JP2006269607A - 光起電力素子の製造方法 - Google Patents

光起電力素子の製造方法 Download PDF

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Publication number
JP2006269607A
JP2006269607A JP2005083597A JP2005083597A JP2006269607A JP 2006269607 A JP2006269607 A JP 2006269607A JP 2005083597 A JP2005083597 A JP 2005083597A JP 2005083597 A JP2005083597 A JP 2005083597A JP 2006269607 A JP2006269607 A JP 2006269607A
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JP
Japan
Prior art keywords
semiconductor layer
layer
transparent conductive
substrate
conductive layer
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Pending
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JP2005083597A
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English (en)
Japanese (ja)
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JP2006269607A5 (enrdf_load_stackoverflow
Inventor
Hirotsugu Shimoda
寛嗣 下田
Takahiro Yajima
孝博 矢島
Shotaro Okabe
正太郎 岡部
Tadashi Sawayama
忠志 澤山
Yasuyoshi Takai
康好 高井
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005083597A priority Critical patent/JP2006269607A/ja
Publication of JP2006269607A publication Critical patent/JP2006269607A/ja
Publication of JP2006269607A5 publication Critical patent/JP2006269607A5/ja
Pending legal-status Critical Current

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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

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  • Physical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
JP2005083597A 2005-03-23 2005-03-23 光起電力素子の製造方法 Pending JP2006269607A (ja)

Priority Applications (1)

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JP2005083597A JP2006269607A (ja) 2005-03-23 2005-03-23 光起電力素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005083597A JP2006269607A (ja) 2005-03-23 2005-03-23 光起電力素子の製造方法

Publications (2)

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JP2006269607A true JP2006269607A (ja) 2006-10-05
JP2006269607A5 JP2006269607A5 (enrdf_load_stackoverflow) 2008-05-08

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ID=37205272

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JP2005083597A Pending JP2006269607A (ja) 2005-03-23 2005-03-23 光起電力素子の製造方法

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JP (1) JP2006269607A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100965397B1 (ko) * 2008-12-23 2010-06-25 주식회사 테스 적층형 박막 태양전지 제조 장치 및 그 방법
US7875486B2 (en) 2007-07-10 2011-01-25 Applied Materials, Inc. Solar cells and methods and apparatuses for forming the same including I-layer and N-layer chamber cleaning
KR101019273B1 (ko) * 2007-07-24 2011-03-07 어플라이드 머티어리얼스, 인코포레이티드 다중-접합 태양 전지들과 이를 형성하기 위한 방법들 및 장치들
US8203071B2 (en) 2007-01-18 2012-06-19 Applied Materials, Inc. Multi-junction solar cells and methods and apparatuses for forming the same
JP2012522403A (ja) * 2009-05-06 2012-09-20 シンシリコン・コーポレーション 光起電力電池、及び、半導体層スタックにおいて光補足を高める方法
WO2013129296A1 (ja) * 2012-02-27 2013-09-06 日東電工株式会社 Ｃｉｇｓ系化合物太陽電池

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02177372A (ja) * 1988-12-27 1990-07-10 Kyocera Corp 光電変換装置
JPH03280476A (ja) * 1990-03-28 1991-12-11 Kanegafuchi Chem Ind Co Ltd 光電変換装置の製造方法
JPH10150210A (ja) * 1996-11-18 1998-06-02 Fuji Electric Co Ltd 薄膜光電変換素子の製造方法および製造装置
JPH11354820A (ja) * 1998-06-12 1999-12-24 Sharp Corp 光電変換素子及びその製造方法
JP2001339080A (ja) * 2000-03-24 2001-12-07 Sanyo Electric Co Ltd 光起電力装置の製造方法
JP2004296653A (ja) * 2003-03-26 2004-10-21 Canon Inc 光起電力素子形成方法
JP2004296651A (ja) * 2003-03-26 2004-10-21 Canon Inc 光起電力素子および光起電力素子形成方法
JP2004311965A (ja) * 2003-03-26 2004-11-04 Canon Inc 光起電力素子の製造方法
JP2005159320A (ja) * 2003-10-27 2005-06-16 Mitsubishi Heavy Ind Ltd 太陽電池及び太陽電池の製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02177372A (ja) * 1988-12-27 1990-07-10 Kyocera Corp 光電変換装置
JPH03280476A (ja) * 1990-03-28 1991-12-11 Kanegafuchi Chem Ind Co Ltd 光電変換装置の製造方法
JPH10150210A (ja) * 1996-11-18 1998-06-02 Fuji Electric Co Ltd 薄膜光電変換素子の製造方法および製造装置
JPH11354820A (ja) * 1998-06-12 1999-12-24 Sharp Corp 光電変換素子及びその製造方法
JP2001339080A (ja) * 2000-03-24 2001-12-07 Sanyo Electric Co Ltd 光起電力装置の製造方法
JP2004296653A (ja) * 2003-03-26 2004-10-21 Canon Inc 光起電力素子形成方法
JP2004296651A (ja) * 2003-03-26 2004-10-21 Canon Inc 光起電力素子および光起電力素子形成方法
JP2004311965A (ja) * 2003-03-26 2004-11-04 Canon Inc 光起電力素子の製造方法
JP2005159320A (ja) * 2003-10-27 2005-06-16 Mitsubishi Heavy Ind Ltd 太陽電池及び太陽電池の製造方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8203071B2 (en) 2007-01-18 2012-06-19 Applied Materials, Inc. Multi-junction solar cells and methods and apparatuses for forming the same
US7875486B2 (en) 2007-07-10 2011-01-25 Applied Materials, Inc. Solar cells and methods and apparatuses for forming the same including I-layer and N-layer chamber cleaning
KR101019273B1 (ko) * 2007-07-24 2011-03-07 어플라이드 머티어리얼스, 인코포레이티드 다중-접합 태양 전지들과 이를 형성하기 위한 방법들 및 장치들
KR100965397B1 (ko) * 2008-12-23 2010-06-25 주식회사 테스 적층형 박막 태양전지 제조 장치 및 그 방법
JP2012522403A (ja) * 2009-05-06 2012-09-20 シンシリコン・コーポレーション 光起電力電池、及び、半導体層スタックにおいて光補足を高める方法
WO2013129296A1 (ja) * 2012-02-27 2013-09-06 日東電工株式会社 Ｃｉｇｓ系化合物太陽電池
CN104137272A (zh) * 2012-02-27 2014-11-05 日东电工株式会社 Cigs系化合物太阳能电池
TWI580060B (zh) * 2012-02-27 2017-04-21 Nitto Denko Corp CIGS-based compound solar cells
US9947808B2 (en) 2012-02-27 2018-04-17 Nitto Denko Corporation CIGS compound solar cell

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