JP2006321623A - 基板搬送装置 - Google Patents

基板搬送装置 Download PDF

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Publication number
JP2006321623A
JP2006321623A JP2005147388A JP2005147388A JP2006321623A JP 2006321623 A JP2006321623 A JP 2006321623A JP 2005147388 A JP2005147388 A JP 2005147388A JP 2005147388 A JP2005147388 A JP 2005147388A JP 2006321623 A JP2006321623 A JP 2006321623A
Authority
JP
Japan
Prior art keywords
substrate
transport
roller
rollers
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2005147388A
Other languages
English (en)
Japanese (ja)
Inventor
Takao Matsumoto
▲隆▼雄 松本
Satoshi Yamamoto
悟史 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP2005147388A priority Critical patent/JP2006321623A/ja
Priority to TW095113746A priority patent/TW200704305A/zh
Priority to KR1020060042398A priority patent/KR100801367B1/ko
Priority to CN2006100798657A priority patent/CN1865097B/zh
Publication of JP2006321623A publication Critical patent/JP2006321623A/ja
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/11—Roller frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
    • B65G17/30—Details; Auxiliary devices
    • B65G17/48—Controlling attitudes of load-carriers during movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
    • B65G23/02—Belt- or chain-engaging elements
    • B65G23/04—Drums, rollers, or wheels
    • B65G23/08—Drums, rollers, or wheels with self-contained driving mechanisms, e.g. motors and associated gearing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2005147388A 2005-05-19 2005-05-19 基板搬送装置 Abandoned JP2006321623A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005147388A JP2006321623A (ja) 2005-05-19 2005-05-19 基板搬送装置
TW095113746A TW200704305A (en) 2005-05-19 2006-04-18 Substrate carrying device
KR1020060042398A KR100801367B1 (ko) 2005-05-19 2006-05-11 기판 반송 장치
CN2006100798657A CN1865097B (zh) 2005-05-19 2006-05-15 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005147388A JP2006321623A (ja) 2005-05-19 2005-05-19 基板搬送装置

Publications (1)

Publication Number Publication Date
JP2006321623A true JP2006321623A (ja) 2006-11-30

Family

ID=37424276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005147388A Abandoned JP2006321623A (ja) 2005-05-19 2005-05-19 基板搬送装置

Country Status (4)

Country Link
JP (1) JP2006321623A (https=)
KR (1) KR100801367B1 (https=)
CN (1) CN1865097B (https=)
TW (1) TW200704305A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009119359A (ja) * 2007-11-14 2009-06-04 Tamura Koki:Kk 紙粉除去装置
CN102506935A (zh) * 2011-10-28 2012-06-20 东莞市伟创东洋自动化设备有限公司 一种自动倾斜检测装置
CN107799449A (zh) * 2017-10-23 2018-03-13 武汉华星光电半导体显示技术有限公司 基板搬送卡夹及基板搬送方法
JP2025038561A (ja) * 2023-09-07 2025-03-19 株式会社タナカ ペレタイザ

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101806674B (zh) * 2009-02-13 2011-08-24 北京京东方光电科技有限公司 玻璃基板抽取装置
JP5088591B2 (ja) * 2010-04-15 2012-12-05 株式会社ダイフク 板状体搬送装置
KR101234593B1 (ko) * 2011-11-15 2013-02-19 김영환 와이어 연결형 롤러를 이용한 고성능 세척 유도 이송유닛
CN103373586B (zh) * 2012-04-16 2015-12-16 鸿富锦精密工业（深圳）有限公司 传送装置
KR101263163B1 (ko) 2012-12-27 2013-05-10 주식회사 폴리쉘 발포시트의 가이드장치
CN104658963B (zh) * 2013-11-19 2018-06-01 中芯国际集成电路制造(上海)有限公司 一种开孔的清洗方法
CN105759645A (zh) * 2016-02-04 2016-07-13 罗建义 智能厨房系统
CN105511331A (zh) * 2016-02-04 2016-04-20 罗建义 智能厨房系统
CN105905582B (zh) * 2016-06-28 2019-03-12 佛山市冠哲金属实业有限公司 一种吊扇叶的收集装置
CN108033270A (zh) * 2017-11-23 2018-05-15 东旭科技集团有限公司 玻璃基板传送装置及其操作方法与玻璃基板传送系统
CN107934547A (zh) * 2017-12-21 2018-04-20 东莞科耀机电设备有限公司 一种pcb板材输送机
CN109650011A (zh) * 2019-02-18 2019-04-19 杭州特翌智物流科技有限公司 一种摆轮分拣设备
CN113307028A (zh) * 2021-04-27 2021-08-27 蔡燕山 一种平板显示器的生产设备
JP7682017B2 (ja) * 2021-05-12 2025-05-23 キヤノントッキ株式会社 姿勢変化装置及び成膜装置
CN113443840B (zh) * 2021-06-30 2022-07-29 福莱特玻璃集团股份有限公司 一种玻璃生产制造用风刀
CN114424868B (zh) * 2022-01-06 2023-11-28 浙江亿睿智能装备有限公司 一种能够节省动力的自动存取鞋柜
CN115285572A (zh) * 2022-07-13 2022-11-04 奥蒂玛光学科技（深圳）有限公司 运输装置及板体检测设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09278172A (ja) * 1996-04-09 1997-10-28 Murata Mach Ltd コンベアシステム
JP2000031238A (ja) * 1998-07-10 2000-01-28 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP2002265026A (ja) * 2001-03-06 2002-09-18 Maruyasu Kikai Kk ローラコンベア

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197222U (https=) 1987-06-10 1988-12-19
JP2683317B2 (ja) * 1993-11-19 1997-11-26 マルヤス機械株式会社 コンベア
FR2716874B1 (fr) * 1994-03-03 1996-06-21 Materiel Arboriculture Dispositif de convoyage de produits, notamment de fruits, adapté pour effectuer un triage desdits produits en fonction de critères de sélection prédéterminés.
JP3290399B2 (ja) 1998-03-27 2002-06-10 マルヤス機械株式会社 コンベア
IT1305875B1 (it) * 1998-12-18 2001-05-21 Lanfranco Anzani Dispositivo di movimentazione a gravita',per magazzini automatizzati
EP1473257A3 (de) * 2003-04-28 2007-08-08 Grob-Werke GmbH & Co. KG Vorrichtung und System für das Transportieren von Gütern auf zwei nebeneinander angeordneten Rollenbahnen
KR100567137B1 (ko) * 2004-04-09 2006-04-05 주식회사 디엠에스 기판이송장비에 구비되는 원통형상의 마그네틱 구동장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09278172A (ja) * 1996-04-09 1997-10-28 Murata Mach Ltd コンベアシステム
JP2000031238A (ja) * 1998-07-10 2000-01-28 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP2002265026A (ja) * 2001-03-06 2002-09-18 Maruyasu Kikai Kk ローラコンベア

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009119359A (ja) * 2007-11-14 2009-06-04 Tamura Koki:Kk 紙粉除去装置
CN102506935A (zh) * 2011-10-28 2012-06-20 东莞市伟创东洋自动化设备有限公司 一种自动倾斜检测装置
CN107799449A (zh) * 2017-10-23 2018-03-13 武汉华星光电半导体显示技术有限公司 基板搬送卡夹及基板搬送方法
JP2025038561A (ja) * 2023-09-07 2025-03-19 株式会社タナカ ペレタイザ

Also Published As

Publication number Publication date
CN1865097A (zh) 2006-11-22
KR100801367B1 (ko) 2008-02-11
KR20060120420A (ko) 2006-11-27
TW200704305A (en) 2007-01-16
CN1865097B (zh) 2010-05-12
TWI309542B (https=) 2009-05-01

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