KR100801367B1 - 기판 반송 장치 - Google Patents

기판 반송 장치 Download PDF

Info

Publication number
KR100801367B1
KR100801367B1 KR1020060042398A KR20060042398A KR100801367B1 KR 100801367 B1 KR100801367 B1 KR 100801367B1 KR 1020060042398 A KR1020060042398 A KR 1020060042398A KR 20060042398 A KR20060042398 A KR 20060042398A KR 100801367 B1 KR100801367 B1 KR 100801367B1
Authority
KR
South Korea
Prior art keywords
substrate
roller
board
conveyance
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020060042398A
Other languages
English (en)
Korean (ko)
Other versions
KR20060120420A (ko
Inventor
다카오 마츠모토
사토시 야마모토
Original Assignee
다이니폰 스크린 세이조우 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이니폰 스크린 세이조우 가부시키가이샤 filed Critical 다이니폰 스크린 세이조우 가부시키가이샤
Publication of KR20060120420A publication Critical patent/KR20060120420A/ko
Application granted granted Critical
Publication of KR100801367B1 publication Critical patent/KR100801367B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/11—Roller frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
    • B65G17/30—Details; Auxiliary devices
    • B65G17/48—Controlling attitudes of load-carriers during movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
    • B65G23/02—Belt- or chain-engaging elements
    • B65G23/04—Drums, rollers, or wheels
    • B65G23/08—Drums, rollers, or wheels with self-contained driving mechanisms, e.g. motors and associated gearing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020060042398A 2005-05-19 2006-05-11 기판 반송 장치 Expired - Fee Related KR100801367B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00147388 2005-05-19
JP2005147388A JP2006321623A (ja) 2005-05-19 2005-05-19 基板搬送装置

Publications (2)

Publication Number Publication Date
KR20060120420A KR20060120420A (ko) 2006-11-27
KR100801367B1 true KR100801367B1 (ko) 2008-02-11

Family

ID=37424276

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060042398A Expired - Fee Related KR100801367B1 (ko) 2005-05-19 2006-05-11 기판 반송 장치

Country Status (4)

Country Link
JP (1) JP2006321623A (https=)
KR (1) KR100801367B1 (https=)
CN (1) CN1865097B (https=)
TW (1) TW200704305A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101263163B1 (ko) 2012-12-27 2013-05-10 주식회사 폴리쉘 발포시트의 가이드장치

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009119359A (ja) * 2007-11-14 2009-06-04 Tamura Koki:Kk 紙粉除去装置
CN101806674B (zh) * 2009-02-13 2011-08-24 北京京东方光电科技有限公司 玻璃基板抽取装置
JP5088591B2 (ja) * 2010-04-15 2012-12-05 株式会社ダイフク 板状体搬送装置
CN102506935A (zh) * 2011-10-28 2012-06-20 东莞市伟创东洋自动化设备有限公司 一种自动倾斜检测装置
KR101234593B1 (ko) * 2011-11-15 2013-02-19 김영환 와이어 연결형 롤러를 이용한 고성능 세척 유도 이송유닛
CN103373586B (zh) * 2012-04-16 2015-12-16 鸿富锦精密工业（深圳）有限公司 传送装置
CN104658963B (zh) * 2013-11-19 2018-06-01 中芯国际集成电路制造(上海)有限公司 一种开孔的清洗方法
CN105759645A (zh) * 2016-02-04 2016-07-13 罗建义 智能厨房系统
CN105511331A (zh) * 2016-02-04 2016-04-20 罗建义 智能厨房系统
CN105905582B (zh) * 2016-06-28 2019-03-12 佛山市冠哲金属实业有限公司 一种吊扇叶的收集装置
CN107799449B (zh) * 2017-10-23 2020-01-17 武汉华星光电半导体显示技术有限公司 基板搬送卡夹及基板搬送方法
CN108033270A (zh) * 2017-11-23 2018-05-15 东旭科技集团有限公司 玻璃基板传送装置及其操作方法与玻璃基板传送系统
CN107934547A (zh) * 2017-12-21 2018-04-20 东莞科耀机电设备有限公司 一种pcb板材输送机
CN109650011A (zh) * 2019-02-18 2019-04-19 杭州特翌智物流科技有限公司 一种摆轮分拣设备
CN113307028A (zh) * 2021-04-27 2021-08-27 蔡燕山 一种平板显示器的生产设备
JP7682017B2 (ja) * 2021-05-12 2025-05-23 キヤノントッキ株式会社 姿勢変化装置及び成膜装置
CN113443840B (zh) * 2021-06-30 2022-07-29 福莱特玻璃集团股份有限公司 一种玻璃生产制造用风刀
CN114424868B (zh) * 2022-01-06 2023-11-28 浙江亿睿智能装备有限公司 一种能够节省动力的自动存取鞋柜
CN115285572A (zh) * 2022-07-13 2022-11-04 奥蒂玛光学科技（深圳）有限公司 运输装置及板体检测设备
JP2025038561A (ja) * 2023-09-07 2025-03-19 株式会社タナカ ペレタイザ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197222U (https=) 1987-06-10 1988-12-19
JPH07177725A (ja) * 1993-11-19 1995-07-14 Maruyasu Kikai Kk コンベア
JPH11278621A (ja) 1998-03-27 1999-10-12 Maruyasu Kikai Kk コンベア
KR20050099140A (ko) * 2004-04-09 2005-10-13 주식회사 디엠에스 기판이송장비에 구비되는 원통형상의 마그네틱 구동장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2716874B1 (fr) * 1994-03-03 1996-06-21 Materiel Arboriculture Dispositif de convoyage de produits, notamment de fruits, adapté pour effectuer un triage desdits produits en fonction de critères de sélection prédéterminés.
JPH09278172A (ja) * 1996-04-09 1997-10-28 Murata Mach Ltd コンベアシステム
JP3608949B2 (ja) * 1998-07-10 2005-01-12 大日本スクリーン製造株式会社 基板搬送装置
IT1305875B1 (it) * 1998-12-18 2001-05-21 Lanfranco Anzani Dispositivo di movimentazione a gravita',per magazzini automatizzati
JP3842565B2 (ja) * 2001-03-06 2006-11-08 マルヤス機械株式会社 ローラコンベア
EP1473257A3 (de) * 2003-04-28 2007-08-08 Grob-Werke GmbH & Co. KG Vorrichtung und System für das Transportieren von Gütern auf zwei nebeneinander angeordneten Rollenbahnen

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197222U (https=) 1987-06-10 1988-12-19
JPH07177725A (ja) * 1993-11-19 1995-07-14 Maruyasu Kikai Kk コンベア
JPH11278621A (ja) 1998-03-27 1999-10-12 Maruyasu Kikai Kk コンベア
KR20050099140A (ko) * 2004-04-09 2005-10-13 주식회사 디엠에스 기판이송장비에 구비되는 원통형상의 마그네틱 구동장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101263163B1 (ko) 2012-12-27 2013-05-10 주식회사 폴리쉘 발포시트의 가이드장치

Also Published As

Publication number Publication date
CN1865097A (zh) 2006-11-22
JP2006321623A (ja) 2006-11-30
KR20060120420A (ko) 2006-11-27
TW200704305A (en) 2007-01-16
CN1865097B (zh) 2010-05-12
TWI309542B (https=) 2009-05-01

Similar Documents

Publication Publication Date Title
KR100801367B1 (ko) 기판 반송 장치
KR100457053B1 (ko) 웨이퍼 세정 장치
JP3919464B2 (ja) 搬送装置、洗浄装置及び現像装置
JP4421956B2 (ja) 基板の処理装置及び処理方法
KR101084672B1 (ko) 와이어 연결형 롤러를 이용한 이송유닛
CN111863660A (zh) 硅片清洗装置、硅片双面清洗设备及硅片的清洗方法
JPH10189528A (ja) 基板洗浄装置および基板洗浄方法
JP2003086654A (ja) 基板処理装置
CN212461617U (zh) 硅片清洗装置及硅片双面清洗设备
JP3628919B2 (ja) 基板処理装置および基板処理方法
JP2010114123A (ja) 基板処理装置及び基板洗浄方法
CN1814357B (zh) 基板处理装置以及基板处理方法
US6012193A (en) Apparatus for washing disc-shaped workpieces
KR20070062915A (ko) 기판 처리 방법 및 기판 처리 장치
JP2543007B2 (ja) ウエ−ハ枚葉洗浄装置
CN101061761B (zh) 基板的输送装置及输送方法
JP4908316B2 (ja) 洗浄装置、フラットパネルディスプレイの製造装置及びフラットパネルディスプレイ
KR20230047021A (ko) 세정 장치
JP2004210511A (ja) 基板の処理装置及び処理方法
JPH11216430A (ja) 洗浄装置
KR20160064742A (ko) 기판 처리 장치
CN115230319B (zh) 印版清洗机
KR100471683B1 (ko) 기판의 이송 및 세정장치
JP5352426B2 (ja) 基板の処理装置
KR100845893B1 (ko) 렘젯 에어나이프, 기판 이송 장치와 이를 포함한 기판공정용 기기

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20120105

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20130130

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20130130

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000