JP2006521466A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006521466A5 JP2006521466A5 JP2006504801A JP2006504801A JP2006521466A5 JP 2006521466 A5 JP2006521466 A5 JP 2006521466A5 JP 2006504801 A JP2006504801 A JP 2006504801A JP 2006504801 A JP2006504801 A JP 2006504801A JP 2006521466 A5 JP2006521466 A5 JP 2006521466A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- object according
- surface roughness
- operating state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 8
- 229910003460 diamond Inorganic materials 0.000 claims 5
- 239000010432 diamond Substances 0.000 claims 5
- 230000003746 surface roughness Effects 0.000 claims 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 3
- 229910052799 carbon Inorganic materials 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000001419 dependent effect Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10312777.1 | 2003-03-21 | ||
| DE10312777 | 2003-03-21 | ||
| PCT/EP2004/003014 WO2004083484A1 (de) | 2003-03-21 | 2004-03-22 | Körper mit glatter diamantschicht, sowie vorrichtung und verfahren |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006521466A JP2006521466A (ja) | 2006-09-21 |
| JP2006521466A5 true JP2006521466A5 (https=) | 2007-05-10 |
| JP5084258B2 JP5084258B2 (ja) | 2012-11-28 |
Family
ID=33015933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006504801A Expired - Lifetime JP5084258B2 (ja) | 2003-03-21 | 2004-03-22 | Ｃｖｄ被覆方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7815735B2 (https=) |
| JP (1) | JP5084258B2 (https=) |
| DE (2) | DE112004000452B4 (https=) |
| WO (1) | WO2004083484A1 (https=) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE529881T1 (de) | 2006-08-03 | 2011-11-15 | Creepservice S A R L | Verfahren zur beschichtung von substraten mit diamantähnlichen kohlenstoffschichten |
| AT504006B1 (de) * | 2006-08-14 | 2008-05-15 | Rho Best Coating Hartstoffbesc | Werkzeuge mit kohlenstoffhaltigen beschichtungen und verfahren zu deren herstellung |
| JP2008100300A (ja) * | 2006-10-17 | 2008-05-01 | Ngk Spark Plug Co Ltd | ダイヤモンド被覆切削インサート及び切削工具 |
| KR100924287B1 (ko) * | 2007-05-10 | 2009-10-30 | 한국과학기술연구원 | 양광주가 존재하지 않는 직류 전원 플라스마 증착 장치와,양광주를 배제한 상태에서의 물질 증착 방법 및 이에 의해제조된 다이아몬드 박막 |
| KR100922543B1 (ko) * | 2007-09-14 | 2009-10-21 | 한국과학기술연구원 | 나노 결정질 다이아몬드 박막 중의 비정상 거대 입자의개재를 방지하는 방법 |
| JP5488873B2 (ja) * | 2009-07-13 | 2014-05-14 | 三菱マテリアル株式会社 | 耐欠損性と耐摩耗性にすぐれたダイヤモンド被覆工具 |
| US9175384B2 (en) | 2010-04-30 | 2015-11-03 | Cemecon Ag | Coated body and a process for coating a body |
| CN102230156A (zh) * | 2011-06-21 | 2011-11-02 | 深圳市金洲精工科技股份有限公司 | 微型刀具上制备复合硬质涂层的方法及微型刀具 |
| DE102013218446A1 (de) | 2013-09-13 | 2015-03-19 | Cemecon Ag | Werkzeug sowie Verfahren zum Zerspanen von faserverstärktenMaterialien |
| CN108291299B (zh) | 2015-11-27 | 2021-09-17 | 塞梅孔公司 | 用金刚石层和硬质材料层涂覆体 |
| EP3669014B1 (de) | 2017-08-18 | 2024-08-07 | Gühring KG | Verfahren zum beschichten temperaturempfindlicher substrate mit polykristallinem diamant |
| JP7556509B2 (ja) * | 2019-11-08 | 2024-09-26 | 住友電工ハードメタル株式会社 | ダイヤモンド被覆工具及びダイヤモンド被覆工具の製造方法 |
| WO2025133335A2 (en) | 2023-12-22 | 2025-06-26 | Oerlikon Surface Solutions Ag, Pfäffikon | Plasma methods for nanodiamond coatings |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0328373A (ja) * | 1989-06-23 | 1991-02-06 | Idemitsu Petrochem Co Ltd | ダイヤモンド被覆部材およびその製造方法 |
| JPH04272179A (ja) * | 1991-02-28 | 1992-09-28 | Idemitsu Petrochem Co Ltd | ダイヤモンド被覆部材の製造方法 |
| JP2813077B2 (ja) * | 1991-05-30 | 1998-10-22 | 京セラ株式会社 | 摺動部材 |
| US5989511A (en) * | 1991-11-25 | 1999-11-23 | The University Of Chicago | Smooth diamond films as low friction, long wear surfaces |
| US5567522A (en) * | 1992-03-10 | 1996-10-22 | Sumitomo Electric Industries, Ltd. | Diamond cutting tool and method of manufacturing the same |
| JPH06279185A (ja) * | 1993-03-25 | 1994-10-04 | Canon Inc | ダイヤモンド結晶およびダイヤモンド結晶膜の形成方法 |
| JP3260986B2 (ja) * | 1994-09-30 | 2002-02-25 | 京セラ株式会社 | ダイヤモンド複合膜付部材 |
| US5505158A (en) * | 1994-11-04 | 1996-04-09 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for achieving growth-etch deposition of diamond using a chopped oxygen-acetylene flame |
| US5852341A (en) * | 1994-11-14 | 1998-12-22 | Crystallume | Diamond film with sharp field emission turn-on |
| JPH10130092A (ja) * | 1996-10-22 | 1998-05-19 | Toshiba Tungaloy Co Ltd | ダイヤモンド被覆焼結合金 |
| EP1408138B9 (en) * | 1997-02-05 | 2008-02-13 | CemeCon AG | Coating device |
| JPH10226597A (ja) * | 1997-02-12 | 1998-08-25 | Toshiba Tungaloy Co Ltd | ダイヤモンド被覆硬質部材 |
| JPH10287491A (ja) * | 1997-04-10 | 1998-10-27 | Toshiba Tungaloy Co Ltd | 表面粗さを調整したダイヤモンド被覆硬質部材 |
| JPH11347805A (ja) * | 1998-06-11 | 1999-12-21 | Toshiba Tungaloy Co Ltd | ダイヤモンド被覆工具部材およびその製造方法 |
| DE19914585C1 (de) * | 1999-03-31 | 2000-09-14 | Cemecon Ceramic Metal Coatings | Diamantbeschichtetes Werkzeug und Verfahren zu seiner Herstellung |
| DE19922665B4 (de) * | 1999-05-18 | 2005-05-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung von einer extrem glatten feinkristallinen Diamantschicht auf dreidimensionalen Grundkörpern und deren Verwendung |
| FR2798940B1 (fr) * | 1999-09-03 | 2001-11-16 | Barros Maria Isabel De | Procede de fabrication d'une piece metallique recouverte de diamant et piece metallique obtenue au moyen d'un tel procede |
| WO2004031437A1 (de) * | 2002-09-27 | 2004-04-15 | Cemecon Ag | Beschichtungsverfahren und beschichteter körper |
-
2004
- 2004-03-22 WO PCT/EP2004/003014 patent/WO2004083484A1/de not_active Ceased
- 2004-03-22 JP JP2006504801A patent/JP5084258B2/ja not_active Expired - Lifetime
- 2004-03-22 DE DE112004000452.7T patent/DE112004000452B4/de not_active Expired - Lifetime
- 2004-03-22 US US10/549,621 patent/US7815735B2/en active Active
- 2004-03-22 DE DE112004003154.0T patent/DE112004003154B4/de not_active Expired - Lifetime
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2006521466A5 (https=) | ||
| CN106191807B (zh) | 一种具有金刚石涂层的硬质合金件及其制备方法 | |
| US8382557B2 (en) | Chemical mechanical planarization pad conditioner and methods of forming thereof | |
| WO2003088340A3 (de) | Verfahren zur herstellung strukturierter schichten auf substraten | |
| JP2007528941A5 (https=) | ||
| JP5111379B2 (ja) | 切削工具及びその製造方法並びに切削方法 | |
| KR20070009701A (ko) | Ｓｏｄ 장치 및 이의 제조 방법 | |
| JP5165484B2 (ja) | ドリルヘッドの製作方法及びドリルヘッド | |
| US20130309522A1 (en) | Sliding member and method for manufacturing the same | |
| DE602006009162D1 (de) | Beschichtetes Hartmetallschneidwerkzeug mit einer harten verschleissfesten Schicht für Hochgeschwindigkeitsschneiden von Hartstahl | |
| JP2006297585A5 (https=) | ||
| EP1426328A3 (fr) | Procédé de réalisation par CVD de nano-structures de matériau semi-conducteur sur diélectrique, de tailles homogènes et contrôlées | |
| JP2008513225A (ja) | 切削工具、およびこれを製造する方法 | |
| JPWO2018061408A1 (ja) | 切削工具 | |
| WO2004081986A3 (en) | Method to planarize and reduce defect density of silicon germanium | |
| JP2004050403A5 (https=) | ||
| JP2013046959A (ja) | 炭窒酸化チタンコーティングが施された切削インサートおよびその製造方法 | |
| JP2002540970A5 (https=) | ||
| JP2006509375A5 (https=) | ||
| EP1199381A3 (en) | Cutting Tool | |
| EP1265235A3 (en) | Phase change of a recording layer under a temporary capping layer | |
| EP1300945A3 (en) | Diamond substrate for surface acoustic wave device, and surface acoustic wave device | |
| CN103934484B (zh) | 刀具工具 | |
| JPH0860366A (ja) | 硬質支持体への複合ダイアモンド被覆の付着方法 | |
| WO2006067694A3 (en) | Nanofabrication based on sam growth |