JP2006269458A - アンダーバンプメタル膜およびこれを用いた弾性表面波デバイスおよびその形成方法 - Google Patents
アンダーバンプメタル膜およびこれを用いた弾性表面波デバイスおよびその形成方法 Download PDFInfo
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Abstract
【解決手段】前記課題を解決するために本発明は、素子基板11上に蒸着リフトオフによって形成するアンダーバンプメタル膜であって、そのアンダーバンプメタル膜の構成が、白金族の金属膜からなる耐拡散バリア層16を備え、その下層にアルミニウムを主成分とする応力緩和層15を備えたものである。
【選択図】図1
Description
以下、実施の形態1を用いて、本発明について説明する。
12 櫛型電極
13 パッド電極
14 密着層
15 応力緩和層
16 耐拡散バリア層
17 半田濡れ層
Claims (5)
- 素子基板上に蒸着リフトオフによって形成するアンダーバンプメタル膜であって、そのアンダーバンプメタル膜の構成が、ニッケルまたはパラジウムまたは白金等の白金族の金属膜からなる耐拡散バリア層、その下層にアルミニウムを主成分とする応力緩和層の少なくとも2層からなる構造を備えるアンダーバンプメタル膜。
- 耐拡散バリア層にニッケルを用い、前記耐拡散バリア層が800nm以上、2000nm以下の厚みを有する請求項1記載のアンダーバンプメタル膜。
- 応力緩和層の厚みが、耐拡散バリア層の厚みの、半分以上、1.5倍以下である請求項2記載のアンダーバンプメタル膜。
- 素子基板が圧電基板であり、この圧電基板上に櫛型電極およびパッド電極を備え、前記パッド電極の上に応力緩和層、その上に耐拡散バリア層からなるアンダーバンプメタル膜が形成され、前記アンダーバンプメタル膜を介して半田バンプにより実装基板に対してフリップチップ実装される弾性表面波デバイス。
- 素子基板上に蒸着リフトオフによってアンダーバンプメタル膜を形成する方法であって、前記アンダーバンプメタル膜を形成すべき部分を露出させるための開口部が設けられたレジストパターンを形成する工程と、前記レジストパターンが形成された前記素子基板上にアンダーバンプメタル膜を真空蒸着装置内で形成する工程は、窒素ガスを主成分とするガスによるイオンボンバードに引き続き真空状態を維持した状態で、少なくともアルミニウムを主成分とする応力緩和層、白金族の金属膜からなる耐拡散バリア層を順次形成する工程、および前記アンダーバンプメタル膜を形成した前記素子基板を有機溶剤により不要となったレジスト膜およびその上に形成されたアンダーバンプメタル膜を除去する工程からなるアンダーバンプメタル膜の形成方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005080945A JP4682657B2 (ja) | 2005-03-22 | 2005-03-22 | 弾性表面波デバイス |
US11/817,171 US7764007B2 (en) | 2005-03-22 | 2006-03-07 | Under bump metal film comprising a stress relaxation layer and a diffusion-resistant layer |
PCT/JP2006/304340 WO2006100900A1 (ja) | 2005-03-22 | 2006-03-07 | アンダーバンプメタル膜とその形成方法、ならびに弾性表面波デバイス |
CN200680009633A CN100590825C (zh) | 2005-03-22 | 2006-03-07 | 凸点下金属膜及其形成方法、及声表面波器件 |
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JP2008235979A (ja) * | 2007-03-16 | 2008-10-02 | Matsushita Electric Ind Co Ltd | 弾性表面波フィルタ |
JP2009272445A (ja) * | 2008-05-08 | 2009-11-19 | Fujitsu Ltd | 電子部品装置 |
JP2010528465A (ja) * | 2007-05-21 | 2010-08-19 | エプコス アクチエンゲゼルシャフト | 機械的に取り付け可能な接続面を有する部品 |
JP2013195414A (ja) * | 2012-03-23 | 2013-09-30 | Renesas Electronics Corp | 半導体装置の測定方法 |
KR20160020836A (ko) * | 2014-08-14 | 2016-02-24 | 엘에스엠트론 주식회사 | 배리어 필름 구조체 및 이를 구비하는 유기전자소자 |
WO2022249500A1 (ja) * | 2021-05-27 | 2022-12-01 | 石原ケミカル株式会社 | アンダーバリアメタルとソルダー層とを含む構造体及び構造体の製造方法 |
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JP2014209508A (ja) * | 2013-04-16 | 2014-11-06 | 住友電気工業株式会社 | はんだ付半導体デバイス、実装はんだ付半導体デバイス、はんだ付半導体デバイスの製造方法および実装方法 |
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Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0334431A (ja) * | 1989-06-30 | 1991-02-14 | Fuji Xerox Co Ltd | 半導体装置の配線方法 |
JPH04153623A (ja) * | 1990-10-18 | 1992-05-27 | Fuji Xerox Co Ltd | 配線構造 |
JPH08307192A (ja) * | 1995-04-28 | 1996-11-22 | Mitsumi Electric Co Ltd | 表面弾性波デバイス |
JPH10165874A (ja) * | 1996-12-06 | 1998-06-23 | Ulvac Japan Ltd | 成膜対象物の前処理方法、及び洗浄装置 |
JPH10322159A (ja) * | 1997-05-16 | 1998-12-04 | Murata Mfg Co Ltd | 弾性表面波装置 |
JPH11234082A (ja) * | 1998-02-13 | 1999-08-27 | Toko Inc | 表面弾性波装置 |
JP2001015540A (ja) * | 1999-04-28 | 2001-01-19 | Murata Mfg Co Ltd | 電子素子、弾性表面波素子、それらの実装方法、電子部品または弾性表面波装置の製造方法、および、弾性表面波装置 |
JP2003032071A (ja) * | 2001-07-18 | 2003-01-31 | Mitsubishi Electric Corp | 弾性表面波デバイス |
JP2003174056A (ja) * | 2001-12-07 | 2003-06-20 | Murata Mfg Co Ltd | 電子部品素子及びその製造方法並びに電子部品装置 |
JP2003318212A (ja) * | 2002-04-26 | 2003-11-07 | Murata Mfg Co Ltd | 蒸着リフトオフによるバンプ形成に用いるレジストパターンおよびその形成方法、バンプおよびその形成方法、ならびに弾性表面波素子およびその製造方法 |
JP2003338514A (ja) * | 2002-05-20 | 2003-11-28 | Tdk Corp | 超音波接合構造及び方法、並びにそれを用いた電子部品及びその製造方法 |
JP2003338517A (ja) * | 2002-05-17 | 2003-11-28 | Internatl Business Mach Corp <Ibm> | 基板上に無鉛はんだ合金を形成する方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1013184A (ja) * | 1996-06-19 | 1998-01-16 | Murata Mfg Co Ltd | 弾性表面波装置 |
KR100502222B1 (ko) * | 1999-01-29 | 2005-07-18 | 마츠시타 덴끼 산교 가부시키가이샤 | 전자부품의 실장방법 및 그 장치 |
KR100426897B1 (ko) | 2001-08-21 | 2004-04-30 | 주식회사 네패스 | 솔더 터미널 및 그 제조방법 |
-
2005
- 2005-03-22 JP JP2005080945A patent/JP4682657B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-07 CN CN200680009633A patent/CN100590825C/zh active Active
- 2006-03-07 US US11/817,171 patent/US7764007B2/en active Active
- 2006-03-07 WO PCT/JP2006/304340 patent/WO2006100900A1/ja active Application Filing
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0334431A (ja) * | 1989-06-30 | 1991-02-14 | Fuji Xerox Co Ltd | 半導体装置の配線方法 |
JPH04153623A (ja) * | 1990-10-18 | 1992-05-27 | Fuji Xerox Co Ltd | 配線構造 |
JPH08307192A (ja) * | 1995-04-28 | 1996-11-22 | Mitsumi Electric Co Ltd | 表面弾性波デバイス |
JPH10165874A (ja) * | 1996-12-06 | 1998-06-23 | Ulvac Japan Ltd | 成膜対象物の前処理方法、及び洗浄装置 |
JPH10322159A (ja) * | 1997-05-16 | 1998-12-04 | Murata Mfg Co Ltd | 弾性表面波装置 |
JPH11234082A (ja) * | 1998-02-13 | 1999-08-27 | Toko Inc | 表面弾性波装置 |
JP2001015540A (ja) * | 1999-04-28 | 2001-01-19 | Murata Mfg Co Ltd | 電子素子、弾性表面波素子、それらの実装方法、電子部品または弾性表面波装置の製造方法、および、弾性表面波装置 |
JP2003032071A (ja) * | 2001-07-18 | 2003-01-31 | Mitsubishi Electric Corp | 弾性表面波デバイス |
JP2003174056A (ja) * | 2001-12-07 | 2003-06-20 | Murata Mfg Co Ltd | 電子部品素子及びその製造方法並びに電子部品装置 |
JP2003318212A (ja) * | 2002-04-26 | 2003-11-07 | Murata Mfg Co Ltd | 蒸着リフトオフによるバンプ形成に用いるレジストパターンおよびその形成方法、バンプおよびその形成方法、ならびに弾性表面波素子およびその製造方法 |
JP2003338517A (ja) * | 2002-05-17 | 2003-11-28 | Internatl Business Mach Corp <Ibm> | 基板上に無鉛はんだ合金を形成する方法 |
JP2003338514A (ja) * | 2002-05-20 | 2003-11-28 | Tdk Corp | 超音波接合構造及び方法、並びにそれを用いた電子部品及びその製造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008235979A (ja) * | 2007-03-16 | 2008-10-02 | Matsushita Electric Ind Co Ltd | 弾性表面波フィルタ |
JP2010528465A (ja) * | 2007-05-21 | 2010-08-19 | エプコス アクチエンゲゼルシャフト | 機械的に取り付け可能な接続面を有する部品 |
JP2009272445A (ja) * | 2008-05-08 | 2009-11-19 | Fujitsu Ltd | 電子部品装置 |
JP2013195414A (ja) * | 2012-03-23 | 2013-09-30 | Renesas Electronics Corp | 半導体装置の測定方法 |
KR20160020836A (ko) * | 2014-08-14 | 2016-02-24 | 엘에스엠트론 주식회사 | 배리어 필름 구조체 및 이를 구비하는 유기전자소자 |
KR102345984B1 (ko) | 2014-08-14 | 2021-12-30 | 에스케이넥실리스 주식회사 | 배리어 필름 구조체 및 이를 구비하는 유기전자소자 |
WO2022249500A1 (ja) * | 2021-05-27 | 2022-12-01 | 石原ケミカル株式会社 | アンダーバリアメタルとソルダー層とを含む構造体及び構造体の製造方法 |
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WO2006100900A1 (ja) | 2006-09-28 |
US20090021109A1 (en) | 2009-01-22 |
CN101147250A (zh) | 2008-03-19 |
JP4682657B2 (ja) | 2011-05-11 |
CN100590825C (zh) | 2010-02-17 |
US7764007B2 (en) | 2010-07-27 |
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