | 半導体装置 |
| US5369054A (en) * | 1993-07-07 | 1994-11-29 | Actel Corporation | Circuits for ESD protection of metal-to-metal antifuses during processing |
| EP0700089A1 (en) * | 1994-08-19 | 1996-03-06 | STMicroelectronics S.r.l. | A device for protection against electrostatic discharges on the I/O terminals of a MOS integrated circuit |
| DE69524858T2 (de) * | 1995-02-28 | 2002-07-18 | Stmicroelectronics S.R.L., Agrate Brianza | Bauelement zum Schutz einer integrierten Schaltung gegen elektrostatische Entladungen |
| US5940258A (en) | 1996-02-29 | 1999-08-17 | Texas Instruments Incorporated | Semiconductor ESD protection circuit |
| US6125021A (en) | 1996-04-30 | 2000-09-26 | Texas Instruments Incorporated | Semiconductor ESD protection circuit |
| US5850095A (en) | 1996-09-24 | 1998-12-15 | Texas Instruments Incorporated | ESD protection circuit using zener diode and interdigitated NPN transistor |
| US5821572A (en) * | 1996-12-17 | 1998-10-13 | Symbios, Inc. | Simple BICMOS process for creation of low trigger voltage SCR and zener diode pad protection |
| US5982217A (en) | 1997-02-19 | 1999-11-09 | Texas Instruments Incorporated | PNP driven NMOS ESD protection circuit |
| US6140683A (en) | 1997-05-08 | 2000-10-31 | Texas Instruments Incorporated | Efficient NPN turn-on in a high voltage DENMOS transistor for ESD protection |
| US5898205A (en) | 1997-07-11 | 1999-04-27 | Taiwan Semiconductor Manufacturing Co. Ltd. | Enhanced ESD protection circuitry |
| US5946177A (en) * | 1998-08-17 | 1999-08-31 | Motorola, Inc. | Circuit for electrostatic discharge protection |
| US6310379B1 (en) | 1999-06-03 | 2001-10-30 | Texas Instruments Incorporated | NMOS triggered NMOS ESD protection circuit using low voltage NMOS transistors |
| US6424013B1 (en) | 1999-07-09 | 2002-07-23 | Texas Instruments Incorporated | Body-triggered ESD protection circuit |
| US6249410B1 (en) | 1999-08-23 | 2001-06-19 | Taiwan Semiconductor Manufacturing Company | ESD protection circuit without overstress gate-driven effect |
| TW469622B (en) | 1999-09-13 | 2001-12-21 | Koninkl Philips Electronics Nv | Semiconductor device with ESD protection |
| US6218226B1 (en) | 2000-01-21 | 2001-04-17 | Vanguard International Semiconductor Corporation | Method of forming an ESD protection device |
| US6327126B1 (en) * | 2000-01-28 | 2001-12-04 | Motorola, Inc. | Electrostatic discharge circuit |
| US6385021B1 (en) * | 2000-04-10 | 2002-05-07 | Motorola, Inc. | Electrostatic discharge (ESD) protection circuit |
| US6472286B1 (en) | 2000-08-09 | 2002-10-29 | Taiwan Semiconductor Manufacturing Company | Bipolar ESD protection structure |
| US6586818B1 (en) * | 2002-03-08 | 2003-07-01 | International Business Machines Corporation | Self-aligned silicon germanium heterojunction bipolar transistor device with electrostatic discharge crevice cover for salicide displacement |
| US6724603B2 (en) * | 2002-08-09 | 2004-04-20 | Motorola, Inc. | Electrostatic discharge protection circuitry and method of operation |
| US6879476B2 (en) * | 2003-01-22 | 2005-04-12 | Freescale Semiconductor, Inc. | Electrostatic discharge circuit and method therefor |
-
2003
- 2003-04-04 US US10/407,687 patent/US7074687B2/en not_active Expired - Lifetime
-
2004
- 2004-03-31 CN CN200480009252A patent/CN100587924C/zh not_active Expired - Fee Related
- 2004-03-31 WO PCT/US2004/009815 patent/WO2004090940A2/en not_active Ceased
- 2004-03-31 JP JP2006509505A patent/JP4532480B2/ja not_active Expired - Fee Related
- 2004-03-31 KR KR1020057018867A patent/KR101054664B1/ko not_active Expired - Fee Related
- 2004-04-05 TW TW093109400A patent/TW200509358A/zh unknown
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